JP2548803B2 - How to operate the slicing machine - Google Patents

Description

Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a slicing machine operating method, and more particularly to a slicing machine operating method for cutting an ingot into wafers in a semiconductor manufacturing process.

[Conventional technology]

A slicing machine is used as an apparatus for manufacturing a wafer by cutting a semiconductor ingot into thin pieces.

FIG. 5 shows the structure in the vicinity of the inner peripheral blade of this type of slicing machine. In FIG. 5, an inner peripheral blade 12 is stretched on the cup-shaped rotating body 10 with a predetermined tension, and the ingot 14 is cut into a thin piece by the inner peripheral blade 12.

In addition, the slicing machine, the inner peripheral blade 12 during cutting
The displacement such as the warp is detected by the non-contact type displacement detector 16, and the ingot 14 is moved in the vertical direction by a small amount based on the detection signal to correct the cutting position, and the inner peripheral blade 12 with respect to the ingot 14. The flatness of the cut surface is ensured by controlling it horizontally (Japanese Utility Model Laid-Open No. 61-122811).

[Problems to be Solved by the Invention]

However, in order to completely prevent defective cutting of the ingot, it is not enough to respond with the detection signal from the non-contact type displacement detector 16, and for example, as shown in FIG.
If the wafer 20 being cut is attracted to the lower surface of the inner peripheral blade 12 due to the surface tension of the coolant 18, or if poor lubrication occurs, the inner peripheral blade does not displace, but the cutting resistance increases and the cutting surface There is a case where a defect occurs or a cutting blade is broken. Further, the abnormality such as the interference of the mechanical section could not be found by the conventional device.

The present invention has been made in view of such circumstances, and an object thereof is to provide a method of operating a slicing machine that does not cause defective cutting of an ingot.

[Means for solving the problem]

The present invention, in order to achieve the above object, in a method of operating a slicing machine in which a cutting blade is attached to a rotating spindle to cut a columnar material into thin pieces, the number of rotations of the cutting blade at the time of cutting is A change is found, and the change in the obtained number of revolutions is compared with the change in the number of revolutions during normal operation and during abnormal operation stored in advance in the control device. If the change corresponds to the change in the rotation speed, the control device sends a signal to the slicing machine to continue cutting.If the obtained change in the rotation speed corresponds to the change in the rotation speed during abnormal operation, the control device sends the slicing machine. It is characterized by sending a signal to stop cutting.

[Action]

According to the present invention, first, the change in the rotational speed of the cutting blade (26) during cutting is obtained. Next, the obtained change in rotation speed is compared with the change in rotation speed during normal operation and abnormal operation that is stored in advance in the control device (52), and the obtained change in rotation speed is the rotation during normal operation. When the number of changes is equivalent, a signal for continuously cutting the columnar material (34) is sent from the control device (52) to each drive unit of the slicing machine (22). Further, when the obtained change in the rotation speed corresponds to the change in the rotation speed at the time of abnormal operation, the control device (52) sends a signal to stop the disconnection to each of the drive units. Thereby, defective cutting of the columnar material (34) can be prevented.

〔Example〕

Hereinafter, preferred embodiments of a method for operating a slicing machine according to the present invention will be described in detail with reference to the accompanying drawings.

In FIG. 1, an inner peripheral blade 26 is arranged on the upper surface of the book 24 of the slicing machine 22, the inner peripheral blade 26 is connected to a rotation mechanism (not shown) described later, and the inner peripheral blade 26 is rotated.

A cutting feed table 28 is slidably supported on the upper surface of the main body 24 in the directions of arrows A and B, and reciprocated by a drive source (not shown). A column 30 is erected on the left end of the cutting and feeding table 28 in FIG. An index slider 32 is supported on the front surface of the support column 30 so as to be movable in the longitudinal direction of the support column 30, that is, in the vertical direction. The index slider 32 is a column
It is screwed with a feed screw (not shown) mounted in the longitudinal direction of 30 and is rotated in the vertical direction by rotating the feed screw.

The index slider 32 supports an ingot 34, and the ingot 34 is fixed to a slice base 36. As a result, the ingot 38 moves in the directions of arrows A and B (cutting direction) and the directions of arrows C and D (work indexing direction).

On the other hand, the inner peripheral blade 26, as shown in FIG.
It is stretched with a predetermined tension on a cup-shaped rotating body 40 provided at the tip of the. The lower end of the rotary shaft 38 is connected to a drive motor 44 via a belt 42. Therefore, the inner peripheral blade 26 rotates via the belt 42, the rotary shaft 38, and the rotary body 40 when the drive motor 44 drives.

Further, a rotary plate 46 with a slit is attached to the rotary shaft 38.

An optical sensor 48 is installed below the rotary plate 46. This optical sensor 48 detects the detection signal of the rotating plate 46 as a spindle tachometer.
Then, the spindle tachometer 50 measures the number of rotations of the inner peripheral blade 26. The detection signal is continuously sent to the main controller 52. Further, the cutting feed position of the ingot 34 is measured by the feed position measuring device 54, and the position signal is successively sent to the main controller 52 successively. Alternatively, the feed position signal of the ingot may be obtained from the cutting feed time of the ingot 34.

The main controller 52 stores in advance the total fluctuation value of the rotation speed during normal operation. The total variation value is a variation value of the rotation speed of the inner peripheral blade 26 from the start of cutting to the end of cutting.

 Next, the processing of the main controller 52 will be described.

First, the main control unit 52, as described above, the main spindle tachometer 50
From the inner peripheral blade rotation speed from the, and the ingot feed position signal from the feed position measuring device 54 simultaneously and continuously,
The total fluctuation value of the rotation speed of the inner peripheral blade 26 from the start of cutting the ingot 34 to the end of cutting is obtained.

By the way, the main controller 52 stores the total variation values shown in FIGS. 3A to 3D in advance.

Here, the total fluctuation value shown in FIG. 3 (A) shows a good cutting state in a dish shape, and the total fluctuation value shown in FIG. 3 (B) is a bowl shape, and the inner peripheral edge 26 is clogged. Shows a state in which the cutting resistance has increased by a small amount. Further, the total fluctuation value shown in FIG. 3 (C) has a downward-sloping shape, and the inner peripheral blade is caused by the surface tension of the coolant.
The base metal of 26 and the wafer or ingot are adsorbed to each other, and the cutting resistance is increased. Further, the total fluctuation value shown in FIG. 3 (D) is due to defective coolant or to the inner peripheral edge 26 from the outside. It shows that mechanical resistance was given and the cutting resistance increased rapidly.

Therefore, the main control unit 52 uses the calculated total variation value and the third variation value.
The total variation values obtained by comparing the total variation values shown in FIGS. 3A to 3D correspond to the total variation values shown in FIG.
If it is within the allowable range of the total fluctuation value during normal operation, it is judged as OK class shown in FIG. 4 and the disconnection continuation signal is transmitted. That is, a signal is sent to the work indexing control unit 56 and the cutting feed control unit 58 to ingot the thickness of one wafer.
Lower 34 to continue cutting.

Further, if the obtained total variation value corresponds to the total variation value shown in FIG. 3 (B) and this total variation value is within the allowable range, it is judged to be the * OK class shown in FIG. And send a self-correction signal. That is, after sending a signal to a dressing device (not shown) to dress the inner peripheral blade 26 and make it visible, the cutting is continued in the procedure described above. As a result, it is possible to prevent the progress of the clogging of the inner peripheral blade 26 from becoming worse, so that the defective cutting of the ingot 34 can be prevented in advance.

Further, when the obtained total variation value corresponds to the total variation value shown in FIG. 3 (C) and this total variation value exceeds the allowable range, it is determined to be * NG class shown in FIG. To send a disconnection stop signal. That is, a stop signal is sent to the work indexing control unit 56, the cutting feed control 58 and the drive motor 44 to stop cutting. Thereby, continuous defective cutting of the ingot 34 can be prevented. Preferably, an alarm light or the like provided above the slicing machine is made to blink to signal the operator to stop cutting.

Further, the obtained total variation value corresponds to the total variation value shown in FIG. 3 (D), and when this total variation value greatly exceeds the allowable range, it is judged as the NG class shown in FIG. And sends a signal to stop the entire cutting device. That is, an emergency stop signal is sent to all operating parts to stop the operation of the slicing machine. As a result, defective cutting of the ingot 34 can be prevented, and damage to the inner peripheral blade 26 can be prevented in advance.

Further, the total variation value curves shown in FIGS. 3A to 3D are patterned and stored in the main controller 52 in advance as the characteristic bend patterns of the inner peripheral blade 26 with respect to the cutting feed position of the ingot 34. Even if these characteristic curve patterns and the obtained characteristic curve pattern are compared and the same control as that in the case of the total variation value is performed, the same effect can be obtained.

In addition, although the inner peripheral blade has been described in the embodiment, the present invention is not limited to this and can be applied to the outer peripheral blade.

〔The invention's effect〕

As described above, according to the operating method of the slicing machine according to the present invention, the change in the rotation speed of the cutting blade is obtained,
In the case where the obtained change in the number of revolutions is compared with the change in each number of revolutions during normal or abnormal operation stored in advance in the control device, and the change in the obtained number of revolutions corresponds to the change in the number of revolutions during normal operation. In this case, the cutting is continued, and the cutting is stopped when the obtained change in the number of revolutions corresponds to the change in the number of revolutions during abnormal operation, so that continuous defective cutting of the columnar material is prevented. be able to.

[Brief description of drawings]

FIG. 1 is a perspective view of a slicing machine operated by the method for operating a slicing machine according to the present invention, FIG. 2 is an operation control explanatory diagram for the method for operating a slicing machine according to the present invention, and FIGS. ) Is an explanatory diagram showing an example of a characteristic curve stored in advance in the control device, FIG. 4 is an explanatory diagram of driving instructions corresponding to FIGS. 3 (A) to (D), and FIG. 5 is a conventional ingot cutting. FIG. 6 is a side sectional view showing a situation, and FIG. 6 is a side sectional view showing an adsorbed state by the coolant. 26 …… Inner peripheral blade, 38 …… Rotary axis, 44 …… Drive motor, 46
...... Slit plate, 48 ...... Optical sensor, 50 ...... Spindle tachometer,
52 ... Main controller.

Claims (3)

(57) [Claims] 1. A method for operating a slicing machine, in which a cutting blade is attached to a rotating spindle to cut a columnar material into thin pieces, and a change in the number of revolutions of the cutting blade during cutting is obtained and obtained. When the change in rotation speed is compared with the change in rotation speed during normal operation and abnormal operation that is stored in advance in the control device, and the obtained change in rotation speed corresponds to the change in rotation speed during normal operation, Shall send a signal to the slicing machine to continue cutting from the control device, and if the obtained change in rotation speed corresponds to a change in rotation speed during abnormal operation, send a signal to stop cutting from the control device to the slicing machine. Driving method of slicing machine characterized by. 2. The method of operating a slicing machine according to claim 1, wherein the change of the rotation speed is displayed as a total variation value of the rotation speed of the cutting blade. 3. The method of operating a slicing machine according to claim 1, wherein the change in the rotational speed is displayed in a characteristic curve pattern.