AU558630B2 - Auantitative compositional analyser for use with scanning electron microscopes - Google Patents
Auantitative compositional analyser for use with scanning electron microscopesInfo
- Publication number
- AU558630B2 AU558630B2 AU17410/83A AU1741083A AU558630B2 AU 558630 B2 AU558630 B2 AU 558630B2 AU 17410/83 A AU17410/83 A AU 17410/83A AU 1741083 A AU1741083 A AU 1741083A AU 558630 B2 AU558630 B2 AU 558630B2
- Authority
- AU
- Australia
- Prior art keywords
- auantitative
- analyser
- compositional
- scanning electron
- electron microscopes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
- H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
- G01N23/203—Measuring back scattering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| AU17410/83A AU558630B2 (en) | 1982-08-06 | 1982-08-06 | Auantitative compositional analyser for use with scanning electron microscopes |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| AU17410/83A AU558630B2 (en) | 1982-08-06 | 1982-08-06 | Auantitative compositional analyser for use with scanning electron microscopes |
| AUPF5247 | 1982-08-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| AU1741083A AU1741083A (en) | 1984-02-09 |
| AU558630B2 true AU558630B2 (en) | 1987-02-05 |
Family
ID=3707131
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AU17410/83A Ceased AU558630B2 (en) | 1982-08-06 | 1982-08-06 | Auantitative compositional analyser for use with scanning electron microscopes |
Country Status (1)
| Country | Link |
|---|---|
| AU (1) | AU558630B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AU597167B2 (en) * | 1987-04-13 | 1990-05-24 | Pechiney | A method of quantitative analysis |
-
1982
- 1982-08-06 AU AU17410/83A patent/AU558630B2/en not_active Ceased
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AU597167B2 (en) * | 1987-04-13 | 1990-05-24 | Pechiney | A method of quantitative analysis |
Also Published As
| Publication number | Publication date |
|---|---|
| AU1741083A (en) | 1984-02-09 |
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