AU292101B2 - Method for producing separated semiconductor areas with low parasitic capacitance ina microminiuaturised circuit arrangement - Google Patents

Method for producing separated semiconductor areas with low parasitic capacitance ina microminiuaturised circuit arrangement

Info

Publication number: AU292101B2
Authority: AU; Australia
Prior art keywords: microminiuaturised; ina; circuit arrangement; parasitic capacitance; low parasitic
Prior art date: 1964-09-17
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired

Application number

AU64063/65A

Other versions

AU6406365A (en

Inventor

HENNINGS and HANS-JURGEN SCHUTZE. Ev KLAUS

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1964-09-17

Filing date

1965-09-15

Publication date

1967-03-16

1965-09-15 Application filed filed Critical

1967-03-16 Application granted granted Critical

1967-03-16 Publication of AU292101B2 publication Critical patent/AU292101B2/en

1967-03-16 Publication of AU6406365A publication Critical patent/AU6406365A/en

Status Expired legal-status Critical Current

Links

238000004519 manufacturing process Methods 0.000 title 1
230000003071 parasitic effect Effects 0.000 title 1
239000004065 semiconductor Substances 0.000 title 1

AU64063/65A 1964-09-17 1965-09-15 Method for producing separated semiconductor areas with low parasitic capacitance ina microminiuaturised circuit arrangement Expired AU292101B2 (en)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
DEDE27,022		1964-09-17

Publications (2)

Publication Number	Publication Date
AU292101B2 true AU292101B2 (en)	1967-03-16
AU6406365A AU6406365A (en)	1967-03-16

Family

ID=

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