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AU543052B2 - Object inspection device - Google Patents
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AU543052B2 - Object inspection device - Google Patents

Object inspection device

Info

Publication number
AU543052B2
AU543052B2 AU69860/81A AU6986081A AU543052B2 AU 543052 B2 AU543052 B2 AU 543052B2 AU 69860/81 A AU69860/81 A AU 69860/81A AU 6986081 A AU6986081 A AU 6986081A AU 543052 B2 AU543052 B2 AU 543052B2
Authority
AU
Australia
Prior art keywords
inspection device
object inspection
inspection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
AU69860/81A
Other versions
AU6986081A (en
Inventor
Hajime Yoshida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hajime Industries Ltd
Original Assignee
Hajime Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hajime Industries Ltd filed Critical Hajime Industries Ltd
Priority to AU69860/81A priority Critical patent/AU543052B2/en
Publication of AU6986081A publication Critical patent/AU6986081A/en
Application granted granted Critical
Publication of AU543052B2 publication Critical patent/AU543052B2/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
AU69860/81A 1981-04-27 1981-04-27 Object inspection device Ceased AU543052B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU69860/81A AU543052B2 (en) 1981-04-27 1981-04-27 Object inspection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AU69860/81A AU543052B2 (en) 1981-04-27 1981-04-27 Object inspection device

Publications (2)

Publication Number Publication Date
AU6986081A AU6986081A (en) 1982-11-04
AU543052B2 true AU543052B2 (en) 1985-03-28

Family

ID=3753266

Family Applications (1)

Application Number Title Priority Date Filing Date
AU69860/81A Ceased AU543052B2 (en) 1981-04-27 1981-04-27 Object inspection device

Country Status (1)

Country Link
AU (1) AU543052B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8618159D0 (en) * 1986-07-25 1986-09-03 Pa Consulting Services Spectrometer based instruments

Also Published As

Publication number Publication date
AU6986081A (en) 1982-11-04

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