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JP2551492B2 - Sterilization method of pure water or ultrapure water - Google Patents
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JP2551492B2 - Sterilization method of pure water or ultrapure water - Google Patents

Sterilization method of pure water or ultrapure water

Info

Publication number
JP2551492B2
JP2551492B2 JP2036304A JP3630490A JP2551492B2 JP 2551492 B2 JP2551492 B2 JP 2551492B2 JP 2036304 A JP2036304 A JP 2036304A JP 3630490 A JP3630490 A JP 3630490A JP 2551492 B2 JP2551492 B2 JP 2551492B2
Authority
JP
Japan
Prior art keywords
water
sterilization
adsorption
tower
treated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2036304A
Other languages
Japanese (ja)
Other versions
JPH03242284A (en
Inventor
葉子 岩瀬
孝行 斉藤
健 中島
弘之 嶋
学 辻村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Ebara Research Co Ltd
Original Assignee
Ebara Corp
Ebara Research Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
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Application filed by Ebara Corp, Ebara Research Co Ltd filed Critical Ebara Corp
Priority to JP2036304A priority Critical patent/JP2551492B2/en
Publication of JPH03242284A publication Critical patent/JPH03242284A/en
Application granted granted Critical
Publication of JP2551492B2 publication Critical patent/JP2551492B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Heat Treatment Of Water, Waste Water Or Sewage (AREA)
  • Water Treatment By Sorption (AREA)

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、例えば電子工業、医療医薬品工業8るいは
精密機械工業で用いられる純水又は超純水の殺菌方法に
関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a sterilization method of pure water or ultrapure water used in, for example, the electronic industry, the medical and pharmaceutical industry 8 or the precision machinery industry.

〔従来の技術〕[Conventional technology]

従来の純水製造システムの殺菌方法としては、紫外線
を常時照射する方法、間欠的に熱水を循環する方法、及
び過酸化水素又はオゾンなどの薬剤による殺菌方法があ
る。
Conventional sterilization methods for pure water production systems include a method of constantly irradiating ultraviolet rays, a method of intermittently circulating hot water, and a sterilization method using a chemical such as hydrogen peroxide or ozone.

紫外線を照射する方法は、紫外線に耐性のある菌に対
しては効果が小さく、かつ常時紫外線を照射しているた
めに耐性菌が増殖しやすい難点がある。
The method of irradiating with ultraviolet rays has a small effect on bacteria resistant to ultraviolet rays, and since ultraviolet rays are constantly irradiated, resistant bacteria easily grow.

熱水をシステム内に循環して殺菌する方法は、殺菌時
に純水製造を停止しなければならない難点がある。
The method of circulating hot water in the system for sterilization has a drawback in that the production of pure water must be stopped during sterilization.

薬剤による殺菌方法では、殺菌時に純水製造を停止し
なければならないばかりでなく、殺菌後に薬剤を洗浄除
去する必要があり、殺菌処理に長時間かかるうえ多量の
排水がでる難点がある。
In the sterilization method using chemicals, not only the production of pure water must be stopped during sterilization, but also the chemicals need to be washed off after sterilization, which requires a long time for sterilization and a large amount of drainage.

また、前記の従来の殺菌方法では、バクテリアの栄養
細胞の殺菌は可能であるが、胞子又は芽胞は栄養細胞に
比較して極端に耐性が強いため、胞子又は芽胞に対する
効果は小さい。更に一部のバクテリアの胞子又は芽胞に
は、60〜70℃、数分〜数十分の高温ショックによって活
性化するものもある。
Further, although the above-mentioned conventional sterilization method can sterilize vegetative cells of bacteria, spores or spores are extremely resistant as compared with vegetative cells, and therefore have little effect on spores or spores. Furthermore, some bacterial spores or spores are activated by a high temperature shock of 60 to 70 ° C for several minutes to several tens of minutes.

従って従来の殺菌方法では、殺菌処理後のシステム内
の不特定の場所で胞子又は芽胞が発芽し増殖する問題点
がある。
Therefore, the conventional sterilization method has a problem that spores or spores germinate and proliferate at an unspecified place in the system after the sterilization treatment.

〔発明が解決しようとする課題〕[Problems to be Solved by the Invention]

上記のように従来の殺菌方法では、バクテリア胞子又
は芽胞を殺菌できないために、システム内でのバクテリ
ア再増殖の危険性がある。そこで、本発明は、純水製造
システム内の特定の場所すなわち吸着剤を充填した吸着
殺菌塔において、バクテリア胞子又は芽胞を捕捉し、吸
着殺菌塔内で発芽させて栄養細胞に変化させた後熱殺菌
する方法を提供することを目的とする。
As described above, the conventional sterilization methods cannot sterilize bacterial spores or spores, so that there is a risk of bacterial regrowth in the system. Therefore, the present invention, in a specific place in the pure water production system, that is, in an adsorption sterilization tower filled with an adsorbent, captures bacterial spores or spores, and germinates in the adsorption sterilization tower to convert into nutrient cells after heat treatment. The purpose is to provide a method for sterilization.

〔課題を解決するための手段〕[Means for solving the problem]

前記目的を達成するために、本発明では、水中のバク
テリア及びバクテリア胞子又は芽胞を、吸着剤を充填し
た吸着殺菌塔で捕捉し、捕捉したバクテリア並びに吸着
殺菌塔内で発芽したバクテリア胞子又は芽胞を、加熱処
理によって殺菌することを特徴とする純水又は超純水の
殺菌方法としたものであり、また、本発明は前記の方法
において、前記吸着殺菌塔を2又はそれ以上並列に設置
し、被処理水をあらかじめ加熱殺菌処理した吸着殺菌塔
に通水するとともに、処理後の吸着殺菌塔のうち少なく
とも1塔は被処理水の供給を停止して加熱処理し、順次
被処理水の通水と加熱殺菌処理とを繰り返し処理するこ
とを特徴とする純水又は超純水の殺菌方法としたもので
ある。
In order to achieve the above-mentioned object, in the present invention, bacteria in water and bacterial spores or spores are captured by an adsorption sterilization tower filled with an adsorbent, and the captured bacteria and bacterial spores or spores germinated in the adsorption sterilization tower. The method is a method for sterilizing pure water or ultrapure water, which is characterized by sterilizing by heat treatment, and the present invention is the method described above, wherein the adsorption sterilization towers are installed in parallel in two or more, The water to be treated is passed through an adsorption sterilization tower that has been heat-sterilized in advance, and at least one of the treated adsorption sterilization towers is subjected to heat treatment by stopping the supply of the water to be treated, and then sequentially passing the water to be treated. This is a method for sterilizing pure water or ultrapure water, which is characterized by repeatedly performing heat sterilization treatment.

上記の方法において、吸着殺菌塔に充填する吸着剤
は、耐熱性を持ち、かつ有機物質の吸着並びにバクテリ
ア及びバクテリア胞子又は芽胞の捕捉が可能な性能を持
つ吸着剤を用いる。
In the above method, as the adsorbent to be filled in the adsorption sterilization tower, an adsorbent having heat resistance and the ability to adsorb organic substances and capture bacteria and bacterial spores or spores is used.

以下に本発明を詳細に説明する。 Hereinafter, the present invention will be described in detail.

第1図は、本発明に用いる装置の一例を示す概略断面
図である。
FIG. 1 is a schematic sectional view showing an example of an apparatus used in the present invention.

第1図において、被処理水中のバクテリア及びバクテ
リア胞子又は芽胞を、吸着剤4を充填した吸着殺菌塔5
で捕捉するために、被処理水を供給水バルブ1から吸着
殺菌塔5に通水し、処理水は処理水バルブ6から得る。
In FIG. 1, an adsorption sterilization tower 5 filled with an adsorbent 4 for bacteria and bacterial spores or spores in water to be treated.
The water to be treated is passed from the feed water valve 1 to the adsorption sterilization tower 5 to obtain the treated water from the treated water valve 6.

また、捕捉されたバクテリア及びバクテリア胞子又は
芽胞が、発芽又は増殖した吸着殺菌塔を加熱殺菌するた
めに、供給水バルブ1及び処理水バルブ6を閉止し、逆
洗水排出バルブ2を開け、加熱装置3によって吸着殺菌
塔の加熱を行う。
Further, in order to sterilize the adsorption sterilization tower in which the captured bacteria and bacterial spores or spores germinated or proliferated, the feed water valve 1 and the treated water valve 6 were closed, the backwash water discharge valve 2 was opened, and heating was performed. The device 3 heats the adsorption sterilization tower.

ついで、逆洗水供給バルブ7を開けて、殺菌処理水を
被処理水の通水方向と逆方向に通水することによって、
吸着殺菌塔内の死滅バクテリアなどを逆洗水排出バルブ
2から排出する。
Then, by opening the backwash water supply valve 7 and passing the sterilization-treated water in the direction opposite to the direction of water to be treated,
Dead bacteria in the adsorption sterilization tower are discharged from the backwash water discharge valve 2.

ついで、逆洗水供給バルブ7及び逆洗水排出バルブ2
を閉止し、供給水バルブ1及び処理水バルブ6を開け
て、被処理水の通水を行う。
Next, backwash water supply valve 7 and backwash water discharge valve 2
Is closed, the feed water valve 1 and the treated water valve 6 are opened, and water to be treated is passed.

以下同様に、被処理水の通水、吸着殺菌塔の加熱殺
菌、吸着殺菌塔の処理水による逆洗のサイクルを繰り返
す。
Similarly, the cycle of passing water to be treated, heat sterilization of the adsorption sterilization tower, and backwashing with the treated water of the adsorption sterilization tower is repeated.

ここで吸着剤とは、粒状活性炭、繊維状活性炭、ジル
コニア、チタニア、ゼオライト等の無機吸着剤から選ば
れた1種以上が好ましく、これらの吸着剤は、耐熱性が
ありかつ、バクテリア及びバクテリア胞子又は芽胞の捕
捉並びに有機物質の吸着が可能であるものを用いる。該
吸着剤には、摩滅強度が高く微粒子を発生しにくい粒状
活性炭が好ましい。
Here, the adsorbent is preferably at least one selected from inorganic adsorbents such as granular activated carbon, fibrous activated carbon, zirconia, titania, and zeolite, and these adsorbents have heat resistance and are bacteria and bacterial spores. Alternatively, a substance capable of capturing spores and adsorbing an organic substance is used. The adsorbent is preferably granular activated carbon which has a high attrition strength and hardly generates fine particles.

次に加熱装置3とは、吸着殺菌塔5を、数時間ないし
数日ごとに50〜95℃に加温し、かつ数十分ないし数時間
保持する装置であり、吸着殺菌塔自体を電気ヒーター、
高周波、マイクロ波等によって加熱する方法、又は別に
加熱した熱水又は水蒸気を吸着殺菌塔内に導入して加熱
する方法等を適宜組合せて用いることができる。
Next, the heating device 3 is a device for heating the adsorption sterilization tower 5 to 50 to 95 ° C. for every several hours or days and holding it for several tens of minutes to several hours. ,
A method of heating by high frequency, a microwave, or the like, or a method of introducing hot water or steam separately heated into the adsorption sterilization tower and heating, and the like can be appropriately combined and used.

第2図は、前記吸着殺菌塔を2系列並列に設置した本
発明の装置の一例を示す概略断面図である。
FIG. 2 is a schematic cross-sectional view showing an example of the apparatus of the present invention in which the adsorption sterilization towers are installed in two series in parallel.

第2図において、被処理水は供給水バルブ1a,1bか
ら、吸着殺菌塔A5a及び吸着殺菌塔B5bに通水し、処理水
は処理水バルブ6a及び6bから得られる。このときバルブ
2a,2b,7a,7bは閉止である。
In FIG. 2, treated water is passed through the feed water valves 1a and 1b to the adsorption sterilization tower A5a and the adsorption sterilization tower B5b, and the treated water is obtained from the treated water valves 6a and 6b. At this time the valve
2a, 2b, 7a, 7b are closed.

ついで、逆洗水排出バルブ2aを開いて加熱装置3aによ
り、吸着殺菌塔A5aの加熱殺菌を行う。
Then, the backwash water discharge valve 2a is opened, and the adsorption sterilization tower A5a is heat-sterilized by the heating device 3a.

ついで、逆洗水供給バルブ7aを開け吸着殺菌塔B5Bの
処理水によって、吸着殺菌塔A5aの逆洗を行う。
Then, the backwash water supply valve 7a is opened to backwash the adsorption sterilization tower A5a with the treated water of the adsorption sterilization tower B5B.

ついで、逆洗水供給バルブ7a及び逆洗水排出バルブ2a
を閉止し、供給水バルブ1a、処理水バルブ6aを開け、吸
着殺菌塔A及びBへの通水を再開する。
Next, backwash water supply valve 7a and backwash water discharge valve 2a
Is closed, the feed water valve 1a and the treated water valve 6a are opened, and the water flow to the adsorption sterilization towers A and B is restarted.

ついで、供給水バルブ1bと処理水バルブ6bを閉止し、
逆洗水排出バルブ2bを開けて、加熱装置3bによって吸着
殺菌塔B5bの加熱殺菌を行う。
Then, close the supply water valve 1b and the treated water valve 6b,
The backwash water discharge valve 2b is opened and the adsorption sterilization tower B5b is heat-sterilized by the heating device 3b.

ついで、逆洗水供給バルブ7bを開けて、吸着殺菌塔A5
aからの処理水で吸着殺菌塔B5bの逆洗を行う。
Then, open the backwash water supply valve 7b to remove the adsorption sterilization tower A5.
The adsorption sterilization tower B5b is backwashed with the treated water from a.

ついで、逆洗水供給バルブ7b及び逆洗水排出バルブ2b
を閉止し、供給水バルブ1b及び処理水バルブ6bを開け、
吸着殺菌塔A及び吸着殺菌塔Bへの通水を再開する。
Then, backwash water supply valve 7b and backwash water discharge valve 2b
Closed, open the supply water valve 1b and the treated water valve 6b,
Water flow to the adsorption sterilization tower A and the adsorption sterilization tower B is restarted.

以下同様に、 イ.吸着殺菌塔A及び吸着殺菌塔Bへの通水、 ロ.吸着殺菌塔Aの加熱殺菌 ハ.吸着殺菌塔Bの処理水による吸着殺菌塔Aの逆洗 ニ.吸着殺菌塔A及び吸着殺菌塔Bへの通水 ホ.吸着殺菌塔Bの加熱殺菌 ヘ.吸着殺菌塔Aの処理水による吸着殺菌塔Bの逆洗 のサイクルを繰り返す。 Similarly, a. Water flow to adsorption sterilization tower A and adsorption sterilization tower B, b. Heat sterilization of adsorption sterilization tower A c. Backwashing the adsorption sterilization tower A with the treated water of the adsorption sterilization tower B d. Water flow to adsorption sterilization tower A and adsorption sterilization tower B Heat sterilization of adsorption sterilization tower B f. The cycle of backwashing the adsorption sterilization tower B with the treated water of the adsorption sterilization tower A is repeated.

〔作 用〕[Work]

前記純水又は超純水殺菌方法には次の作用がある。 The pure water or ultrapure water sterilization method has the following effects.

(イ)吸着殺菌塔に充填した吸着剤によって、純水又は
超純水中のバクテリア及びバクテリア胞子又は芽胞が捕
捉され、処理水中への流出が防止される。
(B) The adsorbent filled in the adsorption sterilization tower traps bacteria and bacterial spores or spores in pure water or ultrapure water and prevents them from flowing out into the treated water.

(ロ)また純水又は超純水中にわずかに残る有機物質
が、吸着濃縮されて吸着殺菌塔内の有機物質濃度が純水
又は超純水中に比較して高くなるため、バクテリア胞子
又は芽胞の発芽が促進される。
(B) In addition, a small amount of organic substances remaining in pure water or ultrapure water is adsorbed and concentrated, and the concentration of organic substances in the adsorption sterilization tower becomes higher than that in pure water or ultrapure water. Germination of spores is promoted.

従って、純水又は超純水中のバクテリア及びバクテリ
ア胞子又は芽胞が吸着殺菌塔で捕捉され、かつ耐熱性の
高いバクテリア胞子又は芽胞は、吸着殺菌塔内で耐熱性
の低い栄養細胞へと変換される。
Therefore, bacteria and bacterial spores or spores in pure water or ultrapure water are trapped in the adsorption sterilization tower, and high heat-resistant bacterial spores or spores are converted into nutrient cells with low heat resistance in the adsorption sterilization tower. It

加熱装置では、吸着殺菌塔を50〜95℃に加熱し、数十
分ないし数時間維持することによって、吸着殺菌塔内の
バクテリア栄養細胞を殺菌する。
In the heating device, the adsorption sterilization tower is heated to 50 to 95 ° C. and maintained for several tens of minutes to several hours to sterilize the bacterial nutrient cells in the adsorption sterilization tower.

被処理水をおのおの数時間ないし数日間通水した吸着
殺菌塔の加熱殺菌を行う。この熱殺菌から次の熱殺菌ま
での間隔は、バクテリアの増殖が進み吸着殺菌塔からの
流出が始まる期間に比較して十分に短いことが必要であ
り、かつバクテリア胞子又は芽胞が栄養細胞に変換する
だけの時間があることが望ましい。
Heat sterilization of an adsorption sterilization tower in which water to be treated is passed for several hours to several days. The interval from this heat sterilization to the next heat sterilization must be sufficiently short compared to the period in which bacteria grow and the outflow from the adsorption sterilization tower begins, and bacterial spores or spores are converted into vegetative cells. It is desirable to have time to do it.

吸着殺菌塔相互の持続及び分岐を行う配管では、被処
理水を、熱殺菌工程にある吸着殺菌塔を除く、吸着殺菌
塔それぞれに配水し、集水する。
In the pipes for maintaining and branching the adsorption sterilization towers, the water to be treated is distributed to and collected in each adsorption sterilization tower except the adsorption sterilization tower in the heat sterilization step.

熱殺菌後の吸着殺菌塔に、処理水の通水方向と反対の
方向に他の吸着殺菌塔の処理水を通水する。この処理に
よって殺菌されたバクテリア及びバクテリア胞子又は芽
胞が系外に排出される。
The treated water of another adsorption sterilization tower is passed through the adsorption sterilization tower after heat sterilization in the direction opposite to the direction of water flow of the treated water. By this treatment, sterilized bacteria and bacterial spores or spores are discharged out of the system.

従って、該純水又は超純水殺菌装置全体としては、常
時殺菌された処理水が得られる。
Therefore, as a whole of the pure water or ultrapure water sterilizer, treated water that is always sterilized can be obtained.

〔実施例〕〔Example〕

以下に本発明を実施例及び比較例を挙げて説明する
が、本発明は次の実施例に限定されるものではない。
The present invention will be described below with reference to examples and comparative examples, but the present invention is not limited to the following examples.

実施例1 水道水を原水として逆浸透装置、真空脱気装置、イオ
ン変換塔及びメンブレンフィルタ等を構成された1次純
水製造装置で処理して得られた1次純水を、第3図に示
すように吸着殺菌塔A5a及び吸着殺菌塔B5b、紫外線殺菌
塔8、イオン交換樹脂カートリッジ9、限外ろ過装置10
で構成された2次純水製造装置で処理した。
Example 1 FIG. 3 shows primary pure water obtained by treating tap water as raw water with a primary pure water producing apparatus configured with a reverse osmosis apparatus, a vacuum degassing apparatus, an ion conversion tower, a membrane filter and the like. As shown in Figure 5, adsorption sterilization tower A5a and adsorption sterilization tower B5b, ultraviolet sterilization tower 8, ion exchange resin cartridge 9, ultrafiltration device 10
Was treated with the secondary pure water producing apparatus constituted by.

吸着殺菌塔A及びBをあらかじめ加熱装置3a、3bで加
熱し、80℃に1時間保持して殺菌処理を行い、1次純水
を吸着殺菌塔A及びBにそれぞれ50/hで通水し、つい
で紫外線殺菌塔、イオン交換カートリッジ及び限外ろ過
装置で処理して超純水を得た。
The adsorption sterilization towers A and B are preheated by the heating devices 3a and 3b and kept at 80 ° C for 1 hour for sterilization treatment, and primary pure water is passed to the adsorption sterilization towers A and B at 50 / h respectively. Then, it was treated with an ultraviolet sterilization tower, an ion exchange cartridge and an ultrafiltration device to obtain ultrapure water.

吸着殺菌塔に1次純水を24時間通水した後、吸着殺菌
塔Bの通水量を100/hにするとともに吸着殺菌塔Aへ
の1次純水の通水を停止した。通水を停止した吸着殺菌
塔Aを加熱装置3aで加熱し、80℃に加温した。この時の
加熱パターンは、45分間で昇温、80℃で1時間保持した
後、吸着殺菌塔Bの処理水の一部を吸着殺菌塔Aの下部
に導入して逆洗を行いながら、10分間で降温した。
After passing the primary pure water through the adsorption sterilization tower for 24 hours, the amount of water passing through the adsorption sterilization tower B was set to 100 / h and the passage of the primary pure water through the adsorption sterilization tower A was stopped. The adsorption sterilization tower A whose water flow was stopped was heated by the heating device 3a and heated to 80 ° C. The heating pattern at this time was such that the temperature was raised in 45 minutes and kept at 80 ° C. for 1 hour, then a part of the treated water in the adsorption sterilization tower B was introduced into the lower part of the adsorption sterilization tower A to carry out backwashing. The temperature was lowered in minutes.

吸着殺菌塔Aの殺菌処理終了後、吸着殺菌塔Aに1次
純水を50/h通水するとともに吸着殺菌塔Bへの通水量
を50/hとした。
After the sterilization treatment of the adsorption sterilization tower A, primary pure water was passed through the adsorption sterilization tower A at 50 / h, and the water flow rate to the adsorption sterilization tower B was set at 50 / h.

吸着殺菌塔Bは、通水開始後48時間すなわち吸着殺菌
塔A殺菌処理開始後24時間、1次純水を通水した後、前
記加熱殺菌と同様の条件で加熱殺菌を行った。
In the adsorption sterilization tower B, primary pure water was passed for 48 hours after the start of water flow, that is, for 24 hours after the start of the sterilization treatment of the adsorption sterilization tower A, and then heat sterilization was performed under the same conditions as the heat sterilization.

その後、吸着殺菌塔A及びBをそれぞれ48時間間隔
で、1次純水の通水及び殺菌を繰り返した。約1ケ月後
の2次純水の生菌を計測した。
Then, the adsorption sterilization towers A and B were repeatedly passed through the primary pure water and sterilized at intervals of 48 hours. The viable bacteria in the secondary pure water after about one month were measured.

これはJIS K0550(1988)に準じて、M−TGE培地を用
い、培養温度25℃で5日間培養し、形成したコロニーを
計数して生菌数を求めた。
According to JIS K0550 (1988), this was cultivated for 5 days at a culturing temperature of 25 ° C. using an M-TGE medium, and the formed colonies were counted to determine the viable cell count.

その結果を第1表−Iに示す。 The results are shown in Table 1-I.

比較列1 前記実施例と同様の装置を用い、吸着殺菌塔それぞれ
に168時間間隔で、1次純水の通水及び前記加熱条件で
の加熱殺菌を繰り返し行った。
Comparative column 1 Using the same apparatus as in the above-mentioned example, the primary pure water was passed through the adsorption sterilization tower at intervals of 168 hours and the heat sterilization under the above heating conditions was repeated.

約1ケ月後の超純水の生菌数は第1表−IIのようにな
った。
The number of viable bacteria in ultrapure water after about 1 month is shown in Table 1-II.

比較例2 前記1次純水を、吸着殺菌塔を通さず、紫外線殺菌
塔、イオン交換樹脂カートリッジ、限外ろ過装置のみで
構成された2次純水製造装置で処理した。約1ケ月後の
2次純水の生菌数は第1表−IIIのようになった。
Comparative Example 2 The primary pure water was treated in a secondary pure water producing apparatus composed only of an ultraviolet sterilization tower, an ion exchange resin cartridge and an ultrafiltration device without passing through the adsorption sterilization tower. The number of viable bacteria in the secondary pure water after about 1 month is shown in Table 1-III.

〔発明の効果〕 以上のように本発明の方法によって、純水又は超純水
中のバクテリア及びバクテリア胞子又は芽胞を効果的に
殺菌でき、純水又は超純水中の生菌を著しく減少させる
ことができた。
[Effects of the Invention] As described above, according to the method of the present invention, bacteria and bacterial spores or spores in pure water or ultrapure water can be effectively sterilized, and viable bacteria in pure water or ultrapure water can be significantly reduced. I was able to.

また、2又はそれ以上の吸着殺菌塔を並列に設置する
ことによって、通水を停止することなく、常時殺菌され
た処理水を得ることができた。
Further, by installing two or more adsorption sterilization towers in parallel, it was possible to obtain treated water that was always sterilized without stopping water flow.

【図面の簡単な説明】[Brief description of drawings]

第1図及び第2図は、本発明に用いる装置の一例を示す
概略断面図であり、第3図は本発明の方法を組み込んだ
2次純水製造装置の概略工程図である。 1,1a,1b……供給水バルブ、 2,2b,2b……逆洗水排出バルブ、 3,3a,3b……加熱装置、 4,4a,4b……吸着剤、 5,5a,5b……吸着殺菌塔、 6,6a,6b……処理水バルブ、 7,7a,7b……逆洗水供給バルブ、 8……紫外線殺菌塔、 9……イオン交換樹脂カートリッジ、 10……限外ろ過装置
1 and 2 are schematic cross-sectional views showing an example of an apparatus used in the present invention, and FIG. 3 is a schematic process diagram of a secondary pure water producing apparatus incorporating the method of the present invention. 1,1a, 1b …… Supply water valve, 2,2b, 2b …… Backwash water discharge valve, 3,3a, 3b …… Heating device, 4,4a, 4b …… Adsorbent, 5,5a, 5b… … Adsorption sterilization tower, 6,6a, 6b …… Treatment water valve, 7,7a, 7b …… Backwash water supply valve, 8 …… Ultraviolet sterilization tower, 9 …… Ion exchange resin cartridge, 10 …… Ultrafiltration apparatus

フロントページの続き (72)発明者 中島 健 神奈川県藤沢市本藤沢4丁目2番1号 株式会社荏原総合研究所内 (72)発明者 嶋 弘之 東京都大田区羽田旭町11番1号 株式会 社荏原製作所内 (72)発明者 辻村 学 東京都大田区羽田旭町11番1号 株式会 社荏原製作所内 (56)参考文献 特開 昭49−70450(JP,A) 特開 昭64−51189(JP,A)Continued Front Page (72) Ken Nakajima Ken 2 1-2-1, Fujisawa, Kanagawa Prefecture Ebara Research Institute Ltd. (72) Inventor Hiroyuki Shima 11-1 Haneda Asahi-cho, Ota-ku, Tokyo Stock Company EBARA MFG. (72) Inventor Manabu Tsujimura 11-1 Haneda Asahi-cho, Ota-ku, Tokyo Stock company EBARA MFG. (56) Reference JP-A-49-70450 (JP, A) JP-A-64-51189 JP, A)

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】水中のバクテリア及びバクテリア胞子又は
芽胞を、吸着剤を充填した吸着殺菌塔で捕捉し、捕捉し
たバクテリア並びに吸着殺菌塔内で発芽したバクテリア
胞子又は芽胞を、加熱処理によって殺菌することを特徴
とする純水又は超純水の殺菌方法。
1. Bacteria and bacterial spores or spores in water are captured by an adsorption sterilization tower filled with an adsorbent, and the captured bacteria and bacterial spores or spores germinated in the adsorption sterilization tower are sterilized by heat treatment. A method for sterilizing pure water or ultrapure water, characterized by:
【請求項2】前記吸着殺菌塔を2又はそれ以上並列に設
置し、被処理水をあらかじめ加熱殺菌処理した吸着殺菌
塔に通水するとともに、処理後の吸着殺菌塔のうち少な
くとも1塔は、被処理水の供給を停止して加熱処理し、
順次被処理水の通水と加熱殺菌処理とを繰り返し処理す
る請求項1記載の純水又は超純水の殺菌方法。
2. The adsorption sterilization towers are installed in parallel with each other, and the water to be treated is passed through the adsorption sterilization tower which has been heat-sterilized in advance, and at least one of the treated adsorption sterilization towers is Stop the supply of water to be treated and perform heat treatment,
The method of sterilizing pure water or ultrapure water according to claim 1, wherein the water to be treated and the heat sterilization treatment are sequentially repeated.
JP2036304A 1990-02-19 1990-02-19 Sterilization method of pure water or ultrapure water Expired - Lifetime JP2551492B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2036304A JP2551492B2 (en) 1990-02-19 1990-02-19 Sterilization method of pure water or ultrapure water

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2036304A JP2551492B2 (en) 1990-02-19 1990-02-19 Sterilization method of pure water or ultrapure water

Publications (2)

Publication Number Publication Date
JPH03242284A JPH03242284A (en) 1991-10-29
JP2551492B2 true JP2551492B2 (en) 1996-11-06

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Application Number Title Priority Date Filing Date
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Country Status (1)

Country Link
JP (1) JP2551492B2 (en)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5123817B2 (en) * 1972-11-09 1976-07-20
JPS6451189A (en) * 1987-08-24 1989-02-27 Yoshihisa Ishii Water purifying plant

Also Published As

Publication number Publication date
JPH03242284A (en) 1991-10-29

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