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AU531198B2 - Foil holder - Google Patents
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AU531198B2 - Foil holder - Google Patents

Foil holder

Info

Publication number
AU531198B2
AU531198B2 AU61722/80A AU6172280A AU531198B2 AU 531198 B2 AU531198 B2 AU 531198B2 AU 61722/80 A AU61722/80 A AU 61722/80A AU 6172280 A AU6172280 A AU 6172280A AU 531198 B2 AU531198 B2 AU 531198B2
Authority
AU
Australia
Prior art keywords
foil holder
foil
holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
AU61722/80A
Other versions
AU6172280A (en
Inventor
Sandor Janky
John Vincent Sullivan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commonwealth Scientific and Industrial Research Organization CSIRO
Original Assignee
Commonwealth Scientific and Industrial Research Organization CSIRO
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commonwealth Scientific and Industrial Research Organization CSIRO filed Critical Commonwealth Scientific and Industrial Research Organization CSIRO
Priority to AU61722/80A priority Critical patent/AU531198B2/en
Publication of AU6172280A publication Critical patent/AU6172280A/en
Application granted granted Critical
Publication of AU531198B2 publication Critical patent/AU531198B2/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
AU61722/80A 1979-08-27 1979-08-27 Foil holder Ceased AU531198B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU61722/80A AU531198B2 (en) 1979-08-27 1979-08-27 Foil holder

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
AUPE020679 1979-08-27
AU61722/80A AU531198B2 (en) 1979-08-27 1979-08-27 Foil holder
AUPE0206 1979-08-27

Publications (2)

Publication Number Publication Date
AU6172280A AU6172280A (en) 1981-03-05
AU531198B2 true AU531198B2 (en) 1983-08-11

Family

ID=25633234

Family Applications (1)

Application Number Title Priority Date Filing Date
AU61722/80A Ceased AU531198B2 (en) 1979-08-27 1979-08-27 Foil holder

Country Status (1)

Country Link
AU (1) AU531198B2 (en)

Also Published As

Publication number Publication date
AU6172280A (en) 1981-03-05

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