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AU411601B2 - Magnetic positioning device - Google Patents
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AU411601B2 - Magnetic positioning device - Google Patents

Magnetic positioning device

Info

Publication number
AU411601B2
AU411601B2 AU23548/67A AU2354867A AU411601B2 AU 411601 B2 AU411601 B2 AU 411601B2 AU 23548/67 A AU23548/67 A AU 23548/67A AU 2354867 A AU2354867 A AU 2354867A AU 411601 B2 AU411601 B2 AU 411601B2
Authority
AU
Australia
Prior art keywords
positioning device
magnetic positioning
magnetic
positioning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
AU23548/67A
Other versions
AU2354867A (en
Inventor
Alden Sawyer Bruce
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to US554181A priority Critical patent/US3376578A/en
Priority claimed from US554181A external-priority patent/US3376578A/en
Application filed by Individual filed Critical Individual
Priority to AU23548/67A priority patent/AU411601B2/en
Publication of AU2354867A publication Critical patent/AU2354867A/en
Priority to US27436D priority patent/USRE27436E/en
Application granted granted Critical
Publication of AU411601B2 publication Critical patent/AU411601B2/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D15/00—Component parts of recorders for measuring arrangements not specially adapted for a specific variable
    • G01D15/24—Drives for recording elements and surfaces not covered by G01D5/00
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R17/00—Measuring arrangements involving comparison with a reference value, e.g. bridge
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
    • H02K2201/18—Machines moving with multiple degrees of freedom

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
AU23548/67A 1966-05-31 1967-06-22 Magnetic positioning device Expired AU411601B2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US554181A US3376578A (en) 1966-05-31 1966-05-31 Magnetic positioning device
AU23548/67A AU411601B2 (en) 1966-05-31 1967-06-22 Magnetic positioning device
US27436D USRE27436E (en) 1966-05-31 1970-03-27 Magnetic positioning device

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US554181A US3376578A (en) 1966-05-31 1966-05-31 Magnetic positioning device
AU23548/67A AU411601B2 (en) 1966-05-31 1967-06-22 Magnetic positioning device
US2406070A 1970-03-27 1970-03-27

Publications (2)

Publication Number Publication Date
AU2354867A AU2354867A (en) 1969-01-09
AU411601B2 true AU411601B2 (en) 1971-03-12

Family

ID=27152804

Family Applications (1)

Application Number Title Priority Date Filing Date
AU23548/67A Expired AU411601B2 (en) 1966-05-31 1967-06-22 Magnetic positioning device

Country Status (2)

Country Link
US (1) USRE27436E (en)
AU (1) AU411601B2 (en)

Families Citing this family (46)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1980001342A1 (en) * 1978-12-21 1980-06-26 R Barton Stepper motor
US4335338A (en) 1980-06-30 1982-06-15 Xynetics, Inc. Linear motor
US4420714A (en) 1981-10-02 1983-12-13 Polaroid Corporation Apparatus for continuously incrementing an output member
US4458227A (en) 1982-04-12 1984-07-03 Polaroid Corporation Electromagnetic actuators
US4536690A (en) 1982-10-19 1985-08-20 Calspan Corporation Tool-supporting self-propelled robot platform
US4506204A (en) 1983-06-10 1985-03-19 The Perkin-Elmer Corporation Electro-magnetic apparatus
US4506205A (en) 1983-06-10 1985-03-19 The Perkin-Elmer Corporation Electro-magnetic alignment apparatus
US4507597A (en) 1983-06-10 1985-03-26 The Perkin-Elmer Corporation Electro-magnetic alignment assemblies
US4622609A (en) * 1984-05-04 1986-11-11 Barton R E Read/write head positioning apparatus
US4535260A (en) 1984-10-15 1985-08-13 Teleflex Incorporated Magnetic linear motor
NL8500930A (en) 1985-03-29 1986-10-16 Philips Nv MOVING DEVICE WITH PRESELVED CONTACTLESS BEARINGS.
US4719381A (en) 1985-08-21 1988-01-12 The Curators Of The University Of Missouri Electrical machines and apparatus for rotation around multiple axes
US4654571A (en) 1985-09-16 1987-03-31 Hinds Walter E Single plane orthogonally movable drive system
US4952858A (en) 1988-05-18 1990-08-28 Galburt Daniel N Microlithographic apparatus
US4893071A (en) 1988-05-24 1990-01-09 American Telephone And Telegraph Company, At&T Bell Laboratories Capacitive incremental position measurement and motion control
US4958115A (en) * 1988-11-28 1990-09-18 At&T Bell Laboratories Capacitively commutated brushless DC servomotors
US5247608A (en) * 1991-04-01 1993-09-21 At&T Bell Laboratories Method and apparatus for achieving dynamic path control of multiple robots
US5874820A (en) 1995-04-04 1999-02-23 Nikon Corporation Window frame-guided stage mechanism
US7365513B1 (en) 1994-04-01 2008-04-29 Nikon Corporation Positioning device having dynamically isolated frame, and lithographic device provided with such a positioning device
US5528118A (en) 1994-04-01 1996-06-18 Nikon Precision, Inc. Guideless stage with isolated reaction stage
US6989647B1 (en) * 1994-04-01 2006-01-24 Nikon Corporation Positioning device having dynamically isolated frame, and lithographic device provided with such a positioning device
US6246204B1 (en) 1994-06-27 2001-06-12 Nikon Corporation Electromagnetic alignment and scanning apparatus
US5828142A (en) * 1994-10-03 1998-10-27 Mrs Technology, Inc. Platen for use with lithographic stages and method of making same
DE4436865A1 (en) * 1994-10-17 1996-08-08 Pasim Mikrosystemtechnik Gmbh Modular planar rotor and process for its manufacture
US5623853A (en) 1994-10-19 1997-04-29 Nikon Precision Inc. Precision motion stage with single guide beam and follower stage
KR0159675B1 (en) * 1995-01-11 1999-01-15 오카노 사다오 Linear motor device for machine tool
US6008500A (en) 1995-04-04 1999-12-28 Nikon Corporation Exposure apparatus having dynamically isolated reaction frame
TW318255B (en) 1995-05-30 1997-10-21 Philips Electronics Nv
US5760564A (en) * 1995-06-27 1998-06-02 Nikon Precision Inc. Dual guide beam stage mechanism with yaw control
US6252234B1 (en) 1998-08-14 2001-06-26 Nikon Corporation Reaction force isolation system for a planar motor
US6097114A (en) 1998-08-17 2000-08-01 Nikon Corporation Compact planar motor having multiple degrees of freedom
US6144118A (en) 1998-09-18 2000-11-07 General Scanning, Inc. High-speed precision positioning apparatus
US6188147B1 (en) 1998-10-02 2001-02-13 Nikon Corporation Wedge and transverse magnet arrays
US6147421A (en) 1998-11-16 2000-11-14 Nikon Corporation Platform positionable in at least three degrees of freedom by interaction with coils
US6208045B1 (en) 1998-11-16 2001-03-27 Nikon Corporation Electric motors and positioning devices having moving magnet arrays and six degrees of freedom
US6661125B2 (en) * 2000-03-02 2003-12-09 Shinano Electronics Co., Ltd. Linear motor
US6437463B1 (en) 2000-04-24 2002-08-20 Nikon Corporation Wafer positioner with planar motor and mag-lev fine stage
US6452292B1 (en) 2000-06-26 2002-09-17 Nikon Corporation Planar motor with linear coil arrays
US6445093B1 (en) 2000-06-26 2002-09-03 Nikon Corporation Planar motor with linear coil arrays
US7230355B2 (en) * 2004-12-21 2007-06-12 Baldor Electric Company Linear hybrid brushless servo motor
US7566997B2 (en) * 2007-03-30 2009-07-28 Baldor Electric Company Gas bearing system
US8922068B2 (en) 2011-07-11 2014-12-30 Baldor Electric Company Linear drive motor with improved bearing system
US8791608B2 (en) 2011-07-11 2014-07-29 Baldor Electric Company Primary for linear drive motor with solid steel stacks
US8803371B2 (en) 2011-07-11 2014-08-12 Baldor Electric Company Secondary for linear drive motor comprising sheet of highly permeable magnetic material having synchronized motor teeth, encoder teeth, and commutation tracks integrally formed therein
US8418350B2 (en) 2011-07-11 2013-04-16 Baldor Electric Company Method of forming a secondary for linear drive motor comprising sheet of highly permeable magnetic material having synchronized motor teeth, encoder teeth, and commutation tracks integrally formed therein
US9829347B2 (en) 2015-06-03 2017-11-28 Hiwin Mikrosystem Corp. Capacitance sensation unit of plane position measurement device

Also Published As

Publication number Publication date
AU2354867A (en) 1969-01-09
USRE27436E (en) 1972-07-18

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