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AU430764B2 - Method of precision etching of semiconductors - Google Patents
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AU430764B2 - Method of precision etching of semiconductors - Google Patents

Method of precision etching of semiconductors

Info

Publication number
AU430764B2
AU430764B2 AU45598/68A AU4559868A AU430764B2 AU 430764 B2 AU430764 B2 AU 430764B2 AU 45598/68 A AU45598/68 A AU 45598/68A AU 4559868 A AU4559868 A AU 4559868A AU 430764 B2 AU430764 B2 AU 430764B2
Authority
AU
Australia
Prior art keywords
semiconductors
precision etching
etching
precision
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
AU45598/68A
Other versions
AU4559868A (en
Inventor
CLYDE KROGNESS and HERBERT ATKIN WAGGENER ROGER
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
Western Electric Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Western Electric Co Inc filed Critical Western Electric Co Inc
Application granted granted Critical
Publication of AU430764B2 publication Critical patent/AU430764B2/en
Publication of AU4559868A publication Critical patent/AU4559868A/en
Expired legal-status Critical Current

Links

AU45598/68A 1967-11-01 1968-10-30 Method of precision etching of semiconductors Expired AU430764B2 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
USUS679,81 1967-11-01

Publications (2)

Publication Number Publication Date
AU430764B2 true AU430764B2 (en) 1970-05-07
AU4559868A AU4559868A (en) 1970-05-07

Family

ID=

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