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NZ767004B2 - Solid Inspection Apparatus and Method of Use - Google Patents
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NZ767004B2 - Solid Inspection Apparatus and Method of Use - Google Patents

Solid Inspection Apparatus and Method of Use

Info

Publication number
NZ767004B2
NZ767004B2 NZ767004A NZ76700417A NZ767004B2 NZ 767004 B2 NZ767004 B2 NZ 767004B2 NZ 767004 A NZ767004 A NZ 767004A NZ 76700417 A NZ76700417 A NZ 76700417A NZ 767004 B2 NZ767004 B2 NZ 767004B2
Authority
NZ
New Zealand
Prior art keywords
optical target
optical
target
objective
solid
Prior art date
Application number
NZ767004A
Other versions
NZ767004A (en
Inventor
M Shane Bowen
John Gerhardt Earney
Michael S Graige
Joseph Francis Pinto
Arthur Pitera
Bala Murali K Venkatesan
Dajun Yuan
Original Assignee
Illumina Inc
Filing date
Publication date
Application filed by Illumina Inc filed Critical Illumina Inc
Publication of NZ767004A publication Critical patent/NZ767004A/en
Publication of NZ767004B2 publication Critical patent/NZ767004B2/en

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12Generating the spectrum; Monochromators
    • G01J3/18Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G01J2003/1842Types of grating
    • G01J2003/1861Transmission gratings
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0289Field-of-view determination; Aiming or pointing of a spectrometer; Adjusting alignment; Encoding angular position; Size of measurement area; Position tracking
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12Generating the spectrum; Monochromators
    • G01J3/18Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/44Raman spectrometry; Scattering spectrometry ; Fluorescence spectrometry
    • G01J3/4406Fluorescence spectrometry
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64Fluorescence; Phosphorescence
    • G01N2021/6417Spectrofluorimetric devices
    • G01N2021/6419Excitation at two or more wavelengths
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64Fluorescence; Phosphorescence
    • G01N21/6428Measuring fluorescence of fluorescent products of reactions or of fluorochrome labelled reactive substances, e.g. measuring quenching effects, using measuring "optrodes"
    • G01N2021/6439Measuring fluorescence of fluorescent products of reactions or of fluorochrome labelled reactive substances, e.g. measuring quenching effects, using measuring "optrodes" with indicators, stains, dyes, tags, labels, marks
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/27Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using photo-electric detection ; circuits for computing concentration
    • G01N21/274Calibration, base line adjustment, drift correction
    • G01N21/278Constitution of standards
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64Fluorescence; Phosphorescence
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64Fluorescence; Phosphorescence
    • G01N21/6428Measuring fluorescence of fluorescent products of reactions or of fluorochrome labelled reactive substances, e.g. measuring quenching effects, using measuring "optrodes"
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64Fluorescence; Phosphorescence
    • G01N21/6428Measuring fluorescence of fluorescent products of reactions or of fluorochrome labelled reactive substances, e.g. measuring quenching effects, using measuring "optrodes"
    • G01N21/643Measuring fluorescence of fluorescent products of reactions or of fluorochrome labelled reactive substances, e.g. measuring quenching effects, using measuring "optrodes" non-biological material
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64Fluorescence; Phosphorescence
    • G01N21/645Specially adapted constructive features of fluorimeters
    • G01N21/6456Spatial resolved fluorescence measurements; Imaging
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64Fluorescence; Phosphorescence
    • G01N21/6489Photoluminescence of semiconductors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9515Objects of complex shape, e.g. examined with use of a surface follower device
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00Features of devices classified in G01N21/00
    • G01N2201/02Mechanical
    • G01N2201/022Casings
    • G01N2201/0227Sealable enclosure
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00Features of devices classified in G01N21/00
    • G01N2201/02Mechanical
    • G01N2201/024Modular construction
    • G01N2201/0245Modular construction with insertable-removable part
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00Features of devices classified in G01N21/00
    • G01N2201/12Circuits of general importance; Signal processing
    • G01N2201/127Calibration; base line adjustment; drift compensation

Abstract

optical detection device, may comprise: an optical target including a solid body that encloses a fluorescing material; an objective to direct excitation light toward the optical target and to receive fluorescence emission from the optical target; a driver to move the objective to a region of interest proximate to the optical target; memory to store program instructions; and a processor to execute the program instructions for detecting fluorescence emission from the optical target in connection with at least one of optical alignment or calibration of an instrument.

Claims (20)

1. An optical detection device, comprising: an optical target including a solid body that encloses a fluorescing material comprising an ion of at least one of an actinide or a transition metal element; an objective to direct excitation light toward the optical target and to receive fluorescence emission from the optical target; a driver to move the objective to a region of interest proximate to the optical target; memory to store program instructions; and a processor to execute the program instructions for detecting fluorescence emission from the optical target in connection with at least one of optical alignment or calibration of an instrument; wherein the optical target includes a solid host material and the fluorescing material embedded in the solid host material, the solid host material having a predetermined phonon energy HOST , the fluorescing material exhibiting a select ground energy level, a target excitation (TE) energy level, and a next lower lying (NLL) energy level spaced an energy gap FM below the TE energy level, wherein a ratio of the FM /HOSTPE is three or more. EG2 EG2
2. The device of claim 1, wherein the objective directs excitation light onto the optical target, the processor is to derive reference information from the fluorescence emission, the processor is to utilise the reference information in connection with the at least one of optical alignment or calibration of the instrument.
3. The device of either claim 1 or 2, wherein the optical target is permanently mounted at a calibration location proximate to the objective, the calibration location being separate from flow cell channels within the instrument.
4. The device of any one of the preceding claims, wherein the solid body represents a substrate comprising a solid host material doped with one or more ions that form the fluorescing material.
5. The device of any one of the preceding claims, wherein the solid body represents at least one of an epoxy or polymer that encloses quantum dots that emit fluorescence in one or more predetermined emission bands of interest when irradiated by the excitation light.
6. The device of any one of the preceding claims, further comprising an anti-reflective coating formed on the optical target.
7. An optical detection method, comprising: aligning an objective of an instrument with an optical target that includes a solid body that encloses a fluorescing material, wherein the aligning operation comprises: aligning the objective with a grating region that includes a microstructure located above the optical target and focusing the excitation light to a first focal point at the microstructure, and aligning the objective with a non-grating region that is void of the microstructure and focusing the excitation light to a second focal point that is below an upper surface of the optical target; directing excitation light onto the optical target; detecting fluorescence emission from the optical target as reference information; and utilising the reference information in connection with at least one of optical alignment or calibration of the instrument.
8. The method of claim 7, further comprising focusing the excitation light to a focal point that is below an upper surface of the optical target.
9. The method of either claim 7 or claim 8, wherein the fluorescing material comprises a chemical element that comprises an ion of at least one of erbium, holmium or praseodymium and wherein the solid host material comprises at least one of silicate, germanate, InF , or ZBLAN.
10. The device of any one of claims 1 to 6, wherein the ratio of the FM /HOST equals or is EG2 PE between four and ten.
11. The device of any one of claims 1 to 6, or 10, wherein the solid host material includes at least one of glass, amorphous polymers, crystalline materials, semi-crystalline polymers, metallic glass, or ceramic.
12. The device of any one of claims 1 to 6, or 10 to 11, wherein the fluorescing material has a fluorescence emission wavelength with a centre wavelength at or below about 1000 nm.
13. The device of any one of claims 1 to 6, or 10 to 12, wherein the solid host material has a maximum phonon energy less than or equal to 580 cm .
14. The device of any one of claims 1 to 6, or 10 to 13, wherein the optical target further comprises microstructures formed on a surface of the optical target to form a grating layer.
15. The method of any one of claims 7 to 9, wherein the solid body has a predetermined phonon energy HOST , the fluorescing material exhibiting a select ground energy level, a target excitation (TE) energy level and a next lower lying (NLL) energy level spaced an energy gap FM below the TE energy level, wherein a ratio of the FM /HOST is three or more. EG2 EG2 PE
16. The method of claim 15, wherein the ratio of the FM /HOST equals or is between four EG2 PE and ten.
17. The method of any one of claims 7 to 9, or 15 to 16, wherein the solid body includes at least one of glass, amorphous polymers, crystalline materials, semi-crystalline polymers, metallic glass, or ceramic.
18. The method of any one of claims 7 to 9, or 15 to 17, wherein the fluorescence emission has a centre wavelength at or below about 1000 nm.
19. The method of any one of claims 7 to 9, or 15 to 18, wherein the solid body has a maximum phonon energy less than or equal to 580 cm .
20. The method of any one of claims 7 to 9, or 15 to 19, wherein the optical target further comprises microstructures formed on a surface of the optical target to form a grating layer.
NZ767004A 2017-12-11 Solid Inspection Apparatus and Method of Use NZ767004B2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201762443675P 2017-01-07 2017-01-07
NZ747901A NZ747901B2 (en) 2017-01-07 2017-12-11 Solid inspection apparatus and method of use

Publications (2)

Publication Number Publication Date
NZ767004A NZ767004A (en) 2024-01-26
NZ767004B2 true NZ767004B2 (en) 2024-04-30

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