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- Google Patents
AU117569B2 - ' Improvements in electron guns for electron discharge devices
- Google Patents
' Improvements in electron guns for electron discharge devices
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
AU5912/42A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nokia Services Ltd
Original Assignee
Standard Telephone and Cables Pty Ltd
Publication of AU117569B2publicationCriticalpatent/AU117569B2/en
Device for reactive sputtering comprises a controllable valve to control the total gas flow into a sputtering chamber, and a control unit for keeping the ratio of the partial pressures of at least two gases constant