CN112738966A - Plasma activation monitoring device - Google Patents
Plasma activation monitoring device Download PDFInfo
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- CN112738966A CN112738966A CN202110053602.3A CN202110053602A CN112738966A CN 112738966 A CN112738966 A CN 112738966A CN 202110053602 A CN202110053602 A CN 202110053602A CN 112738966 A CN112738966 A CN 112738966A
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/0006—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature
- H05H1/0012—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature using electromagnetic or particle radiation, e.g. interferometry
- H05H1/0037—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature using electromagnetic or particle radiation, e.g. interferometry by spectrometry
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Abstract
本发明公开了一种等离子激活监测装置，包括等离子喷枪，所述等离子喷枪包括壳体，所述壳体的一端设有喷嘴，所述壳体内具有与所述喷嘴间隔设置的电极，还包括光谱分析组件，所述电极上具有沿所述壳体长度方向设置的导通孔，所述电极远离所述喷嘴的一端设有导光管且所述导光管部分伸入所述导通孔内，所述导光管远离所述电极的一端设有与所述光谱分析组件接通的光纤。本发明提供的等离子激活监测装置实现了对等离子喷枪工作状态的实时监控，进而根据等离子喷枪的工作状态调整生产线的状态，使等离子喷枪和生产线同时稳定运行，提高生产效率。
The invention discloses a plasma activation monitoring device, comprising a plasma spray gun, wherein the plasma spray gun includes a shell, one end of the shell is provided with a nozzle, the shell is provided with electrodes spaced apart from the nozzle, and further comprises a spectrum An analysis component, the electrode is provided with a conducting hole arranged along the length direction of the casing, the end of the electrode away from the nozzle is provided with a light guide pipe, and a part of the light guide pipe extends into the conducting hole , the end of the light guide pipe away from the electrode is provided with an optical fiber connected with the spectral analysis component. The plasma activation monitoring device provided by the invention realizes the real-time monitoring of the working state of the plasma spray gun, and then adjusts the state of the production line according to the working state of the plasma spray gun, so that the plasma spray gun and the production line run stably at the same time, and the production efficiency is improved.
Description
Technical Field
The invention relates to the technical field of plasma processing equipment, in particular to a plasma activation monitoring device.
Background
The plasma is an ionized gaseous substance consisting of positive and negative ions generated after atoms and radicals are ionized after part of electrons are deprived, the plasma is a good electric conductor, the plasma can be captured, moved and accelerated by utilizing an ingeniously designed magnetic field, and the development of the plasma physics provides new technology and process for the further development of materials, energy sources, information, environmental space, space physics, geophysical and other science, so that the application of the plasma is very wide, and comprises the digital industry, the electronic industry, the automobile industry, the printing and packaging industry and the like.
The existing plasma processing equipment mainly takes a rotary spray gun, a direct current spray gun and a wide-width plasma machine as main parts, when plasma surface treatment is carried out on a plurality of products, the plasma treatment equipment needs to be temporarily closed after the plasma treatment equipment is activated and generates plasma to treat one product, the product to be treated is replaced and then activated again to carry out plasma surface treatment on the product, because the working state of the existing plasma treatment equipment is difficult to determine, in the process of replacing the processed product and processing the next product, a certain time is needed to be waited for ensuring that the plasma processing equipment is closed or enters a working state, so that the production process is not continuous enough, the production efficiency is reduced, therefore, a plasma activation monitoring device capable of monitoring the working state is needed to reduce the waiting time, ensure the stable operation of plasma equipment and a production line and improve the production efficiency.
Disclosure of Invention
The technical problem to be solved by the invention is as follows: a plasma activation monitoring device with a monitorable working state is provided.
In order to solve the technical problems, the invention adopts the technical scheme that: the invention discloses a plasma activation monitoring device which comprises a plasma spray gun, wherein the plasma spray gun comprises a shell, one end of the shell is provided with a nozzle, an electrode arranged at an interval with the nozzle is arranged in the shell, the plasma activation monitoring device also comprises a spectrum analysis assembly, the electrode is provided with a conducting hole arranged along the length direction of the shell, one end of the electrode, far away from the nozzle, is provided with a light guide pipe, part of the light guide pipe extends into the conducting hole, and one end of the light guide pipe, far away from the electrode, is provided with an optical fiber communicated with the spectrum analysis assembly.
The invention has the beneficial effects that: according to the plasma activation monitoring device, photons generated when the working gas is excited are guided by the light guide pipe to be transmitted to the optical fiber and transmitted to the spectral analysis assembly through the optical fiber, the spectral analysis assembly identifies the characteristic spectral line generated when the working gas is excited, the percentage content of the element in the plasma is determined according to the strength of the characteristic spectral line of the corresponding element, the activation state of the plasma can be confirmed, the real-time monitoring of the working state of the plasma spray gun is achieved, the state of the production line is adjusted according to the working state of the plasma spray gun, the plasma spray gun and the production line can run stably at the same time, and the production efficiency is improved.
Drawings
Fig. 1 is a schematic structural diagram of a plasma torch in a plasma activation monitoring apparatus according to a first embodiment of the present invention;
fig. 2 is an exploded view of a plasma torch in the plasma activation monitoring apparatus according to the first embodiment of the present invention;
fig. 3 is a schematic structural diagram of a fixing base in a plasma activation monitoring device according to a first embodiment of the invention;
FIG. 4 is a schematic structural diagram of a conductive rod of a plasma-activated monitoring device according to a first embodiment of the present invention;
fig. 5 is a right side view of a plasma torch in the plasma activation monitoring apparatus according to the first embodiment of the present invention;
fig. 6 is a cross-sectional view of a plasma torch in the plasma activation monitoring apparatus according to the first embodiment of the present invention;
fig. 7 is a left side view of a plasma torch in the plasma activation monitoring apparatus according to the first embodiment of the present invention;
fig. 8 is a cross-sectional view of another cross-section of a plasma torch in a plasma activation monitoring apparatus according to a first embodiment of the present invention.
Description of reference numerals:
1. a housing; 11. a shaft body; 12. a coupling sleeve; 13. a ceramic tube; 14. a sleeve; 15. a bearing housing; 16. a bearing; 17. a bearing sleeve; 2. a nozzle; 21. a spout; 211. a first nozzle; 212. a second nozzle; 22. a tapered channel; 23. a weight reduction section; 3. an electrode; 31. a via hole; 32. a conductive rod; 321. a head portion; 322. a rod portion; 323. hole site; 4. a light pipe; 5. a rear cover; 51. a first through hole; 52. a second through hole; 53. a third through hole; 6. a fixed seat; 61. a spiral air passage.
Detailed Description
In order to explain technical contents, achieved objects, and effects of the present invention in detail, the following description is made with reference to the accompanying drawings in combination with the embodiments.
Referring to fig. 1 to 8, the present invention discloses a plasma activation monitoring device, which includes a plasma torch, the plasma torch includes a housing 1, a nozzle 2 is disposed at one end of the housing 1, an electrode 3 disposed at an interval with the nozzle 2 is disposed in the housing 1, the plasma activation monitoring device further includes a spectrum analysis component, a via hole 31 disposed along a length direction of the housing 1 is disposed on the electrode 3, a light guide pipe 4 is disposed at one end of the electrode 3 away from the nozzle 2, a portion of the light guide pipe 4 extends into the via hole 31, and an optical fiber connected to the spectrum analysis component is disposed at one end of the light guide pipe 4 away from the electrode 3.
The working principle of the invention is briefly described as follows: plasma activation detection device includes plasma torch and the spectral analysis subassembly of control plasma torch operating condition, electrode 3 that arouses working gas production plasma has in the plasma torch, be equipped with conducting hole 31 on the electrode 3, be equipped with light pipe 4 in the conducting hole 31, link to each other through optic fibre between light pipe 4 and the spectral analysis subassembly, photon that light pipe 4 guide working gas produced when arousing transmits to optic fibre and transmits to the spectral analysis subassembly by optic fibre, the characteristic spectral line that produces when arousing working gas through the spectral analysis subassembly discerns, and then according to the percentage content of this element in the intensity determination plasma of the characteristic spectral line of calculating corresponding element, can confirm the activated condition of plasma, realize the real time monitoring to plasma torch operating condition.
From the above description, the beneficial effects of the present invention are: the plasma activation monitoring device provided by the invention realizes real-time monitoring of the working state of the plasma spray gun, and further adjusts the state of the production line according to the working state of the plasma spray gun, so that the plasma spray gun and the production line can stably run at the same time, and the production efficiency is improved.
Further, one end of the housing 1, which is far away from the nozzle 2, is provided with a rear cover 5, and the rear cover 5 is provided with a first through hole 51 matched with the light guide pipe 4.
As can be seen from the above description, the first through hole 51 is provided on the rear cover 5 to position the light pipe 4 in the housing 1, and to allow the optical fiber to enter the housing 1 and connect with the light pipe 4.
Further, the plasma torch also comprises a plasma power supply, a high-voltage wire is arranged between the plasma power supply and the electrode 3, and a second through hole 52 for the high-voltage wire to pass through is arranged on the rear cover 5.
As can be seen from the above description, the plasma power source and the electrode 3 are connected by a high voltage line to provide a stable power source for the plasma torch.
Further, a conductive rod 32 matched with the electrode 3 is further arranged in the shell 1, the conductive rod 32 is provided with a head portion 321 and a rod portion 322 which are connected, a hole portion 323 matched with the high-voltage wire is arranged on the head portion 321, the rod portion 322 extends into the through hole 31, and the light guide pipe 4 penetrates through the conductive rod 32.
As is apparent from the above description, the conductive rod 32 is provided to be connected to a high voltage line, and the working gas is excited to generate plasma by cooperation of the conductive rod 32 and the electrode 3.
Further, still include the gas storage subassembly, the gas storage subassembly with casing 1 passes through the trachea intercommunication, be equipped with on the back lid 5 and supply the third through-hole 53 that the trachea passed.
As can be seen from the above description, the third through hole 53 is formed in the rear cover 5 for the air tube connecting the air storage assembly and the housing 1 to pass through, so as to provide stable working air for the plasma torch.
Further, a fixing seat 6 is further arranged in the shell 1, the fixing seat 6 is sleeved on the electrode 3 and abuts against the inner peripheral wall of the shell 1, and a plurality of spiral air passages 61 penetrating through the fixing seat 6 are arranged on the fixing seat 6.
As can be seen from the above description, the electrode 3 is fixed in the housing 1 through the fixing seat 6, and the spiral gas duct 61 is disposed on the fixing seat 6 to evenly distribute the working gas between the electrode 3 and the nozzle 2.
Further, casing 1 includes axis body 11, the relative both ends of axis body 11 are overlapped respectively and are equipped with even axle sleeve 12 and ceramic pipe 13, even axle sleeve 12 is kept away from the one end of axis body 11 is equipped with hou gai 5, the cover is equipped with sleeve pipe 14 on the periphery wall of ceramic pipe 13, sleeve pipe 14 is kept away from the one end of axis body 11 is equipped with nozzle 2.
Further, the periphery wall of axis body 11 is gone up the cover and is equipped with bearing cover 15, bearing cover 15 with be equipped with a plurality of bearings 16 between the axis body 11, bearing 16 cover is established on the axis body 11.
As can be seen from the above description, the provision of the plurality of bearings 16 between the shaft body 11 and the bearing housing 15 allows the shaft body 11 to rotate relative to the bearing housing 15, so that the plasma torch rotates while emitting plasma, thereby increasing the processing area of the plasma torch.
Further, a nozzle 21 is arranged on the end face of one end, far away from the shell 1, of the nozzle 2, the nozzle 21 is communicated with the shell 1 through a conical channel 22 arranged in the nozzle 2, and the nozzle 21 comprises a first nozzle 211 and a plurality of second nozzles 212 arranged around the first nozzle 211.
As can be seen from the above description, the plasma flows in the tapered passage 22 while being concentrated toward the nozzle 21 and uniformly discharged from the first nozzle 211 and the second nozzle 212.
Further, the light guide pipe 4 is made of quartz.
As can be seen from the above description, the light pipe 4 made of quartz can improve the high temperature resistance and corrosion resistance of the light pipe 4, and the light pipe 4 has good light guiding performance.
Example one
Referring to fig. 1 to 8, a first embodiment of the present invention is: the utility model provides a plasma activation monitoring devices, includes plasma spray gun, spectral analysis subassembly, plasma power and gas storage subassembly, plasma spray gun with the spectral analysis subassembly passes through optic fibre intercommunication, plasma spray gun with the plasma power passes through the high-tension line intercommunication, plasma spray gun with the gas storage subassembly passes through the trachea intercommunication.
Specifically, the gas storage component provides working gas for the plasma spray gun, the plasma power supply provides energy for the plasma spray gun, when the working gas is excited in the plasma spray gun to generate plasma, shell electrons of working gas atoms can emit photons and generate characteristic spectral lines when jumping from a high energy level to a low energy level, the photons are guided by the optical fibers to be transmitted to the spectral analysis component, the characteristic spectral lines are subjected to light splitting and dispersion through the spectral analysis component and are arrayed according to wavelengths to form a series of continuous spectrums, then optical signals are converted into electric signals, the intensity of the characteristic spectral lines of corresponding elements is calculated to determine the percentage content of the elements in the plasma, the activation state of the plasma can be determined, the real-time monitoring of the working state of the plasma spray gun is realized, and the operation is simple and convenient.
As shown in fig. 1 and 2, the plasma torch includes a housing 1, the housing 1 includes a shaft body 11, and coupling sleeves 12 and ceramic tubes 13 disposed at opposite ends of the shaft body 11, one end of the coupling sleeve 12 far away from the shaft body 11 is provided with a rear cover 5 for closing the shell 1, the ceramic tube 13 is divided into two layers, a sleeve 14 is sleeved on the peripheral wall of the outer layer of the ceramic tube 13, one end of the sleeve 14 far away from the shaft body 11 is provided with a nozzle 2, the inner side of the ceramic tube 13 is provided with an electrode 3, the electrode 3 is arranged at a distance from the nozzle 2, and the area between the electrode 3 and the nozzle 2 is the area where the plasma torch generates plasma, the electrode 3 is electrically connected with the high-voltage wire and the area between the motor and the nozzle 2 is communicated with the air pipe, after the electrode 3 is powered on, the working gas in the area between the electrode 3 and the nozzle 2 can be excited to generate plasma.
Specifically, still be equipped with on the electrode 3 and run through the via hole 31 of electrode 3, the via hole 31 is followed the length direction of casing 1 sets up, just electrode 3 keeps away from the one end of nozzle 2 is equipped with light pipe 4, light pipe 4 part stretches into in the via hole 31 and light pipe 4 keeps away from the one end of electrode 3 with the optic fibre switch-on, the photon that produces after the working gas is aroused passes the via hole 31 and is in under the guide of light pipe 4 gets into in the optic fibre, realize the collection of the characteristic spectral line that the working gas produced when arousing.
Preferably, the light guide pipe 4 is made of quartz, so that the light guide pipe 4 has good heat resistance, corrosion resistance and light guide performance, and the light guide pipe 4 can stably work in the plasma spray gun for a long time.
As shown in fig. 3 and 4, a fixing seat 6 is sleeved on the peripheral wall of the electrode 3, the peripheral wall of the fixing seat 6 is provided with threads to enable the fixing seat 6 to abut against the inner peripheral wall of the ceramic tube 13, so that the electrode 3 is fixed in the casing 1, the fixing seat 6 is further provided with a plurality of spiral air passages 61, the spiral air passages 61 surround the electrode 3 and are arranged at equal intervals, the spiral air passages 61 are used for communicating the front end and the rear end of the casing 1 and enabling working gas to enter the electrode 3 and the area between the nozzles 2 and be uniformly distributed, and therefore the working gas is enabled to be uniformly excited to generate plasma. Preferably, the end of the electrode 3 is provided with a screw thread engaged with the fixing seat 6.
The electrode 3 is kept away from the one end of nozzle 2 still is equipped with conducting rod 32, conducting rod 32 includes head 321 and pole portion 322 that link to each other, pole portion 322 stretches into make in the via hole 31 electrode 3 with conducting rod 32 switches on, just light pipe 4 runs through conducting rod 32 sets up, the confession has on the head 321 the breach of high-voltage line location and with the confession the hole site 323 that the high-voltage line is connected, in order to realize the high-voltage line with electrode 3's stable switch on. Optionally, the conductive rod 32 is made of brass, so that the conductive rod 32 has good conductivity.
Referring to fig. 5 and 6, a nozzle 21 is disposed on an end surface of one end of the nozzle 2 away from the housing 1, a tapered channel 22 communicating the nozzle 21 and the housing 1 is disposed in the nozzle 2, and a diameter of one end of the tapered channel 22 close to the housing 1 is larger than a diameter of one end of the tapered channel 22 close to the nozzle 21, so that energy is gradually concentrated when the plasma moves to the nozzle 21 along the tapered channel 22, thereby facilitating generation of plasma flame with better treatment effect. The nozzle 21 comprises a first nozzle 211 and a plurality of second nozzle 212, the second nozzle 212 is arranged around the first nozzle 211 at equal intervals, the diameter of the first nozzle 211 is larger than that of the second nozzle 212, and plasma is released out of the nozzle 2 through the first nozzle 211 and the second nozzle 212, so that the plasma can be completely released out of the nozzle 2, and the problem that the treatment effect is reduced due to insufficient plasma release is avoided.
Preferably, a plurality of concave weight-reducing portions 23 are arranged on an end surface of one end of the nozzle 2, which is far away from the housing 1, so as to reduce the overall weight of the nozzle 2, and further reduce the weight of the plasma torch, so that the plasma torch is convenient to operate and use.
As shown in fig. 7, a first through hole 51 matched with the light guide 4 is formed in the rear cover 5, one end of the light guide 4, which is far away from the electrode 3, extends into the first through hole 51 to position the light guide 4 in the circumferential direction of the housing 1, and the optical fiber passes through the first through hole 51 and is connected with the light guide 4. The rear cover 5 is further provided with a second through hole 52 for the high-voltage wire to pass through and a third through hole 53 for the air pipe to pass through, the high-voltage wire passes through the second through hole 52 and then extends to one end of the electrode 3 far away from the nozzle 2 and is electrically connected with the electrode 3, and the air pipe passes through the third through hole 53 and can be communicated with the inner side of the shell 1.
As shown in fig. 8, the outside cover of axis body 11 is equipped with bearing housing 15, bearing housing 15 with be equipped with three bearing 16 between the axis body 11 just bearing 16 cover is established on the axis body 11, it is three bearing 16 interval sets up and arbitrary adjacent two be equipped with bearing sleeve 17 between the bearing 16, it is three make bearing 16 can rotate in step and then make axis body 11 is rotatable to be set up in bearing housing 15, through the rotation of axis body 11 can drive nozzle 2 rotates, and then increases plasma spray gun's spraying area, and improves plasma spray gun's treatment effect.
The working process of the plasma activation monitoring device provided by the embodiment is as follows: the plasma torch is communicated with the spectral analysis component, the plasma power supply and the gas storage component respectively, the gas storage component is started to feed working gas into the plasma torch, the plasma power supply is started, energy provided by the plasma power supply is transmitted to the electrode 3, so that the electrode 3 excites the working gas to generate plasma, photons generated when the working gas is activated are transmitted to the spectral analysis component through the via hole 31, the light guide pipe 4 and the optical fiber in sequence, the spectral analysis component can judge whether the plasma torch is normally activated according to characteristic spectral lines, and if the plasma torch is normally activated, a product can be processed.
In conclusion, the plasma activation monitoring device provided by the invention realizes monitoring of the activation state of the plasma spray gun, further adjusts the state of the production line according to the working state of the plasma spray gun, improves the production efficiency, and is simple to operate and stable in work.
The above description is only an embodiment of the present invention, and not intended to limit the scope of the present invention, and all equivalent changes made by using the contents of the present specification and the drawings, or applied directly or indirectly to the related technical fields, are included in the scope of the present invention.
Claims (10)
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110053602.3A CN112738966A (en) | 2021-01-15 | 2021-01-15 | Plasma activation monitoring device |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202110053602.3A CN112738966A (en) | 2021-01-15 | 2021-01-15 | Plasma activation monitoring device |
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| CN112738966A true CN112738966A (en) | 2021-04-30 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115946450A (en) * | 2023-03-09 | 2023-04-11 | 苏州科韵激光科技有限公司 | Nozzle device and pattern line forming equipment |
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2021
- 2021-01-15 CN CN202110053602.3A patent/CN112738966A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
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| JPH09199476A (en) * | 1996-01-23 | 1997-07-31 | Nec Corp | Dry etching device |
| CN1599946A (en) * | 2001-10-22 | 2005-03-23 | 应用材料有限公司 | Merie plasma reactor with showerhead RF electrode tuned to the plasma with arcing suppression |
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Application publication date: 20210430 |