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GB2168481B - Silicon transducer - Google Patents
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GB2168481B - Silicon transducer - Google Patents

Silicon transducer

Info

Publication number
GB2168481B
GB2168481B GB08431493A GB8431493A GB2168481B GB 2168481 B GB2168481 B GB 2168481B GB 08431493 A GB08431493 A GB 08431493A GB 8431493 A GB8431493 A GB 8431493A GB 2168481 B GB2168481 B GB 2168481B
Authority
GB
United Kingdom
Prior art keywords
silicon transducer
transducer
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB08431493A
Other versions
GB8431493D0 (en
GB2168481A (en
Inventor
Robert James Hodges
Aubrey Michael Crick
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STC PLC
Original Assignee
STC PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by STC PLC filed Critical STC PLC
Priority to GB08431493A priority Critical patent/GB2168481B/en
Publication of GB8431493D0 publication Critical patent/GB8431493D0/en
Publication of GB2168481A publication Critical patent/GB2168481A/en
Application granted granted Critical
Publication of GB2168481B publication Critical patent/GB2168481B/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
    • G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
    • G01P15/123—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance by piezo-resistive elements, e.g. semiconductor strain gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
GB08431493A 1984-12-13 1984-12-13 Silicon transducer Expired GB2168481B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB08431493A GB2168481B (en) 1984-12-13 1984-12-13 Silicon transducer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB08431493A GB2168481B (en) 1984-12-13 1984-12-13 Silicon transducer

Publications (3)

Publication Number Publication Date
GB8431493D0 GB8431493D0 (en) 1985-01-23
GB2168481A GB2168481A (en) 1986-06-18
GB2168481B true GB2168481B (en) 1988-07-06

Family

ID=10571146

Family Applications (1)

Application Number Title Priority Date Filing Date
GB08431493A Expired GB2168481B (en) 1984-12-13 1984-12-13 Silicon transducer

Country Status (1)

Country Link
GB (1) GB2168481B (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4959568A (en) * 1986-08-05 1990-09-25 General Scanning, Inc. Dynamically tunable resonant device with electric control
DE3731196A1 (en) * 1987-09-17 1989-03-30 Messerschmitt Boelkow Blohm FREQUENCY SELECTIVE SOUND CONVERTER
DE3734906A1 (en) * 1987-10-15 1989-04-27 Bosch Gmbh Robert Measuring device (transducer) for measuring a translational acceleration
US5049775A (en) * 1988-09-30 1991-09-17 Boston University Integrated micromechanical piezoelectric motor
DE4008643A1 (en) * 1990-03-17 1991-09-19 Daimler Benz Ag METHOD FOR SETTING A SET VALUE OF THE EXPANSION OF AN ACTUATOR VARIABLE IN ITS LENGTH EXTENSION, BY USING AN EXTERNAL ELECTROMAGNETIC OR ELECTROSTATIC FIELD
US5610335A (en) * 1993-05-26 1997-03-11 Cornell Research Foundation Microelectromechanical lateral accelerometer
GB2412501B (en) * 2004-03-26 2007-10-31 Univ Southampton An electromagnetic device for converting mechanical vibrational energy into electrical energy

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB767424A (en) * 1953-09-29 1957-02-06 Daimler Benz Ag Improvements relating to acceleration-measuring or vibration-measuring apparatus
US3456508A (en) * 1967-05-24 1969-07-22 Sperry Rand Corp Vibrating diaphragm pressure sensor apparatus
CH538683A (en) * 1971-11-23 1973-06-30 Mettler Instrumente Ag Force or length meter
US4098133A (en) * 1977-05-16 1978-07-04 Sperry Rand Corporation Vibrating diaphragm fluid pressure sensor device
GB2064770A (en) * 1980-04-15 1981-06-17 Sinar Agritec Ltd Improvements relating to weighing devices
US4381672A (en) * 1981-03-04 1983-05-03 The Bendix Corporation Vibrating beam rotation sensor
NO823684L (en) * 1982-01-21 1983-07-22 Watson Ind Inc ANGLE SPEED SENSOR.

Also Published As

Publication number Publication date
GB8431493D0 (en) 1985-01-23
GB2168481A (en) 1986-06-18

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee