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JP2539998B2 - Shape measuring instruments - Google Patents
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JP2539998B2 - Shape measuring instruments - Google Patents

Shape measuring instruments

Info

Publication number
JP2539998B2
JP2539998B2 JP4275880A JP27588092A JP2539998B2 JP 2539998 B2 JP2539998 B2 JP 2539998B2 JP 4275880 A JP4275880 A JP 4275880A JP 27588092 A JP27588092 A JP 27588092A JP 2539998 B2 JP2539998 B2 JP 2539998B2
Authority
JP
Japan
Prior art keywords
measured
stylus
feed screw
screw shaft
slider
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP4275880A
Other languages
Japanese (ja)
Other versions
JPH06129810A (en
Inventor
伸行 濱
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Corp
Original Assignee
Mitutoyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitutoyo Corp filed Critical Mitutoyo Corp
Priority to JP4275880A priority Critical patent/JP2539998B2/en
Publication of JPH06129810A publication Critical patent/JPH06129810A/en
Application granted granted Critical
Publication of JP2539998B2 publication Critical patent/JP2539998B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、形状測定機に関する。
詳しくは、測定アームの先端に設けられたスタイラスを
被測定物の表面に接触させながら移動させ、そのときの
測定アームの揺動量から被測定物の輪郭形状などを測定
する形状測定機において、スタイラスを被測定物の任意
の測定開始点に迅速に位置させることができるようにし
た形状測定機に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a shape measuring machine.
For details, move the stylus provided at the tip of the measuring arm while contacting the surface of the object to be measured, and measure the contour shape of the object from the amount of swing of the measuring arm at that time. The present invention relates to a shape measuring machine capable of quickly positioning an object to be measured at an arbitrary measurement starting point.

【0002】[0002]

【背景技術】従来、被測定物の輪郭形状などを測定する
形状測定機としては、図7に示す構造が知られている。
同図において、基台1上には支柱2が立設されている。
支柱2には図示しない送りねじ軸を介して昇降部材3が
上下方向(Z方向)へ昇降自在に設けられ、この昇降部
材3には揺動部材4が支柱2の軸線に対して直交する軸
を中心として角度(θ)調整可能に取り付けられてい
る。揺動部材4には、内部にモータ5Aの駆動または操
作ハンドル5Bの回動操作によつて回転される送りねじ
軸6が設けられている。送りねじ軸6には、その送りね
じ軸6に螺合するナットなどの連結部材7を介して筐体
8が左右方向(X方向)へ移動自在に吊り下げ支持され
ている。筐体8には、先端にスタイラス9を有する測定
アーム10が上下方向へ揺動自在に支持されているとと
もに、その測定アーム10の揺動量を電気的に検出する
差動トランス(図示省略)が設けられている。なお、2
Aは昇降部材3を上下方向(Z方向)へ昇降させる操作
ハンドルである。
2. Description of the Related Art Conventionally, a structure shown in FIG. 7 is known as a shape measuring machine for measuring the contour shape of an object to be measured.
In the figure, a column 2 is erected on a base 1.
An elevating member 3 is provided on the column 2 so as to be vertically movable (Z direction) via a feed screw shaft (not shown), and an oscillating member 4 is provided on the elevating member 3 so as to be orthogonal to the axis of the column 2. It is attached so that the angle (θ) can be adjusted around. Inside the swing member 4, a feed screw shaft 6 that is rotated by driving the motor 5A or rotating the operation handle 5B is provided. A housing 8 is suspended from and supported by the feed screw shaft 6 via a connecting member 7 such as a nut screwed to the feed screw shaft 6 so as to be movable in the left-right direction (X direction). A measurement arm 10 having a stylus 9 at its tip is swingably supported in the housing 8 in the vertical direction, and a differential transformer (not shown) for electrically detecting the swing amount of the measurement arm 10 is provided. It is provided. In addition, 2
A is an operation handle for moving the elevating member 3 up and down (Z direction).

【0003】測定に当たっては、基台1上に被測定物W
を載置するとともに、その被測定物Wの測定開始点にス
タイラス9を位置させる。これには、予め、被測定物W
の測定面の高さよりスタイラス9が高くなるように昇降
部材3を上昇させ、この状態において、モータ5Aの駆
動または操作ハンドル5Bの回動操作によって筐体8を
X方向へ移動さる。やがて、スタイラス9が被測定物W
の測定開始点の真上に位置したら、昇降部材3を下降さ
せてスタイラス9を被測定物Wの測定開始点に接触させ
る。こののち、モータ5Aを駆動させると、送りねじ軸
6の回転に伴って筐体8がX方向へ移動される。筐体8
がX方向へ移動すると、スタイラス9が被測定物Wの表
面輪郭形状の凹凸に応じて上下に変位するので、測定ア
ーム10が揺動される。その結果、その測定アーム10
の揺動量が図示しない差動トランスによって検出される
から、その揺動量から被測定物Wの輪郭形状などを測定
することができる。
In the measurement, the object to be measured W is placed on the base 1.
And the stylus 9 is positioned at the measurement start point of the object W to be measured. For this, the object to be measured W
The elevating member 3 is raised so that the stylus 9 is higher than the height of the measurement surface of (1), and in this state, the housing 8 is moved in the X direction by driving the motor 5A or rotating the operation handle 5B. Eventually, the stylus 9 becomes the measured object W.
When it is located right above the measurement start point of, the elevating member 3 is lowered to bring the stylus 9 into contact with the measurement start point of the object W to be measured. After that, when the motor 5A is driven, the housing 8 is moved in the X direction with the rotation of the feed screw shaft 6. Case 8
When is moved in the X direction, the stylus 9 is displaced up and down according to the unevenness of the surface contour shape of the object to be measured W, so that the measuring arm 10 is swung. As a result, the measuring arm 10
Since the amount of swing of the object is detected by a differential transformer (not shown), the contour shape of the object to be measured W can be measured from the amount of swing.

【0004】[0004]

【発明が解決しようとする課題】ところが、従来の形状
測定機の構造では、スタイラス9を被測定物Wの測定開
始点に位置させるに当たって、筐体8のX方向への移動
をモータ5Aの駆動によって行うと、スタイラス9を被
測定物Wの測定開始点近傍に迅速に位置させることがで
きるものの、モータ5の慣性などによってスタイラス9
を被測定物Wの測定開始点に正確に位置させることが困
難となる。一方、筐体8のX方向への移動を操作ハンド
ル5Bの回動操作によって行うと、スタイラス9を被測
定物Wの測定開始点に正確に位置させることができるも
のの、操作ハンドル5Bの回動操作に時間がかかり能率
的な測定が行えないという欠点がある。
However, in the structure of the conventional shape measuring machine, when the stylus 9 is positioned at the measurement starting point of the object to be measured W, the movement of the housing 8 in the X direction is driven by the motor 5A. Although the stylus 9 can be quickly positioned in the vicinity of the measurement start point of the object to be measured W, the stylus 9 can be moved by the inertia of the motor 5 or the like.
It becomes difficult to accurately position the measurement object W at the measurement start point. On the other hand, when the movement of the housing 8 in the X direction is performed by the rotation operation of the operation handle 5B, the stylus 9 can be accurately positioned at the measurement start point of the measured object W, but the rotation of the operation handle 5B. It has a drawback that it takes time to operate and efficient measurement cannot be performed.

【0005】また、スタイラス9を損傷させずに被測定
物Wの測定開始点に位置させるには、筐体8のX方向へ
の移動に先立って、被測定物Wの測定面の高さよりスタ
イラス9が高くなるように昇降部材3を上昇させる作業
が必要である上、スタイラス9を被測定物Wの測定開始
点の真上に位置させたのち、昇降部材3を下降させてス
タイラス9を被測定物Wの測定開始点に接触させる作業
が必要であるから、この点からも能率的な測定が行えな
い。
In order to position the object to be measured W at the measurement starting point without damaging the stylus 9, prior to the movement of the casing 8 in the X direction, the stylus is moved from the height of the measuring surface of the object to be measured W. It is necessary to raise the lifting / lowering member 3 so that the height of the stylus 9 becomes higher. Moreover, after the stylus 9 is positioned right above the measurement starting point of the object W to be measured, the lifting / lowering member 3 is lowered to cover the stylus 9. Since it is necessary to bring the measurement object W into contact with the measurement start point, efficient measurement cannot be performed from this point as well.

【0006】ここに、本発明の目的は、このような従来
の欠点を解消し、スタイラスを損傷させることなく、被
測定物の任意の測定開始点に迅速に位置させることがで
きる形状測定機を提供することにある。
An object of the present invention is to solve the above-mentioned conventional drawbacks and to provide a shape measuring machine capable of quickly positioning an object to be measured at an arbitrary measurement starting point without damaging the stylus. To provide.

【0007】[0007]

【課題を解決するための手段】そのため、本発明の形状
測定機は、ベースにガイドシャフトを介してスライダを
移動自在に支持し、このスライダに先端に被測定物の表
面に接するスタイラスを有する測定アームを揺動自在に
支持するとともに、この測定アームの揺動を検出する検
出手段を設けた形状測定機において、前記ベースに送り
ねじ軸を回転自在かつ前記ガイドシャフトと平行に支持
し、前記スライダに前記送りねじ軸に対して係合しその
送りねじ軸の回転に伴ってスライダをガイドシャフトに
沿って移動させる係合部材を設けるとともに、この係合
部材の送りねじ軸への係合を解除するとともに前記スタ
イラスが被測定物の表面から離れる方向へ前記測定アー
ムを揺動させる解除手段を設けた、ことを特徴とする。
Therefore, in the shape measuring machine of the present invention, a slider is movably supported by a base via a guide shaft, and a measuring instrument having a stylus at the tip of the slider is in contact with the surface of the object to be measured. In a shape measuring machine having an arm swingably supported and a detection means for detecting the swing of the measuring arm, a feed screw shaft is rotatably supported on the base in parallel with the guide shaft, and the slider is provided. Is provided with an engaging member that engages with the feed screw shaft and moves the slider along the guide shaft as the feed screw shaft rotates, and disengages the engaging member from the feed screw shaft. In addition, release means for swinging the measuring arm in a direction in which the stylus moves away from the surface of the object to be measured is provided.

【0008】[0008]

【作用】測定に当たって、スタイラスを被測定物の測定
開始点に位置させるには、解除手段によって係合部材の
送りねじ軸への係合を解除するとともに、スタイラスが
被測定物の表面から離れる方向へ測定アームを揺動させ
る。すると、係合部材は送りねじ軸に対して係合が解除
された状態になるから、スライダを手動でガイドシャフ
トに沿って移動させ、スタイラスを被測定物の測定開始
点に迅速に位置させることができる。このとき、スタイ
ラスも被測定物の表面から離れるているから、スライダ
を移動させてもスタイラスが被測定物の凹凸などに引っ
掛かって損傷することがない。こののち、解除手段の作
動を解除する。すると、係合部材が送りねじ軸に係合さ
れ、かつ、測定アームの揺動によってスタイラスが被測
定物の測定開始点に接した状態となるから、この状態に
おいて、スライダを移動させながら測定を行うことがで
きる。
In the measurement, in order to position the stylus at the measurement starting point of the object to be measured, the releasing means disengages the engaging member from the feed screw shaft and the stylus moves away from the surface of the object to be measured. Swing the measuring arm to. Then, the engaging member is disengaged from the feed screw shaft, so that the slider can be manually moved along the guide shaft to quickly position the stylus at the measurement starting point of the measured object. You can At this time, since the stylus is also separated from the surface of the object to be measured, even if the slider is moved, the stylus is not caught by the unevenness of the object to be measured and damaged. After that, the operation of the releasing means is released. Then, the engaging member is engaged with the feed screw shaft, and the swing of the measuring arm brings the stylus into contact with the measurement starting point of the object to be measured.In this state, the measurement is performed while moving the slider. It can be carried out.

【0009】[0009]

【実施例】以下、本発明の形状測定機について好適な実
施例を挙げ、添付図面を参照しながら詳細に説明する。
図1は本実施例の形状測定機の外観を示す斜視図であ
る。同図において、1は基台、2は上端に操作ハンドル
2Aを有する支柱、3は昇降部材、4は揺動部材であ
る。揺動部材4の正面には本体ケース11が取り付けら
れている。本体ケース11には、一端面側に先端にスタ
イラス13を有する測定アーム12が、他端面側に測定
アーム12をX方向へ移動させる操作ハンドル15がそ
れぞれ設けられているとともに、正面に測定アーム12
の移動ストローク位置を示すストローク表示部17およ
び操作つまみ18,19がそれぞれ設けられている。な
お、操作つまみ19は移動ストロークの範囲を調整する
つまみである。
Preferred embodiments of the shape measuring machine of the present invention will be described below in detail with reference to the accompanying drawings.
FIG. 1 is a perspective view showing the external appearance of the shape measuring machine of this embodiment. In the figure, 1 is a base, 2 is a column having an operation handle 2A at the upper end, 3 is a lifting member, and 4 is a swinging member. A body case 11 is attached to the front surface of the swing member 4. The main body case 11 is provided with a measuring arm 12 having a stylus 13 at the tip on one end surface side, an operation handle 15 for moving the measuring arm 12 in the X direction on the other end surface side, and the measuring arm 12 on the front surface.
A stroke display section 17 for indicating the moving stroke position and operation knobs 18 and 19 are respectively provided. The operation knob 19 is a knob for adjusting the range of the movement stroke.

【0010】図2は図1のII−II線断面図、図3は図2
の III−III 線断面図、図4は要部を示す斜視図であ
る。これらの図に示す如く、本体ケース11内には、ベ
ース21を介してサブガイドシャフト22とメインガイ
ドシャフト23とが上下にかつ互いに平行に支持されて
いるとともに、これらの前方位置に前記操作ハンドル1
5の回動操作およびモータ(図示省略)の駆動のいずれ
かによって回転される送りねじ軸24がこれらのガイド
シャフト22,23と平行に支持されている。ガイドシ
ャフト22,23にはスライダ25が移動自在に支持さ
れている。スライダ25は、前記ガイドシャフト22,
23に摺動自在に設けられた平面コ形の第1の部材25
Aと、この第1の部材25Aの間に固定された第2の部
材25Bとから構成されている。
FIG. 2 is a sectional view taken along line II-II of FIG. 1, and FIG.
III-III line sectional view of FIG. 4, and FIG. 4 is a perspective view showing a main part. As shown in these figures, a sub guide shaft 22 and a main guide shaft 23 are vertically and parallelly supported in a main body case 11 via a base 21, and the operation handle is provided at a front position thereof. 1
A feed screw shaft 24, which is rotated by any one of the rotating operation of 5 and the driving of a motor (not shown), is supported in parallel with the guide shafts 22 and 23. A slider 25 is movably supported on the guide shafts 22 and 23. The slider 25 includes the guide shaft 22,
23 is a planar U-shaped first member 25 slidably provided on
A and a second member 25B fixed between the first member 25A and the second member 25B.

【0011】前記第2の部材25Bには、その下部に前
記測定アーム12の基端部側が上下方向へ揺動自在に支
持されているとともに、上部に検出手段を構成する差動
トランス26が固定されている。測定アーム12の基端
部側には、スタイラス13の被測定物に対する接触圧を
低く設定するために、バランスウェイト27が取り付け
られている。前記差動トランス26は、第2の部材25
Bの上部に固定された外筒26Aと、この外筒26A内
に固定されたコイル26Bと、このコイル26B内に前
記ガイドシャフト22,23の軸線方向へ移動自在に設
けられたコア26Cとから構成されている。コア26C
の軸と前記測定アーム12の基端部側(揺動支点よりバ
ランスウェイト27側の部分)とは、連結部材28,2
9によって連結されている。従って、測定アーム12が
揺動すると、連結部材29,28を介してコア26Cが
ガイドシャフト22,23の軸線方向へ移動する結果、
測定アーム12の揺動量が差動トランス26によって検
出される。
On the lower part of the second member 25B, the base end side of the measuring arm 12 is swingably supported in the vertical direction, and on the upper part, a differential transformer 26 constituting a detecting means is fixed. Has been done. A balance weight 27 is attached to the base end side of the measuring arm 12 in order to set a low contact pressure of the stylus 13 on the object to be measured. The differential transformer 26 includes the second member 25.
An outer cylinder 26A fixed to the upper part of B, a coil 26B fixed in the outer cylinder 26A, and a core 26C movably provided in the coil 26B in the axial direction of the guide shafts 22 and 23. It is configured. Core 26C
And the base end side of the measurement arm 12 (the portion closer to the balance weight 27 than the swing fulcrum) are the connecting members 28, 2.
They are connected by 9. Therefore, when the measuring arm 12 swings, the core 26C moves in the axial direction of the guide shafts 22 and 23 via the connecting members 29 and 28,
The swing amount of the measuring arm 12 is detected by the differential transformer 26.

【0012】前記第1の部材25Aには、前記送りねじ
軸24に対して係合しその送りねじ軸24の回転に伴っ
てスライダ25をガイドシャフト22,23に沿って移
動させる係合部材31が設けられているとともに、この
係合部材31の送りねじ軸24への係合を解除するとと
もに前記スタイラス13が被測定物Wの表面から離れる
方向へ前記測定アーム12を揺動させる解除手段41が
設けられている。係合部材31は、前記第1の部材24
Aにブラケット32を介して上下方向へ回動自在に設け
られ下面に前記送りねじ軸24の上側から螺合するめね
じ部分33Aを有する半割ナット33と、この半割ナッ
ト33の先端に取り付けられ垂直面の両側にばね係止片
34A,34Aを有するL字状の当接部材34とから構
成されている。ばね係止片34A,34Aと前記第1の
部材25Aの下面から前方へ向かってL字状に突出した
ブラケット35のばね受けピン36との間には、ばね3
7が張設されている。
An engaging member 31 that engages with the feed screw shaft 24 and moves the slider 25 along the guide shafts 22 and 23 as the feed screw shaft 24 rotates. And a releasing means 41 for releasing the engagement of the engaging member 31 with the feed screw shaft 24 and swinging the measuring arm 12 in a direction in which the stylus 13 moves away from the surface of the object W to be measured. Is provided. The engaging member 31 is the first member 24.
A half nut 33 is provided rotatably in the vertical direction via a bracket 32 and has a female thread portion 33A on the lower surface to be screwed from the upper side of the feed screw shaft 24, and is attached to the tip of the half nut 33. It is composed of an L-shaped contact member 34 having spring locking pieces 34A, 34A on both sides of the vertical surface. Between the spring locking pieces 34A, 34A and the spring receiving pin 36 of the bracket 35 protruding forward from the lower surface of the first member 25A in an L shape, the spring 3 is provided.
7 is stretched.

【0013】前記解除手段41は、前記ブラケット35
の垂直片に前記送りねじ軸24の軸線に対して直交して
かつ回転自在に支持され先端に前記操作つまみ18を有
する回動軸44と、この回動軸44の基端部に固定され
外周カム面が前記係合部材31の当接部材34に当接す
るとともに偏心位置にピン45を有する偏心カム46
と、先端が偏心カム46のピン45が移動する軌跡内に
臨ませられかつ基端が前記連結部材29に固定されたレ
バー47とから構成されている。レバー47は、前記連
結部材29の下部に固定されたL字状の第1のレバー4
7Aと、この第1のレバー47Aの先端から上方へ向か
ってL字状に折曲され先端がピン45が移動する軌跡内
に臨ませられた第2のレバー47Bとから構成されてい
る。なお、通常の測定時において測定アーム12が揺動
しても、第2のレバー47Bの先端が周辺の部品、例え
ば、回転軸44などに干渉しないように配置されてい
る。
The releasing means 41 includes the bracket 35.
A rotary shaft 44 that is rotatably supported by the vertical piece of the feed screw shaft 24 at right angles to the axis of the feed screw shaft 24, and has the operation knob 18 at the tip, An eccentric cam 46 whose cam surface abuts on the abutting member 34 of the engaging member 31 and which has a pin 45 at an eccentric position.
And a lever 47 whose distal end faces the trajectory of the pin 45 of the eccentric cam 46 and whose proximal end is fixed to the connecting member 29. The lever 47 is an L-shaped first lever 4 fixed to the lower portion of the connecting member 29.
7A and a second lever 47B that is bent upward from the tip of the first lever 47A in an L-shape so that the tip of the second lever 47B faces the locus along which the pin 45 moves. It should be noted that the tip of the second lever 47B is arranged so as not to interfere with peripheral parts such as the rotating shaft 44 even if the measuring arm 12 swings during normal measurement.

【0014】次に、本実施例の使用方法を説明する。測
定に当たって、まず、スタイラス13を被測定物Wの測
定開始点に位置させる。これには、解除手段41の操作
つまみ18を掴み時計方向へ回す。すると、偏心カム4
6によって係合部材31がばね37の付勢力に抗して上
方へ回動されていくとともに、ピン45がレバー47に
当接する。更に、操作つまみ18を同方向へ回していく
と、図6に示すごとく、係合部材31の送りねじ軸24
に対する係合が完全に解除され、かつ、測定アーム12
が揺動支点を中心として図6中時計方向へ揺動される。
つまり、スタイラス13が被測定物Wの測定表面から離
れる方向へ測定アーム12が揺動される。この状態にお
いて、操作つまみ18を掴んだままスライダ25を手動
でガイドシャフト22,23に沿って移動させ、スタイ
ラス13を被測定物Wの測定開始点の真上に位置させ
る。
Next, a method of using this embodiment will be described. In the measurement, first, the stylus 13 is positioned at the measurement start point of the object to be measured W. To do this, the operating knob 18 of the releasing means 41 is grasped and turned clockwise. Then, the eccentric cam 4
6, the engaging member 31 is rotated upward against the urging force of the spring 37, and the pin 45 contacts the lever 47. Further, when the operation knob 18 is rotated in the same direction, as shown in FIG. 6, the feed screw shaft 24 of the engaging member 31.
Is completely disengaged and the measuring arm 12
Is swung clockwise around the swing fulcrum in FIG.
That is, the measurement arm 12 is swung in the direction in which the stylus 13 moves away from the measurement surface of the object W to be measured. In this state, while holding the operation knob 18, the slider 25 is manually moved along the guide shafts 22 and 23 to position the stylus 13 right above the measurement starting point of the object W to be measured.

【0015】こののち、解除手段41の操作つまみ18
を前記とは逆に反時計方向へ回す。すると、前記とは逆
に、係合部材31がばね37の付勢力によって下方へ回
動されていくとともに、ピン45がレバー47から次第
に離れる方向へ回動されていく。これにより、図5に示
すごとく、係合部材31が送りねじ軸24に対して係合
され、かつ、測定アーム12が揺動支点を中心として図
5中反時計方向へ揺動される。つまり、スタイラス3が
被測定物Wの測定表面に接する方向へ測定アーム12が
揺動される。この状態において、被測定物Wの輪郭形状
などの測定を行う。
After that, the operating knob 18 of the releasing means 41
Contrary to the above, turn counterclockwise. Then, conversely to the above, the engaging member 31 is rotated downward by the urging force of the spring 37, and the pin 45 is rotated in a direction in which it is gradually separated from the lever 47. As a result, as shown in FIG. 5, the engaging member 31 is engaged with the feed screw shaft 24, and the measuring arm 12 is swung counterclockwise in FIG. 5 about the swing fulcrum. That is, the measurement arm 12 is swung in the direction in which the stylus 3 contacts the measurement surface of the object W to be measured. In this state, the contour shape of the object to be measured W is measured.

【0016】測定では、図示省略のモータを駆動させ
る。すると、送りねじ軸24が回転され、それに伴って
スライダ25がガイドシャフト22,23に沿って定速
度で移動されていく。スライダ25が同方向へ移動する
と、スタイラス3が被測定物Wの表面輪郭形状の凹凸に
応じて上下に変位するので、測定アーム12が揺動され
る。その結果、その測定アーム12の揺動量が差動トラ
ンス26によって検出されるから、その揺動量から被測
定物Wの表面輪郭形状などを測定することができる。
In the measurement, a motor (not shown) is driven. Then, the feed screw shaft 24 is rotated, and accordingly, the slider 25 is moved along the guide shafts 22 and 23 at a constant speed. When the slider 25 moves in the same direction, the stylus 3 is displaced up and down according to the unevenness of the surface contour shape of the object to be measured W, so that the measuring arm 12 is swung. As a result, since the swing amount of the measuring arm 12 is detected by the differential transformer 26, the surface contour shape or the like of the object to be measured W can be measured from the swing amount.

【0017】従って、本実施例によれば、ガイドシャフ
ト22,23と送りねじ軸24とを互いに平行に設ける
とともに、ガイドシャフト22,23に測定アーム12
を揺動自在に支持したスライダ25を移動自在に支持
し、このスライダ25に送りねじ軸24に対して係合し
その送りねじ軸24の回転に伴ってスライダ25をガイ
ドシャフト22,23に沿って移動させる係合部材31
を設けるとともに、この係合部材31の送りねじ軸24
への係合を解除するとともにスタイラス13が被測定物
Wの表面から離れる方向へ測定アーム12を揺動させる
解除手段41を設けたので、解除手段41によって係合
部材31の送りねじ軸24への係合を解除するととも
に、スタイラス13が被測定物Wの表面から離れる方向
へ測定アーム12を揺動させれば、スライダ25を手動
で任意の測定開始点に位置させることができる。
Therefore, according to this embodiment, the guide shafts 22 and 23 and the feed screw shaft 24 are provided in parallel with each other, and the guide shafts 22 and 23 are provided with the measuring arm 12.
A slider 25 that oscillates is movably supported, engages with the feed screw shaft 24 with the slider 25, and the slider 25 is guided along the guide shafts 22 and 23 as the feed screw shaft 24 rotates. Engaging member 31 to move by
And the feed screw shaft 24 of the engaging member 31.
Since the stylus 13 swings the measuring arm 12 in the direction in which the stylus 13 moves away from the surface of the object W to be measured, the releasing means 41 is provided. When the measurement arm 12 is swung in the direction in which the stylus 13 moves away from the surface of the object to be measured W while releasing the engagement of the slider 25, the slider 25 can be manually positioned at an arbitrary measurement start point.

【0018】つまり、係合部材31は送りねじ軸24に
対して係合が解除された状態にあるから、スライダ25
を手動でガイドシャフト22,23に沿って移動させ、
スタイラス13を被測定物Wの測定開始点に位置させる
ことができる。そのため、従来のモータの慣性などによ
って生じる煩雑なスタイラスの位置合わせ作業や、操作
ハンドルの回動操作に伴う非能率的な作業から測定者を
解放できる。しかも、スタイラス13も被測定物Wの表
面から離れるているから、スライダ25を移動させても
スタイラス13が被測定物の凹凸などに引っ掛かって損
傷することがない。
That is, since the engaging member 31 is disengaged from the feed screw shaft 24, the slider 25
Is manually moved along the guide shafts 22 and 23,
The stylus 13 can be positioned at the measurement start point of the object to be measured W. Therefore, the operator can be relieved from the complicated work of positioning the stylus caused by the inertia of the motor and the inefficient work of rotating the operating handle. Moreover, since the stylus 13 is also separated from the surface of the object to be measured W, even if the slider 25 is moved, the stylus 13 is not caught by the unevenness of the object to be measured or damaged.

【0019】また、解除手段41の作動を解除すると、
係合部材31が送りねじ軸24に係合され、かつ、測定
アーム12の揺動によってスタイラス13が被測定物W
の表面に接した状態となるから、この状態において、被
測定物のWの表面輪郭形状などを直ちに測定することが
できる。測定時には、モータの駆動によってスライダ2
5を定速度で移動させることができるから、高精度な測
定を行うことができる。
When the operation of the releasing means 41 is released,
The engaging member 31 is engaged with the feed screw shaft 24, and the stylus 13 is moved by the swing of the measuring arm 12 to be measured W.
In this state, the surface contour shape of the object to be measured W can be immediately measured. During measurement, the slider 2 is driven by the motor.
Since 5 can be moved at a constant speed, highly accurate measurement can be performed.

【0020】以上、本発明について好適な実施例を挙げ
て説明したが、本発明は、この実施例に限られるもので
なく、本発明の要旨を逸脱しない範囲において種々の改
良並びに設計の変更が可能である。例えば、係合部材3
1としては、上記実施例で述べた半割ナット33を1つ
用いたものに限らず、2つの半割ナットを送りねじ軸2
4に対して上下または両側から挟むように開閉可能に配
置したものでもよく、あるいは、一対のピンを送りねじ
軸24を挟むようにかつ谷に係合するように開閉可能に
設けるようにしたものでもよい。
Although the present invention has been described with reference to the preferred embodiment, the present invention is not limited to this embodiment, and various improvements and design changes can be made without departing from the gist of the present invention. It is possible. For example, the engagement member 3
No. 1 is not limited to the one using one half nut 33 described in the above embodiment, but two half nuts are used for the feed screw shaft 2.
4 may be arranged so that it can be opened and closed so as to be sandwiched from above and below or both sides, or a pair of pins that can be opened and closed so as to sandwich the feed screw shaft 24 and engage with the valley. But it's okay.

【0021】また、解除手段41としては、上記実施例
で述べた構造に限られるものでなく、係合部材31の送
りねじ軸24に対する係合を解除すると同時に測定アー
ム12を揺動できるものであればいずれでもよい。更
に、ガイドシャフトについても、上記実施例のように2
本の限られるものでなく、3本以上でもよい。断面形状
が円形でなければ、1本でもよい。
Further, the releasing means 41 is not limited to the structure described in the above-mentioned embodiment, but it can release the engagement of the engaging member 31 with the feed screw shaft 24 and simultaneously swing the measuring arm 12. Any one will do. Further, as for the guide shaft, as in the above embodiment, 2
The number of books is not limited and may be three or more. If the cross-sectional shape is not circular, it may be one.

【0022】また、上記実施例では、被測定物Wの輪郭
形状を測定する場合について説明したが、本発明の形状
測定機は、これに限らず、被測定物の表面粗さを測定す
る場合にも適用できる。
In the above embodiment, the case where the contour shape of the object to be measured W is measured has been described. However, the shape measuring machine of the present invention is not limited to this, and the case where the surface roughness of the object to be measured is measured. Can also be applied to.

【0023】[0023]

【発明の効果】以上の通り、本発明の形状測定機によれ
ば、スタイラスを損傷させることなく、被測定物の任意
の測定開始点に迅速に位置させることができるという効
果が期待できる。
As described above, according to the shape measuring instrument of the present invention, it is expected that the stylus can be quickly positioned at any measurement starting point without damaging the stylus.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例を示す斜視図である。FIG. 1 is a perspective view showing an embodiment of the present invention.

【図2】図1のII−II線断面図である。FIG. 2 is a sectional view taken along line II-II in FIG.

【図3】図2の III−III 線断面図である。FIG. 3 is a sectional view taken along line III-III of FIG. 2;

【図4】同上実施例の要部を示す斜視図である。FIG. 4 is a perspective view showing a main part of the embodiment.

【図5】同上実施例において係合部材が送りねじ軸と係
合した状態を示す図である。
FIG. 5 is a view showing a state in which the engaging member is engaged with the feed screw shaft in the embodiment.

【図6】同上実施例において係合部材の送りねじ軸に対
する係合が解除された状態を示す図である。
FIG. 6 is a view showing a state in which the engagement of the engaging member with the feed screw shaft is released in the embodiment.

【図7】従来の形状測定機を示す正面図である。FIG. 7 is a front view showing a conventional shape measuring machine.

【符号の説明】[Explanation of symbols]

12 測定アーム 13 スタイラス 21 ベース 22,23 ガイドシャフト 24 送りねじ軸 25 スライダ 26 差動トランス(検出手段) 31 係合部材 41 解除手段 12 Measuring Arm 13 Stylus 21 Base 22, 23 Guide Shaft 24 Feed Screw Shaft 25 Slider 26 Differential Transformer (Detecting Means) 31 Engaging Member 41 Releasing Means

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】ベースにガイドシャフトを介してスライダ
を移動自在に支持し、このスライダに先端に被測定物の
表面に接するスタイラスを有する測定アームを揺動自在
に支持するとともに、この測定アームの揺動を検出する
検出手段を設けた形状測定機において、 前記ベースに送りねじ軸を回転自在かつ前記ガイドシャ
フトと平行に支持し、前記スライダに前記送りねじ軸に
対して係合しその送りねじ軸の回転に伴ってスライダを
ガイドシャフトに沿って移動させる係合部材を設けると
ともに、この係合部材の送りねじ軸への係合を解除する
とともに前記スタイラスが被測定物の表面から離れる方
向へ前記測定アームを揺動させる解除手段を設けた、こ
とを特徴とする形状測定機。
1. A slider is movably supported by a base via a guide shaft, and a measuring arm having a stylus in contact with the surface of an object to be measured is swingably supported at the tip of the slider. In a shape measuring machine provided with a detecting means for detecting swinging, a feed screw shaft is rotatably supported on the base in parallel with the guide shaft, and the feed screw shaft is engaged with the slider with respect to the feed screw shaft. An engaging member for moving the slider along the guide shaft as the shaft rotates is provided, and the engaging member is disengaged from the feed screw shaft and the stylus moves away from the surface of the object to be measured. A shape measuring machine characterized by comprising a releasing means for swinging the measuring arm.
JP4275880A 1992-10-14 1992-10-14 Shape measuring instruments Expired - Fee Related JP2539998B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4275880A JP2539998B2 (en) 1992-10-14 1992-10-14 Shape measuring instruments

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4275880A JP2539998B2 (en) 1992-10-14 1992-10-14 Shape measuring instruments

Publications (2)

Publication Number Publication Date
JPH06129810A JPH06129810A (en) 1994-05-13
JP2539998B2 true JP2539998B2 (en) 1996-10-02

Family

ID=17561724

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4275880A Expired - Fee Related JP2539998B2 (en) 1992-10-14 1992-10-14 Shape measuring instruments

Country Status (1)

Country Link
JP (1) JP2539998B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9441715B2 (en) 2013-09-24 2016-09-13 Mitutoyo Corporation Moving mechanism and form measuring apparatus

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Publication number Priority date Publication date Assignee Title
JP3443050B2 (en) 1999-10-21 2003-09-02 株式会社ミツトヨ Attitude adjustment device
JP2005300348A (en) 2004-04-12 2005-10-27 Mitsutoyo Corp Sensor signal circuit and measuring machine
JP6122312B2 (en) 2013-02-28 2017-04-26 株式会社ミツトヨ Shape measuring instruments
JP6250443B2 (en) * 2014-03-19 2017-12-20 株式会社ミツトヨ Shape measuring machine and position adjustment method thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9441715B2 (en) 2013-09-24 2016-09-13 Mitutoyo Corporation Moving mechanism and form measuring apparatus
DE102014013883B4 (en) 2013-09-24 2023-08-31 Mitutoyo Corporation movement mechanism and form measuring device

Also Published As

Publication number Publication date
JPH06129810A (en) 1994-05-13

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