CN119393937B

CN119393937B - A temperature control method, device and electronic equipment

Info

Publication number: CN119393937B
Application number: CN202411665488.XA
Authority: CN
Inventors: 张伟
Original assignee: Beijing Jingyi Automation Equipment Co Ltd
Current assignee: Beijing Jingyi Automation Equipment Co Ltd
Priority date: 2024-11-20
Filing date: 2024-11-20
Publication date: 2025-12-05
Anticipated expiration: 2044-11-20
Also published as: CN119393937A

Abstract

This application provides a temperature control method, apparatus, and electronic device. The system includes a refrigeration device and a circulation device. The refrigeration device includes a compressor, a heat accumulator, an evaporator, and a cooling device. The method includes: acquiring a first circulation temperature at the inlet end of a second heat exchange channel in the evaporator; adjusting a first opening degree of a first channel and a second opening degree of a second channel in a three-way valve according to the first circulation temperature, so that the circulating liquid flowing out of the outlet end of the circulation device flows through the first channel and the second heat exchange channel in the heat accumulator in a first ratio, and mixes with the circulating liquid flowing through the second channel in a second ratio before flowing into the second heat exchange channel in the evaporator, so that the circulating liquid in the first ratio accumulates heating energy for the heat accumulator, and the heating energy is used to heat the circulating liquid according to the temperature rise command. In this way, the waiting time for heating and cooling can be reduced, production efficiency can be improved, energy consumption can be saved and consumption reduced, equipment production costs can be reduced, and it is beneficial to the miniaturization of equipment.

Description

Temperature control method and device and electronic equipment

Technical Field

The present application relates to the field of control technologies, and in particular, to a temperature control method, a temperature control device, and an electronic device.

Background

Semiconductor temperature control devices are important devices in semiconductor integrated circuit fabrication processes that require the provision of a desired temperature output for controlling the temperature of the process chamber of the etching apparatus during the etching process of integrated circuit fabrication. The semiconductor temperature control device accurately controls the temperature through a refrigerating and heating link in actual use. The process chamber of the etching equipment needs different temperatures in the whole process to meet the production process, and the temperature is generally switched periodically within-20 ℃ to 90 ℃. The semiconductor temperature control device is required to switch different temperatures according to the process requirement, corresponding process production can be carried out when the temperature of the process cavity reaches a target value, waiting time can be generated in the temperature rising and falling process, and the conventional temperature control device is adopted to switch from high temperature to low temperature or from low temperature to high temperature, so that the waiting time is long, and the production efficiency is affected.

Disclosure of Invention

Accordingly, the present application is directed to a temperature control method, apparatus and electronic device, so as to solve the problem that the existing temperature control device has long temperature rise and fall waiting time and affects the production efficiency.

The embodiment of the application provides a temperature control method, which is applied to a temperature control system, wherein the system comprises a refrigerating device and a circulating device, the refrigerating device comprises a compressor, a heat accumulator, an evaporator and cooling equipment, the outlet end of a first heat exchange channel in the evaporator is connected with the inlet end of the compressor, the outlet end of the compressor comprises two paths, the first path is connected with the inlet end of the first heat exchange channel in the heat accumulator, the second path and the outlet end of the first heat exchange channel in the heat accumulator are jointly connected with the inlet end of the cooling equipment and the inlet end of the first heat exchange channel in the evaporator, the outlet end of the cooling equipment is connected with the inlet end of the first heat exchange channel in the evaporator, the outlet end of a second heat exchange channel in the evaporator is connected with the inlet end of the circulating device, the outlet end of the circulating device is provided with a three-way valve, the first channel of the three-way valve is connected with the inlet end of the second heat exchange channel in the heat accumulator, the second channel and the outlet end of the second heat exchange channel in the heat accumulator are jointly connected with the inlet end of the second heat exchange channel in the evaporator, and the method comprises the steps of:

Collecting a first circulation temperature of an inlet end of a second heat exchange channel in the evaporator;

According to the first circulation temperature, the first opening of the first channel and the second opening of the second channel in the three-way valve are adjusted, so that circulating liquid flowing out of the outlet end of the circulating device flows through the first channel and the second heat exchange channel in the heat accumulator according to a first proportion, and flows into the second heat exchange channel in the evaporator after being mixed with circulating liquid flowing through the second channel according to a second proportion, heating energy is accumulated for the heat accumulator through the circulating liquid with the first proportion, wherein the heating energy accumulated by the heat accumulator is used for heating the circulating liquid according to a heating instruction, and temperature control is performed on load equipment through the circulating liquid.

Further, adjusting the first opening of the first passage and the second opening of the second passage in the three-way valve according to the first circulation temperature includes:

And when the first circulating temperature is greater than a preset temperature threshold value, increasing the first opening of the first channel and/or reducing the second opening of the second channel.

Further, the method further comprises:

When it is determined that the regenerator is no longer capable of accumulating heating energy through the circulating fluid, the first passage is closed and the second passage is opened.

Further, it is determined that the regenerator is no longer capable of accumulating heating energy via the circulating fluid by:

Collecting a second circulation temperature of an outlet end of the circulation device and a third circulation temperature of an outlet end of a second heat exchange channel in the heat accumulator;

Determining a temperature difference between the second cycle temperature and the third cycle temperature;

And when the temperature difference is smaller than a preset threshold value, determining that the heat accumulator can not accumulate heating energy through the circulating liquid.

Further, the cooling device comprises a condenser and a supercooling liquid storage device, wherein the outlet end of a first heat exchange channel in the evaporator is connected with the inlet end of the compressor, the outlet end of the compressor comprises two paths, the first path is connected with the inlet end of the first heat exchange channel in the heat accumulator through a first valve, the second path is connected with the inlet end of a second heat exchange channel in the condenser through a second valve together with the outlet end of the first heat exchange channel in the heat accumulator, the second path is connected with the inlet end of the first heat exchange channel in the evaporator through a third valve together with the outlet end of the first heat exchange channel in the heat accumulator, the outlet ends of the second heat exchange channels in the condenser are respectively connected with the inlet end of the supercooling liquid storage device, the inlet end of an external cooling pipeline of the supercooling liquid storage device is connected with the inlet end of the first heat exchange channel in the evaporator through a sixth valve, the outlet end of the supercooling liquid storage device is connected with the inlet end of the first heat exchange channel in the evaporator through a fourth valve, the outlet end of the external cooling pipeline is connected with the inlet end of the external cooling pipeline in the supercooling liquid storage device comprises:

closing the first valve, the fourth valve, the second channel of the three-way valve and the sixth valve according to the received temperature rising instruction, and opening the second valve, the third valve and the first channel of the three-way valve;

When the temperature of the circulating liquid is determined to be increased to meet the preset condition, the first channel of the three-way valve is closed, and the second channel of the three-way valve is opened, wherein the preset condition is that the temperature difference between the third circulating temperature of the outlet end of the second heat exchange channel in the heat accumulator and the second circulating temperature of the outlet end of the circulating device is smaller than a preset threshold value.

Further, the method further comprises:

And closing the second valve, the third valve, the first channel of the three-way valve and the sixth valve according to the received cooling instruction, and opening the first valve, the second channel of the three-way valve and the fourth valve.

Further, the method further comprises:

After the temperature control system is started, entering a temperature control preparation stage and lasting for a preset time period so that the heat accumulator stores heating energy, and the supercooling liquid accumulator supercools and stores the refrigerant;

And in the temperature control preparation stage, closing the second valve, the third valve, the first channel of the three-way valve and the fourth valve, opening the first valve and the second channel of the three-way valve, and adjusting the opening of the sixth valve according to the fourth circulation temperature of the inlet end of the circulation device.

Further, the method further comprises:

collecting a first refrigeration temperature at an inlet end of the compressor and a first refrigeration pressure at an outlet end of a first heat exchange channel in the evaporator;

determining a superheat degree difference value between an actual superheat degree value and a preset superheat degree value according to the first refrigeration temperature and the first refrigeration pressure;

And adjusting the opening of the fifth valve according to the superheat degree difference value.

The embodiment of the application also provides a temperature control device which is applied to a temperature control system, wherein the system comprises a refrigerating device and a circulating device, the refrigerating device comprises a compressor, a heat accumulator, an evaporator and cooling equipment, the outlet end of a first heat exchange channel in the evaporator is connected with the inlet end of the compressor, the outlet end of the compressor comprises two paths, the first path is connected with the inlet end of the first heat exchange channel in the heat accumulator, the second path and the outlet end of the first heat exchange channel in the heat accumulator are jointly connected with the inlet end of the cooling equipment and the inlet end of the first heat exchange channel in the evaporator, the outlet end of the cooling equipment is connected with the inlet end of the first heat exchange channel in the evaporator, the outlet end of a second heat exchange channel in the evaporator is connected with the inlet end of the circulating device, the outlet end of the circulating device is provided with a three-way valve, the first channel of the three-way valve is connected with the inlet end of the second heat exchange channel in the heat accumulator, the second channel and the outlet end of the second channel in the heat accumulator is jointly connected with the inlet end of the second heat exchange channel in the evaporator, and the circulating device comprises:

The acquisition module is used for acquiring a first circulating temperature of an inlet end of the second heat exchange channel in the evaporator;

The device comprises a three-way valve, a heat storage device, a heat exchange device, a load device, a heat exchange module, a control module and a control module, wherein the three-way valve is used for controlling the first opening of the first channel and the second opening of the second channel according to the first circulation temperature, so that circulating liquid flowing out from the outlet end of the circulating device flows through the first channel and the second heat exchange channel in the heat storage device according to a first proportion, is mixed with circulating liquid flowing through the second channel according to a second proportion and flows into the second heat exchange channel in the evaporator, the circulating liquid with the first proportion is used for accumulating heating energy for the heat storage device, the heat storage energy stored by the heat storage device is used for heating the circulating liquid according to a heating instruction, and the temperature of the load device is controlled through the circulating liquid.

The embodiment of the application also provides electronic equipment, which comprises a processor, a memory and a bus, wherein the memory stores machine-readable instructions executable by the processor, when the electronic equipment is operated, the processor and the memory are communicated through the bus, and the machine-readable instructions are executed by the processor to execute the steps of the temperature control method.

The embodiments of the present application also provide a computer readable storage medium having stored thereon a computer program which, when executed by a processor, performs the steps of the temperature control method as described above.

According to the temperature control method, the temperature control device and the electronic equipment, on one hand, heating energy is stored in the heat accumulator, circulating liquid can be heated according to the heating instruction to improve the heating speed, and the cooling equipment can cool the refrigerant to improve the cooling speed, so that the heating waiting time is shortened under the condition that the power of the compressor, the condenser and the evaporator is not increased, the production efficiency is improved, energy is saved, consumption is reduced, the production cost of the equipment is reduced, and the equipment miniaturization is facilitated. On the other hand, through adjusting the aperture of the three-way valve, circulating liquid flowing out of the outlet end of the circulating device flows through the second heat exchange channel to accumulate heating energy for the heat accumulator, so that energy recovery is realized, and energy conservation and consumption reduction are further realized.

In order to make the above objects, features and advantages of the present application more comprehensible, preferred embodiments accompanied with figures are described in detail below.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are needed in the embodiments will be briefly described below, it being understood that the following drawings only illustrate some embodiments of the present application and therefore should not be considered as limiting the scope, and other related drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

FIG. 1 shows a flow chart of a temperature control method provided by an embodiment of the application;

FIG. 2 is a schematic diagram of a temperature control system according to an embodiment of the present application;

Fig. 3 is a schematic structural diagram of a temperature control device according to an embodiment of the present application;

Fig. 4 shows a schematic structural diagram of an electronic device according to an embodiment of the present application.

Detailed Description

For the purpose of making the objects, technical solutions and advantages of the embodiments of the present application more apparent, the technical solutions of the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present application, and it is apparent that the described embodiments are only some embodiments of the present application, not all embodiments. The components of the embodiments of the present application generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the application, as presented in the figures, is not intended to limit the scope of the application, as claimed, but is merely representative of selected embodiments of the application. Based on the embodiments of the present application, every other embodiment obtained by a person skilled in the art without making any inventive effort falls within the scope of protection of the present application.

It has been found that a semiconductor temperature control device is an important device in the manufacture of semiconductor integrated circuits, and is required to provide a desired temperature output for controlling the temperature of the process chamber of the etching apparatus during the etching process of integrated circuit manufacture. The semiconductor temperature control device accurately controls the temperature through a refrigerating and heating link in actual use. The process chamber of the etching equipment needs different temperatures in the whole process to meet the production process, and the temperature is generally switched periodically within-20 ℃ to 90 ℃. The semiconductor temperature control device is required to switch different temperatures according to the process requirement, corresponding process production can be carried out when the temperature of the process cavity reaches a target value, waiting time can be generated in the temperature rising and falling process, and the conventional temperature control device is adopted to switch from high temperature to low temperature or from low temperature to high temperature, so that the waiting time is long, and the production efficiency is affected.

Based on the above, the embodiment of the application provides a temperature control method to solve the problems of longer temperature rising and falling waiting time and influence on production efficiency of the existing temperature control equipment.

Referring to fig. 1 and fig. 2, fig. 1 is a flowchart of a temperature control method according to an embodiment of the present application, and fig. 2 is a schematic structural diagram of a temperature control system according to an embodiment of the present application. As shown in fig. 1 and 2, the temperature control method provided in the embodiment of the present application is applied to a temperature control system, and may specifically be a controller (not shown in fig. 2) in the temperature control system. The temperature control system further comprises a refrigeration device 100 and a circulation device 200, wherein the refrigeration device 100 comprises a compressor 112, a heat accumulator 111, an evaporator 115 and a cooling device 117. The controller can acquire the current operation parameters of each component through communication connection with each component in the temperature control system, and sends control instructions to each component so as to adjust the operation parameters of each component.

The refrigerating apparatus 100 has a refrigerant (refrigerant) therein, and the temperature of the refrigerant can be controlled by controlling the refrigerant to flow through each component of the refrigerating apparatus 100 to be warmed and cooled, the circulating apparatus 200 has a circulating liquid therein, the circulating liquid continuously circulates in the circulating apparatus 200 to warm and cool the load device 300, and the temperature of the circulating liquid can be adjusted by controlling the heat exchange between the refrigerant in the refrigerating apparatus 100 and the circulating liquid in the circulating apparatus 200, thereby controlling the temperature of the load device 300.

Specifically, the outlet end of the first heat exchange channel in the evaporator 115 is connected to the inlet end of the compressor 112, the outlet end of the compressor 112 includes two paths, the first path is connected to the inlet end of the first heat exchange channel in the heat accumulator 111, the second path and the outlet end of the first heat exchange channel in the heat accumulator 111 are connected together to the inlet end of the cooling device 117 and the inlet end of the first heat exchange channel in the evaporator 115, and the outlet end of the cooling device 117 is connected to the inlet end of the first heat exchange channel in the evaporator 115. Wherein the compressor 112 sucks the low temperature and low pressure gaseous refrigerant in the evaporator 115 by mechanical energy and then compresses it into the high temperature and high pressure gaseous refrigerant. This process increases the pressure and temperature of the refrigerant, allowing it to effectively release heat.

The outlet end of the second heat exchange channel in the evaporator 115 is connected to the inlet end of the circulation device 200, the outlet end of the circulation device 200 is provided with a three-way valve 201, the first channel (i.e., channel 1-2) of the three-way valve 201 is connected to the inlet end of the second heat exchange channel in the heat accumulator 111, and the second channel (i.e., channel 1-3) and the outlet end of the second heat exchange channel in the heat accumulator 111 are commonly connected to the inlet end of the second heat exchange channel in the evaporator 115.

The temperature control method provided by the embodiment of the application specifically comprises the following steps:

S101, collecting a first circulation temperature of an inlet end of a second heat exchange channel in the evaporator 115.

In this step, the first circulation temperature T202 of the circulation liquid, i.e., the temperature of the circulation liquid entering the second heat exchange channel of the evaporator 115, may be collected by the temperature sensor 202 installed at the inlet end of the second heat exchange channel of the evaporator 115.

S102, according to the first circulation temperature, the first opening of the first channel and the second opening of the second channel in the three-way valve 201 are adjusted, so that the circulation liquid flowing out from the outlet end of the circulation device 200 flows through the first channel and the second heat exchange channel in the heat accumulator 111 according to a first proportion, and flows into the second heat exchange channel in the evaporator 115 after being mixed with the circulation liquid flowing through the second channel according to a second proportion, so that the circulation liquid with the first proportion is used for accumulating heating energy for the heat accumulator 111, wherein the heating energy stored in the heat accumulator 111 is used for heating the circulation liquid according to a heating instruction, and the temperature of the load device 300 is controlled by the circulation liquid.

It should be noted that, when the process chamber is operated at a high temperature, a thermal load may be generated, so that the liquid outlet of the load device 300 (i.e., the outlet end of the circulation device 200) flows out of the high-temperature circulation liquid. Therefore, in this step, the opening of the three-way valve 201 may be adjusted according to the temperature set value and the temperature real-time value T202, so that a part of the circulating liquid enters the heat accumulator 111 through the 1-2 channel to exchange heat and cool, and then flows into the second heat exchange channel of the evaporator 115 after being mixed with the circulating liquid passing through the 1-3 channel. The first opening and the second opening may be determined according to the temperature set value and the temperature real-time value T202 by using the existing PID control algorithm, and the first ratio and the second ratio correspond to the first opening and the second opening of the three-way valve 201.

Specifically, when the first circulation temperature is greater than a preset temperature threshold, the first opening of the first channel is increased and/or the second opening of the second channel is decreased.

The opening degree of a valve refers to the opening degree of the valve in a piping system, and is generally expressed in percentage, that is, the opening degree of the valve from fully closed to fully opened is generally expressed in 0% (fully closed) to 100% (fully opened). By increasing the first opening of the first channel and/or decreasing the second opening of the second channel, more circulating fluid may be allowed to enter the second heat exchange channel in the regenerator 111 from the 1-2 channels, thereby accumulating heating energy for the regenerator 111 more efficiently.

Thus, the portion of the circulating fluid that enters the second heat exchange channel in the heat accumulator 111 through the 1-2 channels can heat the heat storage medium in the heat accumulator 111, thereby accumulating heating energy for the heat accumulator 111. Thus, the energy recovery is carried out on the high-temperature circulating fluid caused by the thermal load of the load equipment 300, so that the energy conservation and consumption reduction are further realized.

And the heating energy stored in the heat accumulator 111 can be used for heating the circulating liquid according to the heating instruction when the subsequent heating instruction is received. It is worth noting that the existing temperature control equipment can only raise temperature through hot gas exhausted by the compressor and the heater device, the temperature raising speed is low, and if the temperature raising speed is raised, the installed power of each component can only be increased, so that the problems of high energy consumption, high cost and adverse equipment miniaturization are caused. In the embodiment of the application, the heat accumulator 111 is additionally arranged, and the heat accumulating medium can firstly heat the circulating liquid once, and the circulating liquid which is heated once by the heat accumulator 111 enters the evaporator 115 again to heat for the second time, so that the circulating liquid continuously absorbs heat to raise the temperature, and the heating speed of the circulating liquid is improved.

Further, the temperature control method further includes closing the first passage and opening the second passage when it is determined that the heat accumulator 111 can no longer accumulate heating energy through the circulating liquid.

Here, when it is determined that the circulating fluid flowing through the heat accumulator 111 can no longer accumulate heating energy for the heat accumulator 111, the first passage is closed, and the second passage is opened, so that the circulating fluid directly enters the evaporator 115, and the circulating fluid is prevented from being reversely heated again by the heat accumulator 111, resulting in unnecessary energy consumption. The determination method may include setting a preset accumulation period, comparing the temperatures, and the like.

In one possible embodiment, it may be determined that the regenerator 111 is no longer capable of accumulating heating energy via the circulating liquid by:

Step 1, collecting a second circulation temperature of the outlet end of the circulation device 200 and a third circulation temperature of the outlet end of the second heat exchange channel in the heat accumulator 111.

And 2, determining a temperature difference value between the second circulation temperature and the third circulation temperature.

And step 3, when the temperature difference is smaller than a preset threshold value, determining that the heat accumulator 111 can not accumulate heating energy through the circulating liquid.

Here, the second circulation temperature T204 of the circulation liquid may be collected by the temperature sensor 204 installed at the outlet end of the circulation device 200, and the third circulation temperature T203 of the circulation liquid may be collected by the temperature sensor 203 installed at the outlet end of the second heat exchange channel in the heat accumulator 111, the temperature difference tc=t204—t203 is compared with the preset threshold TD, it is determined that the heat accumulation medium in the heat accumulator 111 may perform heat recovery on the circulation liquid when TC is greater than or equal to TD, and it is determined that the heat accumulator 111 cannot accumulate heating energy by the circulation liquid when TC is less than TD. Here, TD refers to a preset threshold, which is an empirical value, for example, 10 ℃ to 20 ℃, and may be specifically set according to different temperature control systems, and the present application is not limited in this regard.

Further, referring back to fig. 2, the cooling device 117 includes a condenser 113 and a supercooling liquid reservoir 114. In the conventional temperature control device, if the cooling speed is to be increased, the power of the compressor 112 needs to be increased, at this time, the condenser 113 and the evaporator 115 also need to be correspondingly increased, at this time, the energy consumption of the device is increased, and the external dimension is increased, which increases the cost of the device. In the embodiment of the application, the supercooling liquid storage device 114 is additionally arranged, so that the supercooling treatment can be performed on the refrigerant cooled by the condenser 113, the supercooling degree of the refrigerant can be improved by cooling again, the refrigerating capacity and the cooling speed are improved, and the energy waste is avoided.

The outlet end of the first heat exchange channel in the evaporator 115 is connected with the inlet end of the compressor 112, the outlet end of the compressor 112 comprises two paths, the first path is connected with the inlet end of the first heat exchange channel in the heat accumulator 111 through the first valve 101, the second path is connected with the inlet end of the second heat exchange channel in the condenser 113 through the second valve 102 together with the outlet end of the first heat exchange channel in the heat accumulator 111, the third valve 103 is connected with the inlet end of the first heat exchange channel in the evaporator 115 together with the outlet end of the first heat exchange channel in the heat accumulator 111, the outlet ends of the second heat exchange channels in the condenser 113 are respectively connected with the inlet end of the supercooling liquid accumulator 114, the inlet end of the external cooling pipeline of the supercooling liquid accumulator 114 is connected with the inlet end of the first heat exchange channel in the evaporator 115 through the fifth valve 105, the outlet end of the supercooling liquid accumulator 114 is connected with the inlet end of the first heat exchange channel in the evaporator 115 through the fourth valve 104, and the outlet end of the external cooling pipeline of the supercooling liquid accumulator 114 is connected with the inlet end of the compressor 112.

Wherein, the external cooling pipeline is arranged outside the liquid storage space in the supercooling liquid storage device 114 and is used for cooling the coolant stored in the liquid storage space. In this way, the temperature of the refrigerant in the liquid storage space can be further reduced and the refrigerating speed can be improved by cooling the liquid storage space in the supercooling liquid storage 114 through the external cooling pipeline, so that the purpose of improving the cooling speed of the circulating liquid is achieved indirectly.

Further, the circulation device 200 includes a water tank 206, a water pump 207, and a heater 208.

The inlet end of the water tank 206 is used as the inlet end of the circulation device 200, the outlet end of the water tank 206 is connected with the inlet end of the water pump 207, the outlet end of the water pump 207 is connected with the inlet end of the heater 208, the outlet end of the heater 208 is connected with the liquid inlet corresponding to the load equipment, and the liquid outlet corresponding to the load equipment is used as the outlet end of the circulation device 200.

Under the power of the water pump 207, the circulating liquid is pumped out of the water tank 206 and sucked into the water pump 207, is discharged from the water pump 207 to the heater 208, enters a position corresponding to the load equipment and exchanges heat with the load equipment, and then returns to the water tank 206 or returns to the water tank 206 through the second heat exchange channel of the heat accumulator 111.

Here, the temperature T205 of the circulating fluid at the inlet end of the water tank 206 may be collected by the temperature sensor 205, and the temperature T209 of the circulating fluid at the inlet corresponding to the load device may be collected by the temperature sensor 209. By comparing T205 and T209, the heater 208 is controlled to heat the circulating liquid.

Further, the temperature control method further comprises:

Step a1, according to the received temperature increasing command, closing the first valve 101, the fourth valve 104, the second channel of the three-way valve 201, and the sixth valve 106, and opening the second valve 102, the third valve 103, and the first channel of the three-way valve 201.

When the load device needs high temperature, the temperature control system needs to perform heating operation, and at this time, a heating command is generated, where a target value of heating (may be a target value of temperature of circulating liquid at a liquid inlet corresponding to the load device, that is, a temperature T209 acquired by the temperature sensor 209 in fig. 1) may be set in the heating command.

At this time, the temperature control device performs heating operation, the valves 101, 104 and 106 are closed, the valves 102 and 103 are opened, the three-way valve 201 is fully opened in the channels 1-2, and the channels 1-3 are closed. The circulating liquid returned from the outlet end of the circulating device 200 enters the second heat exchange channel in the heat accumulator 111 through the valve 201, the circulating liquid exchanges heat with the heat accumulation medium in the heat accumulator 111, and the heat accumulation medium heats the circulating liquid once.

The circulating fluid, which is once warmed up by the heat accumulator 111, enters the second heat exchange passage of the evaporator 115, and meanwhile, the hot gas (high-temperature gaseous refrigerant) discharged from the compressor 112 enters the first heat exchange passage of the evaporator 115 through the valve 103, the circulating fluid exchanges heat with the hot gas in the evaporator 115, and the hot gas flowing through one side of the evaporator 115 warms up the circulating fluid secondarily. Thus, the circulating liquid absorbs heat by continuously circulating, and the temperature is continuously increased.

Step a2, when it is determined that the temperature of the circulating liquid increases to meet a preset condition, closing the first passage of the three-way valve 201 and opening the second passage of the three-way valve 201.

Here, the preset condition means that as the heating energy stored in advance in the heat accumulator 111 is released, the temperature of the circulating liquid increases until the heat accumulator 111 has failed to heat up the circulating liquid effectively.

More specifically, the preset condition is that a temperature difference between the third circulation temperature at the outlet end of the second heat exchange channel in the heat accumulator 111 and the second circulation temperature at the outlet end of the circulation device 200 is smaller than a preset threshold. The temperature difference ta=t203-T204, it is apparent that TA gradually decreases with the heat release of the thermal storage medium, and when TA is less than or equal to TB, it is considered that the heat release of the thermal storage medium in the thermal storage 111 is substantially completed. Here, TB represents a preset threshold, which is an empirical value, such as 2-5 ℃, and may be specifically set according to different temperature control systems, and the present application is not limited in this regard.

At this time, the channels 1-3 are all communicated, and the channels 1-2 are cut off, so that the circulating liquid directly enters the evaporator 115 to exchange heat with the high-temperature hot gas discharged by the compressor 112 for heating, namely, the primary heating process of the circulating liquid by the heat accumulator 111 is cut off.

When the temperature rises to the target value set by the temperature increase instruction, the temperature increase process ends. Correspondingly, the temperature control system enters into a working mode, and the system can keep the current temperature with little energy consumption. For example, the system may adjust the valve opening and the power of each component, etc. according to the target value and the actual detected temperature value by using the existing control algorithm such as PID, etc. to make the system operate in a steady state.

Further, the temperature control method further comprises:

And b, closing the second valve 102, the third valve 103, the first channel of the three-way valve 201 and the sixth valve 106 according to the received cooling instruction, and opening the first valve 101, the second channel of the three-way valve 201 and the fourth valve 104.

When the load device 300 needs low temperature, the temperature control system needs to perform cooling operation, and a cooling instruction is generated at this time, where a target value of cooling (may be a target value of temperature of the circulating liquid at the liquid inlet corresponding to the load device 300, that is, the temperature T209 acquired by the temperature sensor 209 in fig. 1) may be set in the cooling instruction.

At this time, the valves 102, 103, 106 are closed, 101 and 104 are opened, the three-way valve 201 is fully opened in the channels 1-3, and 1-2 are closed. The refrigerant after supercooling stored in the supercooler enters a first heat exchange channel in the evaporator 115 through the valve 104, and at the moment, high-temperature circulating liquid of the circulating system flows through a second heat exchange channel in the evaporator 115 through the three-way valve 201 channels 1-3, and the supercooled refrigerant is gasified in the evaporator 115 to absorb heat so as to enable the circulating liquid to be cooled down rapidly.

At the same time of cooling, hot gas discharged by the compressor 112 enters the first heat exchange channel of the heat accumulator 111 through the valve 101 to exchange heat with the heat accumulating medium, so that the temperature of the heat accumulating medium is increased for the next time, and at the same time, the temperature of the heat accumulating medium is also reduced for one time by the refrigerant hot gas. Then the temperature is reduced for the second time through the condenser 113, and then the cooled temperature enters the supercooling liquid storage 114 for supercooling treatment. Here, the supercooling degree of the refrigerant can be indirectly improved by exchanging heat with the heat storage medium in the heat storage 111, and the refrigerating capacity is improved while the waste of energy is avoided, thereby achieving the effect of energy saving.

When the temperature decreases to the target value set by the cooling instruction, the cooling process ends. Correspondingly, the temperature control system enters into a working mode, and the system can keep the current temperature with little energy consumption. For example, the system may adjust the valve opening and the power of each component, etc. according to the target value and the actual detected temperature value by using the existing control algorithm such as PID, etc. to make the system operate in a steady state.

Further, the temperature control method further comprises:

Step c, after the temperature control system is started, a temperature control preparation stage is performed for a predetermined period of time, so that the heat accumulator 111 stores heating energy, and the supercooling liquid accumulator 114 performs supercooling treatment on the refrigerant and stores the refrigerant.

In this way, after a predetermined period of operation, the heat storage 111 and the supercooling liquid storage 114 store sufficient heating energy and cooling energy, and a warm-up mode for the load apparatus can be entered. The predetermined period of time may be set by integrating the energy storage capacities of the heat accumulator 111 and the supercooling reservoir 114, and the present application is not limited thereto.

In the preparation stage of temperature control, the second valve 102, the third valve 103, the first channel of the three-way valve 201 and the fourth valve 104 are closed, the first valve 101 and the second channel of the three-way valve 201 are opened, and the opening of the sixth valve 106 is adjusted according to the fourth circulation temperature of the inlet end of the circulation device 200.

In the temperature control preparation phase, the temperature control system is started, and the compressor 112 and the water pump 207 are operated. The system is typically in an empty state at this time. The default temperature T209 may be set to an initial value of 20 ℃, the valves 102, 104 are in a closed state, the passages 1-3 of the three-way valve 201 are all on, and 1-2 are off.

At this time, the hot gas discharged from the compressor 112 enters the heat accumulator 111 through the valve 101 to heat the heat storage medium, the temperature of the heat storage medium in the initial state is equal to the ambient temperature, and the temperature of the hot gas discharged from the compressor 112 is generally 80-90 ℃. The high-temperature hot gas exchanges heat through the heat accumulator 111, the temperature of the heat accumulation medium is increased, the hot gas is cooled once, the cooled hot gas is cooled twice through the condenser 113, and the refrigerant cooled twice through the condenser 113 is liquefied after the supercooling treatment of the supercooling liquid reservoir 114 and is stored in the supercooling liquid reservoir 114 in a large amount.

Here, the fourth circulation temperature T205 of the circulation liquid, i.e., the actual temperature value of the inlet of the water tank 206, may be collected by the temperature sensor 205 installed at the inlet end of the circulation device 200, and then the opening degree of the sixth valve 106 may be adjusted according to the temperature difference between T205 and the set target value of T209, so as to maintain the stability of the system.

Further, the temperature control method further comprises:

The method comprises the steps of collecting first refrigeration temperature of an inlet end of a compressor and first refrigeration pressure of an outlet end of a first heat exchange channel in an evaporator, determining a superheat degree difference value between an actual superheat degree value and a preset superheat degree value according to the first refrigeration temperature and the first refrigeration pressure, and adjusting the opening of a fifth valve according to the superheat degree difference value.

In practice, the first refrigeration temperature T109 at the inlet end of the compressor 112 may be collected by the temperature sensor 109, and the first refrigeration pressure P110 at the outlet end of the first heat exchange channel in the evaporator 115 may be collected by the pressure sensor 110.

The saturation temperature of the refrigerant (i.e., the temperature at which the refrigerant is completely evaporated) is found according to the first cooling pressure P110 at the outlet end of the evaporator 115, and the actual superheat value is obtained from the saturation temperature of the refrigerant and the second cooling temperature. In the embodiment of the present application, the actual superheat value=the first cooling temperature (T109) at the inlet end of the compressor 112—the saturation temperature of the refrigerant. And finally, determining the deviation between the actual superheat value and the preset superheat value, and using the deviation for the input of a control algorithm.

The control algorithm determines the opening of the fifth valve 105 based on the superheat difference. For example, when the difference of the superheat degree is too large (the actual value of the subcooling degree is too high), the opening of the fifth valve 105 can be increased to take away the heat of the refrigerant in the subcooling liquid reservoir 114, so as to reduce the superheat degree and ensure the stability of the system operation.

According to the temperature control method provided by the embodiment of the application, on one hand, heating energy is stored in the heat accumulator, circulating liquid can be heated according to a heating instruction to improve the heating speed, and the cooling equipment can cool the refrigerant to improve the cooling speed, so that the heating waiting time is shortened, the production efficiency is improved, the energy is saved, the consumption is reduced, the production cost of the equipment is reduced, and the miniaturization of the equipment is facilitated under the condition that the power of the compressor, the condenser and the evaporator is not increased. On the other hand, through adjusting the aperture of the three-way valve, circulating liquid flowing out of the outlet end of the circulating device flows through the second heat exchange channel to accumulate heating energy for the heat accumulator, so that energy recovery is realized, and energy conservation and consumption reduction are further realized.

Referring to fig. 3, fig. 3 is a schematic structural diagram of a temperature control device according to an embodiment of the application. As shown in fig. 3, the temperature control device provided in the embodiment of the application is applied to a temperature control system, and may specifically be a controller in the temperature control system. The refrigerating device comprises a compressor, a heat accumulator, an evaporator and cooling equipment, wherein the outlet end of a first heat exchange channel in the evaporator is connected with the inlet end of the compressor, the outlet end of the compressor comprises two paths, the first path is connected with the inlet end of the first heat exchange channel in the heat accumulator, the second path and the outlet end of the first heat exchange channel in the heat accumulator are jointly connected with the inlet end of the cooling equipment and the inlet end of the first heat exchange channel in the evaporator, the outlet end of the cooling equipment is connected with the inlet end of the first heat exchange channel in the evaporator, the outlet end of a second heat exchange channel in the evaporator is connected with the inlet end of the circulating device, the outlet end of the circulating device is provided with a three-way valve, the first channel of the three-way valve is connected with the inlet end of the second heat exchange channel in the heat accumulator, and the second channel and the outlet end of the second heat exchange channel in the heat accumulator are jointly connected with the inlet end of the second heat exchange channel in the evaporator, and the device 300 comprises:

An acquisition module 310, configured to acquire a first circulation temperature of an inlet end of a second heat exchange channel in the evaporator;

The adjusting module 320 is configured to adjust, according to the first circulation temperature, a first opening of the first channel and a second opening of the second channel in the three-way valve, so that a circulation liquid flowing out from an outlet end of the circulation device flows through the first channel and a second heat exchange channel in the heat accumulator according to a first proportion, and flows into the second heat exchange channel in the evaporator after being mixed with the circulation liquid flowing through the second channel according to a second proportion, so as to accumulate heating energy for the heat accumulator by the circulation liquid with the first proportion, where the heat accumulating energy accumulated by the heat accumulator is used for heating the circulation liquid according to a temperature raising instruction, and temperature control is performed on the load device by the circulation liquid.

Referring to fig. 4, fig. 4 is a schematic structural diagram of an electronic device according to an embodiment of the application. As shown in fig. 4, the electronic device 400 includes a processor 410, a memory 420, and a bus 430.

The memory 420 stores machine-readable instructions executable by the processor 410, when the electronic device 400 is running, the processor 410 communicates with the memory 420 through the bus 430, and when the machine-readable instructions are executed by the processor 410, the steps of the temperature control method in the method embodiment shown in fig. 1 can be executed, and specific implementation can be referred to in the method embodiment and will not be described herein.

The embodiment of the present application further provides a computer readable storage medium, where a computer program is stored, and when the computer program is executed by a processor, the steps of the temperature control method in the embodiment of the method shown in fig. 1 may be executed, and a specific implementation manner may refer to the embodiment of the method and will not be described herein.

It will be clear to those skilled in the art that, for convenience and brevity of description, specific working procedures of the above-described systems, apparatuses and units may refer to corresponding procedures in the foregoing method embodiments, and are not repeated herein.

In the several embodiments provided by the present application, it should be understood that the disclosed systems, devices, and methods may be implemented in other manners. The above-described apparatus embodiments are merely illustrative, for example, the division of the units is merely a logical function division, and there may be other manners of division in actual implementation, and for example, multiple units or components may be combined or integrated into another system, or some features may be omitted, or not performed. Alternatively, the coupling or direct coupling or communication connection shown or discussed with each other may be through some communication interface, device or unit indirect coupling or communication connection, which may be in electrical, mechanical or other form.

The units described as separate units may or may not be physically separate, and units shown as units may or may not be physical units, may be located in one place, or may be distributed on a plurality of network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.

In addition, each functional unit in the embodiments of the present application may be integrated in one processing unit, or each unit may exist alone physically, or two or more units may be integrated in one unit.

The functions, if implemented in the form of software functional units and sold or used as a stand-alone product, may be stored in a non-volatile computer readable storage medium executable by a processor. Based on this understanding, the technical solution of the present application may be embodied essentially or in a part contributing to the prior art or in a part of the technical solution, in the form of a software product stored in a storage medium, comprising several instructions for causing a computer device (which may be a personal computer, a server, a network device, etc.) to perform all or part of the steps of the method according to the embodiments of the present application. The storage medium includes a U disk, a removable hard disk, a Read-Only Memory (ROM), a random access Memory (Random Access Memory, RAM), a magnetic disk, an optical disk, or other various media capable of storing program codes.

It should be noted that the foregoing embodiments are merely illustrative embodiments of the present application, and not restrictive, and the scope of the application is not limited to the embodiments, and although the present application has been described in detail with reference to the foregoing embodiments, it should be understood by those skilled in the art that any modification, variation or substitution of some of the technical features of the embodiments described in the foregoing embodiments may be easily contemplated within the scope of the present application, and the spirit and scope of the technical solutions of the embodiments do not depart from the spirit and scope of the embodiments of the present application. Therefore, the protection scope of the application is subject to the protection scope of the claims.

Claims

1. The temperature control method is characterized by being applied to a temperature control system, the system comprises a refrigerating device and a circulating device, the refrigerating device comprises a compressor, a heat accumulator, an evaporator and a cooling device, the outlet end of a first heat exchange channel in the evaporator is connected with the inlet end of the compressor, the outlet end of the compressor comprises two paths, the first path is connected with the inlet end of the first heat exchange channel in the heat accumulator, the second path is connected with the outlet end of the first heat exchange channel in the heat accumulator together with the inlet end of the cooling device and the inlet end of the first heat exchange channel in the evaporator, the outlet end of the cooling device is connected with the inlet end of the first heat exchange channel in the evaporator, the outlet end of the second heat exchange channel in the evaporator is connected with the inlet end of the circulating device, a three-way valve is arranged at the outlet end of the circulating device, the first channel of the three-way valve is connected with the inlet end of the second heat exchange channel in the heat accumulator, the second channel is connected with the outlet end of the second heat exchange channel in the heat accumulator together with the evaporator, and the method comprises the steps of:

According to the first circulation temperature, the first opening of the first channel and the second opening of the second channel in the three-way valve are regulated so that circulating liquid flowing out of the outlet end of the circulating device flows through the first channel and the second heat exchange channel in the heat accumulator according to a first proportion, and flows into the second heat exchange channel in the evaporator after being mixed with circulating liquid flowing through the second channel according to a second proportion, so that heating energy is accumulated for the heat accumulator through the circulating liquid with the first proportion;

The cooling device comprises a condenser and a supercooling liquid storage device, wherein the outlet end of a first heat exchange channel in the evaporator is connected with the inlet end of the compressor, the outlet end of the compressor comprises two paths, the first path is connected with the inlet end of the first heat exchange channel in the heat accumulator through a first valve, the second path is connected with the inlet end of a second heat exchange channel in the condenser through a second valve together with the outlet end of the first heat exchange channel in the heat accumulator, the third valve is connected with the outlet end of the first heat exchange channel in the heat accumulator together with the inlet end of the first heat exchange channel in the evaporator, the outlet ends of the second heat exchange channels in the condenser are respectively connected with the inlet end of the supercooling liquid storage device, the outlet end of the supercooling liquid storage device is connected with the inlet end of the first heat exchange channel in the evaporator through a fifth valve, the outlet end of the supercooling liquid storage device is connected with the inlet end of the first heat exchange channel in the evaporator through a fourth valve, the outlet end of the supercooling liquid storage device is connected with the inlet end of the first heat exchange channel in the evaporator, the compressor further comprises the compressor, and the method comprises:

2. The method of claim 1, wherein adjusting the first opening of the first passage and the second opening of the second passage in the three-way valve according to the first circulation temperature comprises:

3. The method according to claim 1 or 2, characterized in that the method further comprises:

4. A method according to claim 1 or 2, characterized in that it is determined that the regenerator is no longer capable of accumulating heating energy by means of the circulating liquid by:

5. The method according to claim 1, wherein the method further comprises:

6. The method according to claim 1, wherein the method further comprises:

7. The method according to claim 1, wherein the method further comprises:

8. The temperature control device is characterized by being applied to a temperature control system, the system comprises a refrigerating device and a circulating device, the refrigerating device comprises a compressor, a heat accumulator, an evaporator and a cooling device, the outlet end of a first heat exchange channel in the evaporator is connected with the inlet end of the compressor, the outlet end of the compressor comprises two paths, the first path is connected with the inlet end of the first heat exchange channel in the heat accumulator, the second path and the outlet end of the first heat exchange channel in the heat accumulator are jointly connected with the inlet end of the cooling device and the inlet end of the first heat exchange channel in the evaporator, the outlet end of the cooling device is connected with the inlet end of the first heat exchange channel in the evaporator, the outlet end of the second heat exchange channel in the evaporator is connected with the inlet end of the circulating device, a three-way valve is arranged at the outlet end of the circulating device, the first path of the three-way valve is connected with the inlet end of the second heat exchange channel in the heat accumulator, the second path and the outlet end of the second heat exchange channel in the heat accumulator are jointly connected with the inlet end of the second heat exchange channel in the evaporator, and the device comprises:

The device comprises a three-way valve, a heat storage device, a heat exchange device, a heat storage device, a load device, a heat exchange module, a control module and a control module, wherein the three-way valve is used for controlling the first opening of the first channel and the second opening of the second channel according to the first circulating temperature, so that circulating liquid flowing out from the outlet end of the circulating device flows through the first channel and the second heat exchange channel in the heat storage device according to a first proportion, is mixed with circulating liquid flowing through the second channel according to a second proportion and flows into the second heat exchange channel in the evaporator, and the circulating liquid with the first proportion is used for accumulating heating energy for the heat storage device;

The cooling device comprises a condenser and a supercooling liquid storage device, wherein the outlet end of a first heat exchange channel in the evaporator is connected with the inlet end of the compressor, the outlet end of the compressor comprises two paths, the first path is connected with the inlet end of the first heat exchange channel in the heat accumulator through a first valve, the second path is connected with the inlet end of a second heat exchange channel in the condenser through a second valve together with the outlet end of the first heat exchange channel in the heat accumulator, the second path is connected with the inlet end of the first heat exchange channel in the evaporator through a third valve together with the outlet end of the first heat exchange channel in the heat accumulator, the outlet ends of the second heat exchange channels in the condenser are respectively connected with the inlet end of the supercooling liquid storage device, the outlet end of the supercooling liquid storage device is connected with the inlet end of an external cooling pipeline of the supercooling liquid storage device through a sixth valve, the outlet end of the supercooling liquid storage device is connected with the inlet end of the first heat exchange channel in the evaporator through a fourth valve, the outlet end of the supercooling liquid storage device is connected with the inlet end of the first heat exchange channel in the evaporator through a third valve together with the outlet end of the first heat exchange channel in the evaporator, the outlet end of the supercooling liquid storage device is used for regulating the compressor, and the regulating module is further used for regulating the compressor.

9. An electronic device comprising a processor, a memory and a bus, the memory storing machine-readable instructions executable by the processor, the processor and the memory in communication via the bus when the electronic device is in operation, the machine-readable instructions being executable by the processor to perform the steps of the temperature control method according to any one of claims 1 to 7.