JP2522181B2 - Probe - Google Patents
ProbeInfo
- Publication number
- JP2522181B2 JP2522181B2 JP5249632A JP24963293A JP2522181B2 JP 2522181 B2 JP2522181 B2 JP 2522181B2 JP 5249632 A JP5249632 A JP 5249632A JP 24963293 A JP24963293 A JP 24963293A JP 2522181 B2 JP2522181 B2 JP 2522181B2
- Authority
- JP
- Japan
- Prior art keywords
- glass
- glass plate
- electro
- conversion element
- probe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Measurement Of Current Or Voltage (AREA)
- Tests Of Electronic Circuits (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は、高速電気信号を観測す
るプローブに関し、特にプリント基板の微細な配線パタ
ーン上の高速信号を検出するプローブに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a probe for observing a high-speed electric signal, and more particularly to a probe for detecting a high-speed signal on a fine wiring pattern on a printed board.
【０００２】[0002]
【従来の技術】従来、この種のプローブは、例えば文献
「日本学術振興会荷電粒子ビームの工業への応用第１３
２委員会第１０９回研究会資料」のＰ７−Ｐ１２に記さ
れているが、電気光変換素子（以下、Ｅ−Ｏ素子と称
す）自体の電気的容量を少なくするために１００μｍ四
方程に小さく作ったＬｉＮｂＯ3 結晶の薄板と、このＥ
−Ｏ素子であるＬｉＮｂＯ3 結晶の薄板とガラスブロッ
クとの間に位置するＩＴＯ（Ｉｎｄｉｕｍ Ｔｉｎ Ｏ
ｘｉｄｅ）透明電極と、この透明電極から電極取り出す
外部接続部分として側面に付けた導電体とを含んで構成
されていた。以下このＥ−Ｏ素子を用いたプローブをＥ
−Ｏプローブと言う。2. Description of the Related Art Conventionally, this type of probe has been disclosed in, for example, the document "Japan Society for the Promotion of Science, Industrial Application of Charged Particle Beams No. 13".
2 Committee 109th Study Group Material ”, P7-P12, but in order to reduce the electric capacity of the electro-optical conversion element (hereinafter referred to as EO element) itself, it is as small as 100 μm square. This thin plate of LiNbO 3 crystal and this E
ITO positioned between the thin and the glass block LiNbO 3 crystal is -O element (Indium Tin O
xide) A transparent electrode and a conductor attached to the side surface as an external connection portion for extracting an electrode from the transparent electrode. Hereinafter, a probe using this EO device will be referred to as E
-O probe.
【０００３】[0003]
【発明が解決しようとする課題】上述した従来のＥ−Ｏ
プローブは、プリント基板などの広い面積上の配線パタ
ーン上の信号を検出する際には、Ｅ−Ｏプローブを移動
させる機構が必要であり、高価になるという欠点があ
る。DISCLOSURE OF THE INVENTION Problems to be Solved by the Invention Conventional EO described above
The probe requires a mechanism for moving the EO probe when detecting a signal on a wiring pattern on a large area such as a printed circuit board, which is disadvantageous in that it is expensive.
【０００４】[0004]
【課題を解決するための手段】本発明のプローブは、角
推形の石英ガラスの頂点を底面と平行面で削り取った先
端部を有するガラスブロックと、このガラスブロックを
同一平面状に一列に複数個並べて保持するガラスプレー
トと、複数個並べたガラスブロックの斜面と削り取った
面とに同時に蒸着した透明電極と、ガラスブロックの先
端部に接着するＥ−Ｏ素子と、このＥ−Ｏ素子上であっ
てガラスブロックと接着した面の反対面に位置しレーザ
ー光を反射する誘電体多層反射膜と、透明電極から引き
出す電線と、ガラスプレート上に位置しＥ−Ｏ素子にレ
ーザー光を導く光ファイバと、この光ファイバをカラス
プレート上に固定するファイバ固定部と、この固定部と
被検査物の検査する面の反対の面とを挟み込むクランプ
部とを含むことを特徴としている。The probe of the present invention comprises a glass block having a tip portion obtained by shaving the apex of square-thinned quartz glass in a plane parallel to the bottom surface, and a plurality of the glass blocks arranged in a line in the same plane. On the glass plate, which holds the glass plates side by side, the transparent electrodes which are vapor-deposited simultaneously on the inclined surface and the scraped surface of the glass blocks which are lined up, the EO element adhered to the tip of the glass block, and the EO element. There is a dielectric multilayer reflection film located on the opposite surface of the surface that is bonded to the glass block and reflecting the laser light, an electric wire drawn from the transparent electrode, and an optical fiber that is located on the glass plate and guides the laser light to the EO element. And a fiber fixing portion for fixing the optical fiber on the glass plate, and a clamp portion for sandwiching the fixing portion and a surface opposite to an inspection surface of the inspection object. It is a symptom.
【０００５】[0005]
【実施例】次に、本発明の実施例について図面を参照し
て説明する。Embodiments of the present invention will now be described with reference to the drawings.
【０００６】図１は本発明によるプローブの一実施例を
示す断面図、図２は図１を説明するための部分拡大図で
ある。FIG. 1 is a sectional view showing an embodiment of a probe according to the present invention, and FIG. 2 is a partially enlarged view for explaining FIG.
【０００７】図１に示すＥ−Ｏプローブは、ガラスブロ
ック１と、透明電極２と、Ｅ−Ｏ素子３と、反射膜４
と、透明電極２に接続する電線５と、その電線５の電極
接続部６と、これら全体を支えるガラスプレート７と、
ガラスプレート７上の光ファイバ１２と、この光ファイ
バ１２の固定部１５と被検査物１０との位置を固定する
クランプ部２０とを含んで構成される。The EO probe shown in FIG. 1 comprises a glass block 1, a transparent electrode 2, an EO element 3, and a reflective film 4.
An electric wire 5 connected to the transparent electrode 2, an electrode connecting portion 6 of the electric wire 5, and a glass plate 7 supporting the whole of them.
It is configured to include an optical fiber 12 on the glass plate 7 and a clamp part 20 for fixing the positions of the fixing part 15 of the optical fiber 12 and the inspection object 10.
【０００８】図２の部分拡大図は、Ｅ−Ｏプローブ先端
部９付近の拡大図で、それぞれのＥ−Ｏ素子３をつなぐ
透明電極２と電線５の電極接続部７、ガラスブロック１
とＥ−Ｏ素子３の間に位置する接着層８がある。The partially enlarged view of FIG. 2 is an enlarged view of the vicinity of the EO probe tip portion 9, and the transparent electrode 2 connecting the respective EO elements 3 and the electrode connecting portion 7 of the electric wire 5 and the glass block 1 are shown.
There is an adhesive layer 8 located between the EO element 3 and the EO element 3.
【０００９】ガラスブロック１は、角推形の石英ガラス
で出来ていて、その角推の頂点部分は図２のごとくガラ
スブロック１の底面と平行面で削り取った形をしてお
り、この部分が先端部９である。このガラスブロック１
は複数個並べて、ガラスプレート６上に接着してある。
複数個並べられたガラスブロック１の削り取った先端部
９と斜面とには、ＩＴＯ（Ｉｎｄｉｕｍ Ｔｉｎ Ｏｘ
ｉｄｅ）などの材質の透明電極２が、一括して蒸着して
ある。この透明電極２は、被検査物１０の電界を引き出
す対向電極の役目をする。Ｅ−Ｏ素子３はＬｉＮｂＯ3
やＬｉＴａＯ3 などのカー効果（ポッケスル効果）を有
する結晶の薄板であって、接着層８を介して先端部９に
取り付けられている。このＥ−Ｏ素子３の被検査物１０
側の面には、レーザー光１１を反射する誘電体多層反射
膜４がある。Ｅ−Ｏ素子３に当てるレーザー光１１は、
数ミクロンから数十ミクロンの径を有し、誘電体多層反
射膜４によって反射し、この時、被検査物１０からの電
界に比例して偏向される。電極接続部６は、透明電極２
と電線５を電気的に接続する部分であり、ドータイトな
どの金属ペーストを塗布して乾燥、硬化した物である。
光ファイバ固定部１５は、光ファイバ１２をガラスプレ
ート７上に固定し出射するレーザー光１１がＥ−Ｏ素子
３に当たる位置を定める。クランプ部２０は光ファイバ
固定部１５と被検査物１０とを挟み込み、Ｅ−Ｏ素子３
を誘電体多層反射膜４を介してこの厚み分の距離で被検
査物１０と接触する。The glass block 1 is made of square-thickness quartz glass, and the apex portion of the square-thickness has a shape scraped off on a plane parallel to the bottom surface of the glass block 1 as shown in FIG. It is the tip 9. This glass block 1
Are arranged side by side and bonded on the glass plate 6.
A plurality of glass blocks 1 arranged side by side have ITO (Indium Tin Ox) on the scraped tip 9 and slope.
A transparent electrode 2 made of a material such as ide) is collectively vapor-deposited. The transparent electrode 2 functions as a counter electrode that draws out the electric field of the inspection object 10. The EO element 3 is LiNbO 3
It is a thin crystal plate having a Kerr effect (Pockesul effect) such as LiTaO 3 or LiTaO 3 and is attached to the tip portion 9 via an adhesive layer 8. The object to be inspected 10 of the EO device 3
On the side surface, there is a dielectric multilayer reflective film 4 that reflects the laser light 11. The laser light 11 applied to the EO element 3 is
It has a diameter of several microns to several tens of microns and is reflected by the dielectric multilayer reflection film 4, and at this time, it is deflected in proportion to the electric field from the inspection object 10. The electrode connecting portion 6 is the transparent electrode 2
And the electric wire 5 are electrically connected to each other, which is a product obtained by applying a metal paste such as dotite and drying and curing.
The optical fiber fixing portion 15 fixes the optical fiber 12 on the glass plate 7 and determines the position where the emitted laser light 11 strikes the EO element 3. The clamp part 20 sandwiches the optical fiber fixing part 15 and the inspection object 10, and the EO device 3
Is contacted with the object 10 to be inspected through the dielectric multilayer reflective film 4 at a distance corresponding to this thickness.
【００１０】[0010]
【発明の効果】以上説明したように、本発明のプローブ
は、ガラスプレート７上に一列に複数のガラスブロック
１を並べ、この先端部９にＥ−Ｏ素子３と誘電体多層反
射膜４を設け、これらを被検査物１０に接触させるクラ
ンプ部２０を有する構成によって、プリント基板などの
電子回路を実装した基板の各パターン上の電気信号から
発生する電界を可動部分なしに検出することができると
いう効果がある。As described above, according to the probe of the present invention, a plurality of glass blocks 1 are arranged in a row on the glass plate 7, and the EO element 3 and the dielectric multilayer reflection film 4 are provided at the tip portion 9. With the configuration including the clamp portion 20 that is provided to bring these into contact with the object to be inspected 10, it is possible to detect an electric field generated from an electric signal on each pattern of a board on which an electronic circuit such as a printed board is mounted, without a movable part. There is an effect.
【図１】本発明によるプローブの一実施例を示す断面図
である。FIG. 1 is a sectional view showing an embodiment of a probe according to the present invention.
【図２】図１を説明するための部分拡大図である。FIG. 2 is a partially enlarged view for explaining FIG.
１ ガラスブロック ２ 透明電極 ３ Ｅ−Ｏ素子 ４ 反射膜 ５ 電線 ６ 電極接合部 ７ ガラスプレート ８ 接着層 ９ 先端部 １０ 被検査物 １１ レーザービーム １２ 光ファイバ １５ 光ファイバ固定部 ２０ クランプ部 DESCRIPTION OF SYMBOLS 1 Glass block 2 Transparent electrode 3 E-O element 4 Reflective film 5 Electric wire 6 Electrode joint part 7 Glass plate 8 Adhesive layer 9 Tip part 10 Inspected object 11 Laser beam 12 Optical fiber 15 Optical fiber fixing part 20 Clamp part
Claims (1)
面で削り取った先端部を有するガラスブロックと、この
ガラスブロックを同一平面状に一列に複数個並べて保持
するガラスプレートと、複数個並べた前記ガラスブロッ
クの斜面と削り取った面とに同時に蒸着した透明電極
と、前記ガラスブロックの先端部に接着する電気光変換
素子と、この電気光変換素子上であって前記ガラスブロ
ックと接着した面の反対面に位置しレーザー光を反射す
る誘電体多層反射膜と、前記透明電極から引き出す電線
と、前記ガラスプレート上に位置し前記電気光変換素子
にレーザー光を導く光ファイバと、この光ファイバをカ
ラスプレート上に固定するファイバ固定部と、この固定
部と被検査物の検査する面の反対の面とを挟み込むクラ
ンプ部とを含むことを特徴とするプローブ。1. A glass block having a tip portion obtained by shaving the apex of square-thickness quartz glass in a plane parallel to the bottom surface, a glass plate holding a plurality of the glass blocks arranged in a line in the same plane, and a plurality of glass plates. Transparent electrodes simultaneously deposited on the inclined surface and the scraped surface of the glass blocks arranged side by side, an electro-optical conversion element adhered to the tip of the glass block, and the electro-optical conversion element is adhered to the glass block. A dielectric multilayer reflection film located on the opposite surface of the surface for reflecting laser light, an electric wire drawn from the transparent electrode, an optical fiber located on the glass plate for guiding laser light to the electro-optical conversion element, and this light It includes a fiber fixing part for fixing the fiber on the glass plate and a clamp part for sandwiching the fixing part and the surface opposite to the inspection surface of the inspection object. Characteristic probe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5249632A JP2522181B2 (en) | 1993-10-06 | 1993-10-06 | Probe |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5249632A JP2522181B2 (en) | 1993-10-06 | 1993-10-06 | Probe |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH07104013A JPH07104013A (en) | 1995-04-21 |
| JP2522181B2 true JP2522181B2 (en) | 1996-08-07 |
Family
ID=17195919
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5249632A Expired - Lifetime JP2522181B2 (en) | 1993-10-06 | 1993-10-06 | Probe |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2522181B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007000947A1 (en) | 2005-06-29 | 2007-01-04 | Nec Corporation | Electric field sensor, magnetic field sensor, electro-magnetic sensor, and electro-magnetic field measuring system using them |
-
1993
- 1993-10-06 JP JP5249632A patent/JP2522181B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH07104013A (en) | 1995-04-21 |
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