vp reactionとは 意味・読み方・使い方

In the case thin films are deposited by generating the plasma of a gas which has diffused into a reaction vessel 10, high voltage pulses with a peak voltage VP of 1 kV to about 40 kV are applied to a supporting base ST on which a vapor-deposition object WO is placed, and cations in the plasma reach the vapor-deposition object WO with a comparatively high energy.例文帳に追加

反応容器１０中に拡散したガスをプラズマ化して成膜を行なう際には、被蒸着物ＷＯを載置する支持台ＳＴに１ｋＶ〜４０ｋＶ程度のピーク電圧ＶＰの高電圧パルスが印加されて、プラズマ中の陽イオンが比較的高エネルギーで被蒸着物ＷＯに入射する。 - 特許庁