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AU447941B2 - Thin film treatment apparatus - Google Patents
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AU447941B2 - Thin film treatment apparatus - Google Patents

Thin film treatment apparatus

Info

Publication number
AU447941B2
AU447941B2 AU12954/70A AU1295470A AU447941B2 AU 447941 B2 AU447941 B2 AU 447941B2 AU 12954/70 A AU12954/70 A AU 12954/70A AU 1295470 A AU1295470 A AU 1295470A AU 447941 B2 AU447941 B2 AU 447941B2
Authority
AU
Australia
Prior art keywords
thin film
treatment apparatus
film treatment
thin
treatment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
AU12954/70A
Other versions
AU1295470A (en
Inventor
Fritz Widmer Dr.
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Luwa Ltd
Original Assignee
Luwa Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Luwa Ltd filed Critical Luwa Ltd
Application granted granted Critical
Publication of AU1295470A publication Critical patent/AU1295470A/en
Publication of AU447941B2 publication Critical patent/AU447941B2/en
Expired legal-status Critical Current

Links

AU12954/70A 1969-03-21 1970-03-23 Thin film treatment apparatus Expired AU447941B2 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CHCH4281/69 1969-03-21

Publications (2)

Publication Number Publication Date
AU1295470A AU1295470A (en) 1971-09-30
AU447941B2 true AU447941B2 (en) 1971-09-30

Family

ID=

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