JP2544288B2 - Optical length measuring device - Google Patents

Description

Detailed Description of the Invention

[0001]

[Industrial application] A projection image is formed on the surface to be measured of a work by a projection unit arranged on one side of the work, and the reflection image is observed by an observation unit provided on the other side, and the work is moved. The present invention relates to an optical length measuring device that captures a plurality of measured surfaces with an observation unit and measures the moving distance of the work as a distance between the plurality of measured surfaces.

[0002]

2. Description of the Related Art As an optical length measuring instrument, there is a tool microscope shown in FIG.

The objective lens 4 and the optical axis are arranged in two directions (1-
2) and (1-3), a branching means 5 for branching, an eyepiece or camera observation section 6, and an epi-illumination light source 7.

External length of the object to be measured 10 (hereinafter referred to as work)
When measuring the length of (Iro), the branching means 5 and the objective lens 4 are first provided from the epi-illumination light source 7 arranged in the branch optical axis direction (3).
Work 10 illuminated by epi-illumination light 8 emitted through
While observing the surface through the objective lens 4 with the observing section 6 arranged in the optical axis direction (2), as shown by the observing light 9 shown in FIG. Work 10 is set to match.

Next, the movable table 11 is moved and the other end face B of the work 10 is aligned with the optical axis (1-2) while observing in the same manner. Although not shown, the moving amount of the moving table 11 (moving amount of the work 10) at that time was measured by a linear scale or the like, and the length of the work 10 (outer length length I / O) was measured by the moving amount.

The branching means 5 for branching the optical axis (1-2) is not limited to the illustrated half mirror, but a prism or the like has also been used. Further, the epi-illumination light source 7 of the epi-illumination light source 7 through the objective lens 4 is irradiated so as to illuminate a relatively wide range (the range of the viewing angle of the observation unit 6 or more) in order to illuminate the surface of the work 10. The position was set. White light was selected as the light source, and incandescent bulbs and fluorescent lamps were selected.

Next, the basic structure of the present invention is
An optical length measuring device for measuring between the outer wall surfaces substantially parallel to the (1-2) direction and between the inner wall surfaces of the holes formed in the work will be described with reference to FIGS. 6 to 8.

A projection light source 14 including an incandescent lamp, a condenser lens and a green filter, and a projection pattern 17 (projection pattern forming member 1) having a dotted straight line pattern shown in FIG.
3), the projection lens 12, the moving table 11, the objective lens 4, the branching unit 5, and the optical axis position branched as the observing unit (observing unit 6) to the eyepiece device 15 and the camera device (CC), respectively.
D etc.) 16 and.

The operation will now be described with an example in which the work 10 is used as a ring gauge and its inner diameter is measured.

The projection pattern 17, which is irradiated by the projection light source 14 and formed by passing through the projection pattern forming member 13, is imaged on the inner wall surface (d) of the work 10 by the projection lens 12. The projected reflected light 18 of the formed image is the objective lens 4 and the branching means 5.
With, the camera device 16 and the eyepiece device 15 can be observed as an observation image 19 of FIG.

Now, the inner wall surface (d) of the workpiece 10 is the optical axis (1-
When it matches with 2), the brightness is halved, but it is observed at the center of the screen by the projection reflected light 18 as shown in FIG.

Therefore, after the moving table 11 is set so that the observed image 19 is correctly positioned in the center (after the initial position is set), the inner wall surface of the opposite workpiece 10 is opposed.
When the moving table 11 is moved so that the observation image 19 of (c) is correctly positioned in the center, and the moving amount of the moving table 11 is measured, this measured value itself is the length of the inner wall surface (i) of the workpiece 10. That is, the inner diameter is measured.

The projection pattern forming member 13, the projection lens 12,
Objective lens 4, branching means 5, eyepiece device 15, camera device
By fixing the relative position of the optical system consisting of 16 and moving it in the direction of the optical axis (1-2), an arbitrary inner diameter (for example, a hard axis) in the height direction of the wall surface of the work 10 (optical axis 1-2 direction) is obtained. In addition to d, it is possible to measure the inner diameter at different positions such as a torch.

Since the above-mentioned wall surface observes a reflection image,
It is desirable that the surface is approximately parallel (within ± 2 °) to the optical axis (1-2).

The projection light source 14 is a short-wavelength green light source for accurate measurement.

In the description, the inner diameter has been described, but the outer shape of the work can be measured by the same operation.

With this construction, not only the inner and outer diameters of the workpiece can be measured over the entire wall surface without contact, but also the inner diameter of a small hole of 1 mm or less, which is difficult to measure with other measuring instruments, has a repeatability (standard deviation) of 0.25 μ. Can be measured accurately.

[0018]

When the optical length measuring apparatus as described above is used for measurement, it is necessary to first set an initial position for setting the work near the optical axis center on the moving table.

When measuring the inner diameter of a large hole in a work, the projection light or the reflected light from the wall directly installed from the bottom of the work is observed at a position roughly below the objective lens with a camera or eyepiece. On the other hand, the initial position setting work can be easily performed by moving the moving table.

However, in the case of a small hole of, for example, 0.3φ, if the distance between the optical axis and the small hole is set at a position larger than the inner diameter of the small hole, the projection light will be completely blocked. In the observation of the department, only shadows were seen, and it was difficult to set the initial position because it was not possible to move the moving table left or right.

Therefore, a method for easily setting the small hole at the center of the optical axis has been required. Further, the method is required to be used as an observation method even when it is exclusively used for the eyepiece, and when it is exclusively used for the camera, there is a demand for a method that can be used without removing the eyepiece requiring complicated adjustment from the main unit.

An object of the present invention is to solve the above problems and to provide an excellent optical length measuring apparatus which can easily set the initial position of a work.

[0023]

The gist of the present invention will be described with reference to the accompanying drawings.

Work placement unit that can move the position of the work 10
A projection unit 20 for forming a projection image on the measured position P of the work is arranged on one side of the work 11, and the observation unit 6 for observing the projection image via the observation optical system 21 is separated by the work 10. Projection unit 20
In the optical length measuring device which is provided on the opposite side to the optical axis length measuring device and measures the length between the plurality of measured positions P and P ′ by the projection unit 20 and the observation unit 6, the measured position P of the workpiece 10 is located near the optical axis. A guide light with a spot shape that is narrower than the observation field when installed
Guide light means 23 for irradiating 25 to the work 10 through the observation optical system 21 is provided, and the measured position P of the work 10 can be installed and guided near the observation optical axis by referring to the guide light 25. The observation optical system 21 is provided with a branching means 5 for branching into a plurality of optical axes, and one of the optical axes is provided with the guide light source 24 which is replaceable with the observation camera device 16.
23 is provided, and an eyepiece device 15 including the objective lens 4 and the eyepiece lens 31 is provided on the other optical axis.
The guide light source 24 is detachably attached to the work piece 10, and the guide light means 23 is configured to irradiate the work 10 with the guide light 25 through the objective lens 4 and the eyepiece lens 31, and the guide light is guided to both branched optical axes. The present invention relates to an optical length measuring device characterized in that the light means 23 can be arranged.

[0025]

The guide light 25 emitted from the guide light means 23 is condensed by the observation optical system 21 in a spot shape (substantially point-like shape) at a position observed by the observation section 6.

Therefore, when the guide marking spots, which are condensed in the form of dots, are moved to the measured position P of the work 10 by moving the work 10 side, for example, the measured position P is observed by the observation section 6 ( Caught).

Therefore, when the initial position of the work 10 is set, for example, if the measurement aperture is small and you are looking through the observation part 6, you can see only the shadow and move the work 10 to the left, right, front, or rear Measured position P of workpiece 10 at the axial position
When it is difficult to catch the measured position P by the observation unit 6 without knowing whether the position is measured or not, it is necessary to visually align the guide marking spot position by the guide light means 23 with the measured position P, or The work 10 is moved so as to be positioned in the vicinity of the measurement position P, and then the observation unit 6 finely adjusts the movement of the work 10.

Further, for example, an observation optical system as in the embodiment
A branching means 5 for branching the optical axis (1-2) of the optical system 21 to 21
And the observation unit 6 is provided on each of the one branch optical axis (1-3) and the other branch optical axis (1-2) branched by the branching means 5, and the one branch optical axis (1- The observation unit 6 provided in 3) is referred to as a first observation unit 6A, and the first observation unit 6A
The eyepiece device 15 is provided to the second observation unit 6B provided on the other branched optical axis (1-2), and the second observation unit 6B is provided with the camera device 16. When the eyepiece device 15 is used, the camera device 16 is attached to the other second observation section 6B.
Instead of this, a guide light source 24 is attached to form a guide light means 23.

On the contrary, when the camera device 16 is used, the camera device 16 is provided in the second observation section 6B, and the guide light source 24 is attached to the eyepiece device 15 of the other first observation section 6A to guide light. Means 23 is constituted.

In any case, the guide light source of the guide light means 23
Since 24 is located in the optical axis direction (1-2, 1-3) of the observation optical system 21 branched by the branching means 5, the first observation unit 6
A or the second observing section 6B condenses light into a substantially point shape at a position where it is caught via the observing optical system 21, and a guide marking spot is formed on the work 10 by irradiation.

When using the camera device 16, for example, the eyepiece device 15 is not removed, and the eyepiece 31 is provided so that the guide light 25 can be obtained through the eyepiece 31 of the eyepiece device 15.
A guide light source (24) is attached to the outside of the guide light means (23) to constitute the guide light means (23).

Therefore, both the eyepiece device 15 used as the observing section 6 and the camera device 16 can capture the position where the guide marking spot is formed without complicated attachment and adjustment work.

[0033]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS As shown in FIG. 1, the basic structure of this embodiment is the same as that of the conventional example, and the details thereof will be omitted. The work disposing unit 11 is a moving table, and the work 10 is fixed on the moving table 11 and the work 10 is moved by moving the moving table 11.

The projection unit 20 comprises a projection light source 14, a projection pattern forming member 13 for forming a projection pattern 17 shown in FIG. 8 on the measured positions P and P ', and a projection lens 12.

A movement measuring unit 22 for measuring the movement amount of the work 10.
Is configured to measure and display the movement amount of the work placement unit 11.

The branching means 5 uses a beam splitter, and the observation optical system 21 is composed of the objective lens 4.

In the present embodiment, the optical axis (1-2) is located right above the workpiece 10, and the branching means 5 is arranged above the objective lens 4 via the objective lens 4 so that the optical axis (1-2) is aligned with the optical axis (1-2). Directly above the optical axis
(1-2) and a branched side direction (1-3), and the side direction is defined as one branch optical axis (1-3), and the immediately above direction is defined as the other branch optical axis (1 -2), and one of these optical axes (1-3)
Is provided with the eyepiece device 15 as the first observation unit 6A, and the other optical axis (1-2) is used as the second observation unit 6B so that the camera device 16 can be detachably attached. .

The details will be described below.

A schematic structure is shown in FIG. 1, of which the case for eyepieces is shown in FIG. 2, and the case for cameras is shown in FIG.

A camera device is used only for eyepieces, that is, when measurement is performed using the eyepiece device 15 provided in the first observation section 6A.
Since there is no need to attach the 16, the optical axis (1-
2) is used, the guide light source 24 is attached to the second observation section 6B to which the camera device 16 can be attached to configure the guide light means 23,
It is configured to emit the guide light 25. In this case, a light emitting element is provided as a guide light source 24 in a case 26 fitted to a camera mount 28 for mounting a camera and driven by a guide power supply 27. The power supply is provided with a switch for turning ON / OFF the drive.

The light emitting element 24 is an LED with a lens so that the guide light 25 is condensed in a spot shape on the surface of the work 10 through the objective lens 4 so that the light can be guided more clearly (projection light by the projection unit 20). (It differs from 18 green) LED that emits red light.

In the embodiment, the guide light 25 is condensed to 0.5φ to form a red guide marking spot that can be visually recognized well.

Next, a case will be described in which the camera device 16 is purchased as an option and is used exclusively for the camera without using the eyepiece device 15. In this case, since the eyepiece device 15 is not necessary, the eyepiece device 15 may be removed and the guide light 25 may be produced from this optical axis (3) side. However, when the eyepiece device 15 is used again, After attaching the removed eyepiece device 15, it is necessary to make adjustments that require a high degree of skill to accurately match the optical axis of the eyepiece device 15 with the optical axis of the main body. Therefore, the eyepiece device 15 cannot be removed even in this case. Therefore, in this embodiment, as shown in FIG. 3, the guide light 25 is transmitted through the eyepiece lens 31 with the eyepiece device 15 attached.
The light emitting element 24 can be mounted outside the eyepiece lens 31 so that

That is, the first observing section 6A includes the eyepiece device 15
The adapter 30 is provided at the end of the device, the case 26 is attached to the eyepiece device 15 via the adapter 30, and the guide light source 24 (light emitting element) is detachably attached to the case 26. 6B has a configuration in which the camera device 16 is detachably connected to the camera base 28.

The eyepiece device 15 has an eyepiece lens 31 inside to create a virtual image. Therefore, the adapter 30 is arranged so that the guide light 25 is condensed into a substantially point shape by the objective lens 4, the branching means 5, the eyepiece lens 31, and the light emitting element 24 (as in the case of exclusive use for the eyepiece).
The length in the optical axis direction (3) is set.

In this way, the guide light 25 can be easily obtained as shown in FIG. 4 regardless of whether the camera or the eyepiece is used. Therefore, in the case of a small hole of 1 mm or less, the guide light 25 (guide marking spot) can be visually observed. The objective lens 4 can be easily installed by moving and setting the workpiece 10 so that
A small hole can be set in the vicinity of the optical axis (1-2) directly below the position, so that the projection light 18 can be observed through the small hole, and the accurate positioning can be immediately started by the moving table 11 (workpiece arranging portion 11). You can

Alternatively, the height of the adapter 30 on the eyepiece side may be set in advance, and then the height of the camera base 28 may be set so that the guide light 25 is condensed in a point shape.

Further, when the eyepiece device 15 is not used at all for the exclusive use of the camera, the guide means 23 can be constituted only by the objective lens 4 and the light emitting element 24, though not shown.
In this case, considering the optical length in the branching means 5 (beam splitter), the length of the adapter 30 is determined so as to be the same as the optical path length of the guide light source 24 mounted on the camera device 16 side, and the case 26 is attached. good.

The guide marking spot by the guide light 25 is necessary for the above-mentioned position alignment by visual observation, and is unnecessary in other measurement, and when this guide light 25 is present, the reflected light from the work 10 is reflected. It becomes masked and measurement becomes impossible. Therefore, the guide light 25 is irradiated by the switch only when the initial position of the work is set.

The power sources of the projection light source 14 and the guide light source 24 can be made common.

Power consumption can be saved by the following relationship between the two drive outputs.

Guide light output> projection light output (including 0) when the guide light is operating, and guide light output <projection light output (including 0) when the projection light is operating.

[0053]

Since the present invention is configured as described above, it has the following effects.

(1) Measurement of the workpiece When setting the initial position, it is possible to easily set it on the optical axis position because it can be positioned visually by referring to the guide light that is condensed in points, and it is extremely easy to set the initial position. You can

(2) In particular, it takes a long time to set the initial position of a small measuring point such as a small hole of 1 mm or less, but it can be set easily in a short time.

(3) Since it is easier to set the initial position, refer to FIG.
Measurement of a workpiece with multiple small holes, as shown in, is now possible in a short time. (In the case of a small hole or a comb-shaped groove provided in close proximity as shown in Fig. 4, it was not known in the past which small hole or groove coincided with the optical axis.) (4) Guide light spot-shaped guide marking spot Therefore, it is easy to set even a small hole of 1 mm or less, for example, if the guide light is red, it is easier to identify on the work surface and the setting work becomes smooth.

(5) In addition, the guide light source can be used by appropriately switching it when both the camera and the eyepiece are used.

(6) Since the guide light means can be configured on the eyepiece side without removing the eyepiece when the eyepiece is not used,
The troublesome adjustment work associated with mounting the eyepiece is also unnecessary.

[Brief description of drawings]

FIG. 1 is a schematic configuration diagram of the present embodiment.

FIG. 2 is a schematic configuration diagram when only the eyepiece of the present embodiment is used.

FIG. 3 is a schematic configuration diagram when the camera of this embodiment is dedicated.

FIG. 4 is an explanatory perspective view showing a use state at the time of setting an initial position of the present embodiment.

FIG. 5 is a schematic explanatory view of a conventional example.

FIG. 6 is a schematic configuration diagram of a conventional example which is a basic configuration of the present embodiment.

FIG. 7 is an explanatory view of observing a reflection image at an observation unit in the conventional example shown in FIG.

FIG. 8 is an explanatory diagram showing a projection pattern in the conventional example shown in FIG.

[Explanation of reference signs] 4 Objective lens 5 Dividing means 6 Observation unit 10 Work 11 Work placement unit 15 Eyepiece device 16 Observation camera device 20 Projection unit 21 Observation optical system 23 Guide light means 24 Guide light source 25 Guide light 31 Eyepiece Lens P, P'Measured position

 ─────────────────────────────────────────────────── ─── Continuation of front page (56) Reference JP-A-3-255301 (JP, A) JP-A-58-179301 (JP, A) JP-A-63-305525 (JP, A) JP-A 61- 149815 (JP, A) JP-A-2-165005 (JP, A) Actually open 62-203405 (JP, U) Actually open 57-98179 (JP, U) Actually open 3-11597 (JP, U) Patent 3-75042 (JP, B2) Patent 7-89044 (JP, B2)

Claims (1)

(57) [Claims] 1. A projection unit for forming a projection image on a measured position of a work is provided on one side of the work placement unit that can move the position of the work, and the projection image is observed through an observation optical system. An optical length measuring device is provided on the side opposite to the projection part with the work part as a boundary, and the projection part and the observation part measure the length between a plurality of measured positions. When installed near the axis, guide light means is provided to irradiate the work with a spot-shaped visible guide light that is narrower than the observation field of view through the observation optical system, and the measured position of the work is observed with reference to this guide light. The guide light source is constructed so that it can be installed and guided in the vicinity of the optical axis for observation, and the observation optical system is provided with a branching means for branching into a plurality of optical axes, and one of the optical axes is replaceable with an observation camera device. Is provided to configure the guide light means, and the other An eyepiece device including an objective lens and an eyepiece lens is provided on the optical axis, and the guide light source is detachably attached to the eyepiece device, and the guide light is applied to the workpiece through the objective lens and the eyepiece lens. An optical length measuring device, characterized in that the guide light means can be disposed on both of the branched optical axes.