JP2019090802A - Non-destructive analyzer - Google Patents

Abstract

PROBLEM TO BE SOLVED: To observe, for example, when performing a nail piercing test of a lithium ion battery having a laminated structure, checking the position where a nail has penetrated, the state of each layer of an electrode, the short-circuit voltage, current, temperature, etc. of the battery. I want to be able to do it. An X-ray detector 3 detects X-rays irradiated from an X-ray generator 1 and transmitted through an object W to be inspected, and obtains an X-ray fluoroscopic image by an image configuration device 5 that images the output. The event generator 8 applies a stimulus or the like to the object W to be inspected. The measuring device 9 measures the state of the object to be inspected W changed by the stimulus or the like. The control device 6 controls the position of the X-ray generator 1, the state of the event generator 8, and the like based on the measurement result of the measuring device 9. [Selection diagram] Fig. 1

Description

  An embodiment of the present invention analyzes, using an X-ray detector, internal changes in an object to be analyzed which are generated when physical energy is externally applied to an object to be analyzed (hereinafter referred to as the object to be inspected). It relates to a nondestructive analysis device.

  As a nondestructive analysis device which analyzes internal change of a to-be-inspected object when shock and physical energy is added, what is indicated to patent documents 1 is known conventionally. In this prior art, an impact applying means for impacting an object to be inspected, an X-ray generator for irradiating X-rays to an object to be inspected which is impacted, and an X-ray for receiving X-rays transmitted through the object to be inspected It has a detector and a high-speed camera that continuously captures the output from the X-ray detector at a speed of 100 frames or more per second.

  According to this prior art, the internal shape change of the inspection object which is deformed by the impact is photographed as an X-ray transmission image, and it is subjected to slow motion reproduction so that the given impact and the corresponding inspection object are aged. Has the advantage of being able to visually capture

JP, 2009-276140, A

  Recently, as a test object of this kind of nondestructive analysis device, a relatively small one such as a lithium ion battery and a large degree of deformation to external physical energy are adopted. Lithium ion batteries may cause dangerous phenomena such as ignition, smoke and explosion due to inclusion of foreign matter and impact. In order to solve this, for example, pressure is applied to the battery at a pinpoint such as nailing, and the relationship between the degree of nailing and expansion, heat generation, smoke, ignition, etc. inside the battery is performed. ing. However, in the conventional nail sticking test, it was not possible to solve the phenomenon of what kind of state the battery electrode would be pierced with by only piercing the nail.

  In such a small object to be inspected, it is necessary to analyze in detail the external force applied by the nail sticking and the deformation of the battery accompanying it by applying X-rays to a very narrow area and performing imaging. . However, in the apparatus described in Patent Document 1, when the X-ray fluoroscopic image is photographed with a very narrow area as a field of view, the inspection object deviates from the intended observation range when the inspection object is deformed by nail penetration. An inconvenience arises in that an image which can be discriminated for each electrode layer of the battery can not be obtained, or when it is too large, the deformed portion is out of the intended observation range.

  In particular, in the case of an inspection object such as a lithium ion battery configured by stacking thin cells in multiple layers, physical deformation such as dents or breakage of the cells constituting the battery occurs at the beginning of nailing. Although it occurs, expansion and ignition occur due to an electrical short as the nail sticking further progresses. That is, since the amount of deformation is significantly different between the deformation due to the initial stage of the nail sticking and the subsequent expansion or firing, if the field of vision or angle by the X-ray remains in the state where the nail sticking is started Or the image is missing the whole picture, so it is impossible to expect proper analysis.

  Moreover, when arrange | positioning a to-be-tested object to a sample table, there existed a problem that it was difficult to adjust a to-be-tested object to a suitable position with respect to the irradiation angle of X-ray. An object to be inspected such as a lithium ion battery has members such as a separator and an electrode which are finely configured in the micron order. For this reason, even if the inspection object is disposed with a slight deviation with respect to the X-ray irradiation angle, it is not possible to precisely identify the portion to be observed in the inspection object. There was a problem.

  Such a problem is not limited to the case where the object to be inspected is a battery, and similarly occurs in other articles. The type of physical energy to be applied to the object to be inspected is not limited to mechanical energy such as nailing, but also occurs when overheating or overcurrent is applied to the object to be inspected. Furthermore, it is desirable to adjust not only the adjustment of the field of view and angle by X-rays but also the amount of physical energy to be applied to such changes in the inspection object.

  The present embodiment is proposed to solve the problems of the prior art as described above. The object of the present embodiment is to detect a change in the state of an object under inspection when physical energy is given by an event generator, and to control an X-ray generator or an event generator according to the result. To provide a nondestructive analysis device capable of obtaining appropriate analysis results.

The nondestructive analysis device of the first embodiment has the following configuration.
(1) An X-ray generator that emits X-rays to an inspection object.
(2) A sample table placed on the path of the X-ray and on which the inspection object is placed.
(3) The X-ray detector which detects the X-ray which permeate | transmitted the said to-be-tested object, and outputs it as visible light data.
(4) An event generator for applying physical energy to the inspection object.
(5) A measuring device which measures the state of the inspection object changed by the physical energy from the event generator.
(6) A control device that controls the operation of at least one of the X-ray generator, the sample table, and the event generation device based on the measurement result of the measurement device.

The nondestructive analysis device of the second embodiment has the following configuration.
(1) An X-ray generator that emits X-rays to an inspection object.
(2) A sample table placed on the path of the X-ray and on which the inspection object is placed.
(3) The X-ray detector which detects the X-ray which permeate | transmitted the said to-be-tested object.
(4) A rotating device that rotates the table and the radiation relative to a rotation axis that intersects the radiation.
(5) An image constructing apparatus for reconstructing a tomogram of the subject from transmission images detected in the multiple directions of the rotation.
(6) An event generator for applying physical energy to the inspection object.
(7) A measuring device which measures the state of the inspection object changed by the physical energy from the event generator.
(8) A control device that controls the operation of at least one of the X-ray generator, the sample table, the rotation device, and the event generation device based on the measurement result of the measurement device.

In the first embodiment or the second embodiment, the following configuration may be employed. Here, the distance between the X-ray focal point of the X-ray generator and the X-ray input surface of the X-ray detector is assumed to be FDD. The distance between the X-ray focal point of the X-ray generator and the central position of the object placed on the X-ray optical axis of the battery electrode is taken as FOD.
(1) The X-ray generator is variably configured by the control device with respect to at least one of the FOD, the field of view for imaging the battery, and the imaging direction.
(2) The sample table is movable in at least one of front and rear, left and right, up and down, and rotational directions, and the amount of movement is controlled by the controller.
(3) The event generator applies at least one of current, voltage, temperature, impact force, bending pressure, shear force and penetration to the inspection object, and the measurement device is the inspection object. At least one of the current applied to the object, the voltage, the temperature, and the degree of deformation are measured simultaneously with or during acquisition of the fluoroscopic image.
(4) The event generation device includes a nail penetrating the object to be inspected, an operation device for causing the nail to appear and retract with respect to the object to be inspected, and a drive mechanism of the operation device. Control the movement speed, movement direction and movement start and stop of the nail.
(5) The event generation device includes a nail penetrating the object to be inspected, an operation device for causing the nail to appear and retract with respect to the object to be inspected, and a drive mechanism of the operation device. Control at least one of the FOD of the generator, the field of view, and the imaging direction.
(6) The event generation device includes a nail penetrating the object to be inspected, an operation device for causing the nail to appear and retract with respect to the object to be inspected, and a drive mechanism of the operation device. The amount of movement is controlled for at least one of front and rear, left and right, up and down, and rotational directions.
(7) An X-ray image intensifier capable of responding at high speed to changes in X-ray irradiation dose, and the X-ray image intensifier output visible image at high speed It has a high speed camera that can be collected.

1 is a block diagram of a nondestructive analysis device according to a first embodiment. The block diagram of the nondestructive analysis device of a 2nd embodiment. The block diagram of the nondestructive analysis device of a 3rd embodiment. The external appearance perspective view of the sample table part of the nondestructive analysis device of a 3rd embodiment. The block diagram of the nondestructive analysis device of a 4th embodiment. The block diagram of the nondestructive analysis device of a 5th embodiment. The block diagram of the nondestructive analysis device of a 6th embodiment. FIG. 7 is a block diagram of a nondestructive analysis device having an X-ray CT apparatus according to another embodiment. The external appearance perspective view of the nondestructive analysis apparatus which the event generator part which concerns on other embodiment rotates. FIG. 10 is a block diagram of the nondestructive analysis device according to the embodiment of FIG. 9; The block diagram of the nondestructive analysis device which has a fire extinguishing device concerning other embodiments.

[1. First embodiment]
[1-1. Configuration of embodiment]
In the nondestructive analysis device according to the first embodiment, as shown in the block diagram of FIG. 1, radiation from the X-ray generator 1 which is a radiation source, the sample table 2 on which the inspection object W is placed, and the X-ray generator 1 An X-ray detector 3 for receiving the X-ray beam is disposed at a predetermined interval along the optical axis of the X-ray.

  The X-ray generator 1 emits a conical X-ray beam in the horizontal direction. The X-ray beam passes through the inspection object W mounted on the table 2 and reaches the X-ray detector 3. The X-ray generator 1 is provided with an X-ray generator drive mechanism 11 for changing at least one of the FOD, the field of view, and the imaging direction.

  The sample table 2 moves the sample table 2 in the horizontal direction Y and the vertical direction Z orthogonal to the optical axis direction X of the X-ray and the optical axis, and the rotary drive mechanism 21 that rotates the sample table 2 about the vertical axis. An XYZ drive mechanism 22 is provided. The XYZ drive mechanism 22 is mounted on the rotary drive mechanism 21. The rotary drive mechanism 21 and the XYZ drive mechanism 22 are connected to a control device 6 that controls start and stop and a drive amount.

  The X-ray detector 3 detects X-rays transmitted through the inspection object W and outputs the X-rays as visible light data. The operator uses the image data output from the X-ray detector 3 on the output side of the X-ray detector 3. An image construction device 5 is connected which outputs to a display (not shown) in a desired form.

  The X-ray detector 3 is provided with an X-ray detector drive mechanism 7 for moving the X-ray detector 3 in the optical axis direction, and the X-ray detector drive mechanism 7 is connected to the controller 6.

  An event generator is provided in the vicinity of the inspection object W placed on the sample table 2. Here, a lithium ion battery (referred to as a battery) having a laminated structure as the inspection object W is used. In the present embodiment, a nail sticking device 8 is used as this event generation device. The nail sticking device 8 includes a nail 81 to be pierced by the battery, an operating device 82 for moving the nail into and out of the battery, and a drive mechanism 83 of the operating device 82. The drive mechanism 83 is connected to the control device 6, and the control device 6 starts and stops the movement speed, movement direction and distance of nails by the drive mechanism 83 (for example, angle from cell surface, penetration distance), intrusion pressure and movement. Control.

  A measuring device 9 is provided in the vicinity of the battery. In this embodiment, the measuring device 9 includes a voltmeter 91 and ammeter 92 for measuring the voltage and current of the battery, a temperature sensor 93 for measuring the temperature of the periphery of the battery and nails, and a gas for determining the boiling state of the electrolyte. A detector 94, a strain gauge 95 for measuring the amount of deformation of the battery, and a phototube 96 are provided. Further, the nail sticking device 8 is provided with a pressure gauge 97 and an acceleration sensor 98 which measure a reaction force applied in the process of the nail 81 sticking to the battery as the measuring device 9.

  In the control device 6, the irradiation angle of the X-ray generator 1, the moving position and moving direction of the sample table 2 and the X-ray detector 3, the moving speed, moving direction and distance of the nail 81 of the nail sticking device 8 etc. An input device 61 is provided for setting in advance. The input device 61 includes an input device such as a keyboard and a mouse (not shown), an external device such as a network, and the like. The control device 6 is provided with a storage device 62 such as a memory or a hard disk for storing data values obtained by the measuring device 9 and control data of the controlled device corresponding to the data values.

[1-2. Operation of embodiment]
(1) Basic Operation In the present embodiment, the nail sticking apparatus 8 is driven in a state where the battery to be inspected is placed on the sample table 2, and the nail 81 is pierced into the battery. In this case, the penetration speed and direction of the nail 81 and the penetration depth are previously set in the control device 6 using the input device 61. As an example, the time from the activation of the nail 81 to the tip of the nail 81 reaching the predetermined depth of the battery is about ten seconds. The X-ray is emitted from the X-ray generator 1 simultaneously with the activation of the nail or after a predetermined time from the activation of the nail, the movement of the nail and the deformation of the battery accompanying it are seen through the X-ray, and the X-ray detector The X-ray fluoroscopic image of the state of movement of the nail and the accompanying state of deformation of the battery are obtained by receiving light by the method 3. The direction of travel of the nail is perpendicular to the layers of parallel electrodes in the cell.

  The X-ray fluoroscopic image generated by the image construction device 5 may be converted into a slow motion image in the image construction device 5 and displayed on a display not shown.

(2) Control of the X-ray generator 1 In order to obtain an X-ray fluoroscopic image in which the electrodes of the battery having a laminated structure are separated one by one, X-rays are transmitted at an angle parallel or nearly parallel to each electrode I need to For example, in the state where the tip of the nail is in contact with the outer surface of the battery, it is assumed that the first layer electrode is set so as to be distinguishable from the second layer electrode adjacent thereto.

  With the nailing, the battery exterior and electrodes deform. Since the nail is pushed into the inside of the battery, the X-ray fluoroscopic image in which the electrodes of the first layer and the second layer can be identified separately can be identified separately. Sometimes. Therefore, in the present embodiment, the deformation amount of the battery is measured by the strain gauge 95 or the photoelectric tube 96, and the measured value is transmitted to the control device 6.

  In the control device 6, the X-ray can be separated so that each electrode of the first layer and the second layer can be separated and identified in the X-ray fluoroscopic image according to the measurement value stored in advance and the corresponding driving amount. The generator drive mechanism 11 is driven.

  Similarly, when the battery expands or explodes with the progress of the nail penetration and the amount of deformation deviates from the observation state intended at the beginning of photographing, the amount of deformation is detected by the measuring device 9, and the control device 6 The X-ray generator drive mechanism 11 is controlled so that an observation state corresponding to the amount of deformation can be obtained.

  The control of the position of the X-ray generator 1, the field of view of the battery, and the imaging direction need not necessarily be performed based on the measurement value of the amount of deformation by the measuring device 9. For example, since there is a close relationship between the short circuit current caused by the nailing of the battery and the calorific value due to it, the voltage fluctuation, and the change in external shape, the calorific value rises above a predetermined threshold. The field of view, the X-ray perspective angle, and the like can be adjusted according to the measured value by the control device 6 that has received the measured value.

(3) Control of the sample table 2 When the battery is deformed due to nailing, the sample table 2 can be moved instead of controlling the position of the X-ray generator 1 according to the measurement value of the measuring device 9 It is. Since the sample table 2 is provided with the rotary drive mechanism 21 and the XYZ drive mechanism 22, the sample table is controlled by the control device 6 controlling these drive mechanisms 21 and 22 based on the measurement values from the measuring device 9. Rotate 2 or move 2 in the XYZ direction. Thereby, the X-ray generator 1 can be photographed in different directions and different visual fields while keeping the X-ray generator 1 fixed.

(4) Control of the nail sticking device 8 Since the pressure gauge 97 and the acceleration sensor 98 are provided as the measuring device 9 in the nail sticking device 8, the reaction force from the battery along with the progress of the nail sticking and the nail sticking Impact can be measured. Therefore, when the measured value exceeds a predetermined threshold value, the control device 6 controls the drive mechanism 83 of the nail sticking device 8 so as to stop the nail sticking and reduce the entry speed.

  This makes it possible to detect that the reaction force from the battery is large, and to photograph the deformed state immediately before breaking or penetrating. In addition, a voltmeter 91, an ammeter 92, a temperature sensor 93 or a gas detector 94, etc. are used as the measuring device 9, and sudden voltage and current changes and heat generation of the battery by nailing and gas leakage, smoke, ignition and the like. And the like can be detected at an early point in time, and the control device 6 can stop the nail sticking and pull out the nail based on the detection result.

(5) X-ray detector 3
The controller 6 controls the timing at which the X-ray detector 3 acquires an X-ray image in accordance with the measurement value from the measuring device 9. That is, the X-ray image collection is started or stopped when the nail penetration to the battery reaches a certain depth or the heat generation of the battery exceeds a preset threshold. Further, the light reception angle of the X-ray detector 3 is changed so as to be interlocked with the imaging direction of the X-ray generator 1 by the control device 6.

  The data of the X-ray image obtained from the X-ray detector 3 is generally about 30 frames per second, but for example, an X-ray image intensifier responding at high speed and a high-speed camera capturing an output visible image Thus, a high time resolution of, for example, 1000 to 10000 frames per second can be obtained in excess of 30 frames per second.

[1-3. Effect of embodiment]
The present embodiment has the following effects.
(1) Real-time fluoroscopy by feeding back the measurement results of the measuring device 9 to the X-ray generator 1 and the sample table 2 and further to the drive mechanisms 21, 22, 7 and 83 of the nailing device 8 by the control device 6. Based on the image, the tip of the nail 81 of the nail sticking device 8 and the measurement site of the battery can be arbitrarily changed. That is, each electrode of each layer in the battery to be observed is adjusted by adjusting each part of the apparatus based on the image information so that an arbitrary point such as the tip of the nail 81 or the surface of the battery is located at the center of the field of view. It is possible to obtain X-ray fluoroscopic images taken at appropriate timings suitable for analysis in a state where they can be separated and identified.

(2) The control device 6 can control the position of the nail 81 of the sample table 2 or the nail sticking device 8 based on the measurement result by the measurement device 9 and the threshold value that can ensure a safe state set in advance. By changing the position of the battery or controlling the start and stop of the nail sticking device according to the measurement result, it is possible to safely carry out the nail sticking test.

(3) In the case where deformation or wear of the battery occurs after a certain amount of time has elapsed since the nail penetration was started by the nail penetration test, X-ray generation from the time when the measuring device detects a sign that the phenomenon to be analyzed occurs The start of the detector 1 and the X-ray detector 3 can be started. As a result, it is possible to intensively observe, with high time resolution, the most important changes of the test object occurring in a very short time.

(4) In particular, in the inspection of an article in which the test object W has a thin electrode such as a lithium ion battery laminated as described above, the exterior of the battery and the electrodes inside are deformed during the nail penetration test. In many cases, the state of the electrode that can be separated and identified in the fluoroscopic image changes, but in the present embodiment, since the X-ray generator 1 follows the deformation of the electrode, the state of deformation due to nail penetration is You can catch it for sure. In addition, by adjusting the sample table 2 so that X-rays are appropriately irradiated based on the measurement value from the measuring device 9, the X-rays are irradiated at an angle at which the layers of the electrodes in the battery can be easily identified. As a result, fluoroscopic images can be obtained which can separate and identify each layer of the electrode to be observed.

[2. Second embodiment]
In the second embodiment, the present invention is applied to an X-ray CT apparatus, and the first embodiment is performed in a portion where the X-ray generator 1 and the X-ray detector 3 rotate relative to the inspection object W The configuration is different from that of the embodiment, and the other configuration is the same as that of the first embodiment. About the same composition as a 1st embodiment, the same numerals are attached and explanation is omitted.

  In the second embodiment, a rotation device 10 for rotating the X-ray generator 1 and the X-ray detector 3 around the inspection object W is provided around the sample table 2. As this rotation apparatus 10, what is used for the conventional X-ray CT apparatus can be used suitably. For example, the sample table 2 having the XYZ drive mechanism 22 is fixed to the central opening of a large ring-shaped turntable, and the X-ray generator 1 and the X-ray detector are arranged to sandwich the sample table 2 on the turntable. 3 can be used, and an apparatus that rotates the turntable while moving the sample table 2 at regular intervals by the XYZ drive mechanism 22 can be used.

  In the second embodiment, CT imaging of the battery is performed according to one or more predetermined timings. This timing can be determined according to, for example, the degree of deformation of the battery detected by the measuring device 9 or the temperature rise, or the moving stroke of the nailing device 8. When performing CT imaging at a plurality of timings, CT imaging may be performed at different timings of the same part of the battery, but by controlling the XYZ drive mechanism 22, imaging positions of the inspection object W at each timing are made different. It is also possible.

  As described above, in the second embodiment, the X-ray generator 1 and the X-ray detector 3 are rotated around the inspection object, and a tomographic image of the battery is obtained from transmission images detected in many directions of rotation. it can. In this case, by reconstructing the fluoroscopic imaging data received by the X-ray detector 3 by the image construction device 5, it becomes possible to obtain an appropriate 3D image desired by the operator.

In the second embodiment, in addition to the effects common to the first embodiment, the following effects are exhibited.
(1) It is possible to obtain a 3D image at any time during the change of the test object by the event generator by CT imaging. That is, it becomes possible to obtain a 3D image at any time during nailing in the nailing apparatus 8.

(2) When CT imaging is performed at a plurality of timings, the battery obtains CT values at arbitrary two points during change by the nail sticking device 8 by CT imaging, and compares them. You can ask for changes in content. For example, when the object to be inspected is a battery, it is possible to acquire a CT value by CT imaging, and to change the component with respect to the change in behavior of the battery or to estimate the temperature.

[3. Third embodiment]
In the third embodiment, the initial position of the inspection object is manually corrected in position, and as shown in FIGS. 3 and 4, the rotation mechanism 23 for rotating the sample table 2 in two directions, rolling and pitching, and This embodiment differs from the first embodiment in that it has a display device 63 for displaying transmission image data of an inspection object. The other configuration is the same as that of the first embodiment. About the same composition as a 1st embodiment, the same numerals are attached and explanation is omitted.

  In the third embodiment, in addition to the XYZ drive mechanism 22 for moving the sample table 2 back and forth, left and right, up and down, and the rotational drive mechanism 21 for rotating the sample table 2 in the yawing (rotation around Y axis) direction, the sample table It has a rotation mechanism 23 for rotating 2 in the rolling (rotation around Z axis) direction and the pitching (rotation around X axis) direction. The XYZ drive mechanism 22, the rotation drive mechanism 21 and the rotation mechanism 23 are driven by the control device 6. The input device 61 has a function of allowing the operator to input commands for moving the XYZ drive mechanism 22, the rotation drive mechanism 21, and the rotation mechanism 23 to the control device 6.

  The display device 63 is configured by a liquid crystal display or the like, and displays transmission image data of the inspection object W in real time based on the X-rays detected by the X-ray detector 3. The operator operates the input device 61 based on the transmission image data displayed on the display device 63, moves the XYZ drive mechanism 22, the rotation drive mechanism 21 and the rotation mechanism 23 through the control device 60, and moves the object The positional relationship with the X-ray optical axis at the start of imaging of the inspection object W is determined.

  According to the present embodiment, the operator operates the input device 61 while checking the transmission image data of the inspection object W displayed in real time on the display device 63, and moves the position of the sample table 2 back and forth, left and right, The X-ray detector 3 of the inspection object W is moved in at least one direction of up and down, rolling (rotation around Z axis), pitching (rotation around X axis) direction, and yawing (rotation around Y axis) direction. The position at the start of imaging can be determined. Thereby, the irradiation angle of the X-ray with respect to a to-be-tested object is adjusted appropriately, and the part which should be observed in the to-be-tested object W is identified more precisely. In particular, it is difficult to set an electrode having a minute thickness on the order of microns and a separator at a position parallel to the X-ray optical axis simply by simply setting the test object W on the sample table 2. According to the invention, the X-ray optical axis can be set parallel to the electrodes of the inspection object W by rolling or pitching the sample table 2 while viewing the fluoroscopic image after setting the inspection object W. .

[4. Fourth embodiment]
The fourth embodiment shown in FIG. 5 is to automatically correct the initial position of the inspection object manually performed by the operator in the third embodiment. That is, the control device 6 is provided with the image analysis device 64, and the image analysis device 64 calculates the sharpness, such as lightness and saturation, of the transmission image data displayed on the display device 63, and based on the sharpness , Move the position of the sample table 2. That is, in a test object such as a lithium ion battery, X-rays are easily transmitted in the separator portion formed of a resin member, and hardly transmitted in an electrode portion formed of metal foil. Therefore, when the X-ray optical axis and the electrode portion are not parallel and the adjacent electrode portions overlap each other, the lightness in the imaged image is lowered and the contrast is also lowered. On the other hand, if the X-ray optical axis and the electrode portion are parallel, a clear stripe pattern of light and dark is displayed in the image. Therefore, until such an image is obtained by the image analysis device 64, the XYZ drive mechanism 22 The rotational drive mechanism 21 and the rotational mechanism 23 are controlled to position the inspection object.

  As described above, according to the fourth embodiment, the sharpness, such as lightness and saturation, of transmitted image data obtained by the X-ray detector 3 is calculated by the image analysis device 64, and the control device 6 is calculated based on the sharpness. The position of the sample table 2 is moved by this to determine the position at the start of imaging of the inspection object W. Thereby, there is no burden on the operator, the irradiation angle of the X-ray to the inspection object W is automatically adjusted, and the portion to be observed in the inspection object W is more accurately identified.

  In the fourth embodiment, as means for detecting the necessity of correction of the initial position of the object to be inspected, the appearance of the object to be inspected is photographed with a normal camera or the like other than analyzing the fluoroscopic image of the X-ray It is also possible to use one that determines the initial position of the inspection object by detecting its outer shape, for example, the angle of the wall surface of the inspection object that should be parallel to the X-ray optical axis.

[5. Fifth embodiment]
The fifth embodiment shown in FIG. 6 has a function of performing position correction after nailing on an object to be inspected. That is, the device to be inspected on the sample table 2 may deviate from the set initial position when external physical energy is given like a nail sticking. If the position of the inspection object W moves, the part to be observed in the inspection object W can not be identified precisely.

  In the present embodiment, the measuring device 9 includes a force sensor 111 that detects the position of the inspection object W. As the force sensor 111, a 6-axis type strain gauge type or piezoelectric type sensor used in an industrial robot or the like can be used. The control device 6 performs a needle pricking operation in a state where the force sensor 111 is in contact with the test object W, detects the force applied to the test object W by the force sensor 111, and detects the force of the test object W based on the detected force. Calculate the movement direction and movement amount. In addition, by providing a force sensor 111 on the nailing device 8 side and measuring a reaction force from the inspection object W, it is also possible to detect the movement amount of the inspection object W. The control device 6 moves the sample table 2 based on the movement direction and movement amount, and the test object W moved with the physical energy being applied by the nail sticking device 8 which is an event generation device is moved before movement. Relocate to position.

  According to the present embodiment, even if the inspection object W is moved by the nail sticking apparatus 8, the imaging range does not deviate from the portion to be observed, and the portion to be observed in the inspection object W can be more precisely It can be identified. In particular, since a recent force sensor 111 can detect a minute pressure, it can detect a minute movement amount of the inspection object W due to a nail sticking pressure, and is formed of a metal thin film. Even when the electrode moves very slightly, it is possible to accurately return to the initial installation position, and it is possible to accurately grasp the state of the electrode and the separator deformed by nailing.

[6. Sixth embodiment]
The sixth embodiment shown in FIG. 7 includes an outer shape sensor 112 that detects a change in the outer shape of the inspection object W. That is, when physical energy is applied by the nail sticking device 8, the outer shape of the inspection object W may be deformed. When the outer shape of the inspection object W changes, the relative position of the portion to be observed in the inspection object W with respect to the X-ray generator 1 and / or the X-ray detector 3 changes It becomes impossible to identify the part precisely. The present embodiment addresses such a problem.

  In the present embodiment, the outer shape sensor 112 is configured by an outer shape measurement device such as a live camera or a laser sensor, a strain gauge that measures the strain on the battery surface, or the like. The control device 6 detects a change in the outer shape of the object to be inspected W caused by the needle pricking operation with the outer shape sensor 112, detects the movement direction and movement amount of the object to be inspected W based on the detection data, and detects this by the XYZ drive mechanism 22, By transmitting the rotation drive mechanism 21 and the rotation mechanism 23, the sample table 2 is moved to rearrange the test object W at a predetermined position. Thereby, the part to be observed in the to-be-tested object W can be identified more precisely.

[3. Other embodiments]
The present invention is not limited to the above embodiment, and at the implementation stage, the components can be modified and embodied without departing from the scope of the invention. In addition, various inventions can be formed by appropriate combinations of a plurality of constituent elements disclosed in the above embodiment. For example, some components may be deleted from all the components shown in the embodiment. Furthermore, components in different embodiments may be combined as appropriate. Specifically, the following other embodiments are also included.

(1) The event generating device is not limited to the nail sticking device shown in the first embodiment, and current, voltage, temperature, impact force, bending pressure, shear force, penetration force to the inspection object Those which add at least one of can be used. In that case, the measuring device measures at least one of the current, the voltage, the temperature, and the degree of deformation applied to the test object. For example, a power supply for applying an overcurrent or overvoltage to the battery is connected, the heat generation state of the battery is measured by a thermometer, or the degree of expansion or deformation of the battery is measured by a photoelectric tube or the like. And disconnect the power connection.

(2) The target controlled by the measurement result of the measurement apparatus is any one or a combination of the X-ray generator 1, the sample table 2, and the event generation apparatus, and all the measurements shown in the first embodiment The device and each device controlled thereby are not essential components in the present invention.

(3) The inspection object W is not limited to the battery, but changes with time due to the physical energy from the event generator, and any article can be used as long as X-ray fluoroscopy is possible. It is.

(4) As a rotating device for moving the inspection object, the X-ray generator 1 and the X-ray detector 3 relative to each other in the second embodiment, the sample table 2 is rotated, and the X-ray generator 1 and X-ray detection are performed. The vessel 3 may move linearly. The control based on the measurement values of the measurement apparatus 9 in the second embodiment is not only used to control the timing of CT imaging, but as shown in the first embodiment, the adjustment of the visual field and the imaging direction, the event generation apparatus It can also be used for control etc.

(5) As shown in FIG. 8, the X-ray CT apparatus according to the second embodiment rotates the sample table 2 in two directions, the rotation mechanism 23, the display device 63 for displaying transmitted image data of the inspection object, and force sensor 111 and an outer shape sensor 112 may be provided.

(6) As shown in FIGS. 9 and 10, a rotation mechanism 84 may be provided on the event generation device side, and the event generation device may be rotated in the rolling direction and the pitching direction by this rotation mechanism 84. Also in this other embodiment, after the test object W is set on the sample table 2, accurate alignment between the test object W and the X-ray optical axis can be performed. Even when the rotation mechanism 84 is provided on the event device side, the configurations described in the third to seventh embodiments can be implemented in combination as appropriate.

(7) The nondestructive analysis device in each of the above embodiments may be provided with a fire extinguishing device 120 for extinguishing the inspection object W as shown in FIG. The measuring device 9 has a temperature sensor 93 for detecting the temperature of the inspection object W, a smoke sensor 113 for detecting smoke, and a pressure gauge 97 for detecting the internal pressure. Abnormalities such as ignition, smoke or explosion in the inspection object W To detect The control device 6 controls the fire extinguishing device 120 based on the abnormality detected by the measuring device 9 to extinguish the test object W. The fire extinguisher 120 extinguishes the object W with at least one of sand, vacuum, inert gas and Ni purge. Although the test object W such as a battery is likely to ignite, it is possible to provide a nondestructive analysis device capable of observing the test object W more safely.

  In each of the above embodiments, as the X-ray generator 1, one capable of controlling the X-ray output can be used. For example, an electrode made of metal foil, a separator made of resin, a battery case made of metal or resin, and the like are different in material, and the transmittance of X-rays is also different. Therefore, an appropriate X-ray intensity is selected for each target to observe event occurrence. It becomes possible to analyze the change in shape due to the event generator using X-rays of the strength corresponding to the material to be observed, and accurately grasp the amount of deformation of the metal part or resin part of the inspection object W Can.

W ... inspection object 1 ... X-ray generator 11 ... X-ray generator drive mechanism 2 ... sample table 21 ... rotation drive mechanism 22 ... XYZ drive mechanism 23 ... rotation mechanism 3 ... X-ray detector 5 ... image configuration device 6 ... Control device 61 ... Input device 62 ... Storage device 63 ... Display device 64 ... Image analysis device 7 ... X-ray detector drive mechanism 8 ... Nail penetration device 81 ... Nail 82 ... Operation device 83 ... Drive mechanism 84 ... Rotation mechanism 9 ... Measurement Device 91: voltmeter 92: ammeter 93: temperature sensor 94: gas detector 95: strain gauge 96: photoelectric tube 97: pressure gauge 98: acceleration sensor 111: position sensor 112: external sensor 113: smoke sensor 120: fire extinguishing device

Claims (16)

An X-ray generator that emits X-rays to the inspection object;
A sample table installed on the path of the X-ray and on which the inspection object is placed;
An X-ray detector that detects X-rays transmitted through the inspection object and outputs the X-rays as visible light data;
An event generator for applying physical energy to the inspection object;
A measuring device for measuring a state of an inspection object changed by physical energy from the event generator;
A control device that controls the operation of at least one of the X-ray generator, the sample table, and the event generation device based on the measurement result of the measurement device;
Nondestructive analysis device equipped with An X-ray generator that emits X-rays to the inspection object;
A sample table installed on the path of the X-ray and on which the inspection object is placed;
An X-ray detector for detecting X-rays transmitted through the inspection object;
A rotating device for rotating the table and the radiation relative to a rotation axis intersecting the radiation;
An image construction apparatus for reconstructing a tomogram of the subject from transmission images detected in the multiple directions of rotation;
An event generator for applying physical energy to the inspection object;
A measuring device for measuring a state of an inspection object changed by physical energy from the event generator;
A control device that controls the operation of at least one of the X-ray generator, the sample table, the rotation device, and the event generation device based on the measurement result of the measurement device;
Nondestructive analysis device equipped with   The nondestructive analysis device according to claim 1 or 2, wherein the X-ray generator is variably configured by the control device for at least one of the FOD, the field of view, and the imaging direction.   The nondestructive analysis device according to claim 1 or 2, wherein the sample table is movable in at least one of front and rear, left and right, up and down, and rotation directions, and the movement amount is controlled by the control device. The event generator applies at least one of an electric current, a voltage, a temperature, an impact force, a bending pressure, a shear force, and a penetration force to the inspection object,
The measurement device according to claim 1 or 2, wherein at least one of the current, voltage, temperature and deformation degree applied to the inspection object is measured simultaneously with acquisition of a fluoroscopic image or within a synchronization period. Nondestructive analysis device. The event generation device includes a nail penetrating the object to be inspected, an operation device for causing the nail to appear and retract with respect to the object to be inspected, and a drive mechanism of the operation device.
The nondestructive analysis device according to claim 1 or 2, wherein the control device controls movement speed, movement direction and movement start and stop of the nail by the operating device. The event generation device includes a nail penetrating the object to be inspected, an operation device for causing the nail to appear and retract with respect to the object to be inspected, and a drive mechanism of the operation device.
The nondestructive analysis device according to claim 1 or 2, wherein the control device controls at least one of an FOD, a field of view, and an imaging direction of the X-ray generator. The event generation device includes a nail penetrating the object to be inspected, an operation device for causing the nail to appear and retract with respect to the object to be inspected, and a drive mechanism of the operation device.
The nondestructive analysis device according to claim 1 or 2, wherein the control device controls an amount of movement of at least one of front and rear, right and left, up and down, and rotation directions of the sample table.   The X-ray detector is capable of responding at high speed to changes in X-ray irradiation dose, and collecting an output visible image of the X-ray image intensifier at high speed The nondestructive analysis device according to any one of claims 1 to 8, comprising a high speed camera capable of   At least one of the sample table and the event generator includes a rotation device movable in at least one of the front, rear, right, left, up and down, rolling, pitching, and yawing rotational directions, and the control device includes: The movement amount is controlled in at least one direction among the rotation directions related to back and forth, right and left, up and down, rolling, pitching, and yawing of at least one of the sample table and the event generator. The nondestructive analysis device according to 9. A display device for displaying transmission image data of the inspection object based on the X-rays detected by the X-ray detector;
It has an input device which is instructed by a worker to move the sample table,
The position of the sample table is at least one of the front, rear, right, left, up and down, rolling, pitching, and yawing rotational directions by the input device operated based on the transmission image data displayed on the display device. The nondestructive analysis device according to claim 10, wherein the nondestructive analysis device is moved and the position at the start of imaging by the X-ray detector of the inspection object is determined. A display device for displaying transmission image data of the inspection object based on the X-rays detected by the X-ray detector;
The control device includes an analysis device for the fluoroscopic image data, and based on the data obtained by the image analysis device, the positions of the sample table and the event generation device are back and forth, left and right, up and down, rolling, pitching, yawing The nondestructive analysis device according to any one of claims 1 to 10, wherein the nondestructive analysis device is moved in at least one direction of the rotation direction to determine the position at the start of imaging by the X-ray detector of the inspection object. A force sensor for detecting the movement position of the inspection object based on the operation of the event generator;
The controller moves at least one of the sample table and the event generator based on the position of the inspection object detected by the force sensor, and physical energy is applied by the event generator. The nondestructive analysis device according to any one of claims 1 to 12, wherein the moved inspection object is repositioned at a position before movement. A sensor for detecting a change in the outer shape of the inspection object based on the operation of the event generation device;
The controller moves at least one of the sample table and the event generator on the basis of the change in the shape detected by the sensor to cause physical energy to be applied by the event generator and move the object. Relocate the inspection object to the position before movement,
The nondestructive analysis device according to any one of claims 1 to 13. The X-ray generator has a function of controlling the output intensity of the X-ray,
The X-ray intensity is controlled according to the material of the analysis target part of the inspection object to capture an analysis image of the inspection object.
The nondestructive analysis device according to any one of claims 1 to 14. A sensor for detecting an abnormality of the inspection object;
A fire extinguishing device for extinguishing the inspection object;
The control device controls the fire extinguishing device based on the abnormality detected by the sensor to extinguish the test object.
The nondestructive analysis device according to any one of claims 1 to 15.

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