JP2523027B2 - Magnetostrictive actuator - Google Patents
Magnetostrictive actuatorInfo
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- JP2523027B2 JP2523027B2 JP1309462A JP30946289A JP2523027B2 JP 2523027 B2 JP2523027 B2 JP 2523027B2 JP 1309462 A JP1309462 A JP 1309462A JP 30946289 A JP30946289 A JP 30946289A JP 2523027 B2 JP2523027 B2 JP 2523027B2
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- Prior art keywords
- magnetostrictive
- gap
- magnetostrictive material
- actuator
- yoke
- Prior art date
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Description
【発明の詳細な説明】 [産業上の利用分野] 本発明は磁歪アクチュエータに関する。TECHNICAL FIELD The present invention relates to a magnetostrictive actuator.
[従来の技術] 近時,振動子,音響備品及び変位アクチュエータにお
いて,その可動素子として,磁歪素子が圧電素子に替わ
り用いられつつある。これは,圧電素子のエネルギー密
度,電気−機械変換係数及び使用可能温度等に対し,よ
り勝る磁歪素子が現れ始めたことに起因する。このよう
な磁歪素子(以下,磁歪材とする)の中でも,とりわ
け,磁歪特性が顕著な稀土類系の磁歪材が,近時,脚光
を浴びつつある。かかる磁歪材を用いてなる従来の磁歪
アクチュエータを,図面参照して説明する。第2図にそ
の一例を示す。同図の磁歪アクチュエータ1は,大別し
て、シリンダ2内に,円柱形状の磁歪材3と,この磁歪
材3の磁歪変位xを外部に出力するためのラム4とで主
構成されている。詳しくは,磁歪材3の外周にはボビン
5に巻き回したコイル6が備えられ,更にこのコイル6
の外周にバイアス磁石(通常は永久磁石)7が備えられ
ている。磁歪材3の長手方向の両端にはコイル6と,バ
イアス磁石7と,この磁歪材3とで形成する磁気回路を
容易に形成せしめるためのヨーク81,82が設けてある。
図示左端のヨーク81はシリンダ2に当接しており,磁歪
アクチュエータ1の固定側を構成している。他側,図示
左端のヨーク81は,図示左端が磁歪材3に当接すると共
に図示右側が非磁性体でなるリテーナ9を介してラム4
に当接している。このラム4は,シリンダ2の図示右端
の開口部から摺動自在に外部へ突出している。尚,リテ
ーナ9とシリンダ2との間には弾性体10が収めてあり,
磁歪材3に対し,リテーナ9とヨーク82とを介して常時
圧縮力を加えている。この圧縮力は磁歪材3に対するプ
リストレスである。よく知られる通り,このプリストレ
スと前記バイアス磁石7によるバイアス磁場とは磁歪材
3の磁歪特性を向上せしめる効果をもたらす。かかる磁
歪アクチュエータ1は,コイル6に交流又は脈流電流を
流せば,振動子となる。逆にコイル6に直流電流を流せ
ば,この磁歪アクチュエータ1は変位アクチュエータと
なる。尚,同図の磁歪アクチュエータ1は,磁歪材3の
長手方向の長さがコイル6の長手方向の長さよりも短く
構成してある。この理由は,コイル6とバイアス磁石7
とからの磁束がヨーク81,82とこの磁歪材とを通って形
成する磁気回路において,この磁歪材3内での磁束が並
行となるよう配慮しているためである。[Prior Art] Recently, a magnetostrictive element is being used instead of a piezoelectric element as a movable element in a vibrator, an audio equipment, and a displacement actuator. This is because the magnetostrictive element, which is superior to the energy density, electromechanical conversion coefficient, usable temperature, etc. of the piezoelectric element, has begun to appear. Among such magnetostrictive elements (hereinafter referred to as magnetostrictive materials), particularly rare earth-based magnetostrictive materials, which have remarkable magnetostrictive characteristics, have recently been in the spotlight. A conventional magnetostrictive actuator using such a magnetostrictive material will be described with reference to the drawings. FIG. 2 shows an example thereof. The magnetostrictive actuator 1 shown in FIG. 1 is roughly composed mainly of a cylinder-shaped magnetostrictive material 3 in a cylinder 2 and a ram 4 for outputting the magnetostrictive displacement x of the magnetostrictive material 3 to the outside. Specifically, a coil 6 wound around a bobbin 5 is provided on the outer circumference of the magnetostrictive material 3, and the coil 6 is further provided.
A bias magnet (usually a permanent magnet) 7 is provided on the outer circumference of the. A coil 6, a bias magnet 7, and yokes 81 and 82 for easily forming a magnetic circuit formed by the magnetostrictive material 3 are provided at both ends of the magnetostrictive material 3 in the longitudinal direction.
The yoke 81 at the left end in the figure is in contact with the cylinder 2 and constitutes the fixed side of the magnetostrictive actuator 1. The yoke 81 on the other side, the left end in the drawing, has the left end in the drawing contacting the magnetostrictive material 3 and the right side in the drawing via the retainer 9 made of a non-magnetic material.
Is in contact with The ram 4 slidably projects to the outside from an opening at the right end of the cylinder 2 in the figure. An elastic body 10 is housed between the retainer 9 and the cylinder 2,
A compressive force is constantly applied to the magnetostrictive material 3 via the retainer 9 and the yoke 82. This compressive force is a prestress on the magnetostrictive material 3. As is well known, the pre-stress and the bias magnetic field generated by the bias magnet 7 bring about an effect of improving the magnetostrictive characteristic of the magnetostrictive material 3. The magnetostrictive actuator 1 becomes a vibrator when an alternating current or a pulsating current is passed through the coil 6. On the contrary, when a direct current is applied to the coil 6, the magnetostrictive actuator 1 becomes a displacement actuator. In the magnetostrictive actuator 1 shown in the figure, the length of the magnetostrictive material 3 in the longitudinal direction is shorter than the length of the coil 6 in the longitudinal direction. The reason for this is that the coil 6 and the bias magnet 7 are
This is because, in the magnetic circuit formed by the magnetic fluxes from and through the yokes 81 and 82 and the magnetostrictive material, the magnetic flux in the magnetostrictive material 3 is made parallel.
[発明が解決しようとする課題] 磁歪材は,圧電素子(又は圧電材料)と比較して上述
したような利点を備えている。しかしながら,このよう
な磁歪材料であっても問題なしとは言えない。最も大き
い問題のひとつに,磁歪材がギャップ変動に敏感である
ということを上げることができる。とりわけ磁歪特性が
よい稀土類系の磁歪材にあっては,その透磁率が低いた
め,ギャップがあると漏れ磁束が多くなり,磁歪材材本
来の高磁歪特性が相殺されてしまういう不都合がある。
そこで磁歪アクチュエータにおけるギャップ及びそのギ
ャップ変動を,大別して次の3つ掲げる。[Problems to be Solved by the Invention] The magnetostrictive material has the advantages described above as compared with the piezoelectric element (or piezoelectric material). However, even such a magnetostrictive material cannot be said to have no problem. One of the biggest problems is that magnetostrictive materials are sensitive to gap fluctuations. In particular, in rare earth type magnetostrictive materials having good magnetostrictive characteristics, since the magnetic permeability is low, there is a disadvantage that the leakage magnetic flux increases if there is a gap and the high magnetostrictive characteristics inherent in the magnetostrictive material are offset. .
Therefore, the gaps and fluctuations in the gaps in magnetostrictive actuators are roughly classified into the following three.
(1)磁歪材長手方向側面のギャップとその変動 通常,磁歪材は,上述の通り,磁歪特性を向上させる
ためプリストレスを印加し,長手方向に予め縮めてある
(従って,磁歪材の半径方向には引っ張り応力がかか
り,極端に表現すれば,磁歪材側面は樽状にふくらんだ
形状となっている)。この磁歪材にコイルからの磁束が
流れると,磁歪材が長手方向に伸び,円周方向が縮ん
で,ボビンとの間にギャップが生じるようになる。この
ギャップが漏れ磁束の発生原因となる。殊に,コイルに
交流又は脈流電流が印加されると,コイルの発生磁界が
交番磁界である場合,表皮効果が起こり,磁歪材に流れ
る磁束の浸透深さがこの交番磁界の周波数に影響され
る。即ち交番磁界の交番周波数が高くなればなるほど,
磁歪材での磁束の浸透深さは浅くなる。従って,交番磁
界の場合,磁歪材長手方向側面のギャップとその変動
(即ち,漏れ磁束)は,直流磁界に比較して多くなる。(1) Gap on the longitudinal side of the magnetostrictive material and its variation Usually, as described above, the magnetostrictive material is pre-stressed to improve the magnetostrictive property and is contracted in the longitudinal direction in advance (thus, in the radial direction of the magnetostrictive material). Is applied with tensile stress, and in extreme terms, the side surface of the magnetostrictive material has a barrel-shaped bulge. When the magnetic flux from the coil flows through this magnetostrictive material, the magnetostrictive material expands in the longitudinal direction and contracts in the circumferential direction, so that a gap is created between the magnetostrictive material and the bobbin. This gap causes leakage flux. In particular, when an alternating or pulsating current is applied to the coil, the skin effect occurs when the magnetic field generated by the coil is an alternating magnetic field, and the penetration depth of the magnetic flux flowing in the magnetostrictive material is affected by the frequency of this alternating magnetic field. It That is, the higher the alternating frequency of the alternating magnetic field,
The penetration depth of the magnetic flux in the magnetostrictive material becomes shallow. Therefore, in the case of the alternating magnetic field, the gap on the side surface in the longitudinal direction of the magnetostrictive material and its fluctuation (that is, leakage magnetic flux) are larger than those in the DC magnetic field.
(2)磁歪材長手方向のギャップとその変動 上記(1)と、同様,交番磁界の場合,表皮効果が起
こる。表皮効果は,磁歪材の中心に近いければ近い程,
磁束による渦電流が多く発生し,従って中心程磁束が少
なくなる現象である。換言すると,磁歪材の端面では,
その歪みは磁歪材の中心は少ない(伸びない)が,周囲
は多い(伸びる)ことになる。従って,交番磁界が印加
されると,磁歪材の両端面は凹状となり,この凹部の中
心部はギャップとなる。(2) Gap in the longitudinal direction of the magnetostrictive material and its variation Similar to (1) above, in the case of an alternating magnetic field, a skin effect occurs. The skin effect is closer to the center of the magnetostrictive material,
This is a phenomenon in which a large amount of eddy current is generated due to the magnetic flux, and therefore the magnetic flux decreases toward the center. In other words, on the end face of the magnetostrictive material,
The strain is small in the center of the magnetostrictive material (does not extend), but there is a large amount in the periphery (extends). Therefore, when an alternating magnetic field is applied, both end surfaces of the magnetostrictive material become concave, and the center of this concave becomes a gap.
(3)その他のギャップとその変動 磁歪アクチュエータは,その構成において基本的には
ギャップが必要である。例えば第2図を参照し,説明す
れば,磁歪アクチュエータ1において,固定部材はシリ
ンダ2,ヨーク81,ボビン5,コイル6及びバイアス7であ
り,可動部材はヨーク82,リテーナ9及びラム4であ
り,更に1端固定かつ他端可動部材は磁歪材3及び弾性
体10である。即ち,磁歪材3が縮み切ったとき,ボビン
5とバイアス7とに対し,ヨーク82はある程度のギャッ
プを持って配置されていないと,これらは衝突し,自己
破壊してしまう。従って,このギャップは固定ギャップ
として予め設置されている必要がある。ところが、磁歪
材が磁場を受け,長手方向に伸びると,このギャップは
磁歪材の伸び量の分だけ大きくなる。即ちこの長さの伸
び量がこのギャップは変動となる。(3) Other gaps and their variations Magnetostrictive actuators basically require a gap in their configuration. For example, referring to FIG. 2, in the magnetostrictive actuator 1, the fixed members are the cylinder 2, the yoke 81, the bobbin 5, the coil 6 and the bias 7, and the movable members are the yoke 82, the retainer 9 and the ram 4. Further, the one end fixed member and the other end movable member are the magnetostrictive material 3 and the elastic body 10. That is, when the magnetostrictive material 3 is fully shrunk, if the yoke 82 is not arranged with a certain gap with respect to the bobbin 5 and the bias 7, they will collide and self-destruct. Therefore, this gap must be installed in advance as a fixed gap. However, when the magnetostrictive material receives a magnetic field and extends in the longitudinal direction, this gap increases by the amount of extension of the magnetostrictive material. That is, the amount of elongation of this length changes in this gap.
以上の代表的ギャップとその変動に対し,従来の磁歪
アクチュエータでは,取り立てて対応策を講じていない
のが実情である。従って,従来の磁歪アクチュエータに
あっては,ギャップ変動による漏れ磁束の発生,及びそ
の結果に基づく磁歪特性の低下に対しても考慮が払われ
ていないということになる。In response to the above-mentioned typical gap and its variation, the conventional magnetostrictive actuator does not take any countermeasures against it. Therefore, in the conventional magnetostrictive actuator, no consideration is given to the generation of leakage magnetic flux due to the gap variation and the deterioration of the magnetostrictive characteristic based on the result.
本発明は,かかる従来の技術の問題点に鑑み,ギャッ
プ変動に強く,従って高磁歪特性を引き出せる磁歪アク
チュエータを提供することを目的とする。The present invention has been made in view of the above problems of the conventional technique, and an object of the present invention is to provide a magnetostrictive actuator that is resistant to gap fluctuation and therefore can exhibit high magnetostrictive characteristics.
[課題を解決するための手段] 上記目的を達成するため,本発明に係わる磁歪アクチ
ュエータは,筺体又は筒体等の密閉体と,この密閉体に
内蔵された磁歪材,励磁コイル,バイアス磁石及びヨー
クと,前記磁歪材の運動を前記密閉体から外部に出力す
るラムとを備える磁歪アクチュエータにおいて,前記磁
歪材と前記励磁コイルと前記バイアス磁石と前記ヨーク
とで形成される磁気回路のギャップ内に可圧縮状に高透
磁率材を介在せしめた構成とした。[Means for Solving the Problems] In order to achieve the above object, a magnetostrictive actuator according to the present invention includes a hermetically sealed body such as a casing or a cylindrical body, a magnetostrictive material, an exciting coil, a bias magnet, and the like which are built in the hermetically sealed body. In a magnetostrictive actuator including a yoke and a ram that outputs the movement of the magnetostrictive material to the outside from the sealed body, in a gap of a magnetic circuit formed by the magnetostrictive material, the exciting coil, the bias magnet, and the yoke. A high-permeability material is interposed in a compressible manner.
[作用] 上記構成であれは,歪磁材と,励磁コイルと,バイア
スと,ヨークとで形成される磁気回路のギャップ内に可
圧縮状に高透磁率材を介在せしめたため,ギャップ部か
らの漏れ磁束を大幅に低減することができる。尚,可圧
縮状とは,高透磁率材が固形があったり又はギャップを
満たす液状であってはならないことを意味する。このよ
うに構成してしまうと,これら高透磁率材は非圧縮性で
あるため,その磁歪アクチュエータは,その可動時にお
いて,自己破壊してしまうことになる。尚,磁歪アクチ
ュエータの中には,バイアス磁石を備えない構成のもの
もあり,この場合の磁気回路は磁歪材とバイアスとヨー
クとから構成される。これを考慮して,本発明(請求
項)の構成はこの構成も含むものとする。[Operation] With the above-described configuration, since the high-permeability material is compressively inserted in the gap of the magnetic circuit formed by the strained magnetic material, the exciting coil, the bias, and the yoke, The leakage flux can be reduced significantly. The term “compressible” means that the high-permeability material should not be solid or liquid that fills the gap. With such a structure, since these high magnetic permeability materials are incompressible, the magnetostrictive actuator will self-destruct when it is movable. Some magnetostrictive actuators do not have a bias magnet, and the magnetic circuit in this case is composed of a magnetostrictive material, a bias, and a yoke. In consideration of this, the configuration of the present invention (claim) includes this configuration.
[実施例] 以下本発明の実施例を第1図を参照して説明する。同
図は,従来の技術の欄で説明した磁歪アクチュエータの
例図(第2図)を基礎としている。従って,第1図と第
2図との磁歪アクチュエータは,その構成部品の名称及
びその符号は同一である。従い,以下の実施例は,従来
の技術の欄で説明した構成については重複を避け,本実
施例に係わる付加構成についてのみ説明する。[Embodiment] An embodiment of the present invention will be described below with reference to FIG. This figure is based on the example diagram (FIG. 2) of the magnetostrictive actuator described in the section of the prior art. Therefore, the magnetostrictive actuators in FIGS. 1 and 2 have the same names and reference numerals of their constituent parts. Therefore, in the following embodiments, the configurations described in the section of the prior art will not be duplicated, and only the additional configurations according to this embodiment will be described.
実施例は,第1図において,筺体又は筒体等の密閉体
(シリンダ2)と,この密閉体(シリンダ2)に内蔵さ
れた磁歪材3,励磁コイル6,バイアス磁石7及びヨーク8
1,82と,前記磁歪材3の運動(伸縮運動x)を前記密閉
体(シリンダ2)から外部に出力するラム4とを備える
磁歪アクチュエータ1において,磁歪材3と,励磁コイ
ル6と,バイアス磁石7と,ヨーク81,82とで形成され
る磁気回路のギャップ31,32,33,51,71内に可圧縮状(本
実施例では粉体)に高透磁率材(本実施例ではフェライ
ト粉体)を介在せしめた構成とした。上記ギャップ31,3
2,33,51,71は,符号32,33は磁歪材3の長手方向両端の
ギャップを指し,符号31は磁歪材3の長手方向側面全周
のギャップを指し,符号51,71はその他のギャップを指
す。最後のその他のギャップ61,71とは,符号51はボビ
ン6とヨーク82とギャップを指し,符号71はバイアス磁
石7とヨーク82とギャップを指す。次に,他の実施例を
述べれば,これらギャップ31,32,33,51,71内に介在せし
める高透磁率材は,例えば容積率が100%でない磁性流
体,磁性粉又はこの磁性粉を添加したゴム等の弾性体で
あってもよい。要は可圧縮状を示す状態に介在せしめた
高等磁率材であればよい。尚,この高透磁率材は,渦電
流損を小さくするため,即ち,磁束を流れ易くし,漏れ
磁束を少なくするため,電気抵抗の高いものを選定し使
用すべきである。更にその他の実施例としては,作用の
欄で説明したように,バイアス磁石を備えない磁歪アク
チュエータについては,上記実施例のギャップ71を除い
た構成であってもよい。In the embodiment, as shown in FIG. 1, a hermetically sealed body (cylinder 2) such as a housing or a cylinder, a magnetostrictive material 3, an exciting coil 6, a bias magnet 7 and a yoke 8 built in the hermetically sealed body (cylinder 2).
1, 82, and a ram 4 that outputs the movement (expansion / contraction movement x) of the magnetostrictive material 3 from the sealed body (cylinder 2) to the outside, a magnetostrictive material 3, an exciting coil 6, and a bias. In the gaps 31, 32, 33, 51, 71 of the magnetic circuit formed by the magnet 7 and the yokes 81, 82, a high-permeability material (ferrite in this embodiment) is formed into a compressible state (powder in this embodiment). (Powder) was interposed. Gap 31,3 above
2, 33, 51, 71, reference numerals 32, 33 indicate gaps at both ends in the longitudinal direction of the magnetostrictive material 3, reference numeral 31 indicates gaps around the entire longitudinal side surface of the magnetostrictive material 3, and reference numerals 51, 71 indicate other gaps. Refers to the gap. The other gaps 61 and 71 at the end refer to the bobbin 6, the yoke 82 and the gap, and the reference numeral 71 to the bias magnet 7, the yoke 82 and the gap. Next, to describe another embodiment, the high magnetic permeability material to be interposed in these gaps 31, 32, 33, 51, 71 is, for example, a magnetic fluid whose volume ratio is not 100%, magnetic powder or this magnetic powder is added. It may be an elastic body such as rubber. The point is that any material having a high magnetic susceptibility, which is interposed in a compressible state, may be used. In addition, in order to reduce the eddy current loss, that is, to facilitate the flow of the magnetic flux and reduce the leakage flux, this high magnetic permeability material should be selected and used with high electric resistance. Further, as another embodiment, as described in the section of the operation, the magnetostrictive actuator not including the bias magnet may have a configuration in which the gap 71 of the above embodiment is removed.
実験例 上記実施例の内,いくつかの実験成績を述べる。実験
は,第1図の磁歪アクチュエータにおいて,ギャップ3
1,32,33,51,71に何も介在させない構成のもの(即ち,
従来の技術による磁歪アクチュエータ)Aと,実施例に
基づき,ギャップ31,32,33,51,71にフェライト粉体を介
在させたものBと,ギャップ31,32,33,51,71にパーマロ
イCを介在させたものCとにおける,磁歪アクチュエー
タ(正確には磁歪材3の)作動効率の向上性(相対値)
を調べたものである。試験成績を次表に指す。Experimental Examples Some experimental results of the above examples will be described. The experiment was conducted on the magnetostrictive actuator shown in FIG.
A configuration in which nothing is inserted in 1,32,33,51,71 (that is,
A magnetostrictive actuator according to the prior art) A, based on the embodiment, B having ferrite powder interposed in the gaps 31, 32, 33, 51, 71 and permalloy C in the gaps 31, 32, 33, 51, 71. Improvement of operating efficiency (relative value) of magnetostrictive actuator (more precisely, magnetostrictive material 3) in the case of interposing C
Is the one that was investigated. The test results are shown in the following table.
実験では,上表に示す通り,従来の磁歪アクチュエー
タAに対し,実施例に係わる磁歪アクチュエータB,Cの
作動効率が大幅に改善されている。 In the experiment, as shown in the above table, the operation efficiency of the magnetostrictive actuators B and C according to the embodiment is greatly improved over the conventional magnetostrictive actuator A.
[発明の効果] 以上説明したように,本発明に係わる磁歪アクチュエ
ータは,磁歪アクチュエータの磁気回路のギャップ内に
可圧縮状に高透磁率材を介在せしめる構成としたため,
その作動において,ギャップでの漏れ磁束を減少せしめ
ることができる。即ち,ギャップ変動に左右されない磁
歪アクチュエータを提供することができる。更に述べれ
ば,作動効率を大幅に改善した磁歪アクチュエータを提
供することができる。[Effects of the Invention] As described above, the magnetostrictive actuator according to the present invention has a structure in which a high-permeability material is interposed in a compressible manner in the gap of the magnetic circuit of the magnetostrictive actuator.
In its operation, the leakage flux in the gap can be reduced. That is, it is possible to provide a magnetostrictive actuator that is not affected by gap fluctuation. Furthermore, it is possible to provide a magnetostrictive actuator with significantly improved operating efficiency.
第1図は本発明に係わる磁歪アクチュエータの一実施例
の断面図,第2図は従来の磁歪アクチュエータ例の断面
図である。 1……磁歪アクチュエータ 2……シリンダ 3……磁歪材 31,32,33,51,71……ギャップ(高透磁率材) 4……ラム 5……ボビン 6……コイル 7……バイアス磁石 81,82……ヨーク 9……リテーナ 10……弾性体 x……磁歪変位FIG. 1 is a sectional view of an embodiment of a magnetostrictive actuator according to the present invention, and FIG. 2 is a sectional view of an example of a conventional magnetostrictive actuator. 1 ... Magnetostrictive actuator 2 ... Cylinder 3 ... Magnetostrictive material 31,32,33,51,71 ... Gap (high magnetic permeability material) 4 ... Ram 5 ... Bobbin 6 ... Coil 7 ... Bias magnet 81 , 82 …… Yoke 9 …… Retainer 10 …… Elastic body x …… Magnetic strain displacement
Claims (1)
内蔵された磁歪材,励磁コイル,バイアス磁石及びヨー
クと,前記磁歪材の運動を前記密閉体から外部に出力す
るラムとを備える磁歪アクチュエータにおいて,前記磁
歪材と前記励磁コイルと前記バイアス磁石と前記ヨーク
とで形成される磁気回路のギャップ内に可圧縮状の高透
磁率材を介在せしめた構成を特徴とする磁歪アクチュエ
ータ。1. A hermetically sealed body such as a casing or a cylinder, a magnetostrictive material, an exciting coil, a bias magnet and a yoke built in the hermetically sealed body, and a ram for outputting the movement of the magnetostrictive material from the hermetically sealed body to the outside. A magnetostrictive actuator comprising a magnetostrictive material, the exciting coil, the bias magnet and the yoke, and a compressible high-permeability material interposed in a gap of a magnetic circuit formed by the magnetostrictive material, the exciting coil, the bias magnet and the yoke. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1309462A JP2523027B2 (en) | 1989-11-29 | 1989-11-29 | Magnetostrictive actuator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1309462A JP2523027B2 (en) | 1989-11-29 | 1989-11-29 | Magnetostrictive actuator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03169087A JPH03169087A (en) | 1991-07-22 |
| JP2523027B2 true JP2523027B2 (en) | 1996-08-07 |
Family
ID=17993285
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1309462A Expired - Lifetime JP2523027B2 (en) | 1989-11-29 | 1989-11-29 | Magnetostrictive actuator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2523027B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004298751A (en) * | 2003-03-31 | 2004-10-28 | Tdk Corp | Ultrasonic vibrator and ultrasonic vibration apparatus using same |
-
1989
- 1989-11-29 JP JP1309462A patent/JP2523027B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH03169087A (en) | 1991-07-22 |
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