evacuation estimationとは 意味・読み方・使い方

According to the estimation result, the evacuation of the gas from the lighting system chamber 1 to the wafer chamber 4 by an evacuation apparatus 36 and the supply of a gas (purge gas) that the electron beam is transmitted through into the lighting system chamber 1 to the wafer chamber 4 by a gas supply device 26 are controlled.例文帳に追加

この推定結果に基づいて、排気装置３６による照明系チャンバ１〜ウエハ室４内からの気体の排気と、給気装置２６による照明系チャンバ１〜ウエハ室４内への露光ビームが透過する気体（パージガス）の給気とを制御する。 - 特許庁