Waters projectionとは 意味・読み方・使い方

As the liquid immersion exposure apparatus performing an exposure while a lowest side of a projection optical system and a space for passing an exposure light between wafers are filled up with ultrapure waters and the space for passing the exposure light is charged with the ultrapure waters, there is provided the pure water generating means for generating pure waters from waters.例文帳に追加

投影光学系の最下面並びにウエハ間の露光光通過空間に超純水を充填し、該露光光通過空間に超純水を満たした状態で露光を行う液浸型露光装置として、水から純水を生成する純水生成手段を備える。 - 特許庁