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AU578240B2 - Polycrystalline silicon wafers and fabrication tray - Google Patents
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AU578240B2 - Polycrystalline silicon wafers and fabrication tray - Google Patents

Polycrystalline silicon wafers and fabrication tray

Info

Publication number
AU578240B2
AU578240B2 AU26132/84A AU2613284A AU578240B2 AU 578240 B2 AU578240 B2 AU 578240B2 AU 26132/84 A AU26132/84 A AU 26132/84A AU 2613284 A AU2613284 A AU 2613284A AU 578240 B2 AU578240 B2 AU 578240B2
Authority
AU
Australia
Prior art keywords
polycrystalline silicon
silicon wafers
fabrication tray
fabrication
tray
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
AU26132/84A
Other versions
AU2613284A (en
Inventor
Ichiro Hide
Takeshi Matsuyama
Keiji Sawaya
Takashi Yokoyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hoxan Corp
Original Assignee
Hoxan Corp
Hoxan Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP58054453A external-priority patent/JPS59181013A/en
Priority claimed from JP5659283A external-priority patent/JPS59182219A/en
Application filed by Hoxan Corp, Hoxan Co Ltd filed Critical Hoxan Corp
Publication of AU2613284A publication Critical patent/AU2613284A/en
Application granted granted Critical
Publication of AU578240B2 publication Critical patent/AU578240B2/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P10/00—Technologies related to metal processing
    • Y02P10/20—Recycling
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
AU26132/84A 1983-03-30 1984-03-27 Polycrystalline silicon wafers and fabrication tray Ceased AU578240B2 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP58054453A JPS59181013A (en) 1983-03-30 1983-03-30 Manufacture of polycrystalline silicon wafer
JP58-54453 1983-03-30
JP5659283A JPS59182219A (en) 1983-03-31 1983-03-31 Stacked dish for preparation of wafer
JP58-56592 1983-03-31

Publications (2)

Publication Number Publication Date
AU2613284A AU2613284A (en) 1984-10-04
AU578240B2 true AU578240B2 (en) 1988-10-20

Family

ID=26395222

Family Applications (1)

Application Number Title Priority Date Filing Date
AU26132/84A Ceased AU578240B2 (en) 1983-03-30 1984-03-27 Polycrystalline silicon wafers and fabrication tray

Country Status (1)

Country Link
AU (1) AU578240B2 (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2113680A1 (en) * 1971-03-20 1972-10-12 Preussag Ag Planar monocrystal growth - by heating crystal powder film between strips with central seed crystal
US4561486A (en) * 1981-04-30 1985-12-31 Hoxan Corporation Method for fabricating polycrystalline silicon wafer

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2113680A1 (en) * 1971-03-20 1972-10-12 Preussag Ag Planar monocrystal growth - by heating crystal powder film between strips with central seed crystal
US4561486A (en) * 1981-04-30 1985-12-31 Hoxan Corporation Method for fabricating polycrystalline silicon wafer

Also Published As

Publication number Publication date
AU2613284A (en) 1984-10-04

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Legal Events

Date Code Title Description
MK14 Patent ceased section 143(a) (annual fees not paid) or expired