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US9013572B2 - Method for observing sample and electronic microscope - Google Patents
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US9013572B2 - Method for observing sample and electronic microscope - Google Patents

Method for observing sample and electronic microscope Download PDF

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US9013572B2
US9013572B2 US13/126,638 US200913126638A US9013572B2 US 9013572 B2 US9013572 B2 US 9013572B2 US 200913126638 A US200913126638 A US 200913126638A US 9013572 B2 US9013572 B2 US 9013572B2
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view
fields
field
image
imaging
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US20110205353A1 (en
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Akiko Fujisawa
Hiroyuki Kobayashi
Eiko Nakazawa
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Hitachi High Tech Corp
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Hitachi High Technologies Corp
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/008—Details of detection or image processing, including general computer control
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical, image processing or photographic arrangements associated with the tube
    • H01J37/222—Image processing arrangements associated with the tube
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/22—Treatment of data
    • H01J2237/221—Image processing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/22—Treatment of data
    • H01J2237/226—Image reconstruction

Definitions

  • the present invention relates to an imaging method for electron microscopes, and more particularly to an electron microscope that images consecutive fields of view a plurality of times and combines the respective fields of view in order to record a wide region with favorable resolution.
  • Patent Document 1 a method of performing an imaging process automatically in synchrony with the field of view movement (stage movement) by specifying in advance the imaging magnification, how many times imaging is performed (the number of images produced in the vertical and horizontal directions), and the overlap amount between adjacent fields of view.
  • Patent Document 2 a method of performing an imaging process automatically in synchrony with the field of view movement (stage movement) while also automatically calculating how many times imaging is to be performed by specifying the coordinates of the vertices of the region of the consecutive fields of view to be imaged as a whole.
  • Patent Document 1 there is also presented a function for displaying a field of view region to be consecutively imaged.
  • Patent Document 1 there are described examples in which a plurality of imaging fields of view are defined in such a manner that the interior of a rectangle, or of a region formed by a combination of rectangular shapes, containing an object to be observed is swept, and parts between the respective fields of view are placed over one another.
  • imaging fields of view would be defined even with respect to regions which actually need not be included, resulting in poor efficiency.
  • a sample observation method and an electron microscope are described below, an object thereof being to selectively assign observation fields of view with respect to parts of a sample to be observed that are necessary for observation.
  • a sample observation method comprising: a step of defining an outline, or a plurality of points located along the outline, with respect to an electron microscope image; and a step of arranging a plurality of fields of view of the electron microscope along the outline.
  • an apparatus for realizing this method comprising: a step of defining an outline, or a plurality of points located along the outline, with respect to an electron microscope image; and a step of arranging a plurality of fields of view of the electron microscope along the outline.
  • FIG. 1 is a diagram illustrating one example of the configuration of a transmission electron microscope.
  • FIG. 2 is a diagram illustrating a method of defining consecutive field of view imaging regions by tracing a boundary of an object to be observed.
  • FIG. 3 is a diagram illustrating a method of defining consecutive field of view imaging regions by specifying a plurality of desired positions along a boundary of an object to be observed.
  • FIG. 4 is a flowchart illustrating an operation of consecutive field of view imaging.
  • FIG. 5 is a flowchart illustrating an operation of consecutive field of view imaging.
  • FIG. 6 is a diagram illustrating a method of defining consecutive field of view imaging regions by extracting a boundary of an object to be observed.
  • FIG. 7 is a flowchart illustrating a method of performing consecutive field of view imaging by extracting a boundary of an object to be observed.
  • FIG. 8 is a diagram illustrating a method of defining consecutive field of view imaging regions by extracting a boundary of an object to be observed that matches a pre-registered pattern.
  • FIG. 9 is a flowchart illustrating a method of performing consecutive field of view aging by extracting a boundary of an object to be observed that matches a pre-registered pattern.
  • FIG. 10 is a diagram illustrating a method of performing consecutive field of view imaging by specifying desired imaging regions from among consecutive field of view imaging regions displayed in a grid.
  • FIG. 11 is a flowchart illustrating a method of performing consecutive field of view imaging by specifying desired imaging regions from among consecutive field of view imaging regions displayed in a grid.
  • FIG. 12 is a diagram illustrating a method of efficiently organizing image data imaged at each field of view region.
  • FIG. 13 is a diagram illustrating a function of redefining an automatically calculated imaging field of view position.
  • FIG. 14 is a diagram illustrating the principles of one method for automatically determining consecutive field of view positions.
  • FIG. 15 is a diagram illustrating one example of a method of adjusting the size of an overlapping region between fields of view.
  • a method for defining a field of view of a high-magnification image (second image) with respect to a low-magnification image (first image), as well as a transmission electron microscope (TEM) for realizing it, and a computer program for executing the method above are described below.
  • FOVs fields of view
  • the set of the thus arranged FOVs takes on a square or rectangular block shape.
  • unnecessary fields of view would be imaged, which is inefficient.
  • imaging was performed using time for performing unnecessary imaging processes as well as films, CCD devices, etc., for recording unnecessary imaging results, ample memory capacity for image data had to be secured.
  • there was no function for displaying what sort of fields of view the consecutive field of view regions are being imaged by, and viewing in advance was not possible. Further, it was not possible to view the progress of repeated imaging processes.
  • field of view movements were carried out in such a manner that there would be a predetermined overlap amount in the vertical and horizontal directions of the imaging region. Specifically, the directions of the field of view movements were in alignment with the vertical and horizontal directions of the imaging region. In other words, because the fields of view were consecutively arranged vertically and horizontally, fields of view were consequently disposed even at unnecessary parts, which was inefficient.
  • the means capable of specifying field of view movement directions may be made possible by providing an input means which displays all field of view regions of interest and with which a plurality of, or consecutive, field of view positions can be specified in such a manner that each region necessary for imaging would be included. Further, by providing a means that displays each imaging region superimposed on the aforementioned display, and adopting such display control that the display is made to differ every time the imaging of each region is completed, it is possible to view each imaging field of view and to visualize the progress of the imaging process.
  • FIG. 1 is one embodiment showing the configuration of an electron microscope.
  • the electron beam emitted from an electron gun 1 is focused by irradiation lenses 2 and irradiates a sample 3 held on a sample stage.
  • the electron beam transmitted by the sample 3 is magnified by an image forming lens system 4 , and an image is formed on a fluorescent plate 5 , or on a scintillator within an imaging apparatus 6 .
  • the magnified image formed on the scintillator is imaged with an imaging device, such as a CCD, etc., via an optical lens or a fiber plate that is within the imaging apparatus, and is converted into electrical signals (image signals).
  • image signals are read by a PC 11 via an interface 9 c and are displayed on a monitor 14 as an image. In so doing, the image signals outputted via the interface 9 c may also be stored by the PC 11 as image data in a memory 12 .
  • the controlling entity of the TEM may sometimes be referred to simply as a “control unit.”
  • the memory 12 , a processing unit 13 , an input device 10 , such as a keyboard or a mouse, to be used in specifying conditions, etc., and a monitor 14 are connected to the PC 11 .
  • a sample stage drive part 7 for holding and moving the sample 3 is controlled by the PC 11 via an interface 9 a part.
  • the PC 11 also controls the electron gun 1 , the irradiation lenses 2 , the image forming lens system 4 , etc.
  • an observation magnification M that allows for the viewing of the entire region of interest of the sample 3 is set, and the sample stage drive part 7 is moved in such a manner that desired field of view regions would fall within the imaging range.
  • the coordinate position of the sample stage drive part 7 is read in synchrony with the sample stage drive part 7 by a stage position detector 8 connected to the sample stage drive part 7 , and is transmitted to the PC 11 via an interface 9 b.
  • position information of the sample stage there are stored on the PC 11 parameters for controlling the drive conditions for the sample stage, such as the movement amount of the sample stage, overlap amount between adjacent fields of view, number of consecutive field of view images imaged, specification of imaging range, etc.
  • FIG. 4 With respect to a transmission electron microscope of the configuration shown in FIG. 1 , a method is described with reference to the flowchart in FIG. 4 , where imaging is performed by determining consecutive field of view regions through a method in which, as shown in FIG. 2 , an image in which the entire region of interest can be viewed is displayed on a monitor, and a boundary (outline) of the object being observed is traced with a cursor using the displayed image, or through a method in which, as shown in FIG.
  • a plurality of desired positions along the boundary of the object being observed are specified, and an interpolation computation is performed between the specified positions, and by controlling the stage, or the electron beam deflector, in such a manner that only the boundary of the region, or the region as a whole, would form consecutive fields of view at a predetermined magnification and overlap amount.
  • a given field of view is acquired as shown in FIG. 2 a , where the entire region of interest can be viewed on the monitor 14 .
  • consecutive field of view imaging regions such as those shown in FIG. 2 c are outputted to the monitor 14 , and consecutive field of view images of the boundary alone, or of the entire region, are imaged.
  • a given field of view in which the entire region of interest can be viewed on the monitor 14 is obtained as in FIG. 3 a .
  • consecutive field of view imaging regions are outputted on the monitor 14 as shown in FIG. 3 c , and consecutive field of view images of the boundary alone, or of the entire region, are imaged.
  • step 101 consecutive field of view imaging conditions are defined.
  • the operator inputs imaging magnification M′ of any desired value for the consecutive field of view images and overlap amount ⁇ N pixels for the field of view.
  • the operation here is performed using the input device 10 , such as a keyboard and a mouse, etc.
  • step 102 magnification M of any desired value with which the entire region of interest can be viewed is defined, and a boundary (outline) of the object being observed is traced using the input device 10 , such as a keyboard or a mouse, etc., while looking at the image of the sample 3 displayed on the monitor 14 .
  • a plurality of desired positions along the boundary line of the object being observed are specified.
  • the traced or voluntarily specified coordinates are defined as (x 1 , y 1 ), (x 2 , y 2 ), (x 3 , y 3 ) . . . , (x m , y m ) (where x j , y j are integers, whose units with respect to the coordinate system of the image data are in pixels) and stored in the memory 12 .
  • step 103 all regions of the imaging fields of view are outputted on the monitor 14 .
  • step 104 through step 115 may be repeated a number of times corresponding to how many divided curves there are, and the consecutive field of view images imaged may be combined and outputted as one image.
  • the least-squares method refers to a method for determining a coefficient that minimizes the sum of the squares of residuals so that, in approximating pairs of measured numerical values using a specific function, the model function would result in favorable approximations with respect to the measured values. It is now assumed that there is a set of input coordinates, namely, (x 0 , y 0 ), (x 1 , y 1 ), (x 2 , y 2 ) . . .
  • the calculated values for the respective x j would be (x 0 , f(x 0 )), (x 1 , f(x 1 )), (x 2 , f(x 2 )) . . . , (x m , f(x m )), where the sum of the squares of the residuals from actually measured values y j , may be given by,
  • Equation (2) regarded as being a function with variable A i , the case in which ⁇ , partially differentiated with respect to each A i , equals zero is the condition under which ⁇ becomes smallest. In other words, this may be expressed as
  • step 105 the minimum value and the maximum value for x with respect to the plurality of specified points (x 1 , y 1 ), (x 2 , y 2 ), (x 3 , y 3 ), . . .
  • stage drive part 7 moves to stage coordinates (X, Y), which are calculated as follows, in order to perform consecutive field of view imaging.
  • stage coordinates (X, Y) are (X 0 , Y 0 ), that the imaging magnification is M, that the number of imaged pixels is N ⁇ N pixels, and that the imaging region (scintillator size) is L ⁇ L pixels, then stage coordinates (X, Y) may be given by
  • step 109 the PC 11 performs imaging after changing to imaging magnification M′ of any desired value for the consecutive field of view images as set in step 101 .
  • step 111 it is determined whether or not x e calculated in step 110 is greater than x max . If it is greater, the process proceeds to step 116 and imaging is terminated. If it is less, the process proceeds to step 112 .
  • step 114 with respect to d as calculated in step 113 ,
  • the destination of the next field of view among the consecutive fields of view is calculated each time imaging is finished. Accordingly, it is not possible to view the imaging region of each field of view before the imaging process is begun. In order to enable this, one need only calculate the destination for each field of view before beginning imaging.
  • the coordinate position of (x (j) ′, y (j) ′) is the field of view destination, and a field of view movement is performed by converting this into stage coordinate system (X, Y).
  • one option might be to define, with respect to the area of the overlapping region (or the lengths of the overlapping region in the X direction and the Y direction), an upper limit value and a lower limit value in advance, and adjust the field of view position so that the area of the overlapping region would fall within this range.
  • one option might be to carry out the adjustment of the field of view position by gradually moving the field of view along the outline, and stopping that movement once the area of the above-mentioned overlapping area has fallen between the above-mentioned upper and lower limit values.
  • stage coordinates are determined based on the selection of the plurality of points.
  • stage coordinates etc.
  • FIG. 14 is a diagram illustrating another example of an algorithm for automatically determining FOV positions.
  • a location that is set apart from one field of view (FOV) by an amount corresponding to distance r is defined as the next FOV.
  • Equations (7) and (8) are carried out using an approximate equation that approximates an outline of an object being observed and central coordinates (x c , y c ) of the first FOV 1401 .
  • Equation (7) is an approximate equation that is obtained by approximating an outline of the object being observed.
  • r is a value related to the distance from the central coordinates of the first FOV.
  • distance r is preferably so defined as to be less than the length of the sides of the FOV. Specifically, it is preferably defined as follows: (the size of the sides of the FOV—the desired size of the overlapping region). It is noted that the size of the overlapping region should preferably be freely definable in accordance with the purpose of observation, the observation conditions, etc.
  • the overlapping parts are provided to perform the connection between field of view images in an appropriate manner, when they are defined to be excessively large, the number of acquired field of view images increases, which could potentially prolong observation time.
  • a method of defining that results in the overlapping parts being of an appropriate size while securing at least a certain size for the overlapping regions.
  • the distance between the FOVs is adjusted so as to make the lengths of outlines within overlapping regions uniform, while also making the lengths thereof be equal to distance D which is the same as when the FOVs are linearly arranged in the horizontal direction or in the vertical direction
  • one option might be to adjust the distance between the FOVs by moving an FOV by length D 1 ⁇ D of the outline.
  • the adjustment above may be performed when the length of an outline within an overlapping part exceeds a predetermined value, or adjustment may be performed in such a manner that the lengths of outlines within overlapping regions would always be a predetermined value.
  • FOVs may be assigned using differing values of r depending on the part of the outline of the sample (or on the kind of the approximate curve approximating the outline).
  • the relationship with the observation magnification of the electron microscope, coordinate information of pixels with respect to the image, and the field of view movement amount caused by the stage and/or the deflector when predetermined signals are supplied is pre-registered on a storage medium built into a controlling unit, and the movement of the field of view position with respect to the calculated position is performed by controlling the stage and/or the deflector based on the information registered on this storage medium.
  • an image of a given object to be observed is imaged at any desired magnification M at which the entire region of interest may be viewed, an outline of the object to be observed is extracted through image processing, such as by thresholding the image, and so forth, and imaging is performed through stage control or by controlling the electron beam deflector so that regions along the outline only or within the outline would be consecutive fields of view at a predetermined magnification and overlap amount.
  • a given field of view is obtained as in FIG. 6 a , wherein the entire region of interest can be viewed on the monitor 14 .
  • Image processing is performed to extract a boundary (outline), which results in a form such as that in FIG. 6 b .
  • Consecutive field of view imaging regions such as those shown in FIG. 6 c are displayed, and consecutive field of view images of only the boundary of the object being observed or of the entire region are imaged.
  • step 201 conditions for imaging consecutive field of view images are defined.
  • the operator inputs any desired imaging magnification M′ for the consecutive field of view images and overlap amount ⁇ N pixels for the field of view.
  • the operations here are performed using the input device 10 , such as a keyboard and a mouse, etc.
  • step 202 while looking at the image of the sample 3 displayed on the monitor 14 , magnification M of any desired value with which the entire region of interest can be viewed is defined, and the sample stage drive part 7 is moved in such a manner that desired parts would fall within the imaging range.
  • the coordinate position of the sample stage drive part 7 is read by the position detector 8 connected to the sample stage drive part 7 and is transmitted to the PC 11 via the interface 9 b.
  • An image of any desired object is acquired using the imaging apparatus 6 and stored in the memory 12 via the interface 9 c.
  • the processing unit 13 reads from the memory 12 the image data acquired in step 202 , and performs such image processing as sharpness and edge enhancement, contrast adjustment, threshold processing, etc.
  • a boundary (outline) is extracted.
  • step 205 coordinate positions of the boundary (outline) extracted in step 204 are defined as (x 1 , y 1 ), (x 2 , y 2 ), (x 3 , y 3 ) . . . , (x m , y m ) (where x, y are integers) and stored in the memory 12 .
  • step 206 based on imaging magnification M′ and overlap amount ⁇ N pixels for the field of view that were inputted in step 201 and the coordinates read in step 205 , the processing unit 13 calculates imaging regions for consecutive field of view images and outputs them on the monitor 14 so that the imaging range for consecutive field of view images can be viewed on the monitor 14 .
  • consecutive field of view images are imaged. Consecutive field of view images are imaged through a method similar to that of the flowchart in FIG. 5 described above.
  • step 208 the imaging of consecutive field of view images is terminated.
  • imaging is also possible through a method in which an electron beam deflector is controlled.
  • an image of any desired object is imaged at magnification M of any desired value with which the entire region of interest can be viewed, a region matching a pre-registered pattern is extracted, and imaging regions for consecutive field of view images are determined.
  • a method will now be described with reference to the flowchart in FIG. 9 , wherein imaging is performed through automatic stage control or by controlling the electron beam deflector in such a manner that only the boundary of the region or the entire region would be consecutive field of view images at a predetermined magnification and overlap amount.
  • the circle shown in FIG. 8 a is registered as a pattern, and assuming that a given imaged field of view is obtained on the monitor 14 as in FIG. 8 b , a form having the same pattern as the circle that has been selected as a pattern is automatically extracted. Thereafter, as shown in FIG. 8 c , consecutive field of view imaging regions are outputted, and consecutive field of view images are imaged for the boundary of the form only or for the entire region.
  • step 301 conditions for imaging consecutive field of view images are defined.
  • the operator inputs any desired imaging magnification M′ for the consecutive field of view images and overlap amount ⁇ N pixels for the field of view, and registers any desired pattern for imaging consecutive field of view images.
  • the operations here are performed using the input device 10 , such as a keyboard and a mouse, etc.
  • the pattern may be defined based on such conditions as, by way of example, the angle formed by the sides, ellipticity, the length ratio of the long axis to the short axis, etc. Alternatively, it may be defined by calling a shape pre-stored in the memory 12 .
  • step 302 while looking at the image of the sample 3 displayed on the monitor 14 , magnification M of any desired value with which the entire region of interest can be viewed is defined, and the sample stage drive part 7 is moved in such a manner that desired parts would fall within the imaging range.
  • the coordinate position of the sample stage drive part 7 is read by the position detector 8 connected to the sample stage drive part 7 and is transmitted to the PC 11 via the interface 9 b.
  • An image of the desired part is acquired using the imaging apparatus 6 and stored in the memory 12 via the interface 9 c.
  • the processing unit 13 performs pattern matching between the image data imaged in step 302 and the shape pre-registered in step 301 .
  • step 304 a form that has been determined, through pattern matching, as being identical to the pre-registered shape is extracted.
  • the processing unit 13 performs such image processing as sharpness and edge enhancement, contrast adjustment, threshold processing, etc., on the region extracted in step 304 .
  • step 306 a boundary (outline) within a relevant region is extracted.
  • step 307 coordinate positions of the boundary (outline) extracted in step 306 are defined as (x 1 , y 1 ), (x 2 , y 2 ), (x 3 , y 3 ) . . . , (x m , y m ) (where x, y are integers) and stored in the memory 12 .
  • step 308 based on imaging magnification M′ and overlap amount ⁇ N pixels for the field of view that were inputted in step 301 and the coordinates read in step 306 , the processing unit 13 calculates imaging regions for consecutive field of view images and outputs them on the monitor 14 so that the imaging range for consecutive field of view images can be viewed on the monitor 14 .
  • step 309 consecutive field of view images are imaged. Consecutive field of view images are imaged through a method similar to that of the flowchart in FIG. 5 described above.
  • step 310 the imaging of consecutive field of view images is terminated.
  • imaging is also possible through a method in which an electron beam deflector is controlled.
  • an image of any desired object is displayed on the monitor at magnification M of any desired value at which it is possible to view the entire field of view for performing consecutive field of view imaging, and imaging regions calculated based on a predetermined magnification and overlap amount are displayed in a grid on the monitor.
  • a method will now be described with reference to the flowchart in FIG. 11 , wherein any desired imaging region is specified with a cursor or a mouse, and the specified region is imaged through stage control or by controlling the electron beam deflector so as to obtain consecutive fields of view at a predetermined magnification and overlap amount.
  • step 401 conditions for imaging consecutive field of view images are defined.
  • the operator inputs any desired imaging magnification M′ for the consecutive field of view images and overlap amount ⁇ N pixels for the field of view.
  • the operations here are performed using the input device 10 , such as a keyboard and a mouse, etc.
  • step 402 while looking at the image of the sample 3 displayed on the monitor 14 , magnification M of any desired value with which the entire region of interest can be viewed is defined, and the sample stage drive part 7 is moved in such a manner that desired parts would fall within the imaging range.
  • step 403 based on imaging magnification M′ and overlap amount ⁇ N pixels for the field of view that were inputted in step 401 , consecutive field of view image imaging regions are calculated at the processing unit 13 and displayed on the monitor 14 so that the consecutive field of view image imaging regions may be viewed on the monitor 14 .
  • imaging regions may be represented with grid lines, etc.
  • step 404 the desired imaging regions are specified with a cursor or a mouse.
  • the operations here are performed using the input device 10 , such as a keyboard and a mouse, etc.
  • the specified regions are distinguished from the fields of view that have not been specified, and are displayed accordingly on the monitor 14 .
  • the specified regions are displayed with their color, etc., changed.
  • step 405 the regions specified in step 404 are imaged through automatic stage control or by controlling an electron beam deflector so as to obtain consecutive fields of view at the predetermined magnification and overlap amount inputted in step 401 .
  • the control configuration would be as follows. In the process of imaging consecutive fields of view, there is a need to move the field of view to be imaged to the next field of view each time imaging is performed. As such, there is adopted a configuration comprising a means which, in order to reduce the electron beam incident on the sample during the above-mentioned moving of the field of view, makes electron beam incidence controllable such that it is incident only during imaging by controlling the bias voltage for the electron gun so as to block the electron beam or through deflection control of the electron beam by the electron beam deflector so as to prevent it from being incident on the sample.
  • the control means that starts irradiation from a low electron beam intensity, and gradually sets it to a predetermined electron beam intensity for imaging.
  • a means for field of view movement too, in order suppress sample drift or vibration due to stage movement, it is made possible to move based on one or a combination of stage driven and electromagnetic field of view movement depending on the imaging magnification and movement amount.
  • the configuration is such that it comprises, so as to reduce the effects of sample drift and stage vibration, a means that sets a waiting time for starting imaging after field of view movement, and a means that delays starting imaging by the aforementioned time.
  • Imaging is first performed at a magnification at which all field of view regions to be imaged can be viewed, and this is imported as image data ( FIG. 12 a ).
  • Sequence numbers (or symbols) from when the fields of view are imaged at a predetermined magnification are stored as part of the imaged image data or file names of the respective fields of view.
  • This may be prevented by providing a means, like a mouse, for selecting display regions of the respective field of view regions to be imaged, and by controlling field of view movements and imaging by moving the selected field of view region on the monitor along with the movement of the mouse, and re-calculating the imaging field of view position in accordance with the distance and direction after movement.
  • a function that thus allows redefinition with automatically calculated imaging field of view positions is readily applicable, as shown in FIG. 13 b , to the cases in FIG. 2 , FIG. 3 , FIG. 6 , and FIG. 8 as well.

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