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AU415949B2 - Method of preparing silicon oxynitride - Google Patents
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AU415949B2 - Method of preparing silicon oxynitride - Google Patents

Method of preparing silicon oxynitride

Info

Publication number
AU415949B2
AU415949B2 AU3346/66A AU334666A AU415949B2 AU 415949 B2 AU415949 B2 AU 415949B2 AU 3346/66 A AU3346/66 A AU 3346/66A AU 334666 A AU334666 A AU 334666A AU 415949 B2 AU415949 B2 AU 415949B2
Authority
AU
Australia
Prior art keywords
silicon oxynitride
preparing silicon
preparing
oxynitride
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
AU3346/66A
Other versions
AU334666A (en
Inventor
Edward Washburn Malcolm
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Saint Gobain Abrasives Inc
Original Assignee
Norton Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Norton Co filed Critical Norton Co
Application granted granted Critical
Publication of AU415949B2 publication Critical patent/AU415949B2/en
Publication of AU334666A publication Critical patent/AU334666A/en
Expired legal-status Critical Current

Links

AU3346/66A 1965-04-01 1966-03-24 Method of preparing silicon oxynitride Expired AU415949B2 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
USUS444,655 1965-04-01

Publications (2)

Publication Number Publication Date
AU415949B2 true AU415949B2 (en) 1967-09-28
AU334666A AU334666A (en) 1967-09-28

Family

ID=

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