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AU8011394A - Vacuum seal of heating window to housing in wafer heat processing machine - Google Patents
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AU8011394A - Vacuum seal of heating window to housing in wafer heat processing machine - Google Patents

Vacuum seal of heating window to housing in wafer heat processing machine

Info

Publication number
AU8011394A
AU8011394A AU80113/94A AU8011394A AU8011394A AU 8011394 A AU8011394 A AU 8011394A AU 80113/94 A AU80113/94 A AU 80113/94A AU 8011394 A AU8011394 A AU 8011394A AU 8011394 A AU8011394 A AU 8011394A
Authority
AU
Australia
Prior art keywords
housing
processing machine
heat processing
vacuum seal
wafer heat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU80113/94A
Inventor
Lev Chizhik
Hiroichi Ishikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Materials Research Corp
Original Assignee
Materials Research Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Materials Research Corp filed Critical Materials Research Corp
Publication of AU8011394A publication Critical patent/AU8011394A/en
Abandoned legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/48—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation
    • C23C16/488—Protection of windows for introduction of radiation into the coating chamber
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
    • B01J3/03—Pressure vessels, or vacuum vessels, having closure members or seals specially adapted therefor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
AU80113/94A 1993-10-13 1994-09-26 Vacuum seal of heating window to housing in wafer heat processing machine Abandoned AU8011394A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US13588193A 1993-10-13 1993-10-13
US135881 1993-10-13
PCT/US1994/010856 WO1995010639A1 (en) 1993-10-13 1994-09-26 Vacuum seal of heating window to housing in wafer heat processing machine

Publications (1)

Publication Number Publication Date
AU8011394A true AU8011394A (en) 1995-05-04

Family

ID=22470172

Family Applications (1)

Application Number Title Priority Date Filing Date
AU80113/94A Abandoned AU8011394A (en) 1993-10-13 1994-09-26 Vacuum seal of heating window to housing in wafer heat processing machine

Country Status (2)

Country Link
AU (1) AU8011394A (en)
WO (1) WO1995010639A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8950470B2 (en) 2010-12-30 2015-02-10 Poole Ventura, Inc. Thermal diffusion chamber control device and method
US8097085B2 (en) 2011-01-28 2012-01-17 Poole Ventura, Inc. Thermal diffusion chamber
US20110254228A1 (en) * 2011-01-28 2011-10-20 Poole Ventura, Inc. Thermal Chamber

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4448000A (en) * 1982-04-27 1984-05-15 The United States Of America As Represented By The Secretary Of The Navy High temperature ultra-high vacuum infrared window seal
US4545327A (en) * 1982-08-27 1985-10-08 Anicon, Inc. Chemical vapor deposition apparatus
FR2594529B1 (en) * 1986-02-19 1990-01-26 Bertin & Cie APPARATUS FOR HEAT TREATMENT OF THIN PARTS, SUCH AS SILICON WAFERS
US4911103A (en) * 1987-07-17 1990-03-27 Texas Instruments Incorporated Processing apparatus and method

Also Published As

Publication number Publication date
WO1995010639A1 (en) 1995-04-20

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