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JP2000283111A - Supplying device for high pressure air - Google Patents
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JP2000283111A - Supplying device for high pressure air - Google Patents

Supplying device for high pressure air

Info

Publication number
JP2000283111A
JP2000283111A JP11087772A JP8777299A JP2000283111A JP 2000283111 A JP2000283111 A JP 2000283111A JP 11087772 A JP11087772 A JP 11087772A JP 8777299 A JP8777299 A JP 8777299A JP 2000283111 A JP2000283111 A JP 2000283111A
Authority
JP
Japan
Prior art keywords
pressure
air
valve
secondary side
air supply
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11087772A
Other languages
Japanese (ja)
Inventor
Tatsunari Saka
達成 坂
Satoshi Fujimoto
聡 藤本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pacific Industrial Co Ltd
Original Assignee
Pacific Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pacific Industrial Co Ltd filed Critical Pacific Industrial Co Ltd
Priority to JP11087772A priority Critical patent/JP2000283111A/en
Publication of JP2000283111A publication Critical patent/JP2000283111A/en
Pending legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Supply Devices, Intensifiers, Converters, And Telemotors (AREA)
  • Fluid-Pressure Circuits (AREA)

Abstract

PROBLEM TO BE SOLVED: To instantly generate high pressure air having few pressure fluctuation and high accuracy so as to use for pressurized high pressure without using a pressure control valve, and supply the air stably by arranging a plurality of air tanks and a plurality of pressure regulating valves in a secondary side air supplying path, and regulating pressure of air. SOLUTION: Pressurized air is supplied from a pressurized air supplying source 5 to a primary side cylinder 10 of a booster cylinder 9 through a primary side air supplying path 6 with a solenoid valve 7 and a throttle valve 8. A secondary side air supplying path 16 built in a check valve 15 for preventing reverse flow of air and which is divided from the primary side air supplying path is connected to a secondary side cylinder 11 of the booster cylinder 9. Furthermore, a pressure regulating path 17 having a plurality of air tanks is connected, and a pressurized port 19 is connected through a solenoid valve 18.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】この発明は、「高圧空気の供
給装置」、更に詳しくは、高圧空気供給源の空気圧の変
動を少なくし、安定した高精度な高圧空気を瞬時に得る
ことのできる「高圧空気の供給装置」に関するものであ
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a "high-pressure air supply device", and more particularly, to a "high-pressure air supply device" capable of reducing fluctuations in air pressure of a high-pressure air supply source and instantaneously obtaining stable, high-precision high-pressure air. High-pressure air supply device ”.

【0002】[0002]

【従来の技術】従来から、例えば、加圧空気供給源より
供給された圧力を調整する圧力制御弁として減圧弁があ
った。この減圧弁は、図2のような構成となっており、
この減圧弁の使い方は、一次側から二次側への流体の流
量を決める弁棒1と、弁棒1を押さえるスプリング2
と、スプリング2を圧縮させるハンドル3と、二次側の
圧力消費量の変動を緩和するダイヤフラム4とからなっ
ている。
2. Description of the Related Art Conventionally, for example, there has been a pressure reducing valve as a pressure control valve for adjusting a pressure supplied from a pressurized air supply source. This pressure reducing valve is configured as shown in FIG.
This pressure reducing valve is used as a valve rod 1 for determining the flow rate of fluid from the primary side to the secondary side, and a spring 2 for holding the valve rod 1.
, A handle 3 for compressing the spring 2, and a diaphragm 4 for reducing fluctuations in the secondary side pressure consumption.

【0003】また、この減圧弁は、ハンドル3を回して
調整ねじをねじ込んでいくと、スプリング2が圧縮され
るため、その反発力で弁棒1が下へ押されます。そして
減圧弁が開き、一次側(入口側)から流入した空気は、
二次側(出口側)へ流れ出ます。 この時流れ出す空気
圧は、スプリング2をどの程度圧縮したか(ハンドル3
をどのくらい回したか)によって決まります。つまり、
調整ねじのねじ込量が少なければ低い圧力しか流れ出ま
せんし、ねじ込量が多ければ高い圧力が流れ出ます。
In this pressure reducing valve, when the adjusting screw is screwed by turning the handle 3, the spring 2 is compressed, and the valve rod 1 is pushed downward by the repulsive force. Then, the pressure reducing valve opens, and the air flowing in from the primary side (inlet side)
Flows out to the secondary side (exit side). The air pressure flowing out at this time depends on how much the spring 2 is compressed (the handle 3
How much you turned). That is,
If the amount of screwing in the adjusting screw is small, only low pressure will flow out, and if the amount of screwing in is large, high pressure will flow out.

【0004】そして、ダイヤフラム4を取り付けること
によって、二次側の圧力消費量が多大に変動しても、二
次側の圧力が調整した圧力より低くなることを抑えま
す。ダイヤフラム4は、軟らかい合成ゴムの板などでで
きている膜状のものです。2次側の空気の消費量が多く
なると圧力が下がりますが、そのとき、ダイヤフラム4
に作用している圧力も小さくなるので、スプリング2の
反発力は圧力の小さくなった分だけ大きくなったと同じ
ことになり、弁棒1をより大きく押し下げて弁を開きま
す。そして、空気の流量が多くなって消費量が多くなっ
た分を補い、圧力が下がるのを防ぐのです。
By attaching the diaphragm 4, even if the pressure consumption on the secondary side fluctuates greatly, it is possible to prevent the pressure on the secondary side from becoming lower than the adjusted pressure. The diaphragm 4 is a film made of a soft synthetic rubber plate or the like. When the consumption of air on the secondary side increases, the pressure decreases.
Since the pressure acting on the spring becomes smaller, the repulsive force of the spring 2 becomes the same as the increase in the pressure, and the valve is opened by pushing down the stem 1 more. It compensates for the increased air flow and increased consumption, preventing the pressure from dropping.

【0005】逆に空気の消費量が少なくなると、ダイヤ
フラム4に作用する圧力が上がり、スプリング2の反発
力が減殺されるため、弁棒1は上に戻って、弁の開きの
程度を小さくします。したがって、空気流量は絞られ
て、二次側の圧力が、最初に調整された圧力以上に上昇
しないようになっていた。
Conversely, when the amount of air consumption decreases, the pressure acting on the diaphragm 4 increases, and the repulsive force of the spring 2 is reduced, so that the valve stem 1 returns upward to reduce the degree of opening of the valve. You. Therefore, the air flow rate was reduced, so that the pressure on the secondary side did not increase more than the initially adjusted pressure.

【0006】[0006]

【発明が解決しようとする課題】しかしながら、圧力制
御弁を使用して圧力調整を行う場合において、実際に、
高圧40kgf/cm2程度以上の圧力を調整する圧力制御弁
は、高価であり、また、ダイヤフラムを内蔵しているた
め、高圧によるダイヤフラムの変動が大きいため応答性
が悪く、また、圧力変動幅においては±0.1kgf/cm2レ
ベルの精度が確保できず、また、圧力を得た瞬間に衝撃
圧力を受け、調整された圧力を安定した状態で使用する
までには、衝撃圧の収まるまでのある程度の時間を置く
必要があった。
However, when pressure is adjusted using a pressure control valve,
A pressure control valve that regulates a pressure of about 40 kgf / cm2 or more at high pressure is expensive, and because it has a built-in diaphragm, the diaphragm has large fluctuations due to high pressure, resulting in poor responsiveness. Accuracy of ± 0.1kgf / cm2 level cannot be ensured, and the shock pressure is received at the moment when the pressure is obtained. I had to put some time.

【0007】本発明は、以上の問題点等を解決するもの
で、圧力制御弁を使用せず、圧力変動の少ない高精度な
高圧空気を、高圧加圧に使用できるように瞬時に作り出
し、安定して供給する装置を開発することを目的とした
ものであります。
The present invention solves the above-mentioned problems and the like, and instantly produces high-precision high-pressure air with little pressure fluctuation without using a pressure control valve so that it can be used for high-pressure pressurization. The purpose of this is to develop equipment for supply.

【0008】[0008]

【課題を解決するための手段】前述した目的を達成する
ために、請求項1に記載の発明は、高圧空気の供給装置
の二次側空気供給路に複数個のエアータンクと複数個の
圧力調節弁を設けたものであります。詳しくは、一次側
が二次側よりも大面積であるピストンを内蔵し、該ピス
トンの面積比により、二次側より供給される二次側空気
の圧力を上昇させる昇圧手段と、該昇圧手段の前記ピス
トンの一次側に空気を供給する一次側空気供給路と、該
昇圧手段の前記ピストンの二次側より供給される二次側
空気供給路とを備えた高圧空気の供給装置において、二
次側空気供給路に、複数個のエアータンクと複数個の圧
力調節弁とをもって空気の圧力を調整する手段を備えた
ことを特徴とする。
In order to achieve the above-mentioned object, the invention according to claim 1 provides a plurality of air tanks and a plurality of pressures in a secondary air supply passage of a high-pressure air supply device. A control valve is provided. In detail, a booster that has a built-in piston whose primary side is larger in area than the secondary, and increases the pressure of secondary air supplied from the secondary according to the area ratio of the piston; In a high-pressure air supply device including a primary air supply passage for supplying air to a primary side of the piston and a secondary air supply passage supplied from a secondary side of the piston of the pressure increasing means, The side air supply path is provided with means for adjusting the pressure of air with a plurality of air tanks and a plurality of pressure control valves.

【0009】[0009]

【発明の実施の形態】以下に、この発明の実施例の形態
を図示例と共に説明する。図1は、本発明の実施例にお
ける高圧力供給装置の配管図を示す。加圧空気供給源5
は、一次側空気供給路6により電磁弁7と絞り弁8を介
して、増圧シリンダー9の1次側シリンダー10に加圧
空気を所定圧力、例えば35kgf/cm2で供給する。増圧
シリンダー9に内蔵されたピストン12は、その一次側
面13の面積が二次側面14の面積の数倍となってお
り、その面積比によって二次側シリンダー11側の圧力
を上昇させる。この場合、二次側シリンダー11側の空
気の圧力は47kgf/cm2となる。増圧シリンダー9の二
次側シリンダー11には一次側空気供給路6から分岐さ
れ、空気の逆流を防ぐ逆止弁15を内蔵した二次側空気
供給路16が接続され、複数個のエアータンクを持つ圧
力調整路17が接続され、加圧ポート19が電磁弁18
を介して接続されている。
Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 shows a piping diagram of a high-pressure supply device according to an embodiment of the present invention. Pressurized air supply source 5
Supplies a pressurized air at a predetermined pressure, for example, 35 kgf / cm2, to a primary cylinder 10 of a pressure-intensifying cylinder 9 via a solenoid valve 7 and a throttle valve 8 through a primary air supply passage 6. The area of the primary side surface 13 of the piston 12 built in the pressure intensifying cylinder 9 is several times the area of the secondary side surface 14, and the pressure on the secondary side cylinder 11 side is increased by the area ratio. In this case, the pressure of the air on the secondary cylinder 11 side is 47 kgf / cm2. The secondary cylinder 11 of the pressure intensifying cylinder 9 is connected to a secondary air supply path 16 which is branched from the primary air supply path 6 and has a built-in check valve 15 for preventing backflow of air. A pressure adjusting path 17 having
Connected through.

【0010】また、圧力調整路17からは、昇圧された
圧力47kgf/cm2を保つ1次タンク20と、設定圧力4
2kgf/cm2を瞬時にa%加圧する3次タンク22と、設
定圧力42kgf/cm2を瞬時に(100−a)%加圧する
2次タンク21が分岐して接続されており、それぞれの
タンクは圧力調整路17内で電磁弁23と絞り弁24、
25を介して直列に接続されている。なお、増圧シリン
ダー9の1次側シリンダー10には電磁弁26を介して
排気路27が接続されている。圧力調整路17には、1
次タンク20の空気の圧力を検知する第1の出力接点付
圧力センサ28と2次タンク21、3次タンク22の空
気の圧力を検知する第2の出力接点付圧力センサ29が
設けられている。
From the pressure regulating passage 17, a primary tank 20 for maintaining a boosted pressure of 47 kgf / cm2,
A tertiary tank 22 that instantaneously pressurizes 2 kgf / cm2 by a% and a secondary tank 21 that instantaneously pressurizes a set pressure of 42 kgf / cm2 by (100-a)% are branched and connected. In the adjustment path 17, the solenoid valve 23 and the throttle valve 24,
25 are connected in series. An exhaust path 27 is connected to the primary cylinder 10 of the pressure-intensifying cylinder 9 via an electromagnetic valve 26. The pressure adjustment path 17
A pressure sensor 28 with a first output contact for detecting the pressure of the air in the next tank 20 and a pressure sensor 29 with a second output contact for detecting the pressure of the air in the secondary tank 21 and the tertiary tank 22 are provided. .

【0011】第1の出力接点付圧力センサ28は1次タ
ンク20の圧力を47kgf/cm2に保つために増圧シリン
ダー9を制御する接点に使用される。第2の出力接点付
圧力センサ29は2次タンク21、3次タンク22の圧
力を設定圧力42kgf/cm2に保つために電磁弁23を制
御する接点に使用される。かかる構成によれば、電磁弁
19を開いて加圧体に加圧するとき、まず3次タンク2
2の圧力で設定圧力のa%を加圧し、次に、絞り弁25
を介して、設定圧力の残り(100−a)%を加圧す
る。この時、加圧体にかかる圧力は、2次タンク21と
3次タンク22の圧力が瞬時に合成されもので、衝撃に
よる圧力変動することなく、また、圧力変動幅の少ない
高精度な高圧を瞬時に加圧することができる。
The first pressure sensor with output contact 28 is used as a contact for controlling the pressure-intensifying cylinder 9 in order to maintain the pressure of the primary tank 20 at 47 kgf / cm2. The pressure sensor 29 with the second output contact is used as a contact for controlling the solenoid valve 23 in order to maintain the pressure of the secondary tank 21 and the tertiary tank 22 at a set pressure of 42 kgf / cm2. According to this configuration, when the electromagnetic valve 19 is opened to pressurize the pressurizing body, first, the tertiary tank 2 is pressed.
A% of the set pressure is increased by the pressure of 2.
And pressurize the remaining (100-a)% of the set pressure. At this time, the pressure applied to the pressurizing body is such that the pressure in the secondary tank 21 and the pressure in the tertiary tank 22 are instantaneously synthesized. It can be pressurized instantly.

【0012】本装置により、加圧動作を行う場合、電磁
弁18が開かれ加圧体に設定圧力が加圧されると、2次
タンク21と3次タンク22の圧力が第2の出力接点付
圧力センサ29の設定値以下に低下するので、電磁弁2
3を介して昇圧された圧力が補充される。圧力が補充さ
れ二次側空気供給路16の圧力が第1の出力接点付圧力
センサ28の設定値以下に低下すると、電磁弁7を介し
て加圧空気供給源5から圧力が供給され増圧シリンダー
9が昇圧をする。このように、加圧動作の最中で自動的
に圧力調整を繰り返し、衝撃圧による圧力変動の起こら
ない、また、圧力変動があっても極わずかな圧力変動で
あり、高精度な高圧を瞬時に発生させることができる。
When the pressurizing operation is performed by the present apparatus, when the solenoid valve 18 is opened and the set pressure is applied to the pressurizing member, the pressure of the secondary tank 21 and the tertiary tank 22 is increased to the second output contact. The pressure drops below the set value of the pressure sensor 29, so the solenoid valve 2
The boosted pressure via 3 is replenished. When the pressure is replenished and the pressure in the secondary air supply passage 16 falls below the set value of the pressure sensor 28 with the first output contact, the pressure is supplied from the pressurized air supply source 5 through the solenoid valve 7 to increase the pressure. The cylinder 9 pressurizes. In this way, pressure adjustment is automatically repeated during the pressurizing operation, and pressure fluctuation due to impact pressure does not occur. Can be generated.

【0013】[0013]

【発明の効果】以上説明したように、本発明の請求項1
記載の発明は、安価な部品である複数個のエアータンク
と複数個の圧力調節弁の設けることにより、圧力変動の
少ない高精度な高圧を、高速加圧に使用できるように瞬
時に作り出し、安定して供給する高圧力供給を可能とし
た装置であります。
As described above, according to the first aspect of the present invention,
The described invention provides a stable, high-speed, high-precision high pressure with little pressure fluctuation by providing multiple air tanks and multiple pressure control valves, which are inexpensive parts. This device enables high pressure supply.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の実施例における高圧力供給装置の配管
図である。
FIG. 1 is a piping diagram of a high-pressure supply device according to an embodiment of the present invention.

【図2】圧力制御弁である減圧弁の構造図である。FIG. 2 is a structural diagram of a pressure reducing valve which is a pressure control valve.

【符号の説明】[Explanation of symbols]

1 弁棒 2 スプリング
3 ハンドル 4 ダイヤフラム 5 加圧空気供給源
6 一次側空気供給路 7 電磁弁 8 絞り弁
9 増圧シリンダー 10 一次側シリンダー 11 二次側シリンダー
12 ピストン 13 ピストン一次側面 14 ピストン二次側面
15 逆止弁 16 二次側空気供給路 17 圧力調整路
18 電磁弁 19 加圧ポート 20 1次タンク
21 2次タンク 22 3次タンク 23 電磁弁
24 絞り弁 25 絞り弁 26 電磁弁
27 排気路 28 出力接点付圧力センサ29 出力接点付圧力セン
1 Valve stem 2 Spring
3 Handle 4 Diaphragm 5 Compressed air supply source
6 Primary air supply path 7 Solenoid valve 8 Throttle valve
9 Intensifier cylinder 10 Primary cylinder 11 Secondary cylinder
12 Piston 13 Primary side of piston 14 Secondary side of piston
15 Check valve 16 Secondary air supply path 17 Pressure adjustment path
18 Solenoid valve 19 Pressurization port 20 Primary tank
21 Secondary tank 22 Tertiary tank 23 Solenoid valve
24 Throttle valve 25 Throttle valve 26 Solenoid valve
27 exhaust path 28 pressure sensor with output contact 29 pressure sensor with output contact

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】高圧空気を発生させるために、一次側が二
次側よりも大面積であるピストンを内蔵し、該ピストン
の面積比により、二次側より供給される二次側空気の圧
力を上昇させる昇圧手段と、該昇圧手段の前記ピストン
の一次側に空気を供給する一次側空気供給路と、該昇圧
手段の前記ピストンの二次側より供給される二次側空気
供給路とを備えた高圧空気の供給装置において、二次側
空気供給路に、複数個のエアータンクと複数個の圧力調
節弁をもって空気の圧力を調整する手段を備えたことを
特徴とする高圧空気の供給装置。
In order to generate high-pressure air, a piston whose primary side is larger in area than the secondary side is built in, and the pressure of the secondary side air supplied from the secondary side is controlled by the area ratio of the piston. A booster, a primary air supply passage for supplying air to a primary side of the piston of the booster, and a secondary air supply passage supplied from a secondary side of the piston of the booster. The high-pressure air supply device according to claim 1, further comprising means for adjusting the pressure of the air with a plurality of air tanks and a plurality of pressure control valves in the secondary air supply path.
JP11087772A 1999-03-30 1999-03-30 Supplying device for high pressure air Pending JP2000283111A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11087772A JP2000283111A (en) 1999-03-30 1999-03-30 Supplying device for high pressure air

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11087772A JP2000283111A (en) 1999-03-30 1999-03-30 Supplying device for high pressure air

Publications (1)

Publication Number Publication Date
JP2000283111A true JP2000283111A (en) 2000-10-13

Family

ID=13924277

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11087772A Pending JP2000283111A (en) 1999-03-30 1999-03-30 Supplying device for high pressure air

Country Status (1)

Country Link
JP (1) JP2000283111A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002349433A (en) * 2001-05-23 2002-12-04 Asahi Eng Co Ltd Compressor
KR101081289B1 (en) * 2004-01-29 2011-11-09 오티스 엘리베이터 컴파니 Brake apparatus for an elevator system
JP2023120533A (en) * 2022-02-18 2023-08-30 ギガフォトン株式会社 Target supply system, extreme ultraviolet light generator, and method for manufacturing electronic device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002349433A (en) * 2001-05-23 2002-12-04 Asahi Eng Co Ltd Compressor
KR101081289B1 (en) * 2004-01-29 2011-11-09 오티스 엘리베이터 컴파니 Brake apparatus for an elevator system
JP2023120533A (en) * 2022-02-18 2023-08-30 ギガフォトン株式会社 Target supply system, extreme ultraviolet light generator, and method for manufacturing electronic device

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