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AU492294B2 - Charged particle beam apparatus - Google Patents
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AU492294B2 - Charged particle beam apparatus - Google Patents

Charged particle beam apparatus

Info

Publication number
AU492294B2
AU492294B2 AU81380/75A AU8138075A AU492294B2 AU 492294 B2 AU492294 B2 AU 492294B2 AU 81380/75 A AU81380/75 A AU 81380/75A AU 8138075 A AU8138075 A AU 8138075A AU 492294 B2 AU492294 B2 AU 492294B2
Authority
AU
Australia
Prior art keywords
charged particle
particle beam
beam apparatus
charged
particle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
AU81380/75A
Other versions
AU8138075A (en
Inventor
K. Doran And Merlyn H. Perkins Samuel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US483266A external-priority patent/US3924156A/en
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of AU492294B2 publication Critical patent/AU492294B2/en
Publication of AU8138075A publication Critical patent/AU8138075A/en
Expired legal-status Critical Current

Links

AU81380/75A 1974-06-26 1975-05-21 Charged particle beam apparatus Expired AU492294B2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
USUS483266 1974-06-26
US483266A US3924156A (en) 1974-06-26 1974-06-26 Method and system for correcting an aberration of a beam of charged particles

Publications (2)

Publication Number Publication Date
AU492294B2 true AU492294B2 (en) 1976-11-25
AU8138075A AU8138075A (en) 1976-11-25

Family

ID=

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