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CN117733157A - NiCrAlY alloy target and preparation method thereof - Google Patents
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CN117733157A - NiCrAlY alloy target and preparation method thereof - Google Patents

NiCrAlY alloy target and preparation method thereof Download PDF

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Publication number
CN117733157A
CN117733157A CN202311762469.4A CN202311762469A CN117733157A CN 117733157 A CN117733157 A CN 117733157A CN 202311762469 A CN202311762469 A CN 202311762469A CN 117733157 A CN117733157 A CN 117733157A
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powder
nicraly alloy
alloy target
preparation
nicraly
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张凤戈
孟晓亭
魏铁峰
张学华
姚伟
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At&m Six Nine Materials Co ltd
Suzhou Liujiu New Material Technology Co ltd
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At&m Six Nine Materials Co ltd
Suzhou Liujiu New Material Technology Co ltd
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Abstract

The application relates to the technical field of powder metallurgy, and particularly discloses a NiCrAlY alloy target and a preparation method thereof. The preparation method specifically comprises the following steps: pre-alloying Ni powder and Al powder by using zirconia balls, and uniformly mixing the pre-alloyed Ni powder and the pre-alloyed Al powder with Cr powder and Y powder to obtain NiCrAlY alloy powder; vacuum heating and degassing are carried out on the NiCrAlY alloy powder in a stainless steel sheath, and a degassed ingot blank is obtained; presintering the degassed ingot blank, and performing hot isostatic pressing and machining to obtain the NiCrAlY alloy target. Compared with a smelting casting process, the method adopts a powder metallurgy process to prepare the NiCrAlY alloy target, has the advantages of short process flow, high production efficiency, production cost saving, no high-temperature smelting process, low energy consumption and small environmental pollution, the relative density of the prepared NiCrAlY alloy target is more than 99 percent, and the average grain size is less than 65 mu m.

Description

NiCrAlY alloy target and preparation method thereof
Technical Field
The application relates to the technical field of powder metallurgy, in particular to a NiCrAlY alloy target and a preparation method thereof.
Background
The NiCrAlY coating has excellent compactness, can effectively isolate oxygen and other harmful gases in a high-temperature environment, has good oxidation resistance, can effectively resist hot corrosion of salt fog, high-temperature sulfide and other harmful substances, has excellent wear resistance, can effectively resist friction and wear in a high-temperature environment, prolongs the service life of equipment, and is widely applied to high-temperature corrosion working condition device protection in the fields of aerospace, ships and the like. Meanwhile, the NiCrAlY coating has good toughness and thermal fatigue resistance, can effectively resist the external force effects such as impact and vibration, is not easy to crack and peel off, has high bonding strength with the matrix metal, can be used as a bonding bottom layer of the thermal barrier coating, and improves the thermal expansion compatibility between the ceramic coating and the matrix.
The NiCrAlY coating is generally prepared by adopting a Physical Vapor Deposition (PVD) method, the preparation process is mature, the prepared coating has high quality, and parameters such as thickness and uniformity of the coating can be well controlled. PVD is a method for vaporizing a coating target material by a physical method (such as evaporation, sputtering, etc.), and depositing a film on the surface of a substrate, and has the advantages of low deposition temperature, high deposition speed, simple equipment structure, no pollution, etc.
The quality of the coated target material can have important influence on the coating performance, and the quality is mainly reflected in the aspects of purity, density, internal defects, grain size and the like. The higher the purity of the coating target material is, the lower the impurity element content in the coating is, and the better the PVD coating performance is, including corrosion resistance, optical performance and the like; the density of the coating target material is high, the coating speed can be improved, and meanwhile, the coating target material has certain strength and can better bear the thermal stress in the coating process; defects such as air holes, inclusions and the like in the coating target material can generate discharge phenomenon during coating, large liquid drops are formed, and the surface quality of the coating is affected; the smaller the grain size of the coating target material is, the coating speed can be improved, and the coating is more compact and uniform in thickness.
The film plating target material used for preparing the NiCrAlY coating is a NiCrAlY alloy target material. The NiCrAlY alloy target is usually prepared by adopting a vacuum melting casting process, and because the density and melting point difference of elements such as Ni, cr, al, Y are large, the burning loss of low-melting-point elements is easy to occur in the melting process, so that the control difficulty of the components of the NiCrAlY alloy target is increased, and binary alloys such as nickel-chromium, aluminum-yttrium and the like need to be prepared in advance, so that the preparation process is complicated. Segregation phenomenon easily occurs in the casting and forming process, so that the components of the target material are unevenly distributed, and defects such as air holes, looseness and the like easily occur in the target material, so that the preparation yield of the target material is reduced. Meanwhile, the smelting and casting process has the advantages of high energy consumption and high cost, and a large amount of pollutants such as waste gas, waste water, waste residue and the like can be generated in the process, so that a certain pollution is caused to the environment.
Based on the above, in order to improve the quality of the NiCrAlY alloy target and overcome the defects of low melting point element burning loss and segregation phenomenon easily occurring in the preparation process, it is necessary to find a new target preparation process.
Disclosure of Invention
In order to provide a NiCrAlY alloy target with high relative density, small crystal grains and low energy consumption in the preparation process, the application provides a NiCrAlY alloy target and a preparation method thereof.
In a first aspect, the present application provides a method for preparing a NiCrAlY alloy target, which adopts the following technical scheme:
the preparation method of the NiCrAlY alloy target material specifically comprises the following steps: pre-alloying Ni powder and Al powder by using zirconia balls, and uniformly mixing the pre-alloyed Ni powder and the pre-alloyed Al powder with Cr powder and Y powder to obtain NiCrAlY alloy powder; vacuum heating and degassing are carried out on the NiCrAlY alloy powder in a stainless steel sheath, and a degassed ingot blank is obtained; presintering the degassed ingot blank, and performing hot isostatic pressing and machining to obtain the NiCrAlY alloy target.
Powder metallurgy is a process for manufacturing metallic materials, composite materials, and various types of articles from metal powder (or a mixture of metal powder and non-metal powder) as a raw material through forming and sintering. Compared with the smelting and casting process, the powder metallurgy process does not need high-temperature smelting, and high-temperature energy consumption in the traditional metallurgical processing is saved. Meanwhile, the forming and sintering temperatures are greatly lower than the smelting and casting temperatures, element burning loss in the smelting process and segregation in the casting process can be avoided, the prepared target material is very good in uniformity and high in compactness, and the requirement of preparing high-performance coatings is met.
Compared with the smelting and casting process in the related technology, the method for preparing the NiCrAlY alloy target by adopting the powder metallurgy process has the advantages of short process flow, high production efficiency, production cost saving, no high-temperature smelting process, low energy consumption and little environmental pollution.
According to the method, the Ni powder and the Al powder are prealloyed through the impact ball milling of the zirconia balls, the ingot blank is placed into a heat treatment furnace for presintering after degassing, and alloying reaction between the Ni powder and the Al powder is performed in advance, so that the exothermic amount of the reaction between Ni and Al is greatly reduced when the ingot blank is subjected to hot isostatic pressing.
The NiCrAlY alloy target is prepared by adopting a powder metallurgy process, and Ni and Al can undergo alloying reaction during hot isostatic pressing, particularly when the weight percentage of Al is high, the reaction heat release amount is large, so that the sheath is molten and leaks air, and the preparation of the target fails. The stainless steel sheath is adopted, powder does not react with the sheath material when the ingot blank is subjected to hot isostatic pressing, the risk of sheath melting and air leakage is further reduced, and the NiCrAlY alloy target is successfully prepared.
Optionally, in the prealloying, a ratio of a weight of the zirconia balls to a total weight of the Ni powder and the Al powder is (5-10): 1.
optionally, in the prealloying, a ratio of a weight of the zirconia balls to a total weight of the Ni powder and the Al powder is (6-8): 1.
optionally, in the degassing, the temperature is 400-430 ℃ and the vacuum degree is 1 multiplied by 10 -2 -1×10 -3 Pa。
Optionally, in the pre-sintering, the sintering temperature is 450-480 ℃ and the heat preservation time is 5-9h.
Optionally, in the hot isostatic pressing, the temperature is 450-500 ℃, the pressure is 120-150MPa, and the heat preservation and pressure maintaining time is 3-6h.
In a specific embodiment, the preparation method of the NiCrAlY alloy target specifically comprises the following steps:
(1) Prealloying: pre-alloying Ni powder and Al powder by using zirconia balls to obtain pre-alloyed Ni powder and Al powder;
(2) Mixing powder: uniformly mixing Cr powder, Y powder, the prealloyed Ni powder and Al powder to obtain NiCrAlY alloy powder;
(3) Degassing: vacuum heating and degassing are carried out on the NiCrAlY alloy powder in a stainless steel sheath, and a degassed ingot blank is obtained;
(4) Presintering: presintering the degassed ingot blank to obtain a presintered ingot blank;
(5) Hot isostatic pressing: carrying out hot isostatic pressing on the presintered ingot blank to obtain a hot isostatic pressed ingot blank;
(6) Machining: and removing the sheath from the ingot blank after hot isostatic pressing through milling, obtaining a NiCrAlY alloy target blank through linear cutting, and further obtaining the NiCrAlY alloy target with the required external dimension through machining.
Optionally, the NiCrAlY alloy target comprises the following raw materials in percentage by weight: 10-30% of Cr, 15-35% of Al, 0.5-2% of Y and the balance of Ni.
The NiCrAlY alloy target is prepared by adopting a smelting casting process, the weight percentage content of Al is generally not more than 20%, the excessive content of Al can cause the increase of burning loss during smelting, and the difficulty of controlling alloy components is increased. The method adopts a powder metallurgy process, can prepare the NiCrAlY alloy target with high Al content, and the weight percentage content of Al can reach 35 percent.
Optionally, the purity of the Ni powder is more than or equal to 99.9wt percent, and the granularity is 250-500 meshes; the purity of the Cr powder is more than or equal to 99.8wt percent, and the granularity is 200-500 meshes; the purity of the Al powder is more than or equal to 99.8wt percent, and the granularity is 325-500 meshes; the purity of the Y powder is more than or equal to 99.8wt percent, and the granularity is 200-500 meshes.
In a second aspect, the present application provides a NiCrAlY alloy target material prepared by the above preparation method.
Optionally, the relative density of the NiCrAlY alloy target is more than 99%, and the average grain size is less than 65 mu m.
The relative density of the NiCrAlY alloy target material prepared by the method is more than 99%, the average grain size is less than 65 mu m, the structure is compact, the defects of air holes, looseness and the like are avoided, the element distribution is uniform, the segregation phenomenon is avoided, and the product qualification rate is high.
In summary, the present application has the following beneficial effects:
1. compared with a smelting casting process, the method for preparing the NiCrAlY alloy target by adopting the powder metallurgy process has the advantages of short process flow, high production efficiency, production cost saving, no high-temperature smelting process, low energy consumption and small environmental pollution.
2. The relative density of the NiCrAlY alloy target material prepared by the method is more than 99%, the average grain size is less than 65 mu m, the structure is compact, the defects of air holes, looseness and the like are avoided, the element distribution is uniform, the segregation phenomenon is avoided, and the product qualification rate is high.
3. The NiCrAlY alloy target is prepared by adopting a smelting casting process, the weight percentage content of Al is generally not more than 20%, the excessive content of Al can cause the increase of burning loss during smelting, and the difficulty of controlling alloy components is increased. The method adopts a powder metallurgy process, can prepare the NiCrAlY alloy target with high Al content, and the weight percentage content of Al can reach 35 percent.
4. According to the method, the Ni powder and the Al powder are prealloyed through the impact ball milling of the zirconia balls, the ingot blank is placed into a heat treatment furnace for presintering after degassing, and alloying reaction between the Ni powder and the Al powder is performed in advance, so that the exothermic amount of the reaction between Ni and Al is greatly reduced when the ingot blank is subjected to hot isostatic pressing.
5. The NiCrAlY alloy target is prepared by adopting a powder metallurgy process, and Ni and Al can undergo alloying reaction during hot isostatic pressing, particularly when the weight percentage of Al is high, the reaction heat release amount is large, so that the sheath is molten and leaks air, and the preparation of the target fails. The stainless steel sheath is adopted, powder does not react with the sheath material when the ingot blank is subjected to hot isostatic pressing, the risk of sheath melting and air leakage is further reduced, and the NiCrAlY alloy target is successfully prepared.
Drawings
Fig. 1 is a hot isostatic pressed ingot prepared in example 1.
FIG. 2 is a microstructure of the NiCrAlY alloy target prepared in example 1.
Detailed Description
Before describing in detail embodiments of the present application, it is to be understood that the terminology used herein is for the purpose of describing particular embodiments only. Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this term belongs.
The application provides a preparation method of a NiCrAlY alloy target. The NiCrAlY alloy target comprises the following raw materials in percentage by weight: 10-30% of Cr, 15-35% of Al, 0.5-2% of Y and the balance of Ni. The relative density of the NiCrAlY alloy target is more than 99%, and the average grain size is less than 65 mu m.
The preparation method of the NiCrAlY alloy target material specifically comprises the following steps:
(1) Prealloying: and pre-alloying the Ni powder and the Al powder by using zirconia balls to obtain pre-alloyed Ni powder and Al powder. Wherein the weight ratio of zirconia balls to the total weight of the Ni powder and the Al powder is (5-10): 1.
(2) Mixing powder: and uniformly mixing Cr powder, Y powder, the prealloyed Ni powder and Al powder to obtain NiCrAlY alloy powder.
(3) Degassing: and carrying out vacuum heating and degassing on the NiCrAlY alloy powder in a stainless steel sheath to obtain a degassed ingot blank. Wherein the temperature is 400-430 deg.C, and the vacuum degree is 1×10 -2 -1×10 -3 Pa。
(4) Presintering: and presintering the degassed ingot blank to obtain a presintered ingot blank. Wherein the sintering temperature is 450-480 ℃, and the heat preservation time is 5-9h.
(5) Hot isostatic pressing: and carrying out hot isostatic pressing on the presintered ingot blank to obtain the ingot blank after hot isostatic pressing. Wherein the temperature is 450-500 ℃, the pressure is 120-150MPa, and the heat preservation and pressure maintaining time is 3-6h.
(6) Machining: and removing the sheath from the ingot blank after hot isostatic pressing through milling, obtaining a NiCrAlY alloy target blank through linear cutting, and further obtaining the NiCrAlY alloy target with the required external dimension through machining.
For the purposes, technical solutions and advantages of the present application, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings. All other embodiments, which can be made by those skilled in the art based on the embodiments of the present application without making any inventive effort, are intended to be within the scope of the present application.
The present application will be described in further detail with reference to examples, drawings, comparative examples and performance test results.
In the following examples, ni powder, cr powder, al powder and Y powder were used as raw materials for preparing the NiCrAlY alloy target. Wherein the purity of Ni powder is more than or equal to 99.9wt percent, and the granularity is 250-500 meshes; the purity of Cr powder is more than or equal to 99.8wt percent, and the granularity is 200-500 meshes; the purity of the Al powder is more than or equal to 99.8 weight percent, and the granularity is 325-500 meshes; the purity of the Y powder is more than or equal to 99.8wt percent, and the granularity is 200-500 meshes.
Examples
Example 1
The embodiment provides a NiCrAlY alloy target.
The NiCrAlY alloy target comprises the following elements in percentage by weight: 20% of Cr, 30% of Al, 1.5% of Y and the balance of Ni.
The preparation method of the NiCrAlY alloy target material specifically comprises the following steps:
1. prealloying: adding Ni powder, al powder and zirconia balls into a three-dimensional mixer, uniformly mixing, and pre-alloying the Ni powder and the Al powder by impact ball milling of the zirconia balls to obtain pre-alloyed Ni powder and Al powder. Wherein, the weight ratio of the zirconia balls to the total weight of the Ni powder and the Al powder is 8:1.
2. mixing powder: adding Cr powder, Y powder, prealloyed Ni powder and Al powder into a three-dimensional mixer to be uniformly mixed, and obtaining NiCrAlY alloy powder.
3. Degassing: and (3) loading the NiCrAlY alloy powder into a stainless steel sheath, and carrying out vacuum heating and degassing to obtain a degassed ingot blank. Wherein the degassing temperature is 410 ℃, and the degassing vacuum degree is 2×10 -3 Pa。
4. Presintering: and (3) placing the degassed ingot blank into a heat treatment furnace for presintering to obtain a presintered ingot blank. Wherein the sintering temperature is 460 ℃, and the heat preservation time is 7h.
5. Hot isostatic pressing: and carrying out hot isostatic pressing on the presintered ingot blank to obtain the ingot blank after hot isostatic pressing. Wherein the hot isostatic pressing temperature is 480 ℃, the pressure is 130MPa, and the heat preservation and pressure maintaining time is 5h.
6. Machining: and removing the sheath from the ingot blank after hot isostatic pressing through milling, obtaining a NiCrAlY alloy target blank through linear cutting, and further obtaining the NiCrAlY alloy target with the required external dimension through machining.
In this example, the ingot after hot isostatic pressing is shown in fig. 1, and the microstructure of the NiCrAlY alloy target is shown in fig. 2.
As can be seen from FIG. 2, the relative density of the NiCrAlY alloy target material prepared in the embodiment is 99.8%, the structure is compact, the defects of air holes, looseness and the like are avoided, the average grain size is 60 mu m, the elements are uniformly distributed, and the segregation phenomenon is avoided.
Example 2
The embodiment provides a NiCrAlY alloy target. The NiCrAlY alloy target differs from example 1 in that: the NiCrAlY alloy target comprises the following elements in percentage by weight: 15% of Cr, 20% of Al, 1% of Y and the balance of Ni. The preparation method is the same as that of example 1.
Based on the same principle as in example 1, the relative density of the NiCrAlY alloy target prepared in the example is 99.7%, the structure is compact, defects such as air holes and looseness are avoided, the average grain size is 62 mu m, the elements are uniformly distributed, and segregation phenomenon is avoided.
Examples 3 to 5
Examples 3-5 provide a NiCrAlY alloy target. The NiCrAlY alloy target differs from example 1 in that: the prealloying method is characterized in that the weight ratio of the zirconia balls to the total weight of the Ni powder and the Al powder is different, and the specific ratio is shown in the table 1. The remaining operation steps were the same as in example 1.
Examples 6 to 8
Examples 6-8 provide a NiCrAlY alloy target. The NiCrAlY alloy target differs from example 1 in that: in the preparation method, sintering temperatures are different in pre-sintering, and are shown in table 1. The remaining operation steps were the same as in example 1.
TABLE 1 partial preparation parameters and test results in examples 1-8
Based on the same principle as in example 1, the NiCrAlY alloy targets prepared in examples 3 to 8 were each examined. The test results are shown in Table 1.
As can be seen from table 1, in the prealloying, the ratio of the weight of zirconia balls to the total weight of Ni powder and Al powder was controlled to be (5-10): 1, the prepared NiCrAlY alloy target material has excellent relative density and average grain size. In particular, the ratio of the weight of zirconia balls to the total weight of the Ni powder and the Al powder is controlled to be (6-8): 1, the relative density and average grain size of the NiCrAlY alloy target material can be further optimized, the relative density reaches more than 99.8 percent, and the average grain size is less than 60 mu m.
As can be seen from Table 1, in the pre-sintering, the sintering temperature was controlled to 450-480 ℃, and the obtained NiCrAlY alloy target material had excellent relative density and average grain size. In particular, the relative density and average grain size of the NiCrAlY alloy target material can be further optimized by controlling the sintering temperature to 460-470 ℃, the relative density can reach 99.9%, and the average grain size can reach 59 mu m.
Comparative example
Comparative example 1
The comparative example provides a NiCrAlY alloy target. The NiCrAlY alloy target differs from example 1 in that: ni powder and Al powder are not prealloyed in the preparation method. I.e. without the step of prealloying, the "powder mixing" step is as follows: and adding the Ni powder, the Al powder, the Cr powder and the Y powder into a three-dimensional mixer for uniform mixing to obtain the NiCrAlY alloy powder. The remaining operation steps were the same as in example 1.
In this comparative example, since Ni powder and Al powder were not prealloyed, the reaction exotherm of Ni and Al was large during hot isostatic pressing, the ingot melted, and the target preparation failed.
Comparative example 2
The comparative example provides a NiCrAlY alloy target. The NiCrAlY alloy target differs from example 1 in that: the material of the sheath used in the degassing step in the preparation method. In the step (3) of degassing, the NiCrAlY alloy powder is filled into an aluminum sheath, and vacuum heating and degassing are carried out. The remaining operation steps were the same as in example 1.
In this comparative example, since the capsule used in the degassing step is an aluminum capsule, ni reacts with the aluminum capsule during hot isostatic pressing, the ingot melts, and the target preparation fails.
Comparative example 3
The comparative example provides a NiCrAlY alloy target. The NiCrAlY alloy target differs from example 1 in that: the preparation process was not pre-sintered. I.e. the degassing step is directly followed by a hot isostatic pressing step. The remaining operation steps were the same as in example 1.
In this comparative example, since pre-sintering was not performed, the reaction exotherm of Ni and Al was large at the time of hot isostatic pressing, the ingot was melted, and the target preparation failed.
From comparison of the results of example 1 and comparative examples 1 to 3, it is understood that the sheath material of the pre-alloying and degassing steps of Ni powder and Al powder and the pre-sintering step are critical to the preparation process of the NiCrAlY alloy target. According to the method, the Ni powder and the Al powder are prealloyed through the impact ball milling of the zirconia balls, the ingot blank is placed into a heat treatment furnace for presintering after degassing, and alloying reaction between the Ni powder and the Al powder is performed in advance, so that the exothermic amount of the reaction between Ni and Al is greatly reduced when the ingot blank is subjected to hot isostatic pressing. The NiCrAlY alloy target is prepared by adopting a powder metallurgy process, and Ni and Al can undergo alloying reaction during hot isostatic pressing, particularly when the weight percentage of Al is high, the reaction heat release amount is large, so that the sheath is molten and leaks air, and the preparation of the target fails. The stainless steel sheath is adopted, powder does not react with the sheath material when the ingot blank is subjected to hot isostatic pressing, the risk of sheath melting and air leakage is further reduced, and the NiCrAlY alloy target is successfully prepared.
Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present application, and are not limiting thereof; although the present application has been described in detail with reference to the foregoing embodiments, it should be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit and scope of the corresponding technical solutions.

Claims (10)

1.一种NiCrAlY合金靶材的制备方法,其特征在于,所述制备方法具体包括以下步骤:利用氧化锆球将Ni粉、Al粉预合金化,再与Cr粉、Y粉混匀,得到NiCrAlY合金粉;在不锈钢包套中对所述NiCrAlY合金粉进行真空加热脱气,获得脱气后的锭坯;将脱气后的锭坯进行预烧结,再经过热等静压和机加工,即得NiCrAlY合金靶材。1. A method for preparing a NiCrAlY alloy target, characterized in that the preparation method specifically includes the following steps: using zirconia balls to pre-alloy Ni powder and Al powder, and then mix them with Cr powder and Y powder to obtain NiCrAlY alloy powder; vacuum heating and degassing the NiCrAlY alloy powder in a stainless steel jacket to obtain a degassed ingot; pre-sinter the degassed ingot, and then undergo hot isostatic pressing and machining. That is, NiCrAlY alloy target material is obtained. 2.根据权利要求1所述的制备方法,其特征在于,所述预合金化中,所述氧化锆球的重量与所述Ni粉和所述Al粉的总重量之比为(5-10):1。2. The preparation method according to claim 1, characterized in that, in the pre-alloying, the ratio of the weight of the zirconia balls to the total weight of the Ni powder and the Al powder is (5-10 ):1. 3.根据权利要求2所述的制备方法,其特征在于,所述预合金化中,所述氧化锆球的重量与所述Ni粉和所述Al粉的总重量之比为(6-8):1。3. The preparation method according to claim 2, characterized in that, in the pre-alloying, the ratio of the weight of the zirconia balls to the total weight of the Ni powder and the Al powder is (6-8 ):1. 4.根据权利要求1所述的制备方法,其特征在于,所述脱气中,温度为400-430℃,真空度为1×10-2-1×10-3Pa。4. The preparation method according to claim 1, characterized in that during the degassing, the temperature is 400-430°C and the vacuum degree is 1×10 -2 -1×10 -3 Pa. 5.根据权利要求1所述的制备方法,其特征在于,所述预烧结中,烧结温度为450-480℃,保温时间为5-9h。5. The preparation method according to claim 1, characterized in that in the pre-sintering, the sintering temperature is 450-480°C, and the holding time is 5-9 hours. 6.根据权利要求1所述的制备方法,其特征在于,所述热等静压中,温度为450-500℃,压力为120-150MPa,保温保压时间为3-6h。6. The preparation method according to claim 1, characterized in that, in the hot isostatic pressing, the temperature is 450-500°C, the pressure is 120-150MPa, and the heat and pressure holding time is 3-6 hours. 7. 根据权利要求1所述的制备方法,其特征在于,所述NiCrAlY合金靶材包括以下重量百分比的原料:Cr 10-30%,Al 15-35%,Y 0.5-2%,Ni为余量。7. The preparation method according to claim 1, characterized in that, the NiCrAlY alloy target material includes the following weight percentage of raw materials: Cr 10-30%, Al 15-35%, Y 0.5-2%, Ni is the balance. quantity. 8.根据权利要求1所述的制备方法,其特征在于,所述Ni粉纯度为≥99.9wt%,粒度为250-500目;所述Cr粉纯度为≥99.8wt%,粒度为200-500目;所述Al粉纯度为≥99.8wt%,粒度为325-500目;所述Y粉纯度为≥99.8wt%,粒度为200-500目。8. The preparation method according to claim 1, characterized in that the purity of the Ni powder is ≥99.9wt% and the particle size is 250-500 mesh; the purity of the Cr powder is ≥99.8wt% and the particle size is 200-500 mesh; the purity of the Al powder is ≥99.8wt%, and the particle size is 325-500 mesh; the purity of the Y powder is ≥99.8wt%, and the particle size is 200-500 mesh. 9.一种利用权利要求1-8中任一项所述的制备方法制得的NiCrAlY合金靶材。9. A NiCrAlY alloy target prepared by the preparation method according to any one of claims 1 to 8. 10.根据权利要求9所述的NiCrAlY合金靶材,其特征在于,所述NiCrAlY合金靶材的相对密度在99%以上,平均晶粒尺寸<65μm。10. The NiCrAlY alloy target according to claim 9, characterized in that the relative density of the NiCrAlY alloy target is above 99% and the average grain size is <65 μm.
CN202311762469.4A 2023-12-20 2023-12-20 NiCrAlY alloy target and preparation method thereof Pending CN117733157A (en)

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CN116079055A (en) * 2023-02-08 2023-05-09 苏州六九新材料科技有限公司 CrAlFe-based alloy target and preparation method thereof
CN116804265A (en) * 2023-07-21 2023-09-26 苏州六九新材料科技有限公司 CrAlCuFe alloy target and preparation method thereof

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JPH11335822A (en) * 1998-05-25 1999-12-07 Tosoh Corp NiAlMo sputtering target and method for producing the same
CN1685078A (en) * 2002-06-07 2005-10-19 黑罗伊斯有限公司 Fabrication of ductile intermetallic sputtering targets
TW201416460A (en) * 2012-10-16 2014-05-01 Solar Applied Mat Tech Corp A mixture of aluminum-nickel pre-alloyed powders and an AlNi target made from the same
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