JP2513675B2 - Field emission type gallium charged particle source storage method - Google Patents
Field emission type gallium charged particle source storage methodInfo
- Publication number
- JP2513675B2 JP2513675B2 JP9872387A JP9872387A JP2513675B2 JP 2513675 B2 JP2513675 B2 JP 2513675B2 JP 9872387 A JP9872387 A JP 9872387A JP 9872387 A JP9872387 A JP 9872387A JP 2513675 B2 JP2513675 B2 JP 2513675B2
- Authority
- JP
- Japan
- Prior art keywords
- gallium
- charged particle
- particle source
- field emission
- emission type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 title claims description 51
- 229910052733 gallium Inorganic materials 0.000 title claims description 51
- 239000002245 particle Substances 0.000 title claims description 26
- 238000000034 method Methods 0.000 title claims description 7
- 238000003860 storage Methods 0.000 title description 8
- 239000007788 liquid Substances 0.000 claims description 8
- 238000010894 electron beam technology Methods 0.000 claims description 7
- 238000010884 ion-beam technique Methods 0.000 claims description 7
- 238000002844 melting Methods 0.000 claims description 7
- 230000008018 melting Effects 0.000 claims description 7
- CKHJYUSOUQDYEN-UHFFFAOYSA-N gallium(3+) Chemical compound [Ga+3] CKHJYUSOUQDYEN-UHFFFAOYSA-N 0.000 claims description 6
- 230000005684 electric field Effects 0.000 claims description 4
- 238000007711 solidification Methods 0.000 claims description 4
- 230000008023 solidification Effects 0.000 claims description 4
- 238000001816 cooling Methods 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- 235000011089 carbon dioxide Nutrition 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 239000011324 bead Substances 0.000 description 1
- 230000000740 bleeding effect Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000006260 foam Substances 0.000 description 1
- 239000006261 foam material Substances 0.000 description 1
- 239000005457 ice water Substances 0.000 description 1
- 230000009191 jumping Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 239000003507 refrigerant Substances 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明はガリウムイオンビームあるいは電子ビームを
放射させることのできる電界放射型ガリウム荷電粒子源
の保管方法に関するものである。ここで荷電粒子とはイ
オンと電子の総称である。The present invention relates to a method for storing a field emission type gallium charged particle source capable of emitting a gallium ion beam or an electron beam. Here, the charged particles are a general term for ions and electrons.
電界放射型ガリウムイオン源は0.1〜1A/cm2程度の高
電流密度で0.1μｍ程度に細く絞つたイオンビームを得
ることができるので、二次イオン質量分析装置等の得る
微少部分質量分析装置や、超LSIの微細加工技術などに
応用されつつある。Since the field emission gallium ion source can obtain an ion beam narrowed down to about 0.1 μm at a high current density of about 0.1 to 1 A / cm 2, it is possible to obtain a small partial mass spectrometer such as a secondary ion mass spectrometer or , Is being applied to microfabrication technology for VLSI.
また、ガリウムの先端にマイナスの電位を与えて電子
ビームを放射させる電子源は従来用いられているタング
ステン針状電極に比べ１〜２桁高い電流密度が得られる
ので電子顕微鏡への応用が期待されている。また、同一
の荷電粒子源において正負電位切替え型とすることによ
り、ガリウムイオン源による微細加工と電子源による物
質観察とを引続いて行なうこともでき、このような装置
は半導体微細加工プロセスや分析への応用が期待されて
いる。In addition, an electron source that emits an electron beam by applying a negative potential to the tip of gallium can obtain a current density that is 1 to 2 orders of magnitude higher than that of a conventionally used tungsten needle electrode, and is expected to be applied to an electron microscope. ing. Further, by adopting a positive / negative potential switching type in the same charged particle source, it is possible to continuously perform fine processing by a gallium ion source and material observation by an electron source. Is expected to be applied.
電界放射型ガリウム荷電粒子源は第１図に示す様に針
状電極１が貯蔵部２内を貫通しており、該針状電極及び
該貯蔵部は発熱体6A,6Bによつて伝熱加熱される。貯蔵
部２内にはガリウム３が充填されており、ガリウムが針
状電極の表面に広がり、針状電極の先端は融解したガリ
ウムによつて濡れている。針状電極にプラスの電位をか
け、引出し電極にマイナスの電界を与えると該針状電極
先端のガリウムは第２図に示すとおり、曲率半径が数10
オングストローム以下のコーンを形成し、この先端より
ガリウムイオンビーム９が放射される。また、これと逆
の電界を与えると、針状電極先端のコーンから電子ビー
ムが放射される。As shown in FIG. 1, the field emission type gallium charged particle source has a needle-shaped electrode 1 penetrating the inside of a reservoir 2, and the needle-shaped electrode and the reservoir are heated by heat-generating elements 6A and 6B. To be done. The storage portion 2 is filled with gallium 3, the gallium spreads on the surface of the needle electrode, and the tip of the needle electrode is wet with the molten gallium. When a positive potential is applied to the needle electrode and a negative electric field is applied to the extraction electrode, gallium at the tip of the needle electrode has a radius of curvature of several tens as shown in FIG.
A cone of Angstrom or less is formed, and the gallium ion beam 9 is emitted from this tip. When an electric field opposite to this is applied, an electron beam is emitted from the cone at the tip of the needle electrode.
ガリウムは融点が29.7℃であるが、いつたん融解させ
ると融点未満の温度でも凝固し難く、使用後、加熱電源
を切つた後も液状になつている。そのため、保管中に針
状電極先端のコーン形状が乱れやすく、使用再開後、コ
ーンの形状が整い安定なビームを得るまでに長時間かか
るという問題があつた。また、このような荷電粒子源は
加熱電源を切つた状態では、わずかな衝撃を受けてもそ
の貯蔵部内よりガリウムが飛び出たり、あるいはにじみ
出しを生じ、そのため荷電粒子源の寿命がいちじるしく
短かくなり、場合によつては全く使用できなくなること
もあり、保管および輸送の際には細心の注意を要すると
いう問題があつた。Although gallium has a melting point of 29.7 ° C, once it is melted, it is difficult to solidify even at a temperature below the melting point, and it remains liquid after use and after the heating power is turned off. Therefore, there is a problem that the cone shape of the tip of the needle-like electrode is easily disturbed during storage, and it takes a long time to obtain a stable beam after the cone shape is adjusted after use is resumed. Further, in such a charged particle source, when the heating power source is cut off, even if a slight impact is received, gallium pops out from the storage part or oozes out, which shortens the life of the charged particle source significantly. In some cases, it cannot be used at all, and there is a problem in that it requires extreme caution during storage and transportation.
この発明は上記のような問題を解決し、電界放射型ガ
リウム荷電粒子源を用意に保管あるいは輸送する方法を
提供することを目的とする。It is an object of the present invention to solve the above problems and provide a method for easily storing or transporting a field emission type gallium charged particle source.
発明者らは上記目的を達成するためにガリウムの融解
と凝固について種々検討を行なつた結果この発明を完成
させるに致つた。すなわち、この発明は液状のガリウム
を針状電極の先端に導びき、電界を介してガリウムイオ
ンビームまたは電子ビームを得る電界放射型ガリウム荷
電粒子源において、前記電界放射型ガリウム荷電粒子源
を該ガリウムの凝固温度以下に冷却して該ガリウムを凝
固させ、ついで該ガリウムの融解温度未満の温度に保つ
ことを特徴とする電界放射型ガリウム荷電粒子源の保管
方法である。The inventors conducted various studies on melting and solidification of gallium in order to achieve the above object, and as a result, completed the present invention. That is, the present invention relates to a field emission type gallium charged particle source for guiding liquid gallium to the tip of a needle electrode to obtain a gallium ion beam or electron beam through an electric field, wherein the field emission type gallium charged particle source is The method for storing a field emission type gallium charged particle source is characterized in that the gallium is solidified by cooling to a temperature below the solidification temperature of, and then kept at a temperature below the melting temperature of the gallium.
以下本発明を詳細に説明する。ガリウムは過冷却する
性質があり、液状のガリウムは融点（29.7℃）以下にお
いても準安定な液体の状態を保ちつづける。そして液状
ガリウムを氷水中に注いでも凝固することはまれなほど
である。従つて荷電粒子源の保管に際しては、使用を終
えたガリウム荷電粒子源をすみやかにマイナス10℃程度
以下の環境に少なくとも数時間静置するか、あるいは貯
蔵部内に固体ガリウムの小片を結晶核として投じる方法
により、液状ガリウムを完全に凝固させることが好まし
い。またこの時、該針状電極先端の液状ガリウム・コー
ンが乱されることなく保存され、そのまま凝固する様に
静かに冷却処理を行なうことが大切である。Hereinafter, the present invention will be described in detail. Gallium has the property of being supercooled, and liquid gallium maintains a metastable liquid state even below its melting point (29.7 ° C). And even if liquid gallium is poured into ice water, it rarely solidifies. Therefore, when storing the charged particle source, leave the used gallium charged particle source immediately in an environment of about -10 ° C or lower for at least several hours, or throw a small piece of solid gallium as a crystal nucleus in the storage unit. It is preferable to completely solidify the liquid gallium by the method. At this time, it is important to perform a cooling treatment gently so that the liquid gallium cone at the tip of the needle-shaped electrode is stored without being disturbed and solidified as it is.
一度凝固させたガリウムが再び液化することのない様
に、凝固処理されたガリウム荷電粒子源は、その融点
（29.7℃）未満の温度で保管されなければならない。The solidified gallium charged particle source must be stored at a temperature below its melting point (29.7 ° C) so that once solidified gallium does not liquefy again.
とくに、輸送の場合にはガリウム荷電粒子源を発泡材
等の断熱クッション材、及びドライアイス等の冷媒とと
もに断熱容器中に梱包するなどして、耐熱性および耐衝
撃性をもたせることが好ましい。また、冷蔵庫を備えた
車輌で輸送してもよい。In particular, in the case of transportation, it is preferable to pack the gallium charged particle source in a heat insulating container together with a heat insulating cushioning material such as a foam material and a refrigerant such as dry ice so as to have heat resistance and impact resistance. It may also be transported in a vehicle equipped with a refrigerator.
つぎに、本発明の実施例について述べる。 Next, examples of the present invention will be described.
第１図に示す電界放射型ガリウム荷電粒子源を使用
後、まず、マイナス13℃の冷凍庫に約３時間静置し、貯
蔵部内のガリウムを凝固させた。凝固後、針状電極の先
端を走査型電子顕微鏡で観察した結果、ガリウム・コー
ンの形状は第２図に示すような理想的な形状を保つてい
た。After the field emission type gallium charged particle source shown in FIG. 1 was used, it was first allowed to stand in a freezer at -13 ° C. for about 3 hours to solidify the gallium in the storage part. After the solidification, the tip of the needle-shaped electrode was observed with a scanning electron microscope. As a result, the shape of the gallium cone was maintained in the ideal shape as shown in FIG.
上記のようなガリウムを凝固させた電界放射型ガリウ
ム荷電粒子源を硬質プラスチツク容器内に固定し、発泡
ビーズのクツシヨン材で囲み、ドライアイス塊とともに
ダンボール製箱詰めにして遠隔地にトラツク輸送した。A field emission type gallium charged particle source obtained by solidifying gallium as described above was fixed in a hard plastic container, surrounded by a cushioning material made of foam beads, and packed in a cardboard box together with a block of dry ice, and transported to a remote place.
輸送されたガリウム荷電粒子源は、ガリウムが固体状
に維持されており、ガリウム・コーンの形状は正常であ
り、ガリウムの飛び出し等の損傷も全く見られなかつ
た。In the transported gallium charged particle source, gallium was maintained in a solid state, the shape of the gallium cone was normal, and no damage such as gallium jumping out was observed.
さらに、この荷電粒子源は安定なイオンビームおよび
安定な電子ビームを放射できることを確認した。Furthermore, it was confirmed that this charged particle source can emit a stable ion beam and a stable electron beam.
この発明方法により電界放射型ガリウム荷電粒子源を
保管すると、保管中に多少の衝撃を受けてもガリウムの
飛び出しや、にじみを生ずることがなく、針状電極先端
のガリウム・コーンの形状が理想的な形状に保たれるの
で、使用再開後すぐに安定なイオンビームあるいは安定
な電子ビームを放射させることができる。When the field emission type gallium charged particle source is stored by the method according to the present invention, the gallium cone at the tip of the needle-shaped electrode is ideally formed without causing gallium popping out or bleeding even if a slight shock is applied during storage. Since the shape is maintained, it is possible to emit a stable ion beam or a stable electron beam immediately after the use is restarted.
第１図は実施例で用いた電界放射型ガリウム荷電粒子源
の断面図である。第２図は電界放射型ガリウム荷電粒子
源の針状電極先端の断面図である。 符号 １……針状電極、２……貯蔵部、３……ガリウ
ム、４……伝熱性支持部材、5A,5B……隔壁、6A,6B……
発熱体、7A,7B……電導性支持部材、８……引出し電
極、９……荷電粒子ビーム、10……コーンFIG. 1 is a sectional view of the field emission type gallium charged particle source used in the examples. FIG. 2 is a cross-sectional view of the tip of the needle electrode of the field emission type gallium charged particle source. Reference numeral 1 ... Needle-shaped electrode, 2 ... Reservoir, 3 ... Gallium, 4 ... Heat-conducting support member, 5A, 5B ... Septa, 6A, 6B ...
Heating element, 7A, 7B ... Conductive support member, 8 ... Extraction electrode, 9 ... Charged particle beam, 10 ... Cone
Claims (1)
き、電界を介してガリウムイオンビームまたは電子ビー
ムを得る電界放射型ガリウム荷電粒子源において、前記
電界放射型ガリウム荷電粒子源を該ガリウムの凝固温度
以下に冷却して該ガリウムを凝固させ、ついで該ガリウ
ムの融解温度未満の温度に保つことを特徴とする電界放
射型ガリウム荷電粒子源の保管方法。1. A field emission type gallium charged particle source for guiding liquid gallium to the tip of a needle electrode to obtain a gallium ion beam or an electron beam through an electric field, wherein the field emission type gallium charged particle source is the gallium. A method for storing a field emission type gallium charged particle source, which comprises cooling the gallium to a temperature not higher than the solidification temperature of (1) to solidify the gallium, and then maintaining the temperature below the melting temperature of the gallium.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9872387A JP2513675B2 (en) | 1987-04-23 | 1987-04-23 | Field emission type gallium charged particle source storage method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9872387A JP2513675B2 (en) | 1987-04-23 | 1987-04-23 | Field emission type gallium charged particle source storage method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63266730A JPS63266730A (en) | 1988-11-02 |
| JP2513675B2 true JP2513675B2 (en) | 1996-07-03 |
Family
ID=14227438
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9872387A Expired - Fee Related JP2513675B2 (en) | 1987-04-23 | 1987-04-23 | Field emission type gallium charged particle source storage method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2513675B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4887344B2 (en) * | 2007-12-14 | 2012-02-29 | 株式会社日立ハイテクノロジーズ | Gas field ionization ion source, scanning charged particle microscope, optical axis adjustment method, and sample observation method |
-
1987
- 1987-04-23 JP JP9872387A patent/JP2513675B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63266730A (en) | 1988-11-02 |
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