GB2139781B - Mask structure for vacuum ultraviolet lithography - Google Patents
Mask structure for vacuum ultraviolet lithographyInfo
- Publication number
- GB2139781B GB2139781B GB08411765A GB8411765A GB2139781B GB 2139781 B GB2139781 B GB 2139781B GB 08411765 A GB08411765 A GB 08411765A GB 8411765 A GB8411765 A GB 8411765A GB 2139781 B GB2139781 B GB 2139781B
- Authority
- GB
- United Kingdom
- Prior art keywords
- vacuum ultraviolet
- mask structure
- ultraviolet lithography
- lithography
- mask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000233 ultraviolet lithography Methods 0.000 title 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/50—Mask blanks not covered by G03F1/20 - G03F1/34; Preparation thereof
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US49506483A | 1983-05-13 | 1983-05-13 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| GB8411765D0 GB8411765D0 (en) | 1984-06-13 |
| GB2139781A GB2139781A (en) | 1984-11-14 |
| GB2139781B true GB2139781B (en) | 1986-09-10 |
Family
ID=23967113
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB08411765A Expired GB2139781B (en) | 1983-05-13 | 1984-05-09 | Mask structure for vacuum ultraviolet lithography |
Country Status (6)
| Country | Link |
|---|---|
| JP (1) | JPS59214856A (en) |
| DE (1) | DE3417888A1 (en) |
| FR (1) | FR2545949B1 (en) |
| GB (1) | GB2139781B (en) |
| IT (1) | IT1174089B (en) |
| NL (1) | NL8401525A (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2189903A (en) * | 1986-04-01 | 1987-11-04 | Plessey Co Plc | An etch technique for metal mask definition |
| US4780175A (en) * | 1986-10-27 | 1988-10-25 | Sharp Kabushiki Kaisha | Method for the production of an optical phase-shifting board |
| JPH02166447A (en) * | 1988-12-20 | 1990-06-27 | Fujitsu Ltd | Mask for exposing and its production |
| JPH11237503A (en) * | 1997-12-03 | 1999-08-31 | Canon Inc | Diffraction optical element and optical system having that |
| DE19808461A1 (en) | 1998-03-02 | 1999-09-09 | Zeiss Carl Fa | Reticle with crystal carrier material |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2658623C2 (en) * | 1976-12-23 | 1982-07-29 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut | Recording media and process for its manufacture |
-
1984
- 1984-05-09 GB GB08411765A patent/GB2139781B/en not_active Expired
- 1984-05-09 FR FR8407120A patent/FR2545949B1/en not_active Expired
- 1984-05-10 IT IT20877/84A patent/IT1174089B/en active
- 1984-05-11 NL NL8401525A patent/NL8401525A/en not_active Application Discontinuation
- 1984-05-11 JP JP59093094A patent/JPS59214856A/en active Pending
- 1984-05-14 DE DE19843417888 patent/DE3417888A1/en not_active Withdrawn
Also Published As
| Publication number | Publication date |
|---|---|
| IT8420877A1 (en) | 1985-11-10 |
| DE3417888A1 (en) | 1984-11-15 |
| NL8401525A (en) | 1984-12-03 |
| FR2545949B1 (en) | 1986-10-10 |
| JPS59214856A (en) | 1984-12-04 |
| IT8420877A0 (en) | 1984-05-10 |
| GB8411765D0 (en) | 1984-06-13 |
| FR2545949A1 (en) | 1984-11-16 |
| GB2139781A (en) | 1984-11-14 |
| IT1174089B (en) | 1987-07-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PCNP | Patent ceased through non-payment of renewal fee |
Effective date: 19920509 |