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USD701498S1 - Arm for wafer transportation for manufacturing semiconductor - Google Patents
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USD701498S1 - Arm for wafer transportation for manufacturing semiconductor - Google Patents

Arm for wafer transportation for manufacturing semiconductor Download PDF

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Publication number
USD701498S1
USD701498S1 US29/414,723 US201229414723F USD701498S US D701498 S1 USD701498 S1 US D701498S1 US 201229414723 F US201229414723 F US 201229414723F US D701498 S USD701498 S US D701498S
Authority
US
United States
Prior art keywords
arm
manufacturing semiconductor
wafer transportation
wafer
transportation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
US29/414,723
Inventor
Naruaki Iida
Hideki Kajiwara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Assigned to TOKYO ELECTRON LIMITED reassignment TOKYO ELECTRON LIMITED ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: IIDA, NARUAKI, KAJIWARA, HIDEKI
Application granted granted Critical
Publication of USD701498S1 publication Critical patent/USD701498S1/en
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Description

FIG. 1 is perspective view of an arm for wafer transportation for manufacturing semiconductor showing our new design;
FIG. 2 is a top plan view thereof;
FIG. 3 is a bottom plan view thereof;
FIG. 4 is a front view thereof;
FIG. 5 is a rear view thereof;
FIG. 6 is a left side view thereof, the right side view being a mirror image;
FIG. 7 is an enlarged sectional view taken along line 7-7 of FIG. 2; and,
FIG. 8 is an enlarged sectional view taken along line 8-8 of FIG. 2.
The broken lines shown in the drawings represent portions of the arm for wafer transportation for manufacturing semiconductor that form no part of the claimed design.

Claims (1)

    CLAIM
  1. The ornamental design for arm for wafer transportation for manufacturing semiconductor, as shown and described.
US29/414,723 2011-10-20 2012-03-02 Arm for wafer transportation for manufacturing semiconductor Active USD701498S1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2011024076 2011-10-20
JP2011-024076 2011-10-20

Publications (1)

Publication Number Publication Date
USD701498S1 true USD701498S1 (en) 2014-03-25

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ID=50289174

Family Applications (1)

Application Number Title Priority Date Filing Date
US29/414,723 Active USD701498S1 (en) 2011-10-20 2012-03-02 Arm for wafer transportation for manufacturing semiconductor

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US (1) USD701498S1 (en)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD743400S1 (en) * 2010-06-11 2015-11-17 Ricoh Company, Ltd. Information storage device
USD785578S1 (en) * 2016-03-22 2017-05-02 Asm Ip Holding B.V. Substrate supporting arm for semiconductor manufacturing apparatus
USD868012S1 (en) * 2017-01-18 2019-11-26 Kokusai Electric Corporation Cassette receiving tool for semiconductor manufacturing apparatus
USD868013S1 (en) * 2017-01-18 2019-11-26 Kokusai Electric Corporation Cassette receiving tool for semiconductor manufacturing apparatus
USD877706S1 (en) * 2017-01-18 2020-03-10 Kokusai Electric Corporation Cassette displacement prevention jig of semiconductor manufacturing apparatus
USD911986S1 (en) * 2019-05-03 2021-03-02 Raytheon Company Handheld semiconductor wafer handling tool
USD938373S1 (en) * 2019-10-25 2021-12-14 Applied Materials, Inc. Substrate transfer structure
USD954666S1 (en) * 2019-05-03 2022-06-14 Lumileds Holding B.V. Flexible circuit board
USD997892S1 (en) * 2019-11-28 2023-09-05 Kokusai Electric Corporation End effector for handling wafers
USD1077046S1 (en) * 2022-12-01 2025-05-27 Koninklijke Philips N.V. Handle for nanoimprinting machine

Citations (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6167322A (en) * 1998-07-10 2000-12-26 Holbrooks; Orville Ray Intelligent wafer handling system and method
US6190114B1 (en) * 1998-05-29 2001-02-20 Daihen Corporation Transfer robot
US6216883B1 (en) * 1998-07-24 2001-04-17 Mitsubishi Denki Kabushiki Kaisha Wafer holding hand
US6293749B1 (en) * 1997-11-21 2001-09-25 Asm America, Inc. Substrate transfer system for semiconductor processing equipment
US20010051088A1 (en) * 2000-06-02 2001-12-13 Young Kyou Park Wafer storage equipment and transfer apparatus thereof having a sensor for detecting state of a wafer transfer arm
US6409453B1 (en) * 1998-02-18 2002-06-25 Applied Materials, Inc. End effector for wafer handler in processing system
US20040070914A1 (en) * 2000-12-12 2004-04-15 David Ferreres Electrostatic device for holding an electronic component wafer
US6991419B2 (en) * 2001-04-16 2006-01-31 Samsung Electronics Co., Ltd. Method and apparatus for transferring a wafer
US20070031222A1 (en) * 2005-08-05 2007-02-08 Tokyo Electron Limited Substrate transfer apparatus and method, and storage medium
US7186297B2 (en) * 2000-12-15 2007-03-06 Kabushiki Kaisha Yaskawa Denki Wafer holding apparatus
USD559805S1 (en) * 2005-08-12 2008-01-15 Tokyo Electron Limited Stage arm for a semiconductor wafer delivery apparatus
US7334826B2 (en) * 2001-07-13 2008-02-26 Semitool, Inc. End-effectors for handling microelectronic wafers
USD589474S1 (en) * 2007-06-06 2009-03-31 Tokyo Electron Limited Wafer holding member
USD589912S1 (en) * 2007-06-06 2009-04-07 Tokyo Electron Limited Wafer holding member
US7578649B2 (en) * 2002-05-29 2009-08-25 Brooks Automation, Inc. Dual arm substrate transport apparatus
US7611182B2 (en) * 2005-02-25 2009-11-03 Semes Co., Ltd. Wafer transfer apparatus
USD614152S1 (en) * 2008-07-21 2010-04-20 Asm Genitech Korea, Ltd. Substrate transfer device for semiconductor deposition apparatus
USD673923S1 (en) * 2011-01-20 2013-01-08 Tokyo Electron Limited Arm for wafer transportation for manufacturing semiconductor
USD674366S1 (en) * 2011-01-20 2013-01-15 Tokyo Electron Limited Wafer holding member
USD674365S1 (en) * 2011-01-20 2013-01-15 Tokyo Electron Limited Arm for wafer transportation for manufacturing semiconductor
USD674761S1 (en) * 2011-10-20 2013-01-22 Tokyo Electron Limited Wafer holding member

Patent Citations (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6293749B1 (en) * 1997-11-21 2001-09-25 Asm America, Inc. Substrate transfer system for semiconductor processing equipment
US6409453B1 (en) * 1998-02-18 2002-06-25 Applied Materials, Inc. End effector for wafer handler in processing system
US6190114B1 (en) * 1998-05-29 2001-02-20 Daihen Corporation Transfer robot
US6167322A (en) * 1998-07-10 2000-12-26 Holbrooks; Orville Ray Intelligent wafer handling system and method
US6216883B1 (en) * 1998-07-24 2001-04-17 Mitsubishi Denki Kabushiki Kaisha Wafer holding hand
US20010051088A1 (en) * 2000-06-02 2001-12-13 Young Kyou Park Wafer storage equipment and transfer apparatus thereof having a sensor for detecting state of a wafer transfer arm
US20040070914A1 (en) * 2000-12-12 2004-04-15 David Ferreres Electrostatic device for holding an electronic component wafer
US7186297B2 (en) * 2000-12-15 2007-03-06 Kabushiki Kaisha Yaskawa Denki Wafer holding apparatus
US6991419B2 (en) * 2001-04-16 2006-01-31 Samsung Electronics Co., Ltd. Method and apparatus for transferring a wafer
US7334826B2 (en) * 2001-07-13 2008-02-26 Semitool, Inc. End-effectors for handling microelectronic wafers
US7578649B2 (en) * 2002-05-29 2009-08-25 Brooks Automation, Inc. Dual arm substrate transport apparatus
US7611182B2 (en) * 2005-02-25 2009-11-03 Semes Co., Ltd. Wafer transfer apparatus
US20070031222A1 (en) * 2005-08-05 2007-02-08 Tokyo Electron Limited Substrate transfer apparatus and method, and storage medium
USD559805S1 (en) * 2005-08-12 2008-01-15 Tokyo Electron Limited Stage arm for a semiconductor wafer delivery apparatus
USD589474S1 (en) * 2007-06-06 2009-03-31 Tokyo Electron Limited Wafer holding member
USD589912S1 (en) * 2007-06-06 2009-04-07 Tokyo Electron Limited Wafer holding member
USD614152S1 (en) * 2008-07-21 2010-04-20 Asm Genitech Korea, Ltd. Substrate transfer device for semiconductor deposition apparatus
USD673923S1 (en) * 2011-01-20 2013-01-08 Tokyo Electron Limited Arm for wafer transportation for manufacturing semiconductor
USD674366S1 (en) * 2011-01-20 2013-01-15 Tokyo Electron Limited Wafer holding member
USD674365S1 (en) * 2011-01-20 2013-01-15 Tokyo Electron Limited Arm for wafer transportation for manufacturing semiconductor
USD674761S1 (en) * 2011-10-20 2013-01-22 Tokyo Electron Limited Wafer holding member

Cited By (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9989887B2 (en) 2010-06-11 2018-06-05 Ricoh Company, Ltd. Apparatus and method for preventing an information storage device from falling from a removable device
USD743400S1 (en) * 2010-06-11 2015-11-17 Ricoh Company, Ltd. Information storage device
USD757161S1 (en) 2010-06-11 2016-05-24 Ricoh Company, Ltd. Toner container
USD758482S1 (en) 2010-06-11 2016-06-07 Ricoh Company, Ltd. Toner bottle
US9599927B2 (en) 2010-06-11 2017-03-21 Ricoh Company, Ltd. Apparatus and method for preventing an information storage device from falling from a removable device
US11188007B2 (en) 2010-06-11 2021-11-30 Ricoh Company, Ltd. Developer container which discharges toner from a lower side and includes a box section
US9256158B2 (en) 2010-06-11 2016-02-09 Ricoh Company, Limited Apparatus and method for preventing an information storage device from falling from a removable device
US12416878B2 (en) 2010-06-11 2025-09-16 Ricoh Company, Limited Information storage system including a plurality of terminals
US11275327B2 (en) 2010-06-11 2022-03-15 Ricoh Company, Ltd. Information storage system including a plurality of terminals
US11768448B2 (en) 2010-06-11 2023-09-26 Ricoh Company, Ltd. Information storage system including a plurality of terminals
US20180253028A1 (en) 2010-06-11 2018-09-06 Yasufumi Takahashi Apparatus and method for preventing an information storage device from falling from a removable device
US10725398B2 (en) 2010-06-11 2020-07-28 Ricoh Company, Ltd. Developer container having a cap with three portions of different diameters
US10754275B2 (en) 2010-06-11 2020-08-25 Ricoh Company, Ltd. Apparatus and method for preventing an information storage device from falling from a removable device
US11429036B2 (en) 2010-06-11 2022-08-30 Ricoh Company, Ltd. Information storage system including a plurality of terminals
USD785578S1 (en) * 2016-03-22 2017-05-02 Asm Ip Holding B.V. Substrate supporting arm for semiconductor manufacturing apparatus
USD877706S1 (en) * 2017-01-18 2020-03-10 Kokusai Electric Corporation Cassette displacement prevention jig of semiconductor manufacturing apparatus
USD868013S1 (en) * 2017-01-18 2019-11-26 Kokusai Electric Corporation Cassette receiving tool for semiconductor manufacturing apparatus
USD868012S1 (en) * 2017-01-18 2019-11-26 Kokusai Electric Corporation Cassette receiving tool for semiconductor manufacturing apparatus
USD954666S1 (en) * 2019-05-03 2022-06-14 Lumileds Holding B.V. Flexible circuit board
USD911986S1 (en) * 2019-05-03 2021-03-02 Raytheon Company Handheld semiconductor wafer handling tool
USD938373S1 (en) * 2019-10-25 2021-12-14 Applied Materials, Inc. Substrate transfer structure
USD997892S1 (en) * 2019-11-28 2023-09-05 Kokusai Electric Corporation End effector for handling wafers
USD1077046S1 (en) * 2022-12-01 2025-05-27 Koninklijke Philips N.V. Handle for nanoimprinting machine

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