CN108071577B - Micro fluid control device - Google Patents

Abstract

A microfluid control device includes a stacked air intake plate, a resonance plate and a piezoelectric actuator, wherein the air intake plate has at least one air intake hole, at least one bus hole and a central recess forming a bus chamber; the resonance plate has a hollow hole; the piezoelectric actuator has a suspension plate, an outer frame and a piezoelectric ceramic plate; wherein a first chamber is formed by a gap between the resonance plate and the piezoelectric actuator, and when the piezoelectric actuator is driven, gas is introduced from the at least one air intake hole of the air intake plate, collected to the central recess through the at least one bus hole, and then flows through the hollow hole of the resonance plate to enter the first chamber, and then the piezoelectric actuator transmits the gas downward and continuously pushes the gas out.

Description

Micro fluid control device

【Technical field】

This case is about a micro fluid control device, which is suitable for a micro ultra-thin and silent micro pneumatic power device.

【Background technique】

At present, in various fields, whether it is medicine, computer technology, printing, energy and other industries, products are developing in the direction of refinement and miniaturization. Among them, micro-pumps, sprayers, inkjet heads, industrial printing devices and other products contain fluid transport structures. As its key technology, how to break through its technical bottleneck through innovative structure is an important content of development.

For example, in the pharmaceutical industry, many instruments or equipments that need to be driven by pneumatic power usually use traditional motors and pneumatic valves to achieve the purpose of gas delivery. However, due to the limitation of the structure of these traditional motors and gas valves, it is difficult for such instruments to reduce their volume, so that the overall device volume cannot be reduced, that is, it is difficult to achieve the goal of thinning, so it cannot be installed. The convenience of being used on or in conjunction with a portable device is insufficient. In addition, these conventional motors and gas valves also generate noise during operation, which makes users anxious, resulting in inconvenience and discomfort in use.

Therefore, how to develop a micro-fluid control device that can improve the above-mentioned deficiencies in the known technology, and can make the traditional instruments or equipment using the micro-fluid control device achieve small size, miniaturization and quietness, thereby achieving the purpose of being portable and comfortable, It is a problem that urgently needs to be solved.

[Content of the invention]

The main purpose of this case is to provide a micro-fluidic control device suitable for portable or wearable instruments or equipment. The pressure gradient is generated in the designed flow channel by gas fluctuations generated by the high-frequency action of the piezoelectric ceramic plate. , and make the gas flow at a high speed, and transmit the gas from the suction end to the discharge end through the impedance difference between the inlet and outlet directions of the flow channel, so as to solve the problems of the instruments or equipment using the microfluidic control device of the known technology. Thin, unable to achieve the purpose of being portable, and lack of noise.

In order to achieve the above-mentioned purpose, a broader implementation aspect of the present case is to provide a micro-fluid control device suitable for a micro-pneumatic power device, comprising an air intake plate, a resonance plate and a piezoelectric actuator, the air intake The plate has at least one air inlet hole, at least one bus row hole and a central concave part forming a confluence chamber, the at least one air inlet hole is for introducing gas, the bus row hole corresponds to the air inlet hole, and guides the air inlet hole The gas converging to the confluence chamber formed by the central concave portion, the resonance plate has a hollow hole, corresponding to the confluence chamber of the air inlet plate, and the piezoelectric actuator has a suspension plate, an outer frame and a Piezoelectric ceramic plate, the suspension plate has a length between 2mm and 4.5mm, a width between 2mm and 4.5mm, and a thickness between 0.1mm and 0.3mm, and the outer frame has at least one bracket , connected between the suspension board and the outer frame, and the piezoelectric ceramic plate is attached to a first surface of the suspension board, and has a side length not greater than the side length of the suspension board, and has a length between 2mm and 4.5 A length between mm, a width between 2 mm and 4.5 mm, and a thickness between 0.05 mm and 0.3 mm, the ratio of the length to the width of the piezoelectric ceramic plate is between 0.44 times and 2.25 times, wherein The above-mentioned piezoelectric actuator, the resonance plate and the air intake plate are arranged and positioned opposite to each other in sequence, and there is a gap between the resonance plate and the piezoelectric actuator to form a first chamber, so that a first cavity is formed. When the piezoelectric actuator is driven, the gas is introduced from the at least one gas inlet hole of the gas inlet plate, collected into the central recess through the at least one bus bar hole, and then flows through the hollow hole of the resonant plate to Entering into the first chamber, it is transported downward through a gap between the at least one bracket of the piezoelectric actuator to continuously push out gas.

In order to achieve the above-mentioned purpose, another broader implementation aspect of the present application is to provide a micro-fluid control device, suitable for a micro-pneumatic power device, comprising an air intake plate, a resonance plate and a piezoelectric actuator, wherein the above-mentioned The air intake plate, the resonance plate and the piezoelectric actuator are stacked and positioned in sequence, and there is a gap between the resonance plate and the piezoelectric actuator to form a first chamber, and the piezoelectric actuator When the actuator is driven, the gas enters from the air inlet plate and flows through the resonance plate to enter the first chamber and transmit the gas.

【Description of drawings】

FIG. 1A is a schematic diagram of a front exploded structure of a micro pneumatic power device according to a preferred embodiment of the present invention.

FIG. 1B is a schematic diagram of the front assembly structure of the micro pneumatic power device shown in FIG. 1A .

FIG. 2A is a schematic diagram of a rear exploded structure of the micro pneumatic power device shown in FIG. 1A .

FIG. 2B is a schematic diagram of a rear assembly structure of the micro pneumatic power device shown in FIG. 1A .

FIG. 3A is a schematic diagram of the front assembly structure of the piezoelectric actuator of the micro-pneumatic power device shown in FIG. 1A .

FIG. 3B is a schematic diagram of a rear composite structure of the piezoelectric actuator of the micro-pneumatic power device shown in FIG. 1A .

FIG. 3C is a schematic cross-sectional structural diagram of the piezoelectric actuator of the micro-pneumatic power device shown in FIG. 1A . 4A to 4C are schematic diagrams of various implementations of the piezoelectric actuator.

5A to FIG. 5E are schematic diagrams of partial operations of the micro-fluidic control device of the micro-pneumatic power device shown in FIG. 1A .

FIG. 6A is a schematic view of the pressure collecting action of the gas collecting plate and the micro valve device of the micro pneumatic power device shown in FIG. 1A .

FIG. 6B is a schematic diagram of the pressure relief operation of the gas collecting plate and the micro valve device of the micro pneumatic power device shown in FIG. 1A .

7A to 7E are schematic diagrams of the pressure collecting operation of the micro-pneumatic power device shown in FIG. 1A .

FIG. 8 is a schematic diagram of the depressurization or depressurization operation of the micro-pneumatic power device shown in FIG. 1A .

【Detailed ways】

Some typical embodiments embodying the features and advantages of the present case will be described in detail in the description of the latter paragraph. It should be understood that this case can have various changes in different aspects, all of which do not depart from the scope of this case, and the descriptions and diagrams therein are essentially for illustrative purposes rather than limiting the present case.

The micro-pneumatic power device 1 of the present case can be applied to industries such as medical biotechnology, energy, computer technology, or printing, etc., to transmit gas, but not limited thereto. Please refer to FIGS. 1A , 1B, 2A, 2B and 7A to 7E. FIG. 1A is a schematic diagram of a front exploded structure of a micro-pneumatic power device according to a preferred embodiment of the present invention, and FIG. 1B is a schematic view of the micro-pneumatic power device shown in FIG. 1A . Fig. 2A is a schematic diagram of the back exploded structure of the micro-pneumatic power device shown in Fig. 1A, Fig. 2B is a schematic diagram of the rear composite structure of the micro-pneumatic power device shown in Fig. 1A, and Fig. 7A to 7E are Fig. 1A Schematic diagram of the pressure collecting action of the micro-pneumatic power device shown. As shown in FIG. 1A and FIG. 2A , the micro-pneumatic power device 1 of the present application is composed of a micro-fluid control device 1A and a micro-valve device 1B, wherein the micro-fluid control device 1A has a housing 1a, a piezoelectric actuator 13 , insulating sheets 141 , 142 and conductive sheets 15 and other structures, wherein the housing 1a includes a gas collecting plate 16 and a base 10 , and the base 10 includes an air intake plate 11 and a resonance sheet 12 , but not limited thereto. The piezoelectric actuator 13 is provided corresponding to the resonance plate 12, and the intake plate 11, the resonance plate 12, the piezoelectric actuator 13, the insulating sheet 141, the conductive sheet 15, the other insulating sheet 142, and the gas collecting plate are provided. 16, etc. are stacked in sequence, and the piezoelectric actuator 13 is assembled by a suspension board 130, an outer frame 131, at least one bracket 132 and a piezoelectric ceramic plate 133; and the micro valve device 1B includes A valve plate 17 and an outlet plate 18 are not limited thereto. In this embodiment, as shown in FIG. 1A , the gas collecting plate 16 is not only a single plate structure, but also a frame structure with a side wall 168 at the periphery, and the gas collecting plate 16 has a thickness between 4 mm and 10 mm. The length between 4mm and the width between 4mm and 10mm, and the ratio between the length and the width is between 0.4 times and 2.5 times, and the side wall 168 formed by the peripheral edge and the bottom plate together define a The accommodating space 16a is used for the piezoelectric actuator 13 to be arranged in the accommodating space 16a. Therefore, after the assembly of the micro-pneumatic power device 1 of the present application is completed, its front schematic diagram will be as shown in FIG. 1B , and FIG. 7A to 7E, it can be seen that the micro-fluid control device 1A is assembled corresponding to the micro-valve device 1B, that is, the valve plate 17 and the outlet plate 18 of the micro-valve device 1B are stacked and positioned in sequence on the micro-fluid. It is formed on the gas collecting plate 16 of the control device 1A. The back schematic diagram after the assembly is completed shows the pressure relief through hole 181 and the outlet 19 on the outlet plate 18. The outlet 19 is used to connect with a device (not shown), and the pressure relief through hole 181 is used for the micro valve device. The gas in 1B is discharged to achieve the effect of pressure relief. By means of the assembly of the micro-fluidic control device 1A and the micro-valve device 1B, the gas is inhaled from at least one air inlet 110 on the air inlet plate 11 of the micro-fluidic control device 1A, and passes through the piezoelectric actuator 13, the gas flows through multiple pressure chambers (not shown) and continues to transmit, so that the gas can flow in one direction in the micro-valve device 1B, and the pressure is accumulated in the outlet connected to the micro-valve device 1B. In a device (not shown), and when pressure relief needs to be performed, the output of the microfluidic control device 1A is regulated so that the gas is discharged through the pressure relief through hole 181 on the outlet plate 18 of the microvalve device 1B, so as to Depressurize.

Please refer to FIGS. 1A and 2A. As shown in FIG. 1A, the air inlet plate 11 of the microfluidic control device 1A has a first surface 11b, a second surface 11a and at least one air inlet hole 110. In this embodiment, The number of the air inlet holes 110 is 4, but not limited to this. It penetrates the first surface 11b and the second surface 11a of the air inlet plate 11, and is mainly used for the gas from the outside of the device to comply with the atmospheric pressure. Flow into the microfluidic control device 1A from the at least one air inlet hole 110 . And as shown in FIG. 2A , it can be seen from the first surface 11 b of the air intake plate 11 , there is at least one bus bar hole 112 thereon to correspond to the at least one air intake hole 110 on the second surface 11 a of the air intake plate 11 . set up. In this embodiment, the number of the bus holes 112 corresponds to the air intake holes 110, and the number is four, but not limited to this, wherein the center of the bus holes 112 has a central concave portion 111, And the central concave portion 111 communicates with the bus bar hole 112 , so that the gas entering the bus bar hole 112 from the air inlet 110 can be guided and concentrated to the central concave portion 111 for transmission. Therefore, in this embodiment, the air inlet plate 11 has an integrally formed air inlet hole 110 , a bus bar hole 112 and a central concave portion 111 , and a confluence chamber for converging gas is correspondingly formed at the central concave portion 111 for Gas temporary storage. In some embodiments, the material of the air inlet plate 11 may be, but not limited to, a stainless steel material, and its thickness is between 0.3mm and 0.5mm, and the preferred value is 0.4mm, but Not limited to this. In other embodiments, the depth of the confluence chamber formed by the central concave portion 111 is the same as the depth of the bus bar holes 112, and the preferred values of the depths of the confluence chamber and the bus bar holes 112 are between Between 0.15mm and 0.25mm, but not limited thereto. The resonance plate 12 is made of a flexible material, but not limited thereto, and the resonance plate 12 has a hollow hole 120 , which is disposed corresponding to the central concave portion 111 of the first surface 11 b of the air intake plate 11 . , to circulate the gas. In other embodiments, the resonance plate 12 can be made of a copper material, but not limited to this, and its thickness is between 0.02mm to 0.07mm, and the preferred value is 0.04mm, but it is also Not limited to this.

Please refer to FIG. 3A , FIG. 3B and FIG. 3C at the same time, which are respectively a schematic view of the front structure, the schematic view of the back structure and the schematic cross-sectional structure of the piezoelectric actuator of the micro pneumatic power device shown in FIG. 1A , the piezoelectric actuator 13 It is assembled by a suspension board 130 , an outer frame 131 , at least one bracket 132 and a piezoelectric ceramic plate 133 , wherein the piezoelectric ceramic plate 133 is attached to the first surface 130 b of the suspension plate 130 . The suspension plate 130 is driven to bend and vibrate by applying voltage to generate deformation. The suspension plate 130 has a central portion 130d and an outer peripheral portion 130e, so when the piezoelectric ceramic plate 133 is driven by a voltage, the suspension plate 130 can move from the central portion 130d to the outer peripheral portion. 130e bending vibration, and the at least one bracket 132 is connected between the suspension board 130 and the outer frame 131. In this embodiment, the bracket 132 is connected and arranged between the suspension board 130 and the outer frame 131, and its two ends are They are respectively connected to the outer frame 131 and the suspension board 130 to provide elastic support, and there is at least one gap 135 between the bracket 132 , the suspension board 130 and the outer frame 131 for gas circulation. The shapes and numbers of the frame 131 and the brackets 132 can be varied in many ways. In addition, the outer frame 131 is disposed around the outer side of the suspension board 130 , and has a conductive pin 134 protruding outward for power supply connection, but not limited thereto. In this embodiment, the hoverboard 130 is a stepped surface structure, which means that the second surface 130a of the hoverboard 130 further has a convex portion 130c, and the convex portion 130c can be, but not limited to, a circular protrusion The height of the protruding portion 130c is between 0.02mm and 0.08mm, and the preferred value is 0.03mm, and the diameter thereof is 0.55 times the minimum side length of the suspension board 130 . Please refer to FIG. 3A and FIG. 3C at the same time, it can be seen that the surface of the convex portion 130c of the suspension board 130 is coplanar with the second surface 131a of the outer frame 131 , and the second surface 130a of the suspension board 130 and the second surface 132a of the bracket 132 They are also coplanar, and there is a specific depth between the protruding portion 130c of the suspension board 130 and the second surface 131a of the outer frame 131 , the second surface 130a of the suspension board 130 and the second surface 132a of the bracket 132 . As for the first surface 130b of the suspension board 130, as shown in FIG. 3B and FIG. 3C, the first surface 131b of the outer frame 131 and the first surface 132b of the bracket 132 are flat and coplanar, and the piezoelectric ceramic plate 133 is attached to the first surface 130b of the flat suspension board 130 . In other embodiments, the shape of the suspension board 130 can also be a plate-like square structure with flat surfaces on both sides. In some embodiments, the suspension board 130 , the bracket 132 and the outer frame 131 can be integrally formed, and can be formed of a metal plate, such as stainless steel, but not limited thereto. In some embodiments, the thickness of the suspension board 130 is between 0.1 mm and 0.3 mm, and the preferred value is 0.2 mm, and the length of the suspension plate 130 is between 2 mm and 4.5 mm, and the thickness of the suspension plate 130 is between 2 mm and 4.5 mm. The preferred value may be 2.5mm to 3.5mm, the width is between 2.mm and 4.5mm, and the preferred value may be 2.5mm to 3.5mm but not limited thereto. The thickness of the outer frame 131 is between 0.1 mm and 0.4 mm, and the preferred value is 0.3 mm, but not limited thereto.

In other embodiments, the thickness of the piezoelectric ceramic plate 133 is between 0.05 mm and 0.3 mm, and the preferred value is 0.10 mm, and the piezoelectric ceramic plate 133 has a thickness not greater than that of the suspension plate 130 . The side length of the side length has a length between 2.mm and 4.5mm, and its preferred value can be 2.5mm to 3.5mm, and its width is between 2mm and 4.5mm, and its preferred value can be 2.5 mm to 3.5mm, and the preferred value of the length-to-width ratio is between 0.44 times and 2.25 times, but not limited thereto. In other embodiments, the side length of the piezoelectric ceramic plate 133 may be smaller than that of the suspension plate 130 , and is also designed to be a square plate-like structure corresponding to the suspension plate 130 , but not limited thereto.

In the related embodiment of the micro-pneumatic power device 1 of the present application, the piezoelectric actuator 13 adopts a square suspension board 130, the reason is that compared with the circular suspension board ((j)-(l) shown in FIG. 4A ) design of the circular hoverboard j0), the structure of the square hoverboard 130 obviously has the advantage of power saving, due to the capacitive load operating at the resonant frequency, its power consumption will increase with the increase of the frequency, and Since the resonant frequency of the rectangular suspension board 130 is significantly lower than that of the circular suspension board j0, its relative power consumption is also significantly lower. That is, the square-shaped piezoelectric actuator 13 used in this case can save power. Advantages, especially for wearable devices, power saving is a very important design focus.

Please continue to refer to FIGS. 4A, 4B, and 4C, which are schematic diagrams of various implementations of the piezoelectric actuator. As shown in the figure, it can be seen that the suspension board 130 , the outer frame 131 and the bracket 132 of the piezoelectric actuator 13 can have various types, and at least can have many types (a) to (l) shown in FIG. 4A . In one aspect, for example, in (a) aspect, the outer frame a1 and the hoverboard a0 are square structures, and the two are connected by a plurality of brackets a2, for example: 8, but not with This is limited, and there is a gap a3 between the bracket a2 , the suspension board a0 , and the outer frame a1 for gas circulation. In another aspect (i), the outer frame i1 and the hover board i0 are also in the same square structure, but only two brackets i2 are used to connect them; As shown in Fig. 4C, the floating plate of the piezoelectric actuator 13 can also have various forms, such as (m) to (r) shown in Fig. 4B and (s) to (x) shown in Fig. 4C. In some aspects, both the hover board 130 and the outer frame 131 are square structures. For example, in the aspect (m), the outer frame m1 and the hover board m0 are both square structures, and a plurality of brackets m2 are connected between them, for example: 4, but not limited to this, And there is a gap m3 between the bracket m2, the suspension board m0, and the outer frame m1 for fluid to circulate. And in this embodiment, the bracket m2 connected between the outer frame m1 and the suspension board m0 can be, but not limited to, a board connecting portion m2, and the board connecting portion m2 has two ends m2' and m2", One end m2' is connected with the outer frame m1, and the other end m2" is connected with the hover board m0, and the two ends m2' and m2" correspond to each other and are arranged on the same axis. In (n ) aspect, it also has an outer frame n1, a suspension board n0, a bracket n2 connected between the outer frame n1 and the suspension board n0, and a gap n3 for fluid circulation, and the bracket n2 can also be but not limited to a The board connecting part n2, the board connecting part n2 also has two ends n2' and n2", and the end n2' is connected with the outer frame n1, and the other end n2" is connected with the suspension board n0, but in this embodiment Among them, the board connecting portion n2 is connected to the outer frame n1 and the suspension board n0 at an oblique angle between 0 and 45 degrees. In other words, the two ends n2' and n2" are not arranged on the same horizontal axis. It is a set relationship for mutual dislocation. In the aspect (o), the structures of the outer frame o1, the suspension board o0, the bracket o2 connected between the outer frame o1 and the suspension board o0, and the gap o3 for fluid circulation are similar to those in the previous embodiment, except that the The design pattern of the board connecting portion o2 as the bracket is slightly different from the pattern (m), but in this aspect, the two ends o2' and o2" of the board connecting portion o2 are still corresponding to each other and arranged on the same axis.

In the aspect (p), it also has structures such as an outer frame p1, a hoverboard p0, a bracket p2 connected between the outer frame p1 and the hoverboard p0, and a gap p3 for fluid circulation. Among them, the board connecting part p2 as a bracket further has a suspension board connecting part p20, a beam part p21 and an outer frame connecting part p22 and other structures, wherein the beam part p21 is arranged in the gap p3 between the floating board p0 and the outer frame p1, and The direction of its setting is parallel to the outer frame p1 and the suspension board p0, and the suspension board connection part p20 is connected between the beam part p21 and the suspension board p0, and the outer frame connection part p22 is to connect the beam part p21 and the outer frame p1. and the suspension board connecting portion p20 and the outer frame connecting portion p22 also correspond to each other and are disposed on the same axis.

In the aspect (q), the structure of the outer frame q1, the suspension board q0, the bracket q2 connected between the outer frame q1 and the suspension board q0, and the gap q3 for fluid circulation are the same as the above (m), (o) ) are similar, but the design pattern of the board connecting part q2 as a bracket is slightly different from the (m) and (o) patterns. In this aspect, the hover board q0 is a square shape, and Each side has two plate connecting parts q2 connected to the outer frame q1, and the two end parts q2' and q2" of each plate connecting part q2 are also corresponding to each other and are arranged on the same axis. However, in (r ) form, it also has components such as an outer frame r1, a suspension board r0, a bracket r2 and a gap r3, and the bracket r2 can also be, but not limited to, a board connecting portion r2. In this embodiment, the board connecting portion r2 It is a V-shaped structure, in other words, the board connecting portion r2 is also connected to the outer frame r1 and the suspension board r0 at an oblique angle between 0 and 45 degrees, so each board connecting portion r2 has one end portion r2 ″ and The hover board r0 is connected, and has two ends r2' connected to the outer frame r1, which means that the two ends b2' and the end b2" are not disposed on the same horizontal axis.

Continued as shown in FIG. 4C, the appearance patterns of these (s)-(x) patterns roughly correspond to the patterns (m)-(r) shown in Fig. 4B, except that these (s)-( In the aspect x), the suspension plate 130 of each piezoelectric actuator 13 is provided with a convex portion 130c, that is, structures such as s4, t4, u4, v4, w4, and x4 as shown in the figure. In the aspects (m) to (r) or the aspects (s) to (x), the hover board 130 is designed in a square shape to achieve the aforementioned effect of low power consumption; and it can be seen from these implementation aspects , whether the suspension board 130 is a flat plate structure with flat surfaces on both sides, or a stepped structure with a convex part on one surface, it is within the protection scope of this case, and is connected to the bracket 132 between the suspension board 130 and the outer frame 131. The type and quantity can also be changed arbitrarily according to the actual application situation, and are not limited to the aspect shown in this case. As mentioned above, the suspension board 130 , the outer frame 131 and the bracket 132 can be integrally formed, but not limited to this. Or electroforming, or electrical discharge machining, etc., are not limited to this.

In addition, please refer to FIG. 1A and FIG. 2A, the microfluidic control device 1A further includes an insulating sheet 141, a conductive sheet 15 and another insulating sheet 142 which are correspondingly disposed under the piezoelectric actuator 13 in sequence, and the The form roughly corresponds to the form of the outer frame of the piezoelectric actuator 13 . In some embodiments, the insulating sheets 141 and 142 are made of an insulating material, such as plastic, but not limited thereto, for insulating purposes; in other embodiments, the conductive sheet 15 is made of an insulating material. It is made of conductive material, such as metal, but not limited to this, so as to conduct electrical conduction. And, in this embodiment, a conductive pin 151 may also be disposed on the conductive sheet 15 for conducting electrical conduction.

Please refer to FIG. 1A and FIG. 5A to FIG. 5E at the same time, wherein FIG. 5A to FIG. 5E are schematic diagrams of partial operation of the micro-fluid control device 1A of the micro-pneumatic power device shown in FIG. 1A . First, as shown in FIG. 5A , it can be seen that the microfluidic control device 1A is composed of an air intake plate 11 , a resonance sheet 12 , a piezoelectric actuator 13 , an insulating sheet 141 , a conductive sheet 15 , and another insulating sheet 142 stacked in sequence. In this embodiment, a material, such as conductive glue, is filled in the gap g0 between the resonant plate 12 and the periphery of the outer frame 131 of the piezoelectric actuator 13, but not limited to this, so that The depth of the gap g0 can be maintained between the resonance plate 12 and the convex portion 130c of the suspension plate 130 of the piezoelectric actuator 13, so that the airflow can be guided to flow more rapidly. 12 Keeping a proper distance reduces mutual contact interference, so that noise generation can be reduced.

Please continue to refer to FIG. 5A to FIG. 5E . As shown in the figures, after the air intake plate 11 , the resonance plate 12 and the piezoelectric actuator 13 are assembled correspondingly in sequence, the hollow hole 120 of the resonance plate 12 can be connected with the above The gas inlet plates 11 together form a chamber for converging gas, and a first chamber 121 is further formed between the resonance plate 12 and the piezoelectric actuator 13 for temporarily storing the gas, and the first chamber 121 is transparent. Through the hollow hole 120 of the resonance plate 12, it communicates with the cavity at the central concave portion 111 of the first surface 11b of the air inlet plate 11, and the two sides of the first cavity 121 are connected by the brackets 132 of the piezoelectric actuator 13. The gap 135 therebetween is communicated with the microvalve device 1B arranged under it.

When the micro-fluid control device 1A of the micro-pneumatic power device 1 is actuated, the piezoelectric actuator 13 is mainly actuated by a voltage, and the support 132 is used as a fulcrum to reciprocate in the vertical direction. As shown in FIG. 5B , when the piezoelectric actuator 13 is actuated by a voltage and vibrates downward, since the resonant plate 12 is a light and thin sheet-like structure, when the piezoelectric actuator 13 vibrates, the resonance plate 12 resonates. The sheet 12 will also perform vertical reciprocating vibration with the resonance, that is, the part of the resonance sheet 12 corresponding to the central concave portion 111 of the air intake plate 11 will also deform with bending vibration, that is, the resonance sheet 12 corresponds to the intake plate 11. The central concave portion 111 of the gas plate 11 is the movable portion 12a of the resonance sheet 12, so when the piezoelectric actuator 13 bends downward, the movable portion 12a of the resonance sheet 12 will be affected by the fluid belt. As the piezoelectric actuator 13 bends downward and vibrates and deforms, the gas enters through at least one air intake hole 110 on the air intake plate 11 and passes through the piezoelectric actuator 13. At least one busbar hole 112 on the first surface 11b is collected to the central central concave portion 111, and then flows downward into the first chamber 121 through the central hole 120 on the resonance plate 12 corresponding to the central concave portion 111. Afterwards, driven by the vibration of the piezoelectric actuator 13, the resonant plate 12 will also resonate and vibrate vertically, as shown in FIG. Vibrate down, and stick to the convex part 130c of the suspension plate 130 of the piezoelectric actuator 13, so that the area other than the convex part 130c of the suspension plate 130 and the confluence cavity between the fixed parts 12b on both sides of the resonance plate 12 The space between the chambers will not be reduced, and the volume of the first chamber 121 is compressed by the deformation of the resonant sheet 12, and the intermediate circulation space of the first chamber 121 is closed, so that the gas in it is pushed to flow to both sides. , and then flow downward through the gap 135 between the brackets 132 of the piezoelectric actuator 13 . As for FIG. 5D, the movable part 12a of the resonant plate 12 is deformed by bending vibration, and then returns to the initial position, and the subsequent piezoelectric actuator 13 is driven by a voltage to vibrate upward, and thus the first chamber 121 is also squeezed. At this time, since the piezoelectric actuator 13 is lifted upward, the displacement of the lift can be d, so that the gas in the first chamber 121 will flow to both sides, thereby driving the gas to continuously flow from the air inlet plate At least one air inlet 110 on the 11 enters, and then flows into the cavity formed by the central concave portion 111. As shown in FIG. 5E, the resonance plate 12 is resonated upward by the upward vibration of the piezoelectric actuator 13, resonating upward. The movable portion 12a of the plate 12 also moves to the upward position, so that the gas in the central concave portion 111 flows into the first chamber 121 through the central hole 120 of the resonance plate 12, and passes through the bracket 132 of the piezoelectric actuator 13. The gap 135 between them flows downward through the microfluidic control device 1A. It can be seen from this embodiment that when the resonance plate 12 performs vertical reciprocating vibration, the gap g0 between the resonance plate 12 and the piezoelectric actuator 13 can be used to increase the maximum distance of its vertical displacement. In other words, between the two Setting a gap g0 between the structures can make the resonant plate 12 generate a larger up and down displacement during resonance, and the vibration displacement of the piezoelectric actuator is d, and the difference between the gap g0 and the gap is x, that is, x= g0-d, when x≦0um is tested, it is in the state of noise; when x=1 to 5um, the maximum output air pressure of micro-pneumatic power device 1 can reach 350mmHg; when x=5 to 10um, the maximum output air pressure of micro-pneumatic power device 1 It can reach 250mmHg; when x=10 to 15um, the maximum output air pressure of the micro-pneumatic power device 1 can reach 150mmHg, and the corresponding relationship of the values is shown in the following table 1. The above values are for operating voltages between ±10V and ±20V. In this way, a pressure gradient is generated in the flow channel design of the microfluidic control device 1A, so that the gas flows at a high speed, and through the impedance difference between the inlet and outlet directions of the flow channel, the gas is transmitted from the suction end to the discharge end, and at the discharge end there are Under the state of air pressure, it still has the ability to continuously push out the gas, and can achieve the effect of mute.

(Table I)

Test items x (difference between displacement and clearance) Maximum output air pressure 1 x=1 to 5um 350mmHg 2 x=5 to 10um 250mmHg 3 x=10 to 15um 150mmHg

In addition, in some embodiments, the vertical reciprocating vibration frequency of the resonant plate 12 can be the same as the vibration frequency of the piezoelectric actuator 13 , that is, both can be upward or downward at the same time, which can be according to the actual application situation. However, any changes are not limited to the operation modes shown in this embodiment.

Please refer to FIGS. 1A , 2A and 6A and 6B at the same time, wherein FIG. 6A is a schematic diagram of the pressure collecting action of the gas collecting plate 16 and the micro valve device 1B of the micro pneumatic power device shown in FIG. 1A , and FIG. 6B is a 1A is a schematic diagram of the decompression operation of the gas collecting plate 16 of the micro pneumatic power device and the micro valve device 1B. As shown in FIG. 1A and FIG. 6A , the micro-valve device 1B of the micro-pneumatic power device 1 of the present application is formed by stacking the valve sheet 17 and the outlet plate 18 in sequence, and works with the gas collecting plate 16 of the micro-fluid control device 1A .

In this embodiment, the gas collecting plate 16 has a surface 160 and a reference surface 161, and the surface 160 is concave to form a gas collecting chamber 162 for the piezoelectric actuator 13 to be installed therein and controlled by the micro fluid. The gas transmitted downward by the device 1A is temporarily accumulated in the gas collecting chamber 162, and the gas collecting plate 16 has a plurality of through holes, which include a first through hole 163 and a second through hole 164. The first through hole 163 and the second through hole 164. One end of the through hole 163 and the second through hole 164 is communicated with the gas collecting chamber 162 , and the other end is respectively connected with the first pressure relief chamber 165 and the first outlet chamber 166 on the reference surface 161 of the gas collecting plate 16 . connected. And, a convex structure 167 is further added at the first outlet chamber 166 , such as but not limited to a cylindrical structure, and the height of the convex structure 167 is higher than the reference surface 161 of the gas collecting plate 16 , And the height of the protruding structure 167 is between 0.1 mm and 0.55 mm, and the preferred value is 0.2 mm.

The outlet plate 18 includes a pressure relief through hole 181 , an outlet through hole 182 , a reference surface 180 and a second surface 187 , wherein the pressure relief through hole 181 and the outlet through hole 182 pass through the reference surface 180 and the outlet plate 18 . On the second surface 187 , a second pressure relief chamber 183 and a second outlet chamber 184 are recessed on the reference surface 180 , and the pressure relief through hole 181 is formed in the central part of the second pressure relief chamber 183 and is located in the second pressure relief chamber 183 . There is a communication channel 185 between the pressure relief chamber 183 and the second outlet chamber 184 for gas circulation, and one end of the outlet through hole 182 is communicated with the second outlet chamber 184, and the other end is connected with the outlet 19 is connected to each other. In this embodiment, the outlet 19 can be connected to a device (not shown), such as a press, but not limited thereto.

The valve plate 17 has a valve hole 170 and a plurality of positioning holes 171. The thickness of the valve plate 17 is between 0.1 mm and 0.3 mm, and the preferred value is 0.2 mm.

When the valve sheet 17 is positioned and assembled between the gas collecting plate 16 and the outlet plate 18, the pressure relief through hole 181 of the outlet plate 18 corresponds to the first through hole 163 of the gas collecting plate 16, and the second pressure relief cavity The chamber 183 corresponds to the first pressure relief chamber 165 of the gas collecting plate 16 , the second outlet chamber 184 corresponds to the first outlet chamber 166 of the gas collecting plate 16 , and the valve plate 17 is disposed on the gas collecting plate 16 . Between the plate 16 and the outlet plate 18, the communication between the first pressure relief chamber 165 and the second pressure relief chamber 183 is blocked, and the valve hole 170 of the valve plate 17 is disposed in the second through hole 164 and the outlet through hole 182, and the valve hole 170 is located in the convex structure 167 of the first outlet chamber 166 of the gas collecting plate 16 and is correspondingly arranged. With the design of the single valve hole 170, the gas can reach the The purpose of one-way flow.

In addition, one end of the pressure relief through hole 181 of the outlet plate 18 can be inserted with a protruding part structure 181a formed by adding a protruding part, such as but not limited to a cylindrical structure, and the height of the protruding part structure 181a is between 0.1mm The height of the convex structure 181a is increased by improvement, and the height of the convex structure 181a is higher than the reference surface 180 of the outlet plate 18 to strengthen the height of the convex structure 181a. The valve plate 17 quickly interferes and closes the pressure relief through hole 181, and achieves the effect of a pre-force interference and complete sealing; and the outlet plate 18 further has at least one limit structure 188, and the height of the limit structure 188 is 0.2 mm, taking this embodiment as an example, the limiting structure 188 is disposed in the second pressure relief chamber 183 and is an annular block structure, and is not limited to this, which is mainly used when the micro-valve device 1B collects During the pressing operation, the valve plate 17 is used to assist in supporting the valve plate 17 to prevent the valve plate 17 from collapsing, and the valve plate 17 can be opened or closed more quickly.

When the micro-valve device 1B is pressure-collected, as shown in FIG. 6A , it can be in response to the pressure provided by the downwardly transmitted gas from the micro-fluid control device 1A, or when the external atmospheric pressure is greater than and the outlet When the internal pressure of the device (not shown) connected to 19 is high, the gas will flow from the gas collecting chamber 162 in the gas collecting plate 16 of the microfluidic control device 1A through the first through hole 163 and the second through hole 164 respectively. The gas flows downward into the first pressure relief chamber 165 and the first outlet chamber 166 . At this time, the downward gas pressure causes the flexible valve sheet 17 to bend downward and deform the first pressure relief chamber 165 . The pressure relief hole 181 of the outlet plate 18 can be closed, so the second pressure relief chamber 183 The gas inside will not flow out from the pressure relief through hole 181 . Of course, in this embodiment, a protruding structure 181a can be added at the end of the pressure relief through hole 181 to enhance the rapid contact of the valve plate 17 and seal the pressure relief through hole 181, so as to achieve a pre-force interference effect and complete sealing At the same time, the limiting structure 188 arranged around the pressure relief through hole 181 is used to assist in supporting the valve plate 17 so as not to collapse. On the other hand, since the gas flows downward into the first outlet chamber 166 from the second through hole 164, and the valve plate 17 corresponding to the first outlet chamber 166 is also bent downward, so that the corresponding The valve hole 170 is opened downward, and the gas can flow from the first outlet chamber 166 to the second outlet chamber 184 through the valve hole 170, and flow to the outlet 19 and the device connected to the outlet 19 through the outlet through hole 182 (not shown), the device is used to collect pressure.

Please continue to refer to FIG. 6B , when the micro-valve device 1B is depressurized, it can control the gas transmission volume of the micro-fluid control device 1A so that the gas is no longer input into the gas collection chamber 162 , or when the micro-valve device 1B is connected to the outlet 19 . When the internal pressure of the connected device (not shown) is greater than the external atmospheric pressure, the microvalve device 1B can be relieved of pressure. At this time, the gas will be input into the second outlet chamber 184 from the outlet through hole 182 connected to the outlet 19, so that the volume of the second outlet chamber 184 expands, thereby causing the flexible valve plate 17 to bend upward and deform, and The valve hole 170 of the valve sheet 17 will be closed due to being pressed against the gas collecting plate 16 because it is flat upward and pressed against the gas collecting plate 16 . Of course, in the present embodiment, a convex structure 167 can be added to the first outlet chamber 166, so that the flexible valve piece 17 can be bent upwards to change rapidly and resist, so that the valve hole 170 is more favorable to reach a predetermined height. Therefore, when in the initial state, the valve hole 170 of the valve plate 17 will be closed due to being pressed against the convex structure 167, and the second outlet chamber 184 will be closed. The gas will not flow back into the first outlet chamber 166, so as to achieve a better effect of preventing gas leakage. In addition, the gas in the second outlet chamber 184 can flow into the second pressure relief chamber 183 through the communication channel 185 , thereby expanding the volume of the second pressure relief chamber 183 and making the volume corresponding to the second pressure relief chamber 183 expanded. The valve sheet 17 of the pressure chamber 183 is also bent upward and deformed. At this time, since the valve sheet 17 is not abutted against the end of the pressure relief through hole 181, the pressure relief through hole 181 is in an open state, that is, the second pressure relief chamber. The gas in the chamber 183 can flow out through the pressure relief through hole 181 to perform pressure relief operation. Of course, in this embodiment, the protruding portion structure 181 a added at the end of the pressure relief through hole 181 or the limiting structure 188 disposed in the second pressure relief chamber 183 can be used to allow the flexible valve plate 17 to move upward. The bending shape changes quickly, which is more favorable for getting out of the state of closing the pressure relief through hole 181 . In this way, the gas in the device (not shown) connected to the outlet 19 can be discharged and depressurized by this one-way pressure relief operation, or completely discharged to complete the pressure relief operation.

Please refer to FIG. 1A , FIG. 2A , and FIGS. 7A to 7E at the same time, wherein FIGS. 7A to 7E are schematic diagrams of the pressure collecting operation of the micro pneumatic power device shown in FIG. 1A . As shown in FIG. 7A , the micro-pneumatic power device 1 is composed of a micro-fluid control device 1A and a micro-valve device 1B, wherein the micro-fluid control device 1A is, as described above, composed of an air inlet plate 11 , a resonance plate 12 , The piezoelectric actuator 13 , the insulating sheet 141 , the conductive sheet 15 , another insulating sheet 142 and the gas collecting plate 16 are stacked, assembled and positioned, and there is a space between the resonance sheet 12 and the piezoelectric actuator 13 . There is a gap g0, and there is a first chamber 121 between the resonance plate 12 and the piezoelectric actuator 13, and the micro-valve device 1B is also assembled and positioned in the micro-fluid by the valve plate 17 and the outlet plate 18 in sequence. It is formed on the gas collecting plate 16 of the control device 1A, and between the gas collecting plate 16 of the microfluidic control device 1A and the piezoelectric actuator 13 is a gas collecting chamber 162 and a reference surface 161 of the gas collecting plate 16 A first pressure relief chamber 165 and a first outlet chamber 166 are further recessed, and a second pressure relief chamber 183 and a second outlet chamber 184 are further recessed on the reference surface 180 of the outlet plate 18, in this embodiment , through the operating voltage of the micro pneumatic power device being ±10V to ±16V, and through the driving of the piezoelectric actuator 13 and the vibration of the resonance plate 12 and the valve plate 17 through these multiple different pressure chambers, to The gas is transported down the pressure set.

As shown in FIG. 7B , when the piezoelectric actuator 13 of the microfluidic control device 1A is actuated by a voltage to vibrate downward, the gas will enter the microfluidic control device 1A through the air intake holes 110 on the air intake plate 11 , and is collected to the central concave portion 111 through at least one bus bar hole 112 , and then flows downward into the first chamber 121 through the hollow hole 120 on the resonance plate 12 . After that, as shown in FIG. 7C , due to the resonance effect of the vibration of the piezoelectric actuator 13 , the resonance plate 12 will also vibrate in a reciprocating manner, that is, it vibrates downward and is close to the piezoelectric actuator 13 . On the convex portion 130c of the suspension plate 130, the volume of the cavity at the central concave portion 111 of the air intake plate 11 is increased by the deformation of the resonance plate 12, and the volume of the first cavity 121 is compressed at the same time, thereby promoting The gas in the first chamber 121 is pushed to flow to both sides, and then flows downward through the gap 135 between the brackets 132 of the piezoelectric actuator 13 to flow to the micro-fluid control device 1A and the micro-valve device 1B The first through-hole 163 and the second through-hole 164 communicating with the air-collecting chamber 162 flow downward to the first pressure relief chamber 165 and the first outlet correspondingly. In the chamber 166, it can be seen from this embodiment that when the resonant plate 12 performs vertical reciprocating vibration, the gap g0 between it and the piezoelectric actuator 13 can be used to increase the maximum distance of its vertical displacement, in other words , setting a gap g0 between the two structures can make the resonance plate 12 generate a larger up-and-down displacement during resonance.

Next, as shown in FIG. 7D , since the resonance plate 12 of the microfluidic control device 1A returns to the initial position, the piezoelectric actuator 13 is driven by a voltage to vibrate upward, and the vibration displacement of the piezoelectric actuator is d. The difference from the gap g0 is x, that is, x=g0-d. After testing, when x=1 to 5um and the operating voltage is ±10V to ±16V, the maximum output air pressure can reach at least 300mmHg, but not This is the limit. In this way, the volume of the first chamber 121 is also squeezed, so that the gas in the first chamber 121 flows toward both sides, and is continuously input to the gas collecting chamber through the gap 135 between the brackets 132 of the piezoelectric actuator 13 162. In the first pressure relief chamber 165 and the first outlet chamber 166, the air pressure in the first pressure relief chamber 165 and the first outlet chamber 166 is increased, thereby pushing the flexible valve plate 17 When the downward bending deformation occurs, in the second pressure relief chamber 183, the valve plate 17 is flatly pressed downward and abuts against the convex structure 181a at the end of the pressure relief through hole 181, thereby closing the pressure relief through hole 181. In the second outlet chamber 184 , the valve hole 170 on the valve plate 17 corresponding to the outlet through hole 182 is opened downward, so that the gas in the second outlet chamber 184 can be transmitted downward from the outlet through hole 182 to the outlet 19 And any device (not shown) connected with the outlet 19, so as to achieve the purpose of pressure collecting operation. Finally, as shown in FIG. 7E , when the resonance sheet 12 of the microfluidic control device 1A resonates and displaces upward, the gas in the central concave portion 111 of the first surface 11 b of the intake plate 11 can flow into the hollow hole 120 of the resonance sheet 12 In the first chamber 121, the gas is continuously transported downward to the gas collecting plate 16 through the gap 135 between the brackets 132 of the piezoelectric actuator 13. Since the gas pressure thereof continues to increase downward, the gas still remains. will continue to flow through the plenum chamber 162, the second through hole 164, the first outlet chamber 166, the second outlet chamber 184, and the outlet through hole 182 to the outlet 19 and any devices connected to the outlet 19, which The pressure collecting operation can be driven by the difference between the external atmospheric pressure and the pressure inside the device, but it is not limited to this.

When the internal pressure of the device (not shown) connected to the outlet 19 is greater than the external pressure, the micro-pneumatic power device 1 can be depressurized or depressurized as shown in FIG. 8 . The actuation mode of the pressure is mainly as described above, and the gas transmission volume of the microfluidic control device 1A can be adjusted so that the gas is no longer input into the gas collection chamber 162 , at this time, the gas will flow from the outlet connected to the outlet 19 . The through hole 182 is input into the second outlet chamber 184, so that the volume of the second outlet chamber 184 expands, thereby causing the flexible valve sheet 17 to bend upwardly and deform upwardly, and stick to the first outlet chamber. 166 on the convex structure 167, so that the valve hole 170 of the valve plate 17 is closed, that is, the gas in the second outlet chamber 184 will not flow back into the first outlet chamber 166; and, in the second outlet chamber 184 The gas can flow into the second pressure relief chamber 183 through the communication channel 185, and then through the pressure relief through hole 181 to perform the pressure relief operation; in this way, the one-way gas transmission operation of the micro valve structure 1B can be used to The gas in the device connected to the outlet 19 is discharged to reduce pressure, or completely discharged to complete the pressure relief operation.

The hoverboard 130 used in this case is a square shape. When the side length of the hoverboard 130 is reduced and the area of the hoverboard 130 is gradually reduced, it is found that the reduced size improves the rigidity of the hoverboard 130 on the one hand, and Because the volume of the internal gas flow channel is reduced, it is beneficial to the pushing or compression of the air, so that the output air pressure value can be increased; and on the other hand, the horizontal deformation caused by the vertical vibration of the suspension plate 130 can also be reduced, so that the pressure can be reduced. When the electric actuator 13 operates, it can be maintained in the same vertical direction and is not easy to tilt, thereby reducing the collision and interference between the piezoelectric actuator 13 and the resonance plate 12 or other assembly components, so as to reduce the generation of noise, thereby reducing the generation of noise. This reduces the rate of defective quality. To sum up, when the size of the suspension plate 130 of the piezoelectric actuator 13 is reduced, the piezoelectric actuator 13 can also be made smaller, thereby not only improving the performance of the output air pressure, but also reducing noise, and enabling The defect rate of the product is reduced; on the contrary, it is found that the output air pressure value of the large-sized suspension board 130 is lower and the defect rate is higher.

Furthermore, the suspension board 130 and the piezoelectric ceramic plate 133 are the cores of the micro pneumatic power device 1. With the reduction of the area of the two, the area of the micro pneumatic power device 1 can be simultaneously reduced and its weight can be reduced, so that the The micro-pneumatic power device 1 can be easily installed on a portable device without being limited due to its bulky size. Of course, in order to achieve the trend of thinning the micro-pneumatic power device 1 in this case, the total thickness of the micro-fluid control device 1A assembled with the micro-valve device 1B is between 1.5mm and 4mm in height, so that the micro-pneumatic power device 1 can be light and comfortable. Portable purpose, and can be widely used in medical equipment and related equipment.

To sum up, the micro-pneumatic power device provided in this case is mainly through the mutual combination of the micro-fluid control device and the micro-valve device, so that the gas enters from the air inlet on the micro-fluid control device, and uses piezoelectric actuation. The action of the device causes the gas to generate a pressure gradient in the designed flow channel and pressure chamber, so that the gas flows at a high speed and is transmitted to the micro-valve device, and then through the one-way valve design of the micro-valve device, the gas is Unidirectional flow, which can accumulate pressure in any device connected to the outlet; and when the pressure is reduced or relieved, the transfer volume of the microfluidic control device is regulated, and the gas can be transferred from the device connected to the outlet. to the second outlet chamber of the micro-valve device, and is transmitted to the second pressure relief chamber by the communication channel, and then flows out from the pressure relief through hole, so that the gas can be quickly transmitted, and at the same time, it can be silent The effect of the micro gas power device can further reduce the overall volume and thinning of the micro gas power device, so that the micro gas power device can achieve the purpose of being portable and comfortable, and can be widely used in medical equipment and related equipment. Therefore, the micro gas power device in this case has great industrial application value, and an application should be filed in accordance with the law.

Even though the present invention has been described in detail by the above-mentioned embodiments, various modifications can be made by those skilled in the art, but they are all within the scope of the appended claims.

【Symbol Description】

1: Micro pneumatic power device

1A: Micro Fluid Control Device

1B: Micro valve device

1a: Shell

10: Base

11: Air intake plate

11a: Second surface of intake plate

11b: The first surface of the intake plate

110: Air intake

111: Center recess

112: Busbar hole

12: Resonance sheet

12a: Movable part

12b: Fixed part

120: Hollow Hole

121: First Chamber

13: Piezoelectric Actuators

130: Hoverboard

130a: Second surface of the hoverboard

130b: The first surface of the hoverboard

130c: convex part

130d: Center Section

130e: Peripheral part

131: Outer frame

131a: Second surface of outer frame

131b: first surface of outer frame

132: Bracket

132a: Second surface of the bracket

132b: The first surface of the bracket

133: Piezoelectric ceramic plate

134, 151: Conductive pins

135: void

141, 142: insulating sheet

15: Conductive sheet

16: Gas collector plate

16a: accommodating space

160: Surface

161: Datum surface

162: plenum chamber

163: First through hole

164: Second through hole

165: First pressure relief chamber

166: First Exit Chamber

167, 181a: convex structure

168: Sidewall

17: valve piece

170: valve hole

171: Positioning holes

18: Exit board

180: Datum surface

181: Pressure relief through hole

182: Exit through hole

183: Second pressure relief chamber

184: Second Exit Chamber

185: Connecting runner

187: Second Surface

188: Limit Structure

19: Export

g0: Gap

(a) to (x): Different implementations of piezoelectric actuators

a0, i0, j0, m0, n0, o0, p0, q0, r0: hoverboard

a1, i1, m1, n1, o1, p1, q1, r1: Outer frame

a2, i2, m2, n2, o2, p2, q2, r2: bracket, board connection part

a3, m3, n3, o3, p3, q3, r3: voids

d: Vibration displacement of the piezoelectric actuator

s4, t4, u4, v4, w4, x4: convex part

m2', n2', o2', q2', r2': the bracket is connected to the end of the outer frame

m2", n2", o2", q2", r2": the brackets are attached to the ends of the hoverboard

Claims (15)

1. A miniature fluid control device, suitable for a miniature pneumatic power device, is characterized in that, comprising: an air inlet plate, which has at least one air inlet hole, at least one confluence row hole and a central concave part forming a confluence chamber. The gas of the air inlet is confluent to the confluence chamber formed by the central recess; a resonance plate having a hollow hole corresponding to the confluence chamber of the air intake plate; and A piezoelectric actuator having: a hoverboard, in a square shape, the hoverboard has a length of 2.5mm to 3.5mm, a width of 2.5mm to 3.5mm and a thickness of 0.20mm; an outer frame with at least one bracket, connected between the suspension board and the outer frame; and A piezoelectric ceramic plate, in a square shape, is attached to a first surface of the suspension board, and the piezoelectric ceramic plate has a side length not greater than the side length of the suspension plate, with a length of 2.5mm to 3.5mm and a width of 2.5mm to 3.5mm. 2.5mm to 3.5mm and 0.10mm thick; and a gas collecting plate, having a bottom plate and a side wall, the side wall extending from the periphery of the bottom plate, so that the side wall and the bottom plate together define an accommodating space; Wherein, the above-mentioned air intake plate, the resonance plate, the piezoelectric actuator and the gas collecting plate are arranged and positioned opposite to each other in sequence, so that the piezoelectric actuator is arranged in the accommodating space, and the resonance There is a gap between the sheet and the piezoelectric actuator to form a first chamber, so that when the piezoelectric actuator is driven, the gas is introduced from the at least one gas inlet hole of the gas inlet plate, and passes through the at least one gas inlet hole. A busbar hole is collected into the central concave portion, and then flows through the hollow hole of the resonance plate to enter the first chamber, and then is transmitted downward through a gap between the at least one bracket of the piezoelectric actuator , to continuously push out the gas. 2 . The microfluidic control device of claim 1 , wherein the operating voltage of the microfluidic control device is ±15V, and the maximum output air pressure thereof is at least 300 mmHg. 3 . 3 . The micro-fluid control device of claim 1 , wherein the suspension board further comprises a convex portion disposed on a second surface of the suspension board, the height of which is between 0.02 mm and 0.08 mm. 4 . 4. The microfluidic control device of claim 3, wherein the height of the protruding portion is 0.03 mm. 5 . The microfluidic control device of claim 3 , wherein the protruding portion is a circular protruding structure, and the diameter is 0.55 times the minimum side length of the suspension board. 6 . 6 . The micro-fluid control device of claim 1 , wherein the air inlet plate is made of stainless steel, and the thickness is between 0.3 mm and 0.5 mm. 7 . 7. The microfluidic control device according to claim 6, wherein the thickness of the air inlet plate is 0.4 mm. 8 . The microfluidic control device of claim 1 , wherein the resonance plate is made of a copper material, and the thickness is between 0.02 mm and 0.07 mm. 9 . 9 . The microfluidic control device of claim 8 , wherein the resonant plate has a thickness of 0.04 mm. 10 . 10 . The microfluidic control device of claim 1 , further comprising at least one insulating sheet and one conductive sheet, and the at least one insulating sheet and the conductive sheet are sequentially disposed under the piezoelectric actuator. 11 . 11 . The microfluidic control device of claim 1 , wherein the outer frame of the piezoelectric actuator is made of a stainless steel material, and the thickness is between 0.1 mm and 0.4 mm. 12 . 12 . The microfluidic control device of claim 11 , wherein the thickness of the outer frame of the piezoelectric actuator is 0.3 mm. 13 . 13 . The microfluidic control device of claim 1 , wherein two ends of the support of the piezoelectric actuator are connected to the outer frame, and one end is connected to the suspension board. 14 . 14. A miniature fluid control device, suitable for a miniature pneumatic power device, characterized in that it comprises: an air intake plate; a resonance plate; a piezoelectric actuator; The piezoelectric actuator at least has a suspension board and an outer frame, the suspension board and the outer frame are connected by at least one bracket, and a piezoelectric ceramic plate is attached to a first surface of the suspension board, the The suspension board is in a square shape, with a length of 2.5mm to 3.5mm, a width of 2.5mm to 3.5mm and a thickness of 0.20mm. The piezoelectric ceramic plate is in a square shape and has a side length not greater than the side length of the suspension board. , 2.5mm to 3.5mm in length, 2.5mm to 3.5mm in width and 0.10mm in thickness; and a gas collecting plate, having a bottom plate and a side wall, the side wall extending from the periphery of the bottom plate, so that the side wall and the bottom plate together define an accommodating space; Wherein, the above-mentioned air intake plate, the resonance plate, the piezoelectric actuator and the gas collecting plate are arranged and positioned opposite to each other in sequence, so that the piezoelectric actuator is arranged in the accommodating space, and the resonance There is a gap between the plate and the piezoelectric actuator to form a first cavity. When the piezoelectric actuator is driven, the gas enters from the air inlet plate and flows through the resonance plate to enter the first cavity Indoor retransmission gas. 15. The microfluidic control device as claimed in claim 14, wherein the air inlet plate has at least one air inlet hole, at least one bus row hole and a central concave portion, the at least one air inlet hole is used for introducing gas, the The bus bar hole corresponds to the air inlet hole, and guides the gas from the air inlet hole to flow into the central concave portion; the resonance sheet has a hollow hole corresponding to the central concave portion of the air intake plate.

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