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AU161949B2 - Improvements in or relating to method of etching tantalum - Google Patents
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AU161949B2 - Improvements in or relating to method of etching tantalum - Google Patents

Improvements in or relating to method of etching tantalum

Info

Publication number
AU161949B2
AU161949B2 AU23740/53A AU2374053A AU161949B2 AU 161949 B2 AU161949 B2 AU 161949B2 AU 23740/53 A AU23740/53 A AU 23740/53A AU 2374053 A AU2374053 A AU 2374053A AU 161949 B2 AU161949 B2 AU 161949B2
Authority
AU
Australia
Prior art keywords
relating
etching tantalum
tantalum
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
AU23740/53A
Other versions
AU2374053A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Electric Co
Original Assignee
General Electric Co
Filing date
Publication date
Application filed by General Electric Co filed Critical General Electric Co
Application granted granted Critical
Publication of AU2374053A publication Critical patent/AU2374053A/en
Publication of AU161949B2 publication Critical patent/AU161949B2/en
Expired legal-status Critical Current

Links

AU23740/53A 1953-12-11 Improvements in or relating to method of etching tantalum Expired AU161949B2 (en)

Publications (2)

Publication Number Publication Date
AU2374053A AU2374053A (en) 1954-02-11
AU161949B2 true AU161949B2 (en) 1954-02-11

Family

ID=

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