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GB2149206B - Improvements in semiconductor devices - Google Patents
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GB2149206B - Improvements in semiconductor devices - Google Patents

Improvements in semiconductor devices

Info

Publication number
GB2149206B
GB2149206B GB08425665A GB8425665A GB2149206B GB 2149206 B GB2149206 B GB 2149206B GB 08425665 A GB08425665 A GB 08425665A GB 8425665 A GB8425665 A GB 8425665A GB 2149206 B GB2149206 B GB 2149206B
Authority
GB
United Kingdom
Prior art keywords
semiconductor devices
semiconductor
devices
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB08425665A
Other versions
GB2149206A (en
GB8425665D0 (en
Inventor
Dr James Henry Stephen
Dr Geoffrey Dearnaley
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Inmos Corp
Original Assignee
Inmos Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inmos Corp filed Critical Inmos Corp
Publication of GB8425665D0 publication Critical patent/GB8425665D0/en
Publication of GB2149206A publication Critical patent/GB2149206A/en
Application granted granted Critical
Publication of GB2149206B publication Critical patent/GB2149206B/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00Interconnections in chips, wafers or substrates
    • H10W20/01Manufacture or treatment
    • H10W20/031Manufacture or treatment of conductive parts of the interconnections
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00Electrodes of devices having potential barriers
    • H10D64/01Manufacture or treatment
    • H10D64/011Manufacture or treatment of electrodes ohmically coupled to a semiconductor
    • H10D64/0111Manufacture or treatment of electrodes ohmically coupled to a semiconductor to Group IV semiconductors
    • H10D64/0112Manufacture or treatment of electrodes ohmically coupled to a semiconductor to Group IV semiconductors using conductive layers comprising silicides
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • H10P95/90Thermal treatments, e.g. annealing or sintering
GB08425665A 1983-10-13 1984-10-11 Improvements in semiconductor devices Expired GB2149206B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB838327486A GB8327486D0 (en) 1983-10-13 1983-10-13 Semiconductor devices

Publications (3)

Publication Number Publication Date
GB8425665D0 GB8425665D0 (en) 1984-11-14
GB2149206A GB2149206A (en) 1985-06-05
GB2149206B true GB2149206B (en) 1987-04-08

Family

ID=10550159

Family Applications (2)

Application Number Title Priority Date Filing Date
GB838327486A Pending GB8327486D0 (en) 1983-10-13 1983-10-13 Semiconductor devices
GB08425665A Expired GB2149206B (en) 1983-10-13 1984-10-11 Improvements in semiconductor devices

Family Applications Before (1)

Application Number Title Priority Date Filing Date
GB838327486A Pending GB8327486D0 (en) 1983-10-13 1983-10-13 Semiconductor devices

Country Status (2)

Country Link
JP (1) JPS6098620A (en)
GB (2) GB8327486D0 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5028554A (en) * 1986-07-03 1991-07-02 Oki Electric Industry Co., Ltd. Process of fabricating an MIS FET
JPS6370516A (en) * 1986-09-12 1988-03-30 インタ−ナショナル ビジネス マシ−ンズ コ−ポレ−ション Method of forming metal contact
US6468899B1 (en) * 2001-06-27 2002-10-22 Agere Systems Guardian Corp. Contactless local interconnect process utilizing self-aligned silicide

Also Published As

Publication number Publication date
GB8327486D0 (en) 1983-11-16
GB2149206A (en) 1985-06-05
JPS6098620A (en) 1985-06-01
GB8425665D0 (en) 1984-11-14

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee