Vacuum Transmission Lineとは 意味・読み方・使い方

HEAT INSULATING TRANSMISSION LINE, VACUUM HEAT INSULATING CHAMBER, AND WIRELESS COMMUNICATION SYSTEM例文帳に追加

断熱伝送路、真空断熱容器および無線通信装置 - 特許庁

A reserve vacuum tank 3 is arranged just in front of a plasma generation tank 2 in a microwave transmission line 12.例文帳に追加

プラズマ生成槽２の直前のマイクロ波伝送路１２内に予備真空槽３を設ける。 - 特許庁

In this case, assuming that the wavelength of an electromagnetic wave in vacuum corresponding to a measurement upper limit frequency is λ0, the line length L, the line width W and the line interval D of each parallel flat plate type transmission line 1 satisfy following relations, respectively: λ0>50L, λ0 is approximately equal to 5W, and λ0 is approximately equal to 20D.例文帳に追加

この場合、該平行平板型伝送線路１の線路長Ｌ、線路幅Ｗおよび線路間隔Ｄは、測定上限周波数に対応する真空中の電磁波の波長をλ０とすると、それぞれλ０＞５０Ｌ、λ０≒５Ｗおよびλ０≒２０Ｄである。 - 特許庁

The holder 10 and the ball screw 20 are provided in vacuum, while a transmission means not on the moving straight line of the ball screw 20 and the motor 50 are provided in an atmospheric part.例文帳に追加

ホルダー１０とボールねじ２０とを真空中に設ける一方、ボールねじ２０の移動直線上にない伝動手段およびモータ５０を大気部分に設ける。 - 特許庁

To provide a vacuum processing apparatus provided with a transmission line for transmitting high frequency power of large power which is stably phase controlled for an electrode installed in a vacuum chamber, especially to carry out a film manufacturing process for a large area substrate using plasma, and to provide a high frequency power supplying method in the vacuum processing apparatus.例文帳に追加

本発明の目的は、特にプラズマを用いて大面積基板に対して製膜処理を行うために真空室内部に設置される電極に対して安定的に位相制御された大電力の高周波電力を伝送する伝送線路を備えた真空処理装置、真空処理装置における高周波電力供給方法を提供することである。 - 特許庁

To provide a vacuum processing device that improves reliability and durability thereof by preventing or suppressing the generation of a reflection wave from a high-frequency power flowing through a high-frequency power supply transmission line connected to a discharge electrode with a simple and inexpensive configuration.例文帳に追加

簡素で安価な構成により、放電電極に繋がる高周波給電伝送路を流れる高周波電力の反射波発生を防止または抑制して信頼性および耐久性を向上させることのできる真空処理装置を提供する。 - 特許庁