RU20163U1 - NANOMETRIC SCREW - Google Patents

Description

NANOMETRIC SCREW

The invention relates to the field of mechanical engineering, namely to precision positioning means, and can be widely used, for example, in precision machines, high-precision copying devices, as well as in photolithographic complexes for the electronics industry and other fields of technology, mainly to ensure discreteness (step) positioning an object in the nanometer range with the possibility of ensuring the total movement of this object (relative to the base coordinate system) at a distance of at least one meter.

/ A magnetomechanical transducer (nanometer screw formed on the basis of a magnetostrictive transducer) is known from the prior art, comprising a housing and an exact positioning step comprising an actuating element mounted with the possibility of reciprocating movement relative to the housing, at least part of which is made of magnetostrictive material , and the source of the magnetic field, made in the form of at least one permanent magnet installed in the zone of that, at least least one portion of actuating member which is made of a magnetostrictive material to move relative to the last (RU, №2075797, 1997.).

The main disadvantage of this prior art nanometric device for positioning a moving object is the limited range of movement of the said object with the accuracy of movement (discreteness of the movement step), which can be achieved by the aforementioned device known from the prior art.

The basis of the claimed invention was the task of creating such a device for positioning a movable object relative to the base coordinate system, which would provide (when moving said

IPC GOIB 3/18

object at a given / not less than 1 m /) distance, the possibility of positioning this object with nanometric accuracy, that is, would provide a step (discreteness) of positioning of a moving object at a given distance (relative to the base coordinate system) in the nanometer range, which significantly increases the reliability of the results of known from the prior art, methods and means of measurement during control measurements of the position of the mixed (movable) object of study, and also extends the operational capabilities and devices.

The task is achieved by the fact that the nanometer screw, comprising a housing and an accurate positioning step, comprising an actuating element mounted with the possibility of reciprocating movement relative to the housing, at least a portion of which is made of magnetostrictive material, and a magnetic field source made in the form at least one permanent magnet installed in the area of the at least one part of the actuating element, which is made of magnetically the traction material, with the possibility of moving relative to the latter, according to the invention, is equipped with a rough positioning step, the actuating element of which is kinematically connected with the housing with the possibility of reciprocating movement, and the exact positioning step is kinematically connected with the rough positioning step with the possibility of autonomous reciprocating movement of its elements relative to the stage rough positioning during precise positioning and synchronous return nuclear-translational movement with the latter, in the process of rough positioning of the object.

The invention is illustrated in graphic materials.

In FIG. 1 (a) shows a schematic diagram of a patented device at the initial moment of movement of a positioned object by means of an executive element of a rough step (the dotted line shows the initial position of the supporting surface of a positioned object).

In FIG. 1 (b) shows a schematic diagram of a patented device at the final moment of movement of a positioned object by means of an actuating element of an exact stage.

The nanometer screw includes a housing 1 and an accurate positioning step, comprising an actuating element 2 mounted with the possibility of reciprocating movement relative to the housing 1, at least part 3 of which is made of magnetostrictive material, and a magnetic field source made in the form of at least. , one permanent magnet 4 mounted in the area of the at least one part 3 of the actuating element 2, which is made of magnetostrictive material, with the possibility of movement relative to the latter (i.e., part 3) along the arrow Si. In addition, the nanometric screw is equipped with a rough positioning step, the actuating element 5 of which is kinematically connected with the housing 1 with the possibility of reciprocating movement (for example, by means of a threaded connection 6). The stage of precise positioning is kinematically connected with the stage of rough positioning, for example, via a pusher screw 7 (also, for example, by means of a threaded connection 8) with the possibility of autonomous back-and-forth movement of its elements (along the arrow Si) relative to the stage of rough positioning during the exact positioning of object 9 ( in the direction of the arrow S or opposite) and synchronous reciprocating movement with the latter, during the rough positioning of the object (i.e., when moving actuator coarse stage 5 / well in the direction of arrow S or in the opposite / by applying torque / the arrow V / to the sleeve 9, is rigidly connected to the actuating member 5 coarse stage apparatus).

The device operates as follows.

To move the object 9 to a predetermined distance LI in the direction of the arrow S, the initial actuation element 5 of the coarse step is brought into tight contact with the abutment surface (conventionally shown by a dotted line in the drawing) of the moved object 9, by application to the aforementioned

the torque actuator 5 in the direction of the arrow V, for example, by means of a sleeve 10. In this way, the actuator 5 is displaced by a distance L. Further, in a similar manner, rough movement of the object 9 by the actuator 5 is ensured by an amount L2 slightly less than the specified displacement LI of object 9. Then, by moving the permanent magnets (in the direction of Si, in one direction or another), for example, by rotating the pusher screw 7 in the direction of Vi, the magnetic total field in the area of the location of part 3 (made of magnetostrictive material) of the actuating element 2 of the exact positioning stage. In the process of changing the magnetic field strength (generated by permanent magnets 4) in the area of part 3 (made of magnetostrictive material) of the actuating element 2, the length of this part 3 changes (in this case, increases). As a result, the further movement of object 9 by the value of AL is ensured by means of the actuating element element 2 of the stage of precise positioning of the object 9.

It should be noted that a feature of the magnetomechanical transducer used in the claimed device (i.e., the exact positioning step) is that a rod (part 3) made of a material with giant magnetostriction (magnetostrictor) is used as a power element (means for moving the actuating element), which placed in the magnetic field of a magnetic system formed of permanent magnets. With a change (in magnitude and / or direction) of the magnetic field of the magnetic system, the linear dimensions of the magnetostrictor change. Compared with the well-known magnetostrictive transducers (in which a magnetic field is generated by a solenoid), the use of permanent magnets as a magnetic field source can significantly reduce the energy consumption in the magnetomechanical converter under consideration, eliminate its heating, increase the temporary stability of the position of the actuator, in many cases without a power source and, as a result.

get positioning devices (in particular, nanoscrews) with the following operational parameters:

-minimum step of displacement (positioning) - 0.01 nm;

- range of movement - up to 1000 mm;

dynamic range -

- effort on the executive body when moving it - 10 N;

- power consumed during operation of the drive - up to 5 W;

-lack of power consumption when fixing the position of the actuator.

Thus, the claimed positioning device can be industrially implemented to provide positioning of various objects with a positioning accuracy (discrete positioning step) of not more than 5 nm. This ensures the achievement of fundamentally new technological capabilities in the field of microelectronics, optical instrumentation, and precision

mechanical engineering, etc. Therefore, the patented technical solution can become the basis for creating a new generation of super-precision equipment for technological processes of cutting, engraving, milling, etc., as well as equipment for photolithographic and X-ray lithographic complexes used in the microelectronic and printing industries.

Claims (1)

Nanometric screw, comprising a housing and an accurate positioning step, comprising a reciprocating device relative to the housing, an actuating element, at least part of which is made of magnetostrictive material, and a magnetic field source made in the form of at least one a permanent magnet installed in the area of at least one part of the actuating element, which is made of magnetostrictive material, with the possibility of movement relative to finally, characterized in that it is equipped with a coarse positioning step, an actuating element which is kinematically connected to the housing with the possibility of reciprocating movement, and the exact positioning step is kinematically connected with the coarse positioning step with the possibility of autonomous reciprocating movement of its elements relative to the coarse step positioning in the process of precise positioning and synchronous reciprocating with the latter, in percent CCE coarse positioning of the object.