EP0155895B2 - Method for making flat display screens and flat screens made according to this method - Google Patents
Method for making flat display screens and flat screens made according to this method Download PDFInfo
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- EP0155895B2 EP0155895B2 EP85430005A EP85430005A EP0155895B2 EP 0155895 B2 EP0155895 B2 EP 0155895B2 EP 85430005 A EP85430005 A EP 85430005A EP 85430005 A EP85430005 A EP 85430005A EP 0155895 B2 EP0155895 B2 EP 0155895B2
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- screen
- tip
- light intensity
- screens
- tips
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- 238000000034 method Methods 0.000 title claims abstract description 20
- 239000011159 matrix material Substances 0.000 claims abstract description 6
- 230000015572 biosynthetic process Effects 0.000 claims abstract description 5
- 230000005684 electric field Effects 0.000 claims abstract description 3
- 239000000463 material Substances 0.000 claims description 6
- 239000003086 colorant Substances 0.000 claims description 5
- 230000005284 excitation Effects 0.000 claims 4
- 230000000903 blocking effect Effects 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 description 9
- 238000010586 diagram Methods 0.000 description 7
- 238000000605 extraction Methods 0.000 description 3
- 238000012800 visualization Methods 0.000 description 3
- 238000000151 deposition Methods 0.000 description 2
- 239000002253 acid Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000009304 pastoral farming Methods 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J31/00—Cathode ray tubes; Electron beam tubes
- H01J31/08—Cathode ray tubes; Electron beam tubes having a screen on or from which an image or pattern is formed, picked up, converted, or stored
- H01J31/10—Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes
- H01J31/12—Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes with luminescent screen
- H01J31/123—Flat display tubes
- H01J31/125—Flat display tubes provided with control means permitting the electron beam to reach selected parts of the screen, e.g. digital selection
- H01J31/127—Flat display tubes provided with control means permitting the electron beam to reach selected parts of the screen, e.g. digital selection using large area or array sources, i.e. essentially a source for each pixel group
Definitions
- the conventional television tube with scanning of the electron beam cannot be reduced in thickness for physical reasons: distortion of the image if the beam arrives too grazing on the screen, and lack of precision to reach the masks on the screen in the case of color. Furthermore, the dimensions of the screen cannot be thoughtlessly increased for reasons of vacuum and therefore of resistance of the materials to pressure.
- liquid crystals are attractive because they have a very low power consumption, but they do require an external source of light to be visible. In addition, it is very difficult to make grayscale gradations, and to produce color images.
- the present invention relates to a method for producing flat display screens, according to claim 1.
- the invention also relates to flat display screens obtained by implementing the above method.
- the basic principle of the invention essentially consists in using as field source microtips as the electron source.
- a field emission tip such as 1, having a radius of curvature of a few hundred Angstroms, emits electrons e simply by applying an electric field between the tip 1 and a fluorescent screen 2 thanks to the potential E.
- a simple solution for manufacturing a flat display screen according to the invention consists, as shown diagrammatically in FIG. 2, of connecting: on the one hand, the tips in lines, for example the tips 1 A1 , 1 81 , 1 C1 ... along line L A1 ; points 1 A2 , 182 , 1 C2 ... along line L A2 ; points 1 A3 , 1 B3 , 1 C3 ... along line L A3 etc ...; on the other hand, the screens in columns 2A, 2 B , 2 c ...
- This arrangement makes it possible by matrixing and row-column addressing, successive light points to be emitted on the screen.
- the tips can be produced by deposition or etching techniques using the conventional methods of microelectronics, that is to say masking and then wet etching in acid baths or dry etching by plasma or particle beam.
- the different columns of the screen are made of transparent material, for example glass, covered with a metallic film and a fluorescent material.
- each light point In order to eliminate the problem of manufacturing a large number of microtips having very close radii of curvature, and also to overcome the possible failure of one of these points, it is advantageous to constitute each light point by a set of several microtips.
- the type of screen configuration according to the invention that has just been described is of the diode type, and constitutes the simplest solution from the conceptual point of view, but problems appear at the level of the control voltages. Indeed, for the electron extraction voltage E to be low enough to allow rapid switching, the point-screen distance must be of the order of a few microns, which obviously creates technical manufacturing problems.
- FIG. 3 A solution, both more advanced and simpler, of the invention facilitating the problems of rapid switching and making it possible to considerably reduce the technical problems which have just been mentioned above, is shown diagrammatically in FIG. 3.
- This solution essentially consists in using a triode type assembly with a control grid 3 which makes it possible to modulate the electric intensity.
- E 2 we change the intensity of electrons emitted
- E 1 we change the energy of the electrons e reaching the light screen 2.
- the invention makes it possible to solve the above problem simply and effectively by adopting the tetrode type arrangement shown diagrammatically in FIGS. 5 and 6.
- This arrangement comprises, as in the previous cases, for each unit light point, a field emission tip 1, a fluorescent screen 2, a first extraction grid 3, a second extraction grid 4.
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- Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
- Control Of Indicators Other Than Cathode Ray Tubes (AREA)
- Transforming Electric Information Into Light Information (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Electrodes For Cathode-Ray Tubes (AREA)
- Auxiliary Devices For Music (AREA)
- Ultra Sonic Daignosis Equipment (AREA)
- Farming Of Fish And Shellfish (AREA)
- Photoreceptors In Electrophotography (AREA)
Abstract
Description
On sait que, dans le domaine des écrans de visualisation plats, différentes techniques ont été proposées. Le système idéal devrait être capable de générer à la fois des écrans de petites et grandes dimensions, d'être compatible pour le noir et blanc aussi bien que la couleur, d'avoir une faible consommation électrique, et d'être de fabrication simple.We know that, in the field of flat display screens, different techniques have been proposed. The ideal system should be able to generate both small and large screens, be compatible for black and white as well as color, have low power consumption, and be simple to manufacture.
Le tube classique de télévision avec balayage du faisceau d'électrons ne peut pas être réduit en épaisseur pour des raisons physiques: distorsion de l'image si le faisceau arrive trop rasant sur l'écran, et manque de précision pour atteindre les masques sur l'écran dans le cas de la couleur. Par ailleurs, les dimensions de l'écran ne peuvent pas être augmentées d'une manière inconsidérée pour des raisons de vide et donc, de résistance des matériaux à la pression.The conventional television tube with scanning of the electron beam cannot be reduced in thickness for physical reasons: distortion of the image if the beam arrives too grazing on the screen, and lack of precision to reach the masks on the screen in the case of color. Furthermore, the dimensions of the screen cannot be thoughtlessly increased for reasons of vacuum and therefore of resistance of the materials to pressure.
On s'oriente donc plutôt vers la formation d'images, non pas par un faisceau balayé, mais par une matrice de points adressée ligne-colonne.We are therefore moving more towards the formation of images, not by a scanned beam, but by a matrix of points addressed row-column.
Dans ce domaine, les cristaux liquides sont attirants car ils ont une très faible consommation électrique mais ils nécessitent, par contre, une source extérieure de lumière pour être visibles. Par ailleurs, il est très difficile de faire des dégradés dans les niveaux de gris, et de produire des images en couleur.In this area, liquid crystals are attractive because they have a very low power consumption, but they do require an external source of light to be visible. In addition, it is very difficult to make grayscale gradations, and to produce color images.
D'autres techniques ont été proposées pour la réalisation d'écrans plats. L'une d'elles utilise une mi- crodécharge plasma dans un gaz comme source d'électrons, ces électrons étant ensuite attirés vers un écran fluorescent. Un adressage ligne-colonne permet d'allumer le point désiré de l'écran. Malheureusement, l'utilisation d'une source de plasma comme source d'électrons est délicate, car le plasma fonctionne en tout ou rien, c'est-à-dire qu'il est soit allumé, soit éteint. Il en résulte qu'on ne peut pas obtenir des niveaux de gris.Other techniques have been proposed for the production of flat screens. One of them uses a plasma micro-discharge in a gas as a source of electrons, these electrons then being attracted to a fluorescent screen. Row-column addressing enables the desired point on the screen to be lit. Unfortunately, using a plasma source as an electron source is tricky because the plasma works all or nothing, that is, it is either on or off. As a result, gray levels cannot be obtained.
Par ailleurs, des solutions intermédiaires entre le tube cathodique traditionnel et l'écran plat ont été proposée comme par exemple celle faisant l'objet du brevet français no 2.348.561 comportant des systèmes de production d'électrons par émission de champ à partir de matrices d'émetteurs à bas seuil d'émission d'électrons dont la charge est apportée par un système à deux canons à électrons déposant une charge électrique modulée par le signal vidéo. Un tel système est complexe et il implique pour sa mise en oeuvre un coût de fabrication élevé.In addition, intermediate solutions between the traditional cathode ray tube and the flat screen have been proposed, such as, for example, the subject of French patent no. 2,348,561 comprising systems for producing electrons by field emission from matrices. emitters with low electron emission thresholds, the charge of which is provided by a system with two electron guns depositing an electrical charge modulated by the video signal. Such a system is complex and it involves a high manufacturing cost for its implementation.
La présente invention concerne un procédé de réalisation d'écrans de visualisation plat, selon la revendication 1.The present invention relates to a method for producing flat display screens, according to claim 1.
L'invention concerne également les écrans de visualisation plats obtenus par la mise en oeuvre du procédé ci-dessus.The invention also relates to flat display screens obtained by implementing the above method.
D'autres caractéristiques, avantages et particularités de la présente invention ressortiront de la description qui en est donnée ci-après en référence aux dessins, très schématiques, annexés, représentant différentes formes de réalisation possibles de ladite invention. Sur ces dessins:
- - La figure 1 est un schéma de principe de base de l'invention.
- - La figure 2 est un schéma explicatif d'une première forme de réalisation d'un écran de visualisation plat mettant en oeuvre le principe de base de la figure 1, à montage de type diode.
- - La figure 3 est une variante plus évoluée du principe de base de l'invention, à montage du type triodes.
- - La figure 4 est un schéma explicatif d'une variante de réalisation d'un écran de visualisation plat mettant en oeuvre le principe de la figure 3.
- - La figure 5 est un schéma d'une variante plus évoluée du principe de base de l'invention, à montage du type tétrode.
- - Et la figure 6 est un schéma explicatif d'une variante de réalisation d'un écran de visualisation plat mettant en oeuvre le principe de la figure 5.
- - Figure 1 is a basic block diagram of the invention.
- - Figure 2 is an explanatory diagram of a first embodiment of a flat display screen implementing the basic principle of Figure 1, with diode type mounting.
- - Figure 3 is a more advanced variant of the basic principle of the invention, mounting the triode type.
- FIG. 4 is an explanatory diagram of an alternative embodiment of a flat display screen implementing the principle of FIG. 3.
- - Figure 5 is a diagram of a more advanced variant of the basic principle of the invention, mounting of the tetrode type.
- - And Figure 6 is an explanatory diagram of an alternative embodiment of a flat display screen implementing the principle of Figure 5.
Le principe de base de l'invention, schématisé sur la figure 1, consiste essentiellement à utiliser comme source d'électrons des micropointes à émission de champ. Une pointe à émission de champ, telle que 1, ayant un rayon de courbure de quelques centaines d'Angstrôm, émet des électrons e simplement en appliquant un champ électrique ente la pointe 1 et un écran fluorescent 2 grâce au potentiel E.The basic principle of the invention, shown diagrammatically in FIG. 1, essentially consists in using as field source microtips as the electron source. A field emission tip, such as 1, having a radius of curvature of a few hundred Angstroms, emits electrons e simply by applying an electric field between the tip 1 and a
Une solution simple pour fabriquer un écran de visualisation plat conformément à l'invention consiste, comme cela est schématisé sur la figure 2, à connecter: d'une part, les pointes en lignes, par exemple les pointes 1A1, 181, 1C1... suivant la ligne LA1; les pointes 1A2, 182, 1C2... suivant la ligne LA2; les pointes 1A3, 1 B3, 1C3... suivant la ligne LA3 etc...; d'autre part, les écrans en colonnes 2A, 2B, 2c... Cet agencement permet de réaliser par un matriçage et un adressage ligne-colonne, des points lumineux sucessifs à émettre sur l'écran.A simple solution for manufacturing a flat display screen according to the invention consists, as shown diagrammatically in FIG. 2, of connecting: on the one hand, the tips in lines, for example the tips 1 A1 , 1 81 , 1 C1 ... along line L A1 ; points 1 A2 , 182 , 1 C2 ... along line L A2 ; points 1 A3 , 1 B3 , 1 C3 ... along line L A3 etc ...; on the other hand, the screens in
Les pointes peuvent être réalisées par des techniques de dépôt ou de gravure en utilisant les méthodes classiques de la microélectronique, c'est-à-dire masquage puis gravure humide dans des bains d'acide ou gravure sèche par plasma ou faisceau de particules.The tips can be produced by deposition or etching techniques using the conventional methods of microelectronics, that is to say masking and then wet etching in acid baths or dry etching by plasma or particle beam.
Les différentes colonnes de l'écran sont constituées en matériau transparent, par exemple en verre, recouvert d'un film métallique et d'un matériau fluorescent.The different columns of the screen are made of transparent material, for example glass, covered with a metallic film and a fluorescent material.
Lorsque, par exemple, la ligne LA2 et la colonne 2B sont adressées avec les potentiels convenables, il y a émission d'électrons par la pointe 1 B2 et formation d'un point lumineux P1 sur l'écran, dont l'intensité dépend de la tension V = -E appliquée à la ligne LA2, du rayon de courbure de la pointe lB2 et de la distance pointe écran, étant bien entendu que les deux derniers facteurs sont constants pour toutes les pointes.When, for example, the line L A2 and the
On voit immédiatement que pour empêcher les pointes de la ligne LA2, autres que celles situées sur la colonne 28, à savoir les pointes 1A2, 1C2, d'émettre des électrons, il faut appliquer un potentiel négatif V = -E aux autres colonnes écran 2A, 2c..., le potentiel étant nul, V = O, sur la colonne considérée 28.We immediately see that to prevent the tips of line L A2 , other than those located on
De même, pour empêcher les pointes situées sur la colonne 28, autres que celles de la ligne LA2, à savoir les pointes 181, 1B3..., d'émettre des électrons, il faut appliquer un potentiel nul V = O aux autres lignes LA1, LA3..., le potentiel appliqué sur la ligne LA2 étant négatif V = -E.Likewise, to prevent the points located on
De cette manière, seule la diode constituée par la pointe 1ε2 en ligne LA2 et l'écran en colonne 2B est en état passant, toutes les autres diodes se trouvant bloquées.In this way, only the diode constituted by the tip 1ε2 in line L A2 and the screen in
Le rayon de courbure de la pointe considérée et la distance pointe-écran constituant des valeurs constantes fixées par construction, il est apparent que l'intensité lumineuse du point P1 est fonction de la tension E appliquée.The radius of curvature of the point considered and the point-screen distance constituting constant values fixed by construction, it is apparent that the light intensity of point P 1 is a function of the voltage E applied.
On peut ainsi réaliser la formation d'images sur l'écran par une matrice de points adressée ligne-colonne.It is thus possible to perform the formation of images on the screen by a matrix of points addressed row-column.
Afin d'éliminer le problème de la fabrication d'une grand nombre de micropointes ayant des rayons de courbure très proches, et également pour pallier la défaillance éventuelle d'une de ces pointes, il est avantageux de constituer chaque point lumineux par un ensemble de plusieurs micropointes. Chaque mi- cropointe ayant une largeur à la base voisine de 1 µm, il est possible de placer jusqu'à une centaine de ces pointes par point lumineux élémentaire, ce qui, d'une manière statistique, assurera l'uniformité de l'intensité lumineuse sur toute la surface de l'écran.In order to eliminate the problem of manufacturing a large number of microtips having very close radii of curvature, and also to overcome the possible failure of one of these points, it is advantageous to constitute each light point by a set of several microtips. Each micro-point having a width at the base close to 1 µm, it is possible to place up to a hundred of these points per elementary light point, which, statistically, will ensure uniformity of intensity bright across the entire screen.
Pour réaliser de la couleur, il suffit, sans vouloir entrer dans des détails techniques inutiles, de tripler les lignes ou les colonnes, et de mettre des matériaux fluorescents de couleurs différentes, par exemple rouge, vert, bleu, ordonnés en triades sur l'écran en regard de chaque point lumineux élémentaire.To achieve color, it suffices, without wanting to go into unnecessary technical details, to triple the rows or columns, and to put fluorescent materials of different colors, for example red, green, blue, arranged in triads on the screen next to each elementary light point.
Le type de configuration d'écran conforme à l'invention que l'on vient de décrire est du type diode, et constitue la solution la plus simple du point de vue conceptuel, mais des problèmes apparaissent au niveau des tensions de commande. En effet, pour que la tension E d'extraction des électrons soit suffisamment faible pour autoriser des commutations rapides, la distance point-écran doit être de l'ordre de quelques microns, ce qui évidemment crée des problèmes techniques de fabrication.The type of screen configuration according to the invention that has just been described is of the diode type, and constitutes the simplest solution from the conceptual point of view, but problems appear at the level of the control voltages. Indeed, for the electron extraction voltage E to be low enough to allow rapid switching, the point-screen distance must be of the order of a few microns, which obviously creates technical manufacturing problems.
Une solution, tout à la fois plus évoluée et plus simple, de l'invention facilitant les problèmes de commutations rapides et permettant de réduire considérablement les problèmes techniques dont il vient d'être question ci-dessus, est schématisée sur la figure 3.A solution, both more advanced and simpler, of the invention facilitating the problems of rapid switching and making it possible to considerably reduce the technical problems which have just been mentioned above, is shown diagrammatically in FIG. 3.
Cette solution consiste essentiellement à utiliser un montage de type triode avec une grille de commande 3 qui permet de moduler l'intensité électrique. On voit immédiatement qu'en faisant varier la tension E2, on change l'intensité d'électrons émise, et qu'en faisant varier la tension E1, on change l'énergie des électrons e atteignant l'écran lumineux 2.This solution essentially consists in using a triode type assembly with a
Dans le cas du montage triode, le matriçage est semblable à celui du montage diode, étant toutefois important de remarquer que contrairement à ce dernier, il existe ici la possibilité de trois combinaisons, à savoir:
- 1 pointe 1 -
grille 3, la troisième composante, en l'occurence l'écran 2, étant à un potentiel fixe; - 2 pointe 1 -
écran 2, la troisième composante, en l'occurence lagrille 3, étant à un potentiel fixe; - 3 grille 3-
écran 2, la trosième composante, en l'occurence la pointe 1, étant à un potentiel fixe.
- 1 tip 1 -
grid 3, the third component, in this case thescreen 2, being at a fixed potential; - 2 point 1 -
screen 2, the third component, in this case thegrid 3, being at a fixed potential; - 3 grid 3-
screen 2, the third component, in this case the tip 1, being at a fixed potential.
Comme on peut le voir sur le schéma de la figure 4 (qui est analogue à celui de la figure 2, mais sur lequel seules les pointes 1A1, 181, 1C1... et les grilles correspondantes 3A1, 3B1, 3c,... ont été représentées pour la clarté du dessin), on peut utiliser également dans le cas d'un montage du type triode une solution à trois composantes en faisant un adressage ligne-colonne pour les pointes et les écrans, mais sans modulation des valeurs des tensions appliquées E1 et E3, en reliant toutes les grilles 3A1, 3B1, 3C1... ensemble et en modulant la tension commune E2 pour faire varier l'intensité lumineuse.As can be seen in the diagram in Figure 4 (which is similar to that in Figure 2, but in which only the tips 1 A1 , 1 81 , 1 C1 ... and the
De la même manière, on peut réaliser un adressage ligne-colonne entre grille et écran avec des tensions E2 et E1 fixes et relier toutes les pointes ensemble afin de faire varier l'intensité lumineuse en modulant la tension commune E3.In the same way, it is possible to carry out a row-column addressing between grid and screen with fixed voltages E 2 and E 1 and connect all the tips together in order to vary the light intensity by modulating the common voltage E 3 .
On peut encore réaliser un adressage ligne-colonne entre pointe et grille avec des tensions B3 et E2 fixes et relier tous les écrans ensemble afin de faire varier l'intensité lumineuse en modulant la tension commune E1 d'écran.One can also carry out a row-column addressing between tip and grid with fixed voltages B 3 and E 2 and connect all the screens together in order to vary the light intensity by modulating the common screen voltage E 1 .
On voit que cette technique a trois composantes permet de séparer les fonctions adressage et modulation d'intensité.We see that this technique has three components to separate the addressing and intensity modulation functions.
Il est bien évident que pour ce montage de type triode, on peut réaliser de la couleur comme dans le cas du montage du type diode en triplant les lignes et les colonnes et en mettant des matériaux fluorescents de couleurs différentes sur l'écran.It is quite obvious that for this triode type assembly, color can be produced as in the case of the diode type assembly by tripling the rows and the columns and by putting fluorescent materials of different colors on the screen.
Pour des raisons de fabrication, aussi bien de l'écran que des pointes, il apparait judicieux de relier toutes les pointes ensemble et tous les écrans ensemble, car autrement des difficultés apparaissent quant à la fabrication de pointes sur support isolant qui sépare les colonnes ou lignes de pointes.For manufacturing reasons, both of the screen and the points, it seems advisable to connect all the points together and all the screens together, because otherwise difficulties appear as for the manufacture of points on insulating support which separates the columns or tip lines.
L'invention permet de résoudre de façon simple et efficace le problème ci-dessus en adoptant le montage de type tetrode schématisé sur les figures 5 et 6.The invention makes it possible to solve the above problem simply and effectively by adopting the tetrode type arrangement shown diagrammatically in FIGS. 5 and 6.
Ce montage comporte, comme dans les cas précédents, pour chaque point lumineux unitaire, une pointe à émission de champ 1, un écran fluorescent 2, une première grille d'extraction 3, une deuxième grille d'extraction 4.This arrangement comprises, as in the previous cases, for each unit light point, a field emission tip 1, a
Comme on peut le voir sur le schéma de la figure 6 qui est analogue à celui de la figure 4, toutes les pointes 1A1, 181, Ici... sont reliées ensemble ainsi que les écrans 2A, 2B, 2c...As can be seen in the diagram in Figure 6 which is similar to that in Figure 4, all the tips 1 A1 , 181, Here ... are connected together as well as the
Il en résulte que grâce à ce montage tétrode, l'adressage ligne-colonne se fait en jouant sur les tensions E2 et E3 tandis que la modulation de l'intensité lumineuse est obtenue par la variation de la tension E1.It follows that thanks to this tetrode assembly, the row-column addressing is done by playing on the voltages E 2 and E 3 while the modulation of the light intensity is obtained by the variation of the voltage E 1 .
Il est bien évident que pour ce montage tétrode, on peut réaliser, comme dans les cas précédents, de la couleur en triplant les lignes et les colonnes et en mettant des matériaux fluorescents de couleurs différentes sur l'écran.It is quite obvious that for this tetrode assembly, it is possible, as in the previous cases, to produce color by tripling the rows and the columns and by putting fluorescent materials of different colors on the screen.
On notera en particulier que le matriçage et l'adressage ligne-colonne constituant deux des phases du procédé de l'invention sont des opérations bien connues de l'homme de l'art et leurs modes de mise en oeuvre, dans le détail, peuvent être choisis parmi ceux les plus généralement utilisés.It will be noted in particular that the matrixing and the row-column addressing constituting two of the phases of the process of the invention are operations well known to those skilled in the art and their modes of implementation, in detail, can be chosen from those most generally used.
Claims (10)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| AT85430005T ATE44114T1 (en) | 1984-03-09 | 1985-03-05 | METHOD OF MANUFACTURING FLAT DISPLAY SCREENS AND SCREENS MANUFACTURED BY THIS METHOD. |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR8403877A FR2561019B1 (en) | 1984-03-09 | 1984-03-09 | PROCESS FOR PRODUCING FLAT VISUALIZATION SCREENS AND FLAT SCREENS OBTAINED BY IMPLEMENTING SAID METHOD |
| FR8403877 | 1984-03-09 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| EP0155895A1 EP0155895A1 (en) | 1985-09-25 |
| EP0155895B1 EP0155895B1 (en) | 1989-06-14 |
| EP0155895B2 true EP0155895B2 (en) | 1993-09-22 |
Family
ID=9301995
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP85430005A Expired - Lifetime EP0155895B2 (en) | 1984-03-09 | 1985-03-05 | Method for making flat display screens and flat screens made according to this method |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US4763187B1 (en) |
| EP (1) | EP0155895B2 (en) |
| JP (1) | JP2711834B2 (en) |
| AT (1) | ATE44114T1 (en) |
| DE (1) | DE3571099D1 (en) |
| FR (1) | FR2561019B1 (en) |
Families Citing this family (50)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2568394B1 (en) * | 1984-07-27 | 1988-02-12 | Commissariat Energie Atomique | DEVICE FOR VIEWING BY CATHODOLUMINESCENCE EXCITED BY FIELD EMISSION |
| DE3622259A1 (en) * | 1986-07-02 | 1988-01-07 | Standard Elektrik Lorenz Ag | FLAT IMAGE DISPLAY DEVICE |
| US4857799A (en) * | 1986-07-30 | 1989-08-15 | Sri International | Matrix-addressed flat panel display |
| FR2604823B1 (en) * | 1986-10-02 | 1995-04-07 | Etude Surfaces Lab | ELECTRON EMITTING DEVICE AND ITS APPLICATION IN PARTICULAR TO THE PRODUCTION OF FLAT TELEVISION SCREENS |
| FR2632436B1 (en) * | 1988-06-01 | 1991-02-15 | Commissariat Energie Atomique | METHOD FOR ADDRESSING A MICROPOINT FLUORESCENT MATRIX SCREEN |
| US5225820A (en) * | 1988-06-29 | 1993-07-06 | Commissariat A L'energie Atomique | Microtip trichromatic fluorescent screen |
| US5231387A (en) * | 1988-06-29 | 1993-07-27 | Commissariat A L'energie Atomique | Apparatus and method for addressing microtip fluorescent screen |
| FR2633765B1 (en) * | 1988-06-29 | 1991-09-06 | Commissariat Energie Atomique | MICROPOINT FLUORESCENT SCREEN HAVING A REDUCED NUMBER OF ADDRESSING CIRCUITS AND METHOD FOR ADDRESSING THE SAME |
| FR2633763B1 (en) * | 1988-06-29 | 1991-02-15 | Commissariat Energie Atomique | MICROPOINT TRICHROME FLUORESCENT SCREEN |
| US4923421A (en) * | 1988-07-06 | 1990-05-08 | Innovative Display Development Partners | Method for providing polyimide spacers in a field emission panel display |
| CN1026943C (en) * | 1990-03-06 | 1994-12-07 | 杭州大学 | flat panel color display |
| FR2669124B1 (en) * | 1990-11-08 | 1993-01-22 | Commissariat Energie Atomique | BISTABLE ELECTROOPTIC DEVICE, SCREEN COMPRISING SUCH A DEVICE AND METHOD FOR IMPLEMENTING THE SCREEN. |
| US5140219A (en) * | 1991-02-28 | 1992-08-18 | Motorola, Inc. | Field emission display device employing an integral planar field emission control device |
| GB2254486B (en) * | 1991-03-06 | 1995-01-18 | Sony Corp | Flat image-display apparatus |
| US5818500A (en) * | 1991-05-06 | 1998-10-06 | Eastman Kodak Company | High resolution field emission image source and image recording apparatus |
| US5536193A (en) * | 1991-11-07 | 1996-07-16 | Microelectronics And Computer Technology Corporation | Method of making wide band gap field emitter |
| US5402143A (en) * | 1991-12-23 | 1995-03-28 | Panocorp Display Systems | Color fluorescent liquid crystal display |
| US5237180A (en) * | 1991-12-31 | 1993-08-17 | Eastman Kodak Company | High resolution image source |
| US5696028A (en) * | 1992-02-14 | 1997-12-09 | Micron Technology, Inc. | Method to form an insulative barrier useful in field emission displays for reducing surface leakage |
| US5449970A (en) * | 1992-03-16 | 1995-09-12 | Microelectronics And Computer Technology Corporation | Diode structure flat panel display |
| US5686791A (en) * | 1992-03-16 | 1997-11-11 | Microelectronics And Computer Technology Corp. | Amorphic diamond film flat field emission cathode |
| US5548185A (en) * | 1992-03-16 | 1996-08-20 | Microelectronics And Computer Technology Corporation | Triode structure flat panel display employing flat field emission cathode |
| US5675216A (en) * | 1992-03-16 | 1997-10-07 | Microelectronics And Computer Technololgy Corp. | Amorphic diamond film flat field emission cathode |
| US5543684A (en) * | 1992-03-16 | 1996-08-06 | Microelectronics And Computer Technology Corporation | Flat panel display based on diamond thin films |
| US5679043A (en) * | 1992-03-16 | 1997-10-21 | Microelectronics And Computer Technology Corporation | Method of making a field emitter |
| US6127773A (en) * | 1992-03-16 | 2000-10-03 | Si Diamond Technology, Inc. | Amorphic diamond film flat field emission cathode |
| US5763997A (en) * | 1992-03-16 | 1998-06-09 | Si Diamond Technology, Inc. | Field emission display device |
| US5504387A (en) * | 1992-12-26 | 1996-04-02 | Sanyo Electric Co., Ltd. | Flat display where a first film electrode, a dielectric film, and a second film electrode are successively formed on a base plate and electrons are directly emitted from the first film electrode |
| CA2112733C (en) * | 1993-01-07 | 1999-03-30 | Naoto Nakamura | Electron beam-generating apparatus, image-forming apparatus, and driving methods thereof |
| KR0156032B1 (en) * | 1993-05-28 | 1998-10-15 | 호소야 레이지 | Image display device and driver therefor |
| US5378182A (en) * | 1993-07-22 | 1995-01-03 | Industrial Technology Research Institute | Self-aligned process for gated field emitters |
| US5462467A (en) * | 1993-09-08 | 1995-10-31 | Silicon Video Corporation | Fabrication of filamentary field-emission device, including self-aligned gate |
| TW272322B (en) * | 1993-09-30 | 1996-03-11 | Futaba Denshi Kogyo Kk | |
| US5404070A (en) * | 1993-10-04 | 1995-04-04 | Industrial Technology Research Institute | Low capacitance field emission display by gate-cathode dielectric |
| EP0727057A4 (en) * | 1993-11-04 | 1997-08-13 | Microelectronics & Computer | Methods for fabricating flat panel display systems and components |
| JP3267432B2 (en) * | 1993-12-20 | 2002-03-18 | 双葉電子工業株式会社 | Display device |
| DE69423716T2 (en) * | 1993-12-22 | 2000-08-17 | Canon K.K., Tokio/Tokyo | Imaging device |
| US5451830A (en) * | 1994-01-24 | 1995-09-19 | Industrial Technology Research Institute | Single tip redundancy method with resistive base and resultant flat panel display |
| US5786663A (en) * | 1994-12-01 | 1998-07-28 | Commissariat A L'energie Atomique | Electron collector having independently controllable conductive strips |
| US5751262A (en) | 1995-01-24 | 1998-05-12 | Micron Display Technology, Inc. | Method and apparatus for testing emissive cathodes |
| US6559818B1 (en) * | 1995-01-24 | 2003-05-06 | Micron Technology, Inc. | Method of testing addressable emissive cathodes |
| KR100239688B1 (en) * | 1995-11-20 | 2000-01-15 | 김영환 | How to manufacture micro tips for field emission displays (FED) |
| DE19546039A1 (en) * | 1995-12-09 | 1997-06-12 | Forsch Mineralische Und Metall | Screen, method for its production and method and device for displaying images on a screen |
| US5633561A (en) * | 1996-03-28 | 1997-05-27 | Motorola | Conductor array for a flat panel display |
| US5710483A (en) * | 1996-04-08 | 1998-01-20 | Industrial Technology Research Institute | Field emission device with micromesh collimator |
| US6022256A (en) | 1996-11-06 | 2000-02-08 | Micron Display Technology, Inc. | Field emission display and method of making same |
| GB2321335A (en) * | 1997-01-16 | 1998-07-22 | Ibm | Display device |
| US6391670B1 (en) | 1999-04-29 | 2002-05-21 | Micron Technology, Inc. | Method of forming a self-aligned field extraction grid |
| KR100499120B1 (en) * | 2000-02-25 | 2005-07-04 | 삼성에스디아이 주식회사 | Triode structure field emission display using carbon nanotube |
| US7482750B2 (en) * | 2005-01-25 | 2009-01-27 | The Board Of Trustees Of The University Of Illinois | Plasma extraction microcavity plasma device and method |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3622828A (en) * | 1969-12-01 | 1971-11-23 | Us Army | Flat display tube with addressable cathode |
| JPS50107858A (en) * | 1974-01-30 | 1975-08-25 | ||
| US4020381A (en) * | 1974-12-09 | 1977-04-26 | Texas Instruments Incorporated | Cathode structure for a multibeam cathode ray tube |
| US3935500A (en) * | 1974-12-09 | 1976-01-27 | Texas Instruments Incorporated | Flat CRT system |
| US3935499A (en) * | 1975-01-03 | 1976-01-27 | Texas Instruments Incorporated | Monolythic staggered mesh deflection systems for use in flat matrix CRT's |
| FR2348561A1 (en) * | 1976-04-13 | 1977-11-10 | Battelle Memorial Institute | Image reproduction CRT with evacuated vessel - has transparent screen with phosphor coating and matrix of field-effect emission electrodes |
| US4170772A (en) * | 1978-04-26 | 1979-10-09 | The United States Of America As Represented By The Secretary Of The Army | Flat panel display with full color capability |
| DE3035988A1 (en) * | 1980-09-24 | 1982-04-29 | Siemens Ag | Planar colour TV screen - has cold cathode with cellular emission at crossing point and column control matrix |
| JPS57162692U (en) * | 1981-04-03 | 1982-10-13 | ||
| JPS57202051A (en) * | 1981-06-05 | 1982-12-10 | Futaba Corp | Fluorescent display unit |
| JPS57202050A (en) * | 1981-06-08 | 1982-12-10 | Futaba Corp | Fluorescent display unit |
| DE3243596C2 (en) * | 1982-11-25 | 1985-09-26 | M.A.N. Maschinenfabrik Augsburg-Nürnberg AG, 8000 München | Method and device for transferring images to a screen |
-
1984
- 1984-03-09 FR FR8403877A patent/FR2561019B1/en not_active Expired
-
1985
- 1985-03-05 DE DE8585430005T patent/DE3571099D1/en not_active Expired
- 1985-03-05 EP EP85430005A patent/EP0155895B2/en not_active Expired - Lifetime
- 1985-03-05 AT AT85430005T patent/ATE44114T1/en not_active IP Right Cessation
- 1985-03-08 US US06709671 patent/US4763187B1/en not_active Expired - Lifetime
- 1985-03-08 JP JP60047331A patent/JP2711834B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| US4763187A (en) | 1988-08-09 |
| FR2561019B1 (en) | 1987-07-17 |
| JPS6123479A (en) | 1986-01-31 |
| US4763187B1 (en) | 1997-11-04 |
| DE3571099D1 (en) | 1989-07-20 |
| EP0155895B1 (en) | 1989-06-14 |
| JP2711834B2 (en) | 1998-02-10 |
| ATE44114T1 (en) | 1989-06-15 |
| FR2561019A1 (en) | 1985-09-13 |
| EP0155895A1 (en) | 1985-09-25 |
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