EP1078166B2 - Friction vacuum pump with a stator and a rotor - Google Patents
Friction vacuum pump with a stator and a rotor Download PDFInfo
- Publication number
- EP1078166B2 EP1078166B2 EP98946450A EP98946450A EP1078166B2 EP 1078166 B2 EP1078166 B2 EP 1078166B2 EP 98946450 A EP98946450 A EP 98946450A EP 98946450 A EP98946450 A EP 98946450A EP 1078166 B2 EP1078166 B2 EP 1078166B2
- Authority
- EP
- European Patent Office
- Prior art keywords
- rotor
- pump
- vacuum pump
- friction vacuum
- stages
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/16—Centrifugal pumps for displacing without appreciable compression
- F04D17/168—Pumps specially adapted to produce a vacuum
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps
Definitions
- the invention relates to a friction vacuum pump having the features of the preamble of patent claim 1.
- a friction vacuum pump of this type is known. It is preferably used to evacuate corpuscular blasting devices (eg mass spectrometers) with chambers separated from each other by diaphragms, in which different pressures are to prevail during operation of the corpuscular blasting device. It is known per se to use separate vacuum pumps for generating these pressures.
- the DE-A-43 31 589 discloses using only a vacuum pumping system to generate the various pressures required by the corpuscular blasting machine.
- the pumping system includes two turbomolecular and one molecular (Holweck) pumping stage. These pumping stages are arranged axially one behind the other. Each pumping stage has a gas inlet (end-face gas passage surface), which is connected via connecting means with the associated chamber of the device to be evacuated.
- connection means are used in the solution after the DE-A-34 31 589 the housing itself and a laterally arranged additional housing.
- the housing itself is equipped with a frontally located connection opening for the connection of the gas inlet of the first pumping stage with the device to be evacuated.
- connection lines are provided, which connect the associated inlets of the other pumping stages with other connection openings. These in turn are each connected to the associated chambers in the device to be evacuated. Since the connection openings in the additional housing with the connection opening of the first pumping stage lie in a common plane (perpendicular to the rotor axis), the connecting lines located in the additional housing must be relatively long. This results in relatively large conductance losses in the connecting lines, which is particularly disadvantageous when a high pumping speed is desired, especially in the area of an intermediate connection.
- the state of the art also includes the content of the documents DE 18 09 102 A1 .
- US 31 89 264 A and US 36 28 894 A Disclosed are turbomolecular and molecular pumps, each with only one suction side located port.
- the DE 24 42 614 discloses a friction vacuum pump according to the preamble of claim 1.
- the present invention has for its object to make a friction vacuum pump of the type mentioned above so that the pumping speed of the intermediate stages is not affected by high Leitwertmene in connecting lines.
- the implementation of the measures according to the invention has the consequence that the gases to be delivered in the inlet region of the first pumping stage, ie just where the pressure is lowest, must be redirected.
- the conductance loss caused thereby can be kept small, since the distance between the gas inlet and the plane of the connection opening is still relatively small and, moreover, nothing stands in the way of choosing larger diameters in this area.
- particularly high pumping speed values in the region of the inlet of the first (high-vacuum-side) pumping stage are not required. Often there is even the need to throttle the suction at this point.
- the essential purpose of the first pumping stage is to provide a high compression ratio.
- the blade properties chosen for the first pumping stage (number of turbo stages, blade clearance, pitch angle, etc.) must take this function into account. It is essential to separate the two working pressure ranges of the two pumping stages. A high pumping speed is usually desired only at the or the intermediate inlets. This goal can also be achieved by choosing special blade geometries.
- the accessibility of the gas molecules to the gas inlet is decisive.
- the pump itself is designated 1, its housing 2, its stator system 3 and its rotor system 4.
- the rotor system includes the shaft 5, which in turn on the bearings 6, 7 in the bearing housing 8, connected to the pump housing 2, is supported.
- the bearing housing is also still the drive motor 9, 10.
- the axis of rotation of the rotor system 4 is denoted by 15.
- a total of three pumping stages 12, 13, 14 are provided, of which two (12, 13) as Turbomolekularvakuumpumpgen and one (14) is a molecular (Holweck) pumping stage. At the molecular pumping stage 14, the outlet of the pump 17 connects.
- the first, high-vacuum side pumping stage 12 consists of four pairs of rotor blade rows 21 and Statorschaufelschsch 22. Your inlet, the effective gas passage area is denoted by 23.
- the first pumping stage 12 is followed by the second pumping stage 13, which consists of three pairs of one stator blade row 22 and one rotor blade row 21. Your inlet is labeled 28.
- the second pumping stage 13 is spaced from the first pumping stage 12.
- the selected distance (height) a ensures the free accessibility of the gas molecules to be delivered to the gas inlet 28. Expediently, the distance a is greater than a quarter, preferably greater than one third, of the diameter of the rotor system 4.
- the adjoining Holweck pump comprises a rotating cylinder section 29, the outside and inside facing in a known manner, each with a threaded groove 30, 31 equipped with stator elements 32, 33.
- the rotor-side parts of the pump stages 12, 13, 14, form a unit which is connected to the shaft 5 in the ready state.
- the shaft 5 passes through a central bore 25, so that there is no direct connection between the storage space and the intermediate space and thus the risk of back diffusion of lubricant vapors is eliminated.
- This purpose is also the flying support of the rotor system 4.
- On high vacuum side mounted bearings with the conductance impairing components (bearing carrier) can be omitted.
- the distance of the bearing 6, 7 is kept small from the center of gravity of the rotor.
- the back diffusion of lubricant vapors can also be avoided by using magnetic bearings that can be placed in a more favorable location.
- the housing 2 is formed such that the planes of all the connection openings 36, 37 are parallel to the rotor axis 15.
- the distance of the connection 37 to the associated gas inlet 28 is very small, so that the pumping stage 13 impairing conductance losses are negligible.
- the diameter of the connection opening 37 exceeds the height a by about twice. This measure also serves to reduce the conductance losses between inlet 28 and connection opening 37.
- the illustrated pump 1 or its pump-effective elements are expediently designed such that in the region of the connection opening 36 a pressure of 10 -4 to 10 -7 , preferably 10 -5 to 10 -6 , and im Area of the connection opening 37, a pressure of about 10 -2 to 10 -4 mbar is generated.
- a high pumping speed is to be generated (eg 200 l / s).
- the subsequent, two-stage Holweck pumping stage (29, 30, 29, 31) ensures a high prevacuum resistance, so that usually the pumping speed of the second pumping stage is independent of the fore-vacuum pressure.
- this goal can be achieved by appropriate design of the blades of the first pumping stage 12.
- Another possibility is to arrange a diaphragm 38 in front of the inlet 23 of the first pumping stage, the inner diameter of which determines the desired pumping speed.
- the exemplary embodiment of the invention according to FIG. 2 differs from the pump according to FIG. 1 in that the diameter of the pumping stages 13 and 14 following the first pumping stage 12 are greater than the diameter of the pumping stage 12.
- This situation is the plane of the connection openings 36, 37 customized. It is inclined in such a way to the axis 15 of the rotor 4, that the distance of the connection openings 36, 37 to the associated gas inlets 23, 28 is as small as possible.
- the inclination angle a of the plane of the connection openings 36, 37 to the rotor axis 15 corresponds to the increase in the diameter of the pumping stages. Optimal favorable distance ratios can be achieved. In the illustrated embodiment, the inclination angle is about 5 °.
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Description
Die Erfindung bezieht sich auf eine Reibungsvakuumpumpe mit den Merkmalen des Oberbegriffs des Patentanspruchs 1.The invention relates to a friction vacuum pump having the features of the preamble of
Aus der
Die
Zum Stand der Technik gehört außerdem der Inhalt der Dokumente
Die
Der vorliegenden Erfindung liegt die Aufgabe zugrunde, eine Reibungsvakuumpumpe der eingangs erwähnten Art so zu gestalten, dass das Saugvermögen der Zwischenstufen nicht durch hohe Leitwertverluste in Verbindungsleitungen beeinträchtigt ist.The present invention has for its object to make a friction vacuum pump of the type mentioned above so that the pumping speed of the intermediate stages is not affected by high Leitwertverluste in connecting lines.
Erfindungsgemäß wird diese Aufgabe durch die kennzeichnenden Merkmale des Patentansprüchs 1 gelöst.According to the invention this object is achieved by the characterizing features of
Durch diese Merkmale ist sichergestellt, dass auch der Abstand zwischen dem jeweiligen Gaseinlass der Zwischenstufen und den zugehörigen Anschlussöffnungen möglichst klein ist. Leitwertverluste sind niedrig. Das im Bereich des Gaseinlasses aller Pumpstufen wirksame Saugvermögen steht nahezu unverändert auch im Bereich der zugehörigen Anschlussöffnungen zur Verfügung.These features ensure that the distance between the respective gas inlet of the intermediate stages and the associated connection openings is as small as possible. Conductance losses are low. The effective suction capacity in the area of the gas inlet of all pump stages is available almost unchanged even in the area of the associated connection openings.
Die Verwirklichung der Maßnahmen nach der Erfindung hat zwar zur Folge, dass die zu fördernden Gase im Einlassbereich der ersten Pumpstufe, also gerade dort, wo der Druck am niedrigsten ist, umgelenkt werden müssen. Der dadurch bewirkte Leitwertverlust kann jedoch klein gehalten werden, da der Abstand zwischen dem Gaseinlass und der Ebene der Anschlussöffnung immer noch relativ klein ist und außerdem in diesem Bereich der Wahl größerer Durchmesser nichts im Wege steht. Außerdem gilt für die Mehrzahl der Applikationen, dass besonders hohe Saugvermögenswerte im Bereich des Einlasses der ersten (hochvakuumseitigen) Pumpstufe nicht gefordert werden. Häufig besteht sogar die Notwendigkeit, das Saugvermögen an dieser Stelle zu drosseln.Although the implementation of the measures according to the invention has the consequence that the gases to be delivered in the inlet region of the first pumping stage, ie just where the pressure is lowest, must be redirected. However, the conductance loss caused thereby can be kept small, since the distance between the gas inlet and the plane of the connection opening is still relatively small and, moreover, nothing stands in the way of choosing larger diameters in this area. In addition, for the majority of applications, particularly high pumping speed values in the region of the inlet of the first (high-vacuum-side) pumping stage are not required. Often there is even the need to throttle the suction at this point.
Der wesentliche Zweck der ersten Pumpstufe liegt darin, für ein hohes Kompressionsverhältnis zu sorgen. Die für die erste Pumpstufe gewählten Schaufeleigenschaften (Anzahl der Turbostufen, Schaufelabstand, Neigungswinkel usw.) müssen dieser Funktion Rechnung tragen. Wesentlich ist eine Trennung der beiden Arbeitsdruckbereiche der beiden Pumpstufen. Ein hohes Saugvermögen wird in aller Regel erst an dem oder den Zwischeneinlässen gewünscht. Auch dieses Ziel kann durch die Wahl besonderer Schaufelgeometrien erreicht werden. Durch die Anwendung der erfindungsgemäßen Maßnahmen ist gerade in diesem Bereich sichergestellt, dass Saugvermögensverluste weitestgehend vermieden sind.The essential purpose of the first pumping stage is to provide a high compression ratio. The blade properties chosen for the first pumping stage (number of turbo stages, blade clearance, pitch angle, etc.) must take this function into account. It is essential to separate the two working pressure ranges of the two pumping stages. A high pumping speed is usually desired only at the or the intermediate inlets. This goal can also be achieved by choosing special blade geometries. By applying the measures according to the invention, it is ensured in this area that pumping losses are largely avoided.
Für das Saugvermögen einer Pumpstufe ist die Zugänglichkeit der Gasmoleküle zum Gaseinlass (wirksame Gasdurchtrittsfläche) maßgebend. Um dieses Ziel zu erreichen, ist es bei einer Zwischenstufe bekannt, zwischen der vorhergehenden Stufe und ihrem Gaseinlass einen größeren Abstand vorzusehen. Besonders vorteilhaft ist es, wenn dieser Abstand mindestens ein Viertel, vorzugsweise ein Drittel, des Durchmessers des Rotors beträgt.For the pumping stage, the accessibility of the gas molecules to the gas inlet (effective gas passage area) is decisive. To achieve this goal, it is known at an intermediate stage to provide a greater distance between the previous stage and its gas inlet. It is particularly advantageous if this distance is at least a quarter, preferably one third, of the diameter of the rotor.
Weitere Vorteile und Einzelheiten der Erfindung sollen an Hand des in Figur 2 dargestellten Ausführungsbeispiels erläutert werden.Further advantages and details of the invention will be explained with reference to the embodiment shown in Figure 2.
In beiden Figuren sind die Pumpe selbst mit 1, ihr Gehäuse mit 2, ihr Statorsystem mit 3 und ihr Rotorsystem mit 4 bezeichnet. Zum Rotorsystem gehört die Welle 5, die sich ihrerseits über die Lager 6, 7 im Lagergehäuse 8, verbunden mit dem Pumpengehäuse 2, abstützt. Im Lagergehäuse befindet sich außerdem noch der Antriebsmotor 9, 10. Die Drehachse des Rotorsystems 4 ist mit 15 bezeichnet.In both figures, the pump itself is designated 1, its
Insgesamt sind drei Pumpstufen 12, 13, 14 vorgesehen, von denen zwei (12, 13) als Turbomolekularvakuumpumpstufen und eine (14) als Molekular(Holweck)-Pumpstufe ausgebildet sind. An die Molekularpumpstufe 14 schließt sich der Auslass der Pumpe 17 an.A total of three
Die erste, hochvakuumseitig gelegene Pumpstufe 12 besteht aus vier Paaren von Rotorschaufelreihen 21 und Statorschaufelreihen 22. Ihr Einlass, die wirksame Gasdurchtrittsfläche, ist mit 23 bezeichnet. An die erste Pumpstufe 12 schließt sich die zweite Pumpstufe 13 an, die aus drei Paaren von je einer Statorschaufelreihe 22 und einer Rotorschaufelreihe 21 besteht. Ihr Einlass ist mit 28 bezeichnet.The first, high-vacuum
Die zweite Pumpstufe 13 ist von der ersten Pumpstufe 12 beabstandet. Der gewählte Abstand (Höhe) a sichert die freie Zugänglichkeit der zu fördernden Gasmoleküle zum Gaseinlass 28. Zweckmäßig ist der Abstand a größer als ein Viertel, vorzugsweise größer als ein Drittel des Durchmessers des Rotorsystems 4.The
Die sich daran anschließende Holweck-Pumpe umfasst einen rotierenden Zylinderabschnitt 29, dem außen und innen in bekannter Weise mit jeweils einer Gewindenut 30, 31 ausgerüstete Statorelemente 32, 33 gegenüberstehen.The adjoining Holweck pump comprises a rotating
Die rotorseiten Teile der Pumpstufen 12, 13, 14, bilden eine Einheit, die im betriebsfertigen Zustand mit der Welle 5 verbunden ist. In Höhe des Zwischenraumes zwischen den Pumpstufen 12 und 13 durchsetzt die Welle 5 eine zentrale Bohrung 25, so dass keine unmittelbare Verbindung zwischen dem Lagerraum und dem Zwischenraum besteht und damit die Gefahr der Rückdiffusion von Schmiermitteldämpfen beseitigt ist. Diesem Zweck dient auch die fliegende Lagerung des Rotorsystems 4. Auf hochvakuumseitig angeordnete Lagerungen mit den Leitwert beeinträchtigenden Bauteilen (Lagerträger) kann verzichtet werden. Durch eine glockenförmige Ausbildung des motornahen Teils des Rotorsystems 4 wird allerdings der Abstand der Lagerung 6, 7 vom Schwerpunkt des Rotors klein gehalten. Die Rückdiffusion von Schmiermitteldämpfen kann auch durch Einsatz von Magnetlagern vermieden werden, die an günstigerer Stelle angeordnet werden können.The rotor-side parts of the
Bei der Pumpe nach Figur 1, die kein Ausführungsbeispiel der Erfindung ist, ist das Gehäuse 2 derart ausgebildet, dass die Ebenen sämtlicher Anschlussöffnungen 36, 37 parallel zur Rotorachse 15 liegen. Dadurch ist insbesondere der Abstand des Anschlusses 37 zum zugehörigen Gaseinlass 28 sehr klein, so dass das Saugvermögen der Pumpstufe 13 beeinträchtigende Leitwertverluste vernachlässigbar sind. Dieses würde auch für jeden weiteren Zwischenanschluss gelten, der stromabwärts vom Zwischenanschluss 37/28 gelegen wäre. Im übrigen überschreitet der Durchmesser der Anschlussöffnung 37 die Höhe a um etwa das Doppelte. Auch diese Maßnahme dient der Verringerung der Leitwertverluste zwischen Einlass 28 und Anschlussöffnung 37.In the pump of Figure 1, which is not an embodiment of the invention, the
Die dargestellte Pumpe 1 bzw. ihre pumpwirksamen Elemente (Stator-. Rotorschaufeln, Gewindestufen) sind zweckmäßig derart ausgebildet, dass im Bereich der Anschlussöffnung 36 ein Druck von 10-4 bis 10-7, vorzugsweise 10-5 bis 10-6, und im Bereich der Anschlussöffnung 37 ein Druck von etwa 10-2 bis 10-4 mbar erzeugt wird. Dadurch ergibt sich für die erste Pumpstufe 12 die Notwendigkeit, für ein Kompressionsverhältnis von 102 bis 104, vorzugsweise größer 100, zu sorgen. Mit der zweiten Pumpstufe soll ein hohes Saugvermögen erzeugt werden (z.B. 200 l/s). Die sich anschließende, zweistufige Holweck-Pumpstufe (29, 30; 29, 31) sichert eine hohe Vorvakuumbeständigkeit, so dass üblicherweise das Saugvermögen der zweiten Pumpstufe vom Vorvakuumdruck unabhängig ist.The illustrated
Für den Fall, dass im Bereich der Anschlussöffnung 36 ein besonders hohes Saugvermögen nicht gefordert wird, kann dieses Ziel durch entsprechende Gestaltung der Schaufeln der ersten Pumpstufe 12 erreicht werden. Eine andere Möglichkeit besteht darin, vor dem Einlass 23 der ersten Pumpstufe eine Blende 38 anzuordnen, deren Innendurchmesser das gewünschte Saugvermögen bestimmt.In the event that a particularly high pumping speed is not required in the region of the connecting
Das Ausführungsbeispiel der Erfindung nach Figur 2 unterscheidet sich von der Pumpe nach Figur 1 dadurch, dass der Durchmesser der auf die erste Pumpstufe 12 folgenden Pumpstufen 13 und 14 größer sind als der Durchmesser der Pumpstufe 12. Dieser Gegebenheit ist die Ebene der Anschlussöffnungen 36, 37 angepasst. Sie ist derart zur Achse 15 des Rotors 4 geneigt, dass der Abstand der Anschlussöffnungen 36, 37 zu den zugehörigen Gaseinlässen 23, 28 möglichst klein ist. Der Neigungswinkel a der Ebene der Anschlussöffnungen 36, 37 zur Rotorachse 15 entspricht der Zunahme der Durchmesser der Pumpstufen. Optimal günstige Abstandsverhältnisse können dadurch erreicht werden. Im dargestellten Ausführungsbeispiel beträgt der Neigungswinkel etwa 5°.The exemplary embodiment of the invention according to FIG. 2 differs from the pump according to FIG. 1 in that the diameter of the pumping stages 13 and 14 following the
Claims (11)
- Single-flow friction vacuum pump (1) having a stator (3) and a rotor (4), which form at least two pump stages (12, 13, 14) each having a gas inlet (23, 28), as well as having connection means for the pump stages, which are equipped with connection openings (36, 37) for each of the gas inlets (23, 28), wherein the connection openings (36, 37) lie in a common plane and are used to connect the gas inlets (23, 28) of the pump stages to a device, which is to be evacuated, wherein all of the connection openings (36, 37) and also the common plane of the connection openings are situated laterally adjacent to the pump stages (12, 13, 14) so that the distance between the connection openings (36, 37) and the rotor axis (15) is selectable as small as possible, characterized in that the diameter of succeeding pump stages (13, 14) is greater than the diameter of preceding pump stages (12, 13) and that the inclination of the plane of the connection openings (36, 37) in relation to the direction of the axis (15) of the rotor (4) is adapted to the diameter enlargement.
- Friction vacuum pump according to one of the preceding claims, characterized in that the connection openings (36, 37) are component parts of the housing (2) of the friction vacuum pump (1).
- Friction vacuum pump according to one of the preceding claims, characterized in that the first two pump stages (12, 13) are designed as turbomolecular pump stages and that their pump-active elements (stator blades, rotor blades) are fashioned in such a way that the first pump stage (12) ensures a high compression ratio and that the second pump stage (13) generates a high intake capacity.
- Friction vacuum pump according to claim 3, characterized in that the two pump stages (12 and 13) are disposed a distance apart and that their distance(a) is greater than a quarter of the rotor diameter, preferably approximately a third of the rotor diameter.
- Friction vacuum pump according to claim 4, characterized in that the diameter of the connection opening (37) connected by the connection means to the gas inlet (28) of the second pump stage is greater than the distance (a), preferably approximately double the distance (a).
- Friction vacuum pump according to claim 3, 4 or 7, characterized in that the two pump stages (12, 13) are adjoined by a two-stage Holweck pump stage.
- Friction vacuum pump according to one of the preceding claims, characterized in that the rotor (4) is driven at the backing vacuum end and mounted overhung.
- Friction vacuum pump according to claim 7, characterized in that a free shaft end penetrates a central bore (25) in the rotor (4) and that the rotor (4) is fastened on said shaft end.
- Friction vacuum pump according to claim 7 or 8, characterized in that the part of the rotor (4) that is close to the motor is of a bell-shaped design.
- Friction vacuum pump according to one of the preceding claims, characterized in that associated with the inlet (23) of the first pump stage (12) is a restrictor (38) for limiting the intake capacity.
- Friction vacuum pump according to one of the preceding claims, characterized in that it is equipped with magnetic bearings.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19821634 | 1998-05-14 | ||
| DE19821634A DE19821634A1 (en) | 1998-05-14 | 1998-05-14 | Friction vacuum pump with staged rotor and stator |
| PCT/EP1998/005802 WO1999060275A1 (en) | 1998-05-14 | 1998-09-11 | Friction vacuum pump with a stator and a rotor |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| EP1078166A1 EP1078166A1 (en) | 2001-02-28 |
| EP1078166B1 EP1078166B1 (en) | 2003-06-11 |
| EP1078166B2 true EP1078166B2 (en) | 2007-09-05 |
Family
ID=7867761
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP98946450A Expired - Lifetime EP1078166B2 (en) | 1998-05-14 | 1998-09-11 | Friction vacuum pump with a stator and a rotor |
Country Status (10)
| Country | Link |
|---|---|
| US (1) | US6435811B1 (en) |
| EP (1) | EP1078166B2 (en) |
| JP (1) | JP4173637B2 (en) |
| KR (1) | KR20010025024A (en) |
| CN (1) | CN1115488C (en) |
| AU (1) | AU754944B2 (en) |
| CA (1) | CA2332777C (en) |
| DE (2) | DE19821634A1 (en) |
| TW (1) | TW370594B (en) |
| WO (1) | WO1999060275A1 (en) |
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| JP3777498B2 (en) * | 2000-06-23 | 2006-05-24 | 株式会社荏原製作所 | Turbo molecular pump |
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| DE10302764A1 (en) * | 2003-01-24 | 2004-07-29 | Pfeiffer Vacuum Gmbh | Vacuum pumping system |
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| GB0329839D0 (en) * | 2003-12-23 | 2004-01-28 | Boc Group Plc | Vacuum pump |
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| DE202005019644U1 (en) * | 2005-12-16 | 2007-04-26 | Leybold Vacuum Gmbh | Turbo molecular pump |
| JP2007231938A (en) * | 2006-02-06 | 2007-09-13 | Boc Edwards Kk | Vacuum device, method of quickly reducing water vapor partial pressure in vacuum device, method of preventing rise of water vapor partial pressure in load lock chamber, and vacuum pump for vacuum device |
| DE102008024764A1 (en) * | 2008-05-23 | 2009-11-26 | Oerlikon Leybold Vacuum Gmbh | Multi-stage vacuum pump |
| DE202009003880U1 (en) | 2009-03-19 | 2010-08-05 | Oerlikon Leybold Vacuum Gmbh | Multi-inlet vacuum pump |
| FR2984972A1 (en) * | 2011-12-26 | 2013-06-28 | Adixen Vacuum Products | ADAPTER FOR VACUUM PUMPS AND ASSOCIATED PUMPING DEVICE |
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| DE102013109637A1 (en) * | 2013-09-04 | 2015-03-05 | Pfeiffer Vacuum Gmbh | Vacuum pump and arrangement with a vacuum pump |
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| JP6488898B2 (en) * | 2015-06-09 | 2019-03-27 | 株式会社島津製作所 | Vacuum pump and mass spectrometer |
| US10655638B2 (en) | 2018-03-15 | 2020-05-19 | Lam Research Corporation | Turbomolecular pump deposition control and particle management |
| US11519419B2 (en) | 2020-04-15 | 2022-12-06 | Kin-Chung Ray Chiu | Non-sealed vacuum pump with supersonically rotatable bladeless gas impingement surface |
| GB2601515B (en) * | 2020-12-02 | 2022-12-28 | Agilent Technologies Inc | Vacuum pump with elastic spacer |
| EP4293232B1 (en) * | 2023-10-17 | 2026-05-06 | Pfeiffer Vacuum Technology AG | Turbomolecular pump |
| EP4379216B1 (en) * | 2024-04-22 | 2026-02-18 | Pfeiffer Vacuum Technology AG | Turbomolecular vacuum pump with compact design |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2442614A1 (en) † | 1974-09-04 | 1976-03-18 | Siemens Ag | Rotary high vacuum pump - has second inlet opening so that it can produce two levels of vacuum |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3189264A (en) * | 1963-06-04 | 1965-06-15 | Arthur Pfeiffer Company | Vacuum pump drive and seal arrangement |
| DE1809902C3 (en) * | 1968-11-20 | 1973-11-15 | Arthur Pfeiffer-Vakuumtechnik Gmbh, 6330 Wetzlar | Multi-stage turbo molecular high vacuum pump |
| US3628894A (en) * | 1970-09-15 | 1971-12-21 | Bendix Corp | High-vacuum mechanical pump |
| DE3826710A1 (en) * | 1987-08-07 | 1989-02-16 | Japan Atomic Energy Res Inst | VACUUM PUMP |
| EP0603694A1 (en) * | 1992-12-24 | 1994-06-29 | BALZERS-PFEIFFER GmbH | Vacuum system |
| US5733104A (en) | 1992-12-24 | 1998-03-31 | Balzers-Pfeiffer Gmbh | Vacuum pump system |
| DE4331589C2 (en) * | 1992-12-24 | 2003-06-26 | Pfeiffer Vacuum Gmbh | Vacuum pumping system |
| DE29516599U1 (en) * | 1995-10-20 | 1995-12-07 | Leybold AG, 50968 Köln | Friction vacuum pump with intermediate inlet |
| GB9725146D0 (en) * | 1997-11-27 | 1998-01-28 | Boc Group Plc | Improvements in vacuum pumps |
| US6193461B1 (en) * | 1999-02-02 | 2001-02-27 | Varian Inc. | Dual inlet vacuum pumps |
-
1998
- 1998-05-14 DE DE19821634A patent/DE19821634A1/en not_active Withdrawn
- 1998-09-11 WO PCT/EP1998/005802 patent/WO1999060275A1/en not_active Ceased
- 1998-09-11 JP JP2000549859A patent/JP4173637B2/en not_active Expired - Fee Related
- 1998-09-11 CA CA002332777A patent/CA2332777C/en not_active Expired - Fee Related
- 1998-09-11 DE DE59808723T patent/DE59808723D1/en not_active Expired - Lifetime
- 1998-09-11 US US09/700,046 patent/US6435811B1/en not_active Expired - Lifetime
- 1998-09-11 AU AU93481/98A patent/AU754944B2/en not_active Ceased
- 1998-09-11 EP EP98946450A patent/EP1078166B2/en not_active Expired - Lifetime
- 1998-09-11 CN CN98814028A patent/CN1115488C/en not_active Expired - Fee Related
- 1998-09-11 KR KR1020007012771A patent/KR20010025024A/en not_active Ceased
- 1998-10-19 TW TW087117262A patent/TW370594B/en not_active IP Right Cessation
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2442614A1 (en) † | 1974-09-04 | 1976-03-18 | Siemens Ag | Rotary high vacuum pump - has second inlet opening so that it can produce two levels of vacuum |
Non-Patent Citations (1)
| Title |
|---|
| "Vakuumtechnik-Grundlagen und Anwendungen", S. 77, Carl Hanser Verlag München-Wien, 1991 † |
Also Published As
| Publication number | Publication date |
|---|---|
| US6435811B1 (en) | 2002-08-20 |
| JP4173637B2 (en) | 2008-10-29 |
| WO1999060275A1 (en) | 1999-11-25 |
| AU754944B2 (en) | 2002-11-28 |
| JP2002515568A (en) | 2002-05-28 |
| DE19821634A1 (en) | 1999-11-18 |
| DE59808723D1 (en) | 2003-07-17 |
| CA2332777C (en) | 2007-11-06 |
| EP1078166B1 (en) | 2003-06-11 |
| AU9348198A (en) | 1999-12-06 |
| KR20010025024A (en) | 2001-03-26 |
| TW370594B (en) | 1999-09-21 |
| CN1292851A (en) | 2001-04-25 |
| EP1078166A1 (en) | 2001-02-28 |
| CN1115488C (en) | 2003-07-23 |
| CA2332777A1 (en) | 1999-11-25 |
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