WO1998041336A1 - Cleaning apparatus and cleaning method - Google Patents

Abstract

A steam cleaning apparatus wherein no solvent is used, provided with a steam generating section (2), a holding section (1) for letting in the steam generated in the steam generating section (2) from underneath and applying the steam to an object of cleaning held in it, and a recovering section (4) provided under the holding section (1) to let the steam from underneath pass therethrough while recovering oil and the like dropping from the holding section; and a cleaning method comprising the cleaning step and the recovering step, realized with the aforementioned cleaning apparatus.

Description

 Description Cleaning device and cleaning method

 The present invention relates to a cleaning method and a cleaning apparatus capable of efficiently cleaning at least an object to be cleaned to which oil has adhered using steam. Background art

 An oil component such as fat or oil is attached to the metal product after the addition. For this reason, metal products after cleaning are used after cleaning. Since solvents such as trichloroethane and specific freon can no longer be used for this cleaning, a cleaning method using a solvent instead of these has been required.

 As a method of washing with such an alternative solvent, a method of washing by washing with water or a method of spraying steam from above to below toward an object to be washed has been proposed.

 However, when washing with water, there is a problem that it is difficult to treat the emulsified water. Also, in the case of steam cleaning, there is a problem that the apparatus becomes large-scale because steam is pressurized and blown. Although a method has been proposed in which steam is used as superheated steam by mixing it with a burner flame, there is a problem that impurities are mixed in the superheated steam and a device for generating the superheated steam becomes large.

Therefore, an object of the present invention is to provide a cleaning apparatus and a cleaning method capable of efficiently performing steam cleaning of an object to be cleaned to which at least oil has adhered with a simple system. Disclosure of the invention

 A first device invention for solving the above-mentioned problems is a cleaning device for cleaning by applying steam to at least an object to be washed to which oil has adhered, wherein a steam generating unit for generating steam, A storage section for introducing the steam from below and applying the steam to the stored object to be cleaned; and a recovery section provided below the storage section, through which the steam passes but which falls from the storage section and collects oil and the like. This is a cleaning device including a collection unit for performing the cleaning.

 According to this, the cleaning efficiency is improved because steam is blown from the bottom to the top with a natural flow to the object to be cleaned. The oil that falls down from the object to be cleaned is collected in the collection section that does not hinder the passage of steam, so that the steam generation section is not contaminated with oil.

 And, the steam generating section accommodates a laminated structure in which a number of small passages in a direction intersecting with the axis of the pipe member are formed in a pipe member around which a coil is wound, It is preferable that the above-mentioned structure is changed to generate steam by induction heating the laminated structure.

 According to this, the entire laminated structure forming the small passage in the direction crossing the magnetic field lines is induction-heated, and the fluid flowing along the small passage product is regularly dispersed, diffused, radiated, and volatilized. The structure can turn the fluid into steam. Therefore, a compact steam generating unit can be provided. The steam generating unit is provided between the collecting unit and the steam generating unit, and diffuses the steam from the steam generating unit to the entire collecting unit. Those provided with a diffusion section are preferred.

This allows the steam from the compact steam generator to spread over the surface, creating a bottom-to-top steam flow throughout the storage. Then, steam from the storage section is introduced, and the high It is preferable that the apparatus includes a separator for returning the warm liquid to the vapor generation section. According to this, since the high-temperature liquid recovered from the storage section is returned to the steam generation section, the electric power for producing steam can be reduced.

 Preferably, the steam generated from the steam generating section is superheated steam.

 According to this, cleaning efficiency can be improved by using superheated steam for cleaning.

 A first method invention for solving the above-mentioned problem is a cleaning method for cleaning the object to be cleaned to which at least oil has adhered by applying steam to the object to be cleaned, wherein steam is introduced from below a storage part for storing the object to be cleaned. Washing the object to be cleaned by applying steam that is going to flow upward from below, and collecting the oil and the like flowing down from above to below the object to be cleaned by a recovery unit located below the storage unit. Recovering, but passing the vapor reaching the storage section from bottom to top.

 A second device invention that solves the above-mentioned problem is a cleaning device that cleans an object to be cleaned by applying steam to the cleaning object, and converts the water into steam, and further heats the steam to generate a cleaning medium consisting of only superheated steam. An electromagnetic induction heating section to be cleaned, a cleaning chamber for storing the object to be cleaned, and introducing the superheated steam, and removing the additional material added by cleaning from the cleaning medium flowing out of the cleaning chamber, and removing the remainder from the electromagnetic field. This is a cleaning device including a circulation path for returning an induction heating section.

According to this, a cleaning medium consisting only of superheated steam containing no air can be easily generated by the electromagnetic induction heating section, and the object to be cleaned can be cleaned cleanly. The electromagnetic induction heating section is preferably composed of a first electromagnetic induction heating section that heats water to produce steam and a second electromagnetic induction heating section that heats this steam to produce superheated steam. According to this, it is possible to easily control the first electromagnetic induction heating section to generate a predetermined amount of steam and the second electromagnetic induction heating section to generate the superheated steam at a predetermined temperature.

 The first and second electromagnetic induction heating sections house a laminated structure in which a number of small passages in a direction intersecting with the axis of the pipe member are formed in a pipe member wound with a coil, It is preferable that the magnetic flux of the line of magnetic force generated by the coil is changed and the laminated structure is induction-heated to generate steam. According to this, the entire laminated structure forming the small passage in the direction crossing the magnetic field lines is induction-heated, and the fluid flowing along the small passage product is regularly dispersed, diffused, radiated, and volatilized. The structure can turn the fluid into steam. Therefore, it is possible to provide a compact steam generating unit. It is preferable that the first electromagnetic induction heating unit and the second electromagnetic induction heating unit are connected via a pipe.

 According to this, the device can be easily configured via the pipe.

 A second method invention for solving the above-mentioned problems is a cleaning method of cleaning the object to be cleaned by applying steam thereto, wherein the electromagnetic induction heating section turns water into steam, and further heats the steam to produce superheated steam. Generating a cleaning medium consisting of only the cleaning medium; and applying the cleaning medium to the object to be cleaned, and cleaning the cleaning medium. And a step of circulating in the heating and heating section. BRIEF DESCRIPTION OF THE FIGURES

FIG. 1 is a device configuration diagram of a cleaning device of the present invention, FIG. 2 is a device configuration diagram of another cleaning device of the present invention, and FIG. 3 is a perspective view of a main part of a steam generation unit. Yes, FIG. 4 is a structural diagram of the laminated structure, and FIG. FIG. 6 is a structural diagram of a net structure used, and FIG. 6 is a structural diagram of an element used in a recovery unit. BEST MODE FOR CARRYING OUT THE INVENTION

 Hereinafter, an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a device configuration diagram of a cleaning device of the present invention.

 In FIG. 1, a cleaning device 1 includes a steam generating section 2 which is also an electromagnetic induction heating section, a diffusion section 3, a recovery section 4, a storage section 5, a first oil / water separator 6, and a second oil / water separation section. 7 as the main equipment.

 The upper flange of the steam generator 2 is connected to the lower flange of the diffuser 3. The lower part of the steam generation part 2 is connected to the liquid supply line 11. The main body of the steam generating section 2 is configured by winding a coil 22 around the outer periphery of a pipe member 21, inserting a laminated structure 23 into the pipe member 21, and connecting an inverter 24 to the coil 22. Is done.

 In order to control the level of liquid in the pipe member 21, a level meter 25 is attached to the pipe member 21, and a solenoid valve 2 controlled by the level meter 25 is connected to the liquid supply line 11. 6 is installed.

 In FIG. 3, the pipe member 21 where the liquid comes into contact is made of an inorganic material such as ceramic, a resin material such as FRP (fiber reinforced plastic), a fluororesin, or a non-magnetic material such as stainless steel so that the magnetic flux passes therethrough. Formed from material. The normal pipe member 21 has a circular cross section, but may be a square pipe having a square cross section.

The coil 22 formed by twisting the rip wire is embedded in a force wound around the outer periphery of the pipe member 21 or wound within the wall thickness of the pipe member 21. When the coil 22 is energized, a line of magnetic force a passing along the central axis of the pipe member 21 is formed. Inverter 24 in Fig. 1 Unit for converting a DC power supply into an AC power supply having an arbitrary frequency. Therefore, the magnetic field lines a form a high-frequency magnetic field.

 The laminated structure 23 is housed in a pipe member 21 and fixed by a wall flow prevention member (not shown) with its upper and lower portions electrically insulated. The details of the laminated structure 23 are shown in FIG.

 The laminated structure 23 having a cylindrical shape as a whole is formed by alternately laminating first metal plates 31 and flat second metal plates 32 bent in a zigzag mountain shape. As the material of the first metal plate 31 and the second metal plate 32, a martensitic stainless steel having corrosion resistance and ferromagnetism such as SUS447J1 is used.

 The peaks or valleys 33 of the first metal plate 31 are disposed so as to be inclined at an angle with respect to the central axis 34, and the first metal plates adjacent to each other with the second metal plate 32 interposed therebetween. It is arranged so as to intersect with the peak or valley of 3 1. Then, at the intersection of the peaks or valleys 33 of the adjacent first metal plates 31, the first metal plate 31 and the second metal plate 32 are welded by spot welding and joined electrically conductively. Are preferred.

According to such a structure, the first small flow path 35 inclined at an angle _{α with} respect to the center axis direction is formed between the first metal plate 31 and the second metal plate 32 on the near side. A second small flow path 36 is formed between the second metal plate 32 and the back first metal plate 31 at an angle of 1α with respect to the central axis direction. The first small flow path 35 and the second small flow path 36 intersect at an angle of 2X. Further, holes 37 are provided on the surfaces of the first metal plate 31 and the second metal plate 32 as third small flow paths for generating turbulent flow of fluid. Further, the surfaces of the first metal plate 31 and the second metal plate 32 are not smooth, and minute irregularities 38 due to satin finish or embossing are provided on the surfaces. The unevenness 38 is negligibly small compared to the height of the mountain or valley 33. In FIG. 3, when an electric current is applied to the coil 22, magnetic lines of force a are formed along the central axes of the pipe member 21 and the laminated structure 23. The lines of magnetic force a cross the corrugated sheets of the valleys of the first metal plate 31 arranged obliquely in opposite directions to each other. Since the magnetic field lines a are high-frequency magnetic fields, an eddy current is generated throughout the obliquely arranged first metal plate 31 and the parallelly arranged second metal plate 32 forming the laminated structure 23, and the laminated structure 23 The whole generates heat. At this time, the temperature distribution is an eyeball shape extending in the longitudinal direction of the first metal plate 31 and the second metal plate 32, and since the central portion generates heat more than the peripheral portion, the fluid flowing in the central portion This is advantageous for heating.

 Further, as shown in FIG. 4, a first small flow path 35 and a second small flow path 36 that intersect are formed in the laminated structure 23, and diffusion between the periphery and the center is performed. In addition, due to the presence of the hole 37 forming the third small passage, diffusion in the thickness direction between the first small passage 35 and the second small passage 36 is also performed. Therefore, these small channels 35, 36, and 37 cause a macroscopic dispersion, dissipation, and volatilization of the liquid throughout the laminated structure 23. In addition, microscopic diffusion, emission, and volatilization occur due to minute irregularities 3 8 on the surface. As a result, the liquid passing through the laminated structure 23 has a substantially uniform flow, and a uniform opportunity of contact between the first metal plate 31 and the second metal plate 32 and the fluid is obtained. Heats quickly and uniformly.

Note that the laminated structure 23 plays an important role in efficiently generating steam and further heating. In order to ensure this role, it is preferable that the contact area per cubic centimeter of the liquid of the laminated structure 23 is not less than 2.5 square centimeters. When metal plates are laminated so that the surface area per cubic centimeter of liquid of the laminated structure 23 is 2.5 square centimeters or more, and more preferably 5 square centimeters or more, treatment efficiency due to increased contact with liquids is increased. Can be achieved. Also laminated The amount of liquid to be heated per square centimeter of the surface area of the structure 23 is preferably not more than 0.4 cubic centimeter. By setting the amount of liquid per square centimeter of the surface of the laminated structure 23 to 0.4 cubic centimeter or less, more preferably 0.1 cubic centimeter or less, a rapid response of the treatment to the fluid can be obtained.

 When the laminated structure 23 is a heating element of electromagnetic induction, the thickness of the metal plates 31 and 32 is 30 μm or more and 1 mm or less, and the frequency of the high-frequency current by the inverter 24 is 15 to Those in the range of 150 KHz are preferred. When the thickness of the metal plate is 30 μm or more and 1 mm or less, it is easy to supply power, and it is easy to secure a small flow path by processing a waveform or the like to increase the heat transfer area. When the frequency used is in the range of 15 KHz to 150 KHz, copper loss of the coil 22 and loss of the switching element can be prevented. In particular, the frequency band with low loss is 20 to 70 KHz.

For example, 1 0 Omm diameter, length 20 Omm, when using the surface area 2. 2~6. 2m ² of the laminated structure 23, the thickness of the defined monkey Fluid water film per 1 cm ³ 0. It is extremely thin, having a thickness of 5 to 0.2 mm, and since the metal plates 31 and 32 constituting the laminated structure 23 are also thin, heating along the metal plate can be facilitated.

In FIG. 1, the liquid level is controlled by the level meter 25 and the solenoid valve 26 so that about 2/3 of the lower side of the laminated structure 23 is immersed in water, and the entire laminated structure 23 is heated by the inverter 24. , Generates steam. This steam is heated at about one third of the upper side of the laminated structure 23 and becomes superheated steam. In order to prevent this superheated steam from being blown out with liquid from the upper part of the laminated structure 23, as shown by a two-dot chain line, a similar laminated structure It is preferable to include what is not done. The steam generator 2 is compact as described above, and at the same time, a large-diameter diffuser 3 is mounted on the steam generator 2 by flange joining to diffuse the generated superheated steam to the surface. Have been. The net structure 40 housed in the diffusion section 3 is shown in FIG. The mesh structure 40 is formed by bending a mesh plate 41 made of stainless steel wire with holes 44 opened in a wave form, and the bending line 42 of the wave mesh plate 41 is aligned with the center axis 43. The layers are alternately stacked so that they become + Θ or Θ alternately.

 When the superheated steam passes through such a network structure 40 from the bottom to the top, the superheated steam is largely diffused in the surface direction along the waveform, and at the same time, the eyes or the holes 44 of the network structure 40 are formed. An upward flow is caused to pass through, and as a whole, diffusion in the surface direction is performed. The diffusion unit 3 is not limited to the one using the network structure 40, but a number of pipes having holes formed in rows are arranged in parallel, and the steam generation unit 2 is connected to the original pipe of this pipe. The steam may be simultaneously blown up from the pipe row of the above.

The superheated steam diffused in the plane direction in the diffusion unit 3 passes through the element 50 of the recovery unit 4 and reaches the storage unit 5. However, the oil falling from the object to be cleaned 56 in the storage section 5 is collected by the element 50. An element 50 having such a function is shown in FIG. The element 50 includes a large number of separation plates 51 arranged in parallel, and gutters 52 located at both ends of the separation plate 51. The separation plate 51 has a shape in which the upper part of the obliquely arranged plate part 51 a is a mountain fold part 51 b and the lower part of the plate part 51 a is a valley fold part 51 c. The mountain fold portion 51b and the valley fold portion 51c of the adjacent separating plate 51 overlap in the vertical direction. Therefore, the oil and liquid that fall from above as shown by the arrow b always hit the plate portion 51a and gather in the valley fold portion 51c. The oil and the liquid collected at the valley folds 51c of the separation plates 51 flow to both ends, flow into the gutter 52, and are collected. Steam from below flows between adjacent plate parts 51a of the separation plate 51 as shown by the arrow c. Pass through to the top.

 The storage unit 5 is installed on the recovery unit 4 and allows superheated steam boiling from the recovery unit 4 to pass from below to above. The storage section 5 is divided into a plurality of layers in the vertical direction by a wire netting stand 55, and an object to be cleaned 56 is placed on each stand 55. The upper side of the storage unit 5 is sealed with a lid 5.7, and the steam rising from the storage unit 5 reaches the first oil / water separator 6 via the steam recovery line 12.

 The oil and liquid recovered in the recovery section 4 reach the second oil / water separator 7 via the recovery line 13. The first and second oil-water separators 6 and 7 separate the high-temperature liquid from the oil by floating the oil on the surface of the high-temperature liquid. The high-temperature liquid from the first and second oil-water separators 6 and 7 is returned to the liquid supply line 11 via the liquid line 14 and the filter 15. 16 is a makeup water line. An example of using the above-described cleaning device will be described below. In FIG. 1, an object to be cleaned 56 such as a metal product is previously placed on a net table 55 of the storage unit 5. The storage section 5 is placed on the recovery section 4, the lid 57 of the storage section 5 is closed, and the vapor recovery line 12 is connected.

 The level meter 25 is set so that about 2 Z 3 of the laminated structure 23 of the steam generating section 2 is immersed in the liquid, and the inverter 24 is started. Then, the entire laminated structure 23 is heated by electromagnetic induction, and the liquid becomes vapor. This steam is heated at the upper part of the laminated structure 23 to become superheated steam and blows up toward the diffusion part 40. In the diffusion section 40, the vapor going upward from the bottom diffuses in the plane. The superheated steam heading for the recovery section 4 passes through the element 50 and rises from the bottom of the storage section 5 to the top. The surface of the object to be cleaned 56 is cleaned by being exposed to the flow of superheated steam. Since the evaporation temperature of the oil is several hundred degrees, the softened oil flows down and flows down with condensed water.

The fluidized oil and the condensed water are recovered by the element 50 of the recovery section 4 and reach the second oil-water separator 7. Oil may reach the diffuser 3 and the steam generator 2 They do not pollute them. The steam recovered from the steam recovery line 12 reaches the first oil / water separator 6 and is blown into the water. The steam condenses into high-temperature water, and the oil carried as oil droplets rises to the surface. The second oil / water separator 7 separates the oil component in the same manner. High-temperature water from the first and second oil-water separators 6 and 7 is returned to the steam generator 2 via the liquid supply line 11 after removing dust and the like by the filter 15. Therefore, the energy added in the steam generating section 2 is reduced.

 By repeating the circulation of steam as described above, the oil on the surface of the cleaning object 56 in the storage section 5 is removed. In particular, the steam from the steam generator 2 is blown from the bottom to the top in a natural flow to the object 56 to be cleaned, and the cleaning effect is improved. Further, since the efficiency of the steam generating section 2 is high and compact, the efficiency of the cleaning itself is also increased.

 Next, another embodiment of the present invention will be described with reference to the device configuration diagram of FIG.

 In FIG. 2, the cleaning device 101 includes an electromagnetic induction heating section 102, a cleaning chamber 103, and a circulation section 104.

 The electromagnetic induction heating unit 102 includes a first electromagnetic induction heating unit 111 that heats water to produce steam, and a second electromagnetic induction heating unit 112 that heats the steam to produce superheated steam. They are connected via conduits 113.

 The first electromagnetic induction heating section 111 has the same structure as that described with reference to FIGS. 3 and 4. The first electromagnetic induction heating section 111 is arranged on a vertical pipe 111a branching from the horizontal pipe 114 so that the central axis 34 is vertical. An electromagnetic on-off valve 1 15 and a drain valve 1 16 are connected to the pipeline 1 14.

The pipelines 1 1 and 3 are composed of the first pipeline 1 13 a that carries the steam from the first electromagnetic induction heating section 1 1 1 in a horizontal direction, and the pipeline 1 that is vertically set up from the pipeline 1 1 4 It comprises a second vertical pipeline 1 13 b connected to 17 and a third horizontal pipeline 113 c. The junction A between the horizontal and vertical pipes separates hot water mixed with steam from the first electromagnetic induction heating section 1 1 1 and returns steam to the first electromagnetic induction heating section 1 1 1 for steam-water separation. Has functions. Further, a level meter 1 18 for detecting a water level with respect to the first electromagnetic induction heating section 111 is connected to the pipe line 117. The level meter 1 18 opens and closes the solenoid on-off valve 1 15 to maintain the water level for the first electromagnetic induction heating section 1 11 at a predetermined level.

 The second electromagnetic induction heating section 112 also has the same structure as that described with reference to FIGS. The second electromagnetic induction heating section 112 is arranged in a horizontal pipeline 113c so that the central axis 34 is horizontal. When the lamination surface of the metal plate of the laminated structure 32 in FIG. 3 is set to be horizontal or oblique, it is difficult to block the condensed water.

 The washing chamber 103 is mounted on the can body 121 and the upper part of the can body 121, and the superheated steam from the second electromagnetic induction heating part 112 is guided through the pipe 122. 1 2 3 and a wire mesh stand 55 mounted on the middle of the can 1 2 1 to place the object 5 6 to be cleaned, and mounted below the can 1 2 1 to separate gas by flowing gas Element 50. The structure of the element 50 has the same structure as that described in FIG.

The circulating section 104 is provided with a first separator 13 1 for removing condensed water from the liquid from the element 50 by washing the oil and the like to the electromagnetic induction heating section 102, and a can 1 2 It comprises a second separator 1332 that returns condensed water to the electromagnetic induction heating section 102, excluding any additional substances resulting from washing of oil or the like from the gas and fluid from 1 above. The second separator 13 2 has a structure capable of separating steam and condensed water. The condensed water from the first separator 13 1 and the second separator 13 2 is returned to the electromagnetic induction heating section 102 upstream of the first electromagnetic induction heating section 111 via the circulation path 133. For cleaning oil etc. from the first separator 1 3 1 and the second separator 1 3 2 The added product is discharged to the treatment tank 135 through the pipe 134. Further, the steam from the second separator 13 2 is returned to the pipeline 113. At the connection B between the horizontal and vertical pipes, the subsequent condensed water is separated, and only steam flows to the second electromagnetic induction heating section 112.

 According to the cleaning device 1◦1 having the above structure, superheated steam of, for example, 200 ° C, which does not include air generated in the electromagnetic induction heating section 102, is injected downward from the top of the can 122, The object to be cleaned 56 is cleaned at a high temperature. Additives such as condensed water and oil generated by washing are separated by the element 50 and reach the first separator 13 1. The steam passed through the element 50 reaches the second separator 1332. The high-temperature condensed water from the first separator 13 1 and the second separator 13 2 is returned upstream of the first electromagnetic induction heating section 11 1.

 As described above, since the cleaning is performed using only the high-temperature superheated steam that does not include air, cleaning can be performed efficiently without contaminating the object to be cleaned. In addition, since high-temperature condensed water is returned to the first electromagnetic induction heating section 111, energy loss is small. Since it is divided into a first electromagnetic induction heating section 1 1 1 that generates steam and a second electromagnetic induction heating section 1 1 2 that overheats steam, each section 1 1 1 and 1 1 2 can be controlled individually. It is possible to easily obtain a superheated steam of a predetermined amount and a predetermined temperature. In order to obtain the injection power from the injection nozzles 123, the superheated steam from the electromagnetic induction heating section 102 is increased to, for example, 2 atm, and the temperature is set to, for example, 200 ° C which is higher than the saturated steam temperature of 2 atm. C superheated steam can also be used. At this time, the cleaning chamber 103 can be set to the atmospheric pressure, but the condensed water from the circulation unit 104 is pressurized by the pump and returned to the electromagnetic induction heating unit 102. Also, the direction of superheated steam jetting from the cleaning nozzles 1 2 3 may be from the side,

Industrial applicability As described above, the present invention provides a cleaning method and a cleaning apparatus capable of efficiently cleaning an object to be cleaned to which oil has adhered, such as a processed metal product, using steam that does not pollute the environment. Optimal.

Claims

The scope of the claims  1. A cleaning device that cleans objects to be cleaned that have at least oil attached by applying steam.  A steam generator (2) for generating steam;  A storage unit (1) for introducing the steam from the steam generation unit (2) from below and applying the steam to the stored object to be cleaned;  A collection unit (4) provided below the storage unit (1) and configured to collect oil, etc., which passes through the steam but falls from the storage unit;  A cleaning device comprising:  2. The steam generating section (2) includes a plurality of small passages (3) in a direction intersecting the axis (34) of the pipe member (21) in the pipe member (21) around which the coil (22) is wound. 5) The laminated structure (23) on which the (36) is formed is housed, the magnetic flux of the magnetic field lines by the coil (22) is changed, and the laminated structure (23) is induction-heated to generate steam. The cleaning device according to claim 1, wherein the cleaning device is a cleaning device.  3. An expansion device provided between the recovery section (4) and the steam generation section (2) to diffuse the steam from the steam generation section (2) to the entire recovery section (4). 3. The cleaning device according to claim 2, further comprising a scattering part (3).  4. The cleaning device according to claim 1, further comprising a separator (6) for introducing steam from the storage part (4) and returning the high-temperature liquid after oil separation to the steam generation part (2). apparatus.  5. The cleaning device according to any one of claims 1 to 4, wherein the steam generated from the steam generation section (2) is superheated steam.  6. A cleaning method in which the object to be cleaned to which at least oil has adhered is cleaned by applying steam. A step of introducing steam from below the storage section (5) for storing the article to be washed, and applying steam to the article to be washed with steam that is going to flow upward from below; The oil and the like flowing down from the top of the object to be washed is collected in the collection section (4) located below the storage section, and the steam reaching the storage section (5) is passed from top to bottom. A cleaning method comprising the steps of:  7. A cleaning apparatus for cleaning an object to be cleaned by applying steam thereto, wherein water is converted into steam, and the steam is further heated to generate a cleaning medium consisting of only superheated steam. ,  A cleaning chamber (103) for storing the object to be cleaned and introducing the superheated steam, and removing the additional material added by cleaning from the cleaning medium flowing out of the cleaning chamber, and removing the remainder from the electromagnetic induction heating unit (102). And a circulation path (104) for returning to (1).  8. The electromagnetic induction heating section (102) comprises a first electromagnetic induction heating section (111) for heating water to produce steam, and a second electromagnetic induction heating section (112) for heating this steam to produce superheated steam. The cleaning device according to claim 7, comprising:  9. The first and second electromagnetic induction heating sections (111) and (112) intersect the axis (34) of the pipe member (21) in the pipe member (21) around which the coil (22) is wound. The laminated structure (23) in which a large number of small passages (35) and (36) are formed in the direction in which the magnetic field lines of the coils (22) are changed, and the laminated structure (23) is induction-heated. 9. The cleaning device according to claim 8, wherein the cleaning device generates steam. 10. The cleaning apparatus according to claim 8, wherein the first electromagnetic induction heating section (11 1) and the second electromagnetic induction heating section (112) are connected via a pipe (113).  1 2. A cleaning method of applying steam to an object to be cleaned, wherein the electromagnetic induction heating section turns water into steam, and further heats the steam to generate a cleaning medium consisting of only superheated steam. ,  Washing the cleaning medium by applying the cleaning medium to the object to be cleaned, The remainder after removing the adduct added by washing from the washing medium after washing. Circulating through the electromagnetic induction heating section.