FINAL RINSEとは 意味・読み方・使い方

Then spaces within the cover 108 are filled with the nitrogen gas, and the substrate 9 being transferred from the final rinse part 104 to the drier part 105 is showered with the pure water.例文帳に追加

そして、カバー１０８内の空間１８４ａ、１８４ｂを窒素ガスにて充填し、最終リンス部１０４から乾燥部１０５へと搬送される基板９に純水のシャワーを浴びせる。 - 特許庁

When the final rinse treatment ends, a rotational member elevating mechanism 87 is driven, and the wafer W held by a substrate holding member 4 is made to rise from the chemical treatment position to a drying treatment position (positions shown by the figure).例文帳に追加

最終リンス処理が終了すると、回転部材昇降機構８７が駆動されて、基板保持部材４に保持されたウエハＷが薬液処理位置から乾燥処理位置（図に示す位置）まで上昇される。 - 特許庁

The elevator structure 6 is switched to a state that the wafer W is housed in the inside cleaning chamber 4 when the SPM cleaning and the subsequent rinse cleaning are executed and is switched to a state that the wafer W is housed in the outside cleaning chamber 2 when the subsequent SCI cleaning and the final drying treatment are executed.例文帳に追加

昇降機構６は，ＳＰＭ洗浄とその後のリンス洗浄を行う場合には，内洗浄室４にウェハＷを収納した状態に切り換え，次のＳＣ１洗浄から最後の乾燥処理を行う場合には，外洗浄室２にウェハＷを収納した状態に切り換える。 - 特許庁