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AU401204B2 - Method of producing micro-structures - Google Patents
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AU401204B2 - Method of producing micro-structures - Google Patents

Method of producing micro-structures

Info

Publication number
AU401204B2
AU401204B2 AU16981/67A AU1698167A AU401204B2 AU 401204 B2 AU401204 B2 AU 401204B2 AU 16981/67 A AU16981/67 A AU 16981/67A AU 1698167 A AU1698167 A AU 1698167A AU 401204 B2 AU401204 B2 AU 401204B2
Authority
AU
Australia
Prior art keywords
structures
producing micro
micro
producing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
AU16981/67A
Other versions
AU1698167A (en
Inventor
SCHUTZE and KLAUS HENNINGS HANS-JURGEN
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Application granted granted Critical
Publication of AU1698167A publication Critical patent/AU1698167A/en
Publication of AU401204B2 publication Critical patent/AU401204B2/en
Expired legal-status Critical Current

Links

AU16981/67A 1966-02-08 1967-01-27 Method of producing micro-structures Expired AU401204B2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DEDE30428 1966-02-08
DEDE30892 1966-03-17

Publications (2)

Publication Number Publication Date
AU1698167A AU1698167A (en) 1968-08-01
AU401204B2 true AU401204B2 (en) 1968-08-01

Family

ID=

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