EP0714482B2 - Vacuum pump with oil separator - Google Patents
Vacuum pump with oil separator Download PDFInfo
- Publication number
- EP0714482B2 EP0714482B2 EP94926181A EP94926181A EP0714482B2 EP 0714482 B2 EP0714482 B2 EP 0714482B2 EP 94926181 A EP94926181 A EP 94926181A EP 94926181 A EP94926181 A EP 94926181A EP 0714482 B2 EP0714482 B2 EP 0714482B2
- Authority
- EP
- European Patent Office
- Prior art keywords
- oil
- line
- pump
- oil separator
- vacuum pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/12—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
- F04C29/122—Arrangements for supercharging the working space
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
- F04C27/02—Liquid sealing for high-vacuum pumps or for compressors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
- F04C28/28—Safety arrangements; Monitoring
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/02—Lubrication; Lubricant separation
- F04C29/026—Lubricant separation
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2220/00—Application
- F04C2220/50—Pumps with means for introducing gas under pressure for ballasting
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S418/00—Rotary expansible chamber devices
- Y10S418/01—Non-working fluid separation
Definitions
- the invention relates to a vacuum pump with the Features of the preamble of claim 1.
- gas ballast supply With gas ballast supply, the inlet of gases into the Understand the capacity of a vacuum pump, namely one Time when the scoop is closed to the inlet side is.
- the gas ballast supply can be harmful Condensation of extracted vapors can be avoided.
- a two-stage vacuum pump is used to supply the gas ballast usually in the forevacuum stage. It is also known to supply gas ballast to the high vacuum stage.
- Oil-sealed vacuum pumps deliver with the gas volume flow an oil volume flow that consists of one at every revolution Oil supply gets into the pump. The extracted oil gets into the oil supply back. The gases contaminated with oil vapors are fed to the pump outlet.
- the outlet of such Pumping is therefore usually internal or external located oil separator or gas filter, in which by far the largest part of the oil vapors transported from Gas volume flow is separated.
- From DE-B-10 98 150 is a gate valve vacuum pump known, the outlet of which is followed by an oil separator.
- the Oil separator is designed as a cyclone.
- the previously known vacuum pump on a gas ballast device that comprises a gas channel with a valve. In this gas channel opens a side channel that leads to the oil separator.
- the Side channel has the effect that part of the oil separator located oil mist as gas ballast in the work area the pump is sucked in. Are using this pump promoted aggressive gases, there is the disadvantage that these get back into the pump delivery chamber. in the other side channel is not used to return the im Oil separation room of separated oil.
- the state of the art also includes the content of GB-A-863 162. This discloses a gas compressor. On Oil separator from which oil is derived is not available.
- the present invention has for its object a To create a vacuum pump with the features mentioned at the beginning, where the risk of repatriation from aggressive Gases no longer exist in the pumping chamber and at which the Means for oil return from the oil separator especially are simply designed.
- the return leads to the return the oil serving line at one point in the vacuum pump, on the during the operation of the vacuum pump There is negative pressure, which is the conveyance of the oil from the oil separator to the pump. The influence on the final pressure behavior is. negligible. The danger of one There is backflow of oil in the connected recipient no more.
- the oil return into the gas ballast supply serving line also has the advantage that it is particularly simple, inexpensive and can be retrofitted.
- the anchor sections 21, 22 are provided with slots 25, 26 for Slider 27, 28 equipped. These are each from the associated end face of the rotor milled here, so that achieved exact slot dimensions in a simple manner can be.
- the bearing section 23 lies between the anchor sections 21, 22. bearing section 23 and bearing bore 11 form the only storage of the Rotor.
- Anchor section 22 and the associated scoop space 9 are longer than the anchor section 21 with the scooping space 8.
- Anchor section 22 and Ladle chamber 9 form the high vacuum stage. While the inlet of high vacuum stage 9 is in operation, 22 with the intake manifold 30 in connection.
- the outlet the high vacuum stage 9, 22 and the inlet of the fore vacuum stage 8, 21 are over the housing bore or the intermediate channel 31 in connection, which is parallel extends to the axes 15, 16 of the scoops 8, 9.
- the outlet of the forevacuum stage 8, 21 opens in the oil space 17, which includes the oil sump 20. In the oil room 17 the oily gases calm down and leave the pump 1 through the outlet port 33.
- the inlet and outlet openings are for reasons of clarity of the two pump stages in the figure not shown.
- the bearing piece 13 Is coaxial with the axis 14 of the bearing bore 11 the bearing piece 13 with a bore 35 for the shaft 36 of the drive motor 4 equipped.
- the seal the shaft 36 to the bearing piece 13 takes place through the shaft sealing rings 37 in the recesses 38.
- the clutch of the rotor 3 with the drive shaft 36 is form-fitting via cams and corresponding recesses.
- float valve 50 Appropriately located in line section 45 a float valve 50. This ensures that line 45 is shut off if there is no deposited and there is oil to be returned. A flood the pump 1 is thereby avoided.
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
Description
Die Erfindung bezieht sich auf eine Vakuumpumpe mit den Merkmalen des Oberbegriffs des Patentanspruchs 1.The invention relates to a vacuum pump with the Features of the preamble of claim 1.
Unter Gasballastzufuhr wird der Einlaß von Gasen in den Schöpfraum einer Vakuumpumpe verstanden, und zwar zu einem Zeitpunkt, wenn der Schöpfraum zur Einlaßseite hin abgeschlossen ist. Durch die Gasballastzufuhr können schädliche Kondensationen abgesaugter Dämpfe vermieden werden. Bei einer zweistufigen Vakuumpumpe erfolgt die Gasballastzufuhr üblicherweise in die Vorvakuumstufe. Es ist aber auch bekannt, der Hochvakuumstufe Gasballast zuzuführen.With gas ballast supply, the inlet of gases into the Understand the capacity of a vacuum pump, namely one Time when the scoop is closed to the inlet side is. The gas ballast supply can be harmful Condensation of extracted vapors can be avoided. at A two-stage vacuum pump is used to supply the gas ballast usually in the forevacuum stage. It is also known to supply gas ballast to the high vacuum stage.
Ölgedichtete Vakuumpumpen fördern mit dem Gasvolumenstrom einen Ölvolumenstrom, der bei jeder Umdrehung aus einem Ölvorrat in die Pumpe gelangt. Das geförderte Öl gelangt in den Ölvorrat zurück. Die mit Öldämpfen belasteten Gase werden dem Pumpenauslaß zugeführt. Dem Auslaß derartiger Pumpen ist deshalb in der Regel ein intern oder extern gelegener Ölabscheider bzw. Gasfilter nachgeordnet, in dem der weitaus größte Teil der mitgeförderten Öldämpfe vom Gasvolumenstrom getrennt wird.Oil-sealed vacuum pumps deliver with the gas volume flow an oil volume flow that consists of one at every revolution Oil supply gets into the pump. The extracted oil gets into the oil supply back. The gases contaminated with oil vapors are fed to the pump outlet. The outlet of such Pumping is therefore usually internal or external located oil separator or gas filter, in which by far the largest part of the oil vapors transported from Gas volume flow is separated.
Es ist bekannt, das im Gasfilter abgeschiedene Öl durch den Einlaß der Pumpe zurückzuführen. Das der Saugseite der Pumpe zugeführte Öl verschlechtert den Enddruck; außerdem besteht die Gefahr von unerwünschten Ölrückströmungen in den angeschlossenen Rezipienten, was zu Störungen der im Rezipienten ablaufenden Prozesse führen kann. It is known that the oil separated in the gas filter by the Pump inlet. The suction side of the pump supplied oil worsens the final pressure; also exists the risk of undesirable oil backflows in the connected Recipients, causing interference in the recipient running processes can lead.
Bei einer anderen Lösung wird das im Gasfilter abgeschiedene Öl unmittelbar in den Ölsumpf der Pumpe zurückgeführt. Diese Ölrückführung ist nur möglich, wenn eine Hilfspumpe vorhanden ist, oder - was in der Regel nicht der Fall ist - der Gasfilter so weit oberhalb des Schöpfraumes angeordnet ist, daß das Öl infolge seiner Schwerkraft in den Ölsumpf zurückströmt.In another solution, this is separated out in the gas filter Oil is returned directly to the pump sump. This Oil return is only possible if an auxiliary pump is available is, or - which is usually not the case - the Gas filter is arranged so far above the pumping chamber, that the oil flows back into the oil sump due to its gravity.
Aus der DE-B-10 98 150 ist eine Sperrschiebervakuumpumpe bekannt, deren Auslaß ein Ölabscheider nachgeordnet ist. Der Ölabscheider ist als Zyklon ausgebildet. Außerdem weist die vorbekannte Vakuumpumpe eine Gasballast-Einrichtung auf, die einen Gaskanal mit einem Ventil umfaßt. In diesem Gaskanal mündet ein Seitenkanal, der zum Ölabscheider führt. Der Seitenkanal hat die Wirkung, daß ein Teil des im Ölabscheideraum befindlichen Ölnebels als Gasballast in den Arbeitsraum der Pumpe hineingesaugt wird. Werden mit dieser Pumpe aggressive Gase gefördert, dann besteht der Nachteil, daß diese erneut in den Förderraum der Pumpe gelangen. Im übrigen dient der Seitenkanal nicht der Rückführung des im Ölabscheideraum abgeschiedenen Öls.From DE-B-10 98 150 is a gate valve vacuum pump known, the outlet of which is followed by an oil separator. The Oil separator is designed as a cyclone. In addition, the previously known vacuum pump on a gas ballast device that comprises a gas channel with a valve. In this gas channel opens a side channel that leads to the oil separator. The Side channel has the effect that part of the oil separator located oil mist as gas ballast in the work area the pump is sucked in. Are using this pump promoted aggressive gases, there is the disadvantage that these get back into the pump delivery chamber. in the the other side channel is not used to return the im Oil separation room of separated oil.
Zum Stand der Technik gehört auch noch der Inhalt der GB-A-863 162. Diese offenbart einen Gaskompressor. Ein Ölabscheider, aus dem Öl zurückzuführen ist, ist nicht vorhanden.The state of the art also includes the content of GB-A-863 162. This discloses a gas compressor. On Oil separator from which oil is derived is not available.
Der vorliegenden Erfindung liegt die Aufgabe zugrunde, eine Vakuumpumpe mit den eingangs erwähnten Merkmalen zu schaffen, bei der die Gefahr der Rückführung von aggressiven Gasen in den Förderraum nicht mehr besteht und bei der die Mittel zur Ölrückführung aus dem Ölabscheider besonders einfach gestaltet sind.The present invention has for its object a To create a vacuum pump with the features mentioned at the beginning, where the risk of repatriation from aggressive Gases no longer exist in the pumping chamber and at which the Means for oil return from the oil separator especially are simply designed.
Erfindungsgemäß wird diese Aufgabe durch die kennzeichnenden Merkmale des Patentanspruchs 1 gelöst. According to the invention, this object is achieved by the characterizing Features of claim 1 solved.
Bei dieser erfindungsgemäßen Lösung gelangt nur das Öl aus dem Ölabscheider über die Gasballasteinrichtung in den Förderraum der Vakuumpumpe zurück. In den Ölabscheider geförderte aggressive Dämpfe werden nicht erneut in den Förderraum der Vakuumpumpe zurückgeführt.In this solution according to the invention only the oil comes out the oil separator via the gas ballast device in the Delivery chamber of the vacuum pump back. In the oil separator promoted aggressive vapors are not re-introduced into the Delivery chamber of the vacuum pump returned.
Eine andere, nur bei zweistufigen Vakuumpumpen realisierbare Lösung der erfindungsgemäßen Aufgabe besteht darin, daß die der Rückführung des abgeschiedenen Öls dienende Leitung in den Zwischenkanal mündet, der den Auslaß der Hochvakuum-Stufe mit dem Einlaß der Vorvakuum-Stufe verbindet.Another one that can only be realized with two-stage vacuum pumps Solution of the task according to the invention is that the line for returning the separated oil in the intermediate channel that opens the outlet of the high vacuum stage connects to the inlet of the fore-vacuum stage.
Bei beiden vorgeschlagenen Lösungen mündet die der Rückführung des Öls dienende Leitung an einer Stelle in die Vakuumpumpe, an der während des Betriebs der Vakuumpumpe ein Unterdruck herrscht, der die Förderung des Öls vom Ölabscheider zur Pumpe sicherstellt. Der Einfluß auf das Enddruckverhalten ist. vernachlässigbar. Die Gefahr einer Ölrückströmung in den angeschlossenen Rezipienten besteht nicht mehr. Die Ölrückführung in die der Gasballastzufuhr dienende Leitung hat außerdem noch den Vorteil, daß sie besonders einfach, kostengünstig und nachrüstbar ist. With both of the proposed solutions, the return leads to the return the oil serving line at one point in the vacuum pump, on the during the operation of the vacuum pump There is negative pressure, which is the conveyance of the oil from the oil separator to the pump. The influence on the final pressure behavior is. negligible. The danger of one There is backflow of oil in the connected recipient no more. The oil return into the gas ballast supply serving line also has the advantage that it is particularly simple, inexpensive and can be retrofitted.
Die Ankerabschnitte 21,22 sind mit Schlitzen 25, 26 für
Schieber 27, 28 ausgerüstet. Diese sind jeweils von der
zugehörigen Stirnseite des Rotors her eingefräst, so
daß in einfacher Weise exakte Schlitzabmessungen erreicht
werden können. Der Lagerabschnitt 23 liegt zwischen
den Ankerabschnitten 21, 22. Lagerabschnitt 23
und Lagerbohrung 11 bilden die einzige Lagerung des
Rotors.The
Der Ankerabschnitt 22 und der zugehörige Schöpfraum
9 sind länger ausgebildet als der Ankerabschnitt
21 mit dem Schöpfraum 8. Ankerabschnitt 22 und
Schöpfraum 9 bilden die Hochvakuumstufe. Während
des Betriebs steht der Einlaß der Hochvakuumstufe 9,
22 mit dem Ansaugstutzen 30 in Verbindung. Der Auslaß
der Hochvakuumstufe 9, 22 und der Einlaß der Vorvakuumstufe
8, 21 stehen über die Gehäusebohrung
bzw. den Zwischenkanal 31 in Verbindung, der sich parallel
zu den Achsen 15, 16 der Schöpfräume 8, 9 erstreckt.
Der Auslaß der Vorvakuumstufe 8, 21 mündet
in den ölraum 17, der den Ölsumpf 20 umfaßt. Im Ölraum
17 beruhigen sich die ölhaltigen Gase und verlassen
die Pumpe 1 durch den Auslaßstutzen 33. Aus
Gründen der Übersichtlichkeit sind die Einlaß- und Auslaßöffnungen
der beiden Pumpenstufen in der Figur
nicht dargestellt.The
Koaxial mit der Achse 14 der Lagerbohrung 11 ist
das Lagerstück 13 mit einer Bohrung 35 für die Welle
36 des Antriebsmotors 4 ausgerüstet. Die Abdichtung
der Welle 36 zum Lagerstück 13 erfolgt durch die Wellendichtringe
37 in den Aussparungen 38. Die Kupplung
des Rotors 3 mit der Antriebswelle 36 erfolgt formschlüssig
über Nocken und korrespondierende Aussparungen.Is coaxial with the
An den Auslaßstutzen 33 der Pumpe 1 schließt sich
eine Leitung 41 an, die in den ölabscheider bzw. Gasfilter
42 mündet. Das von Öldämpfen befreite Gas verläßt
den Ölabscheider über die Leitung 43. Das abgeschiedene
Öl sammelt sich im Raum 44 und soll in den
Ölvorrat der Pumpe 1 zurückgeführt werden.At the
Dargestellt sind zwei Alternativen der Ölrückführung.
Bei der ersten Alternative gelangt das abgeschiedene
Öl über die Leitungsabschnitte 45, 46 in die Leitung
47, die der Zufuhr von Gasballast in die Vorvakuumstufe
8, 21 der Pumpe 1 dient. Zweckmäßig mündet
der Leitungsabschnitt 46 in die Leitung 47 an einer Stelle,
die in Bezug auf die Strömungsrichtung des Gasballastes
stromabwärts vom Gasballastventil 48 liegt. Dadurch
ist sichergestellt, daß auch bei geschlossenem
Gasballastventil die Ölrückführung möglich ist.Two alternatives for oil return are shown.
In the first alternative, this comes off
Oil via
Bei der zweiten Alternative strömt das abgeschiedene
Öl durch die Leitungsabschnitte 45 und 49. Der
gestrichelt dargestellte Leitungsabschnitt 49 mündet in
den Zwischenkanal 31.In the second alternative, the separated flows
Oil through
Zweckmäßig befindet sich im Leitungsabschnitt 45
ein Schwimmerventil 50. Dadurch ist sichergestellt, daß
die Leitung 45 abgesperrt ist, wenn kein abgeschiedenes
und zurückzuführendes Öl vorhanden ist. Ein Fluten
der Pumpe 1 wird dadurch vermieden.Appropriately located in line section 45
a
Claims (2)
- Vacuum pump (1)
with an oil separator (42) arranged downstream of its outlet (33),
with a gas ballast device which incorporates a line (47) serving for the gas supply with a gas ballast valve (48),
with a further line (45, 46) which connects the line (47) to the oil collection chamber (44) of the oil separator (42) and serves for the return of the oil separated in the oil separator (42) into the vacuum pump (1), wherein the further line (45, 46) issues into the line (47) at a point which lies upstream of the gas ballast valve (48) in relation to the flow direction of the gas ballast, and
with a valve (50) in the further line (45, 46),
characterised in that the valve (50) is a float valve which shuts off the line (45, 46) if no oil separated and to be returned is present. - Two-stage vacuum pump (1)
with a high-vacuum stage (9, 22),
with an initial vacuum stage (8, 21),
with an intermediate channel (31) connecting the two stages,
with an oil separator (42) arranged downstream of its outlet (33) and
with a further line (45, 49) via which the oil separated in the oil separator (42) is returned into the vacuum pump (1),
characterised in that the further line (45, 49) serving for the return of the oil issues into the intermediate channel (31) which connects the outlet of the high-vacuum stage (9, 22) to the inlet of the initial vacuum stage (8, 21) of the pump (1), and that a float valve (50) is located in the line (45, 49), which shuts off the line (45, 49) if no oil separated and to be returned is present.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE4327583A DE4327583A1 (en) | 1993-08-17 | 1993-08-17 | Vacuum pump with oil separator |
| DE4327583 | 1993-08-17 | ||
| PCT/EP1994/002675 WO1995005540A1 (en) | 1993-08-17 | 1994-08-11 | Vacuum pump with oil separator |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| EP0714482A1 EP0714482A1 (en) | 1996-06-05 |
| EP0714482B1 EP0714482B1 (en) | 1997-05-21 |
| EP0714482B2 true EP0714482B2 (en) | 2002-10-09 |
Family
ID=6495351
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP94926181A Expired - Lifetime EP0714482B2 (en) | 1993-08-17 | 1994-08-11 | Vacuum pump with oil separator |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US5697771A (en) |
| EP (1) | EP0714482B2 (en) |
| JP (1) | JPH09503566A (en) |
| KR (1) | KR960704159A (en) |
| DE (2) | DE4327583A1 (en) |
| WO (1) | WO1995005540A1 (en) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19709206A1 (en) * | 1997-03-06 | 1998-09-10 | Leybold Vakuum Gmbh | Vacuum pump |
| DE19962445A1 (en) * | 1999-12-22 | 2001-06-28 | Leybold Vakuum Gmbh | Dry compressing vacuum pump has gas ballast device with valve that only opens when difference between atmospheric pressure and pressure on pump side of valve exceeds set value |
| DE20103261U1 (en) * | 2001-02-23 | 2001-06-07 | Werner Rietschle GmbH + Co. KG, 79650 Schopfheim | Oil separator for oil-flooded pumps |
| DE102008013784B4 (en) * | 2007-03-15 | 2017-03-23 | Denso Corporation | compressor |
| DE102007043350B3 (en) * | 2007-09-12 | 2009-05-28 | Oerlikon Leybold Vacuum Gmbh | Vacuum pump and method for controlling a gas ballast supply to a vacuum pump |
| BRPI1014604A2 (en) | 2009-05-04 | 2016-04-05 | Basf Corp | catalyst composition, and method for treating a discharge gas stream |
| JP2012122450A (en) * | 2010-12-10 | 2012-06-28 | Kobe Steel Ltd | Screw compressor |
| JP5947023B2 (en) * | 2011-11-14 | 2016-07-06 | 東京エレクトロン株式会社 | Temperature control apparatus, plasma processing apparatus, processing apparatus, and temperature control method |
| KR101540313B1 (en) * | 2014-04-07 | 2015-07-30 | 한전케이피에스 주식회사 | Separator potentiometer oil filling equipment and method of candu Type Fuelling machine |
| PL3161318T3 (en) * | 2014-06-27 | 2020-08-10 | Ateliers Busch S.A. | Method of pumping in a system of vacuum pumps and system of vacuum pumps |
| EP3376033B1 (en) * | 2017-03-14 | 2020-11-25 | Leybold GmbH | Lubricant-sealed vacuum pump |
| BE1028138B1 (en) * | 2020-03-10 | 2021-10-11 | Atlas Copco Airpower Nv | Lubricant recovery system and vacuum system including such lubricant recovery system |
| GB2631448B (en) | 2023-06-30 | 2025-07-30 | Agilent Technologies Inc | Oil-lubricated vacuum pump with improved oil sealing |
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|---|---|---|---|---|
| DE951884C (en) * | 1953-12-23 | 1956-11-08 | Leybold S Nachfolger E | Vacuum pump |
| GB863162A (en) * | 1956-09-21 | 1961-03-15 | Scaife Company | Rotary gas compressor pump |
| DE1302133B (en) * | 1958-05-07 | 1970-01-22 | ||
| DE1098150B (en) * | 1958-05-30 | 1961-01-26 | Heraeus Gmbh W C | Vacuum pump with gas ballast device |
| DE1123076B (en) * | 1959-04-18 | 1962-02-01 | Leybolds Nachfolger E | Rotating mechanical vacuum pump |
| DE1403069B1 (en) * | 1959-06-19 | 1970-01-29 | Leybold Heraeus Gmbh & Co Kg | Liquid-sealed rotating mechanical vacuum pump |
| US4204815A (en) * | 1977-12-06 | 1980-05-27 | Gast Manufacturing Corporation | Cartridge rotary vane pump |
| US4268230A (en) * | 1979-04-26 | 1981-05-19 | Varian Associates, Inc. | Gas ballast for oil sealed mechanical vacuum vane pump |
| GB2081383B (en) * | 1980-07-31 | 1983-12-21 | Hydrovane Compressor The Co Lt | Rotary compressors |
| JPS6030494A (en) * | 1983-07-29 | 1985-02-16 | Hitachi Ltd | Full enclosed compressor |
| US4875149A (en) * | 1988-12-16 | 1989-10-17 | Sundstrand Corporation | Phase separation control |
| DE58907121D1 (en) * | 1989-06-06 | 1994-04-07 | Leybold Ag | Two- or multi-stage high vacuum pump. |
| DE4017191A1 (en) * | 1990-05-29 | 1991-12-05 | Leybold Ag | METHOD FOR OIL SUPPLYING A TWO-STAGE ROTARY VALVE VACUUM PUMP AND A ROTARY VALVE VACUUM PUMP SUITABLE FOR CARRYING OUT THIS METHOD |
-
1993
- 1993-08-17 DE DE4327583A patent/DE4327583A1/en not_active Ceased
-
1994
- 1994-08-11 DE DE59402844T patent/DE59402844D1/en not_active Expired - Fee Related
- 1994-08-11 EP EP94926181A patent/EP0714482B2/en not_active Expired - Lifetime
- 1994-08-11 JP JP7506742A patent/JPH09503566A/en active Pending
- 1994-08-11 US US08/596,222 patent/US5697771A/en not_active Expired - Fee Related
- 1994-08-11 WO PCT/EP1994/002675 patent/WO1995005540A1/en not_active Ceased
-
1996
- 1996-02-16 KR KR1019960700780A patent/KR960704159A/en not_active Ceased
Also Published As
| Publication number | Publication date |
|---|---|
| EP0714482B1 (en) | 1997-05-21 |
| EP0714482A1 (en) | 1996-06-05 |
| JPH09503566A (en) | 1997-04-08 |
| DE4327583A1 (en) | 1995-02-23 |
| KR960704159A (en) | 1996-08-31 |
| US5697771A (en) | 1997-12-16 |
| WO1995005540A1 (en) | 1995-02-23 |
| DE59402844D1 (en) | 1997-06-26 |
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