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JP2564836B2 - Method of coupling substrate of optical integrated circuit and optical fiber - Google Patents
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JP2564836B2 - Method of coupling substrate of optical integrated circuit and optical fiber - Google Patents

Method of coupling substrate of optical integrated circuit and optical fiber

Info

Publication number
JP2564836B2
JP2564836B2 JP62186040A JP18604087A JP2564836B2 JP 2564836 B2 JP2564836 B2 JP 2564836B2 JP 62186040 A JP62186040 A JP 62186040A JP 18604087 A JP18604087 A JP 18604087A JP 2564836 B2 JP2564836 B2 JP 2564836B2
Authority
JP
Japan
Prior art keywords
optical fiber
optical
integrated circuit
tip
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP62186040A
Other languages
Japanese (ja)
Other versions
JPS6429809A (en
Inventor
鈴木  誠
人美 大利
行宏 佐古
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Brother Industries Ltd
Original Assignee
Brother Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Brother Industries Ltd filed Critical Brother Industries Ltd
Priority to JP62186040A priority Critical patent/JP2564836B2/en
Publication of JPS6429809A publication Critical patent/JPS6429809A/en
Priority to US07/447,421 priority patent/US5018817A/en
Application granted granted Critical
Publication of JP2564836B2 publication Critical patent/JP2564836B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/255Splicing of light guides, e.g. by fusion or bonding
    • G02B6/2552Splicing of light guides, e.g. by fusion or bonding reshaping or reforming of light guides for coupling using thermal heating, e.g. tapering, forming of a lens on light guide ends
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • B23K26/40Removing material taking account of the properties of the material involved
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B37/00Joining burned ceramic articles with other burned ceramic articles or other articles by heating
    • C04B37/04Joining burned ceramic articles with other burned ceramic articles or other articles by heating with articles made from glass
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/30Optical coupling means for use between fibre and thin-film device
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/36Mechanical coupling means
    • G02B6/3628Mechanical coupling means for mounting fibres to supporting carriers
    • G02B6/3648Supporting carriers of a microbench type, i.e. with micromachined additional mechanical structures
    • G02B6/3652Supporting carriers of a microbench type, i.e. with micromachined additional mechanical structures the additional structures being prepositioning mounting areas, allowing only movement in one dimension, e.g. grooves, trenches or vias in the microbench surface, i.e. self aligning supporting carriers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00Materials to be soldered, welded or cut
    • B23K2103/50Inorganic materials other than metals or composite materials
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00Materials to be soldered, welded or cut
    • B23K2103/50Inorganic materials other than metals or composite materials
    • B23K2103/52Ceramics
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/36Mechanical coupling means
    • G02B6/3628Mechanical coupling means for mounting fibres to supporting carriers
    • G02B6/3684Mechanical coupling means for mounting fibres to supporting carriers characterised by the manufacturing process of surface profiling of the supporting carrier

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Plasma & Fusion (AREA)
  • General Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Ceramic Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Optical Couplings Of Light Guides (AREA)

Description

【発明の詳細な説明】 産業上の利用分野 この発明は、光集積回路の基板に形成した溝部に光フ
ァイバを臨ませて結合するに際し、光ファイバの先端と
光導波路との間に隙間が生ずるのを防止して、光伝達損
失を有効に抑制し得るようにした光集積回路の基板と光
ファイバとの結合方法に関するものである。
Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention provides a gap between a tip of an optical fiber and an optical waveguide when the optical fiber is faced to a groove formed in a substrate of an optical integrated circuit and coupled. The present invention relates to a method of coupling a substrate of an optical integrated circuit and an optical fiber, which is capable of effectively suppressing optical transmission loss by preventing the above.

従来技術 最近のオプトエレクトロニクスの進展に伴い、従来の
電気通信方式に代替するものとして光伝送方式が広く普
及する傾向にある。この光伝送方式は、光による情報の
伝送媒体として、例えば石英系や多成分系ガラスを材質
とする光ファイバを使用し、このため電磁誘導障害を受
けず、しかも大容量の情報伝送密度が得られる等の多く
の利点を有している。前述の光伝送技術では、発光素
子、導波路、受光素子等を集積化した光集積回路の基板
に前記光ファイバを結合し、この基板の光導波路と光フ
ァイバとの間で光情報の交換(光の入射・出射)が行な
われる。
2. Description of the Related Art With the recent development of optoelectronics, optical transmission systems tend to be widely used as alternatives to conventional telecommunication systems. This optical transmission system uses an optical fiber made of, for example, quartz or multi-component glass as a medium for transmitting information by light, and therefore, does not suffer from electromagnetic induction interference and yet has a large capacity of information transmission density. It has many advantages, including: In the above-mentioned optical transmission technology, the optical fiber is coupled to a substrate of an optical integrated circuit in which a light emitting element, a waveguide, a light receiving element, etc. are integrated, and optical information is exchanged between the optical waveguide and the optical fiber of the substrate ( Light is incident and emitted.

このため光集積回路基板には光ファイバを結合する必
要があり、当該基板と光ファイバとの結合方法の1つと
して、ガラス材やニオブ酸リチウム(LiNbO3)の結晶を
材質とする光集積回路基板に所要深さの溝を形成し、こ
の溝中に光ファイバの先端を臨ませて、両者を紫外線硬
化樹脂により接着する技術が知られている。この結合方
法によれば、光集積回路基板に溝が形成されていること
から、光ファイバを基板に対して高精度で位置決めし得
る利点がある。しかしその反面、基板はガラス材やニオ
ブ酸リチウム等のぜい性の高い難削材を材質とするの
で、前記溝部の加工が一般に困難であり、加工時に割れ
や欠けの如きチッピングを生じて不良率が高く、また光
ファイバの先端と溝部との間での光分散による損失が大
きい等の難点を有している。
For this reason, it is necessary to connect an optical fiber to the optical integrated circuit substrate, and as one of the methods for connecting the substrate and the optical fiber, an optical integrated circuit made of a glass material or a crystal of lithium niobate (LiNbO 3 ) is used. A technique is known in which a groove having a required depth is formed on a substrate, the tip of an optical fiber is exposed in the groove, and the both are bonded by an ultraviolet curable resin. According to this coupling method, since the groove is formed in the optical integrated circuit board, there is an advantage that the optical fiber can be positioned with respect to the board with high accuracy. On the other hand, however, since the substrate is made of a highly brittle and difficult-to-cut material such as glass or lithium niobate, it is generally difficult to process the groove, and chipping such as cracking or chipping occurs during processing, resulting in defects. It has a high rate and a large loss due to light dispersion between the tip of the optical fiber and the groove.

これらの課題に対する解決提案として、本件出願人に
より発明「ぜい性部材の溝加工方法」(特願昭61-28833
1号)が出願されている。この発明は、先端が角錐形状
をした角錐工具を回転させながら横方向に送り、被加工
物の表面に断面がV字形状をなす溝を切削加工すること
を特徴としており、この方法によって、ぜい性部材の光
集積回路基板にチッピングを生ずることなく所要の溝部
を形成することができる。
As a proposal for solving these problems, the applicant of the present invention invented "a method for forming a groove in a brittle member" (Japanese Patent Application No. 61-28833).
No. 1) has been filed. The present invention is characterized in that a pyramidal tool having a pyramidal tip is fed in a horizontal direction while being rotated, and a groove having a V-shaped cross section is cut on the surface of the workpiece. The required groove can be formed on the optical integrated circuit board of the insulating member without chipping.

発明が解決しようとする問題点 第5図に示すように、前記出願に係る発明によれば、
基板10の表面に断面がV字形状をなす溝12を所要深さで
形成することができ、このV字溝12に光ファイバ14の先
端を臨ませるだけで、基板10上の光導波路16に当該光フ
ァイバ14の中心軸線を高精度で位置決めすることが可能
である。しかしこの方法では、角錐工具を回転させなが
らV字溝12を切削するものであるために、V字溝12の最
奥部12aは、第5図から判明する如く、加工に使用した
角錐工具の先端角に対応した角度の斜面として形成され
る。しかも、V字溝12に結合される光ファイバ14として
は、その先端14aが中心軸線Cに対し直角になるよう加
工したファイバが使用される。
Problems to be Solved by the Invention As shown in FIG. 5, according to the invention of the above application,
A groove 12 having a V-shaped cross section can be formed on the surface of the substrate 10 to a required depth, and the optical waveguide 16 on the substrate 10 can be provided with the V-shaped groove 12 only by facing the tip of the optical fiber 14. The central axis of the optical fiber 14 can be positioned with high accuracy. However, in this method, since the V-shaped groove 12 is cut while rotating the pyramidal tool, the deepest portion 12a of the V-shaped groove 12 is, as shown in FIG. It is formed as a slope having an angle corresponding to the tip angle. Moreover, as the optical fiber 14 coupled to the V-shaped groove 12, a fiber processed so that the tip 14a thereof is perpendicular to the central axis C is used.

従って、V字溝12の定位置に光ファイバ14を臨ませた
際に、当該溝12の最奥部12aにおける上方に位置する光
導波路16の開放端16aと、光ファイバ14の先端14aとの間
には、不可避的に隙間Sが形成され、この隙間Sから光
の分散による損失を生じて、光伝送効率を低下させる問
題が派生している。
Therefore, when the optical fiber 14 is exposed to the fixed position of the V-shaped groove 12, the open end 16a of the optical waveguide 16 located above the innermost part 12a of the groove 12 and the tip 14a of the optical fiber 14 are separated from each other. A gap S is inevitably formed between the gaps, and the gap S causes a loss due to the dispersion of light, resulting in a problem of reducing the optical transmission efficiency.

発明の目的 この発明は、光集積回路の基板に光ファイバを結合す
るに際して顕在化する前記問題点に鑑み、これを好適に
解決するべく提案されたものであって、光ファイバと光
導波路との間に光の分散による損失が防止され、高効率
の光伝送を実現させ得る手段を提供することを目的とす
る。
SUMMARY OF THE INVENTION The present invention has been proposed in order to suitably solve the above problems that appear when coupling an optical fiber to a substrate of an optical integrated circuit. It is an object of the present invention to provide a means capable of realizing high-efficiency optical transmission by preventing loss due to light dispersion.

問題点を解決するための手段 前記問題点を克服し、所期の目的を達成するため本発
明は、光ファイバの先端を円錐状または半球状に加工
し、この光ファイバを光集積回路の基板に加工した断面
V字状で最奥に傾斜端部を有する溝部に位置させ、前記
加工後の光ファイバの先端を前記傾斜端部に指向させて
固定することを特徴とする。
Means for Solving the Problems In order to overcome the problems and achieve the intended object, the present invention processes the tip of an optical fiber into a conical shape or a hemispherical shape, and forms the optical fiber into a substrate of an optical integrated circuit. It is characterized in that it is positioned in a groove portion having a V-shaped cross section processed into a deepest position and having an inclined end portion at the innermost side, and the tip of the optical fiber after the processing is directed and fixed to the inclined end portion.

作用 本発明に係る光集積回路の基板と光ファイバとの結合
方法によれば、光ファイバのコアとなる部分と光導波路
とを密着状態で結合させることが可能になる。
Effects According to the method for coupling the substrate of the optical integrated circuit and the optical fiber according to the present invention, it becomes possible to couple the core portion of the optical fiber and the optical waveguide in a close contact state.

実施例 次に、本発明に係る光集積回路の基板と光ファイバと
の結合方法につき、好適な実施例を挙げて、添付図面を
参照しながら説明する。なお第5図に関連して既に説明
した部材と同一の部材については、同じ符号で指示する
ものとする。
Embodiments Next, a method for coupling a substrate of an optical integrated circuit and an optical fiber according to the present invention will be described with reference to the accompanying drawings with reference to preferred embodiments. The same members as those already described with reference to FIG. 5 are designated by the same reference numerals.

ガラス材やニオブ酸リチウムを材質とする光集積回路
基板10の表面には、前述の特願昭61-288331号に係る方
法により断面がV字形状をなす溝12が形成されている。
すなわち光集積回路基板10の表面に、超硬合金からなる
角錐工具を回転させながら横方向に送って切削を行な
い、この切削を複数回反復することによって、断面がV
字形状をなす溝12が、前記チッピングの全くない良好な
状態で加工される。この場合において、V字溝12の最奥
部12aには、前述したように、角錐工具の先端角と対応
した角度の斜面が形成されている。
A groove 12 having a V-shaped cross section is formed on the surface of an optical integrated circuit substrate 10 made of a glass material or lithium niobate by the method described in Japanese Patent Application No. 61-288331.
That is, a pyramidal tool made of cemented carbide is rotated and fed in the lateral direction on the surface of the optical integrated circuit substrate 10 to perform cutting, and the cutting is repeated a plurality of times so that the cross section is V-shaped.
The groove 12 having a V shape is machined in a good state without any chipping. In this case, the innermost portion 12a of the V-shaped groove 12 is formed with a slope having an angle corresponding to the tip angle of the pyramid tool, as described above.

本発明では、光ファイバ14の先端を円錐状または半球
状に加工し、この光ファイバ14の加工後のコア端部14a
を、前述した光集積回路基板10におけるV字溝12の傾斜
端部12aに指向させた状態で固定することを内容とす
る。すなわち第2図は、光ファイバ14の先端を円錐状に
加工する手段の1実施例を示すものであって、光ファイ
バ14をシース状の保持体18で保持し、該光ファイバ14の
先端14aをこの保持体18から僅かに延出させている。そ
して垂直な回転軸20に固定されて水平に回転する円盤状
の研削砥石22の研削面22aに対し、前記保持体18を所要
の角度θをもって近接させ、光ファイバ14の先端14aを
前記研削砥石22によって研磨する。これにより光ファイ
バ14のコアとなる部分の先端14aは、第3図に示すよう
に、2θの角度を有する円錐形状に加工される。
In the present invention, the tip of the optical fiber 14 is processed into a conical shape or a hemispherical shape, and the processed core end 14a of the optical fiber 14 is processed.
Is fixed in a state of being directed to the inclined end portion 12a of the V-shaped groove 12 in the optical integrated circuit board 10 described above. That is, FIG. 2 shows an embodiment of means for processing the tip of the optical fiber 14 into a conical shape, in which the optical fiber 14 is held by a sheath-shaped holding body 18, and the tip 14a of the optical fiber 14 is held. Is slightly extended from this holder 18. Then, with respect to the grinding surface 22a of the disk-shaped grinding wheel 22 which is fixed to the vertical rotating shaft 20 and rotates horizontally, the holding body 18 is brought close to the grinding surface 22a at a required angle θ, and the tip 14a of the optical fiber 14 is moved to the grinding wheel Polish with 22. As a result, the tip 14a of the core portion of the optical fiber 14 is processed into a conical shape having an angle of 2θ, as shown in FIG.

第4図は光ファイバ14の先端を半球状に加工する手法
の1実施例を示すものであって、2本の対向し合う放電
電極24,26に高電圧を印加し、その電弧形成間隙SG中に
アーク放電を発生させる。そして光ファイバ14の先端を
電弧形成間隙SGに介在させてアーク放電により溶融させ
れば、コアとなる部分の先端14aが溶融時の表面張力に
より半球状に加工される。
FIG. 4 shows an embodiment of a method of processing the tip of the optical fiber 14 into a hemispherical shape. A high voltage is applied to the two discharge electrodes 24 and 26 facing each other, and the arc forming gap SG Generate an arc discharge inside. When the tip of the optical fiber 14 is placed in the electric arc forming gap SG and melted by arc discharge, the tip 14a of the core portion is processed into a hemispherical shape due to the surface tension during melting.

このように加工した光ファイバ14を、前述の加工に係
る光集積回路基板10のV字溝12に臨ませると、当該光フ
ァイバ14の円錐形状または半球状をなすコア先端14a
は、第1図に示すように、光集積回路基板10における光
導波路16の開放端16aに指向して密着可能となる。従っ
て光ファイバ14と光導波路16との間に隙間が形成される
ことはなく、光の分散による損失を有効に抑制して、高
い光伝送効率を得ることができる。なおV字溝12と光フ
ァイバ14とは、例えば紫外線硬化樹脂により接着固化さ
れる。また前記V字溝12の存在によって、光ファイバ14
の中心軸線は基板10上の光導波路16に高精度で位置決め
される。
When the optical fiber 14 thus processed faces the V-shaped groove 12 of the optical integrated circuit board 10 according to the above-mentioned processing, the conical or hemispherical core tip 14a of the optical fiber 14 is processed.
As shown in FIG. 1, the light can be directed toward the open end 16a of the optical waveguide 16 in the optical integrated circuit board 10 and can be brought into close contact therewith. Therefore, no gap is formed between the optical fiber 14 and the optical waveguide 16, the loss due to the dispersion of light is effectively suppressed, and high optical transmission efficiency can be obtained. The V-shaped groove 12 and the optical fiber 14 are adhered and solidified with, for example, an ultraviolet curable resin. Further, due to the presence of the V-shaped groove 12, the optical fiber 14
The central axis of is positioned on the optical waveguide 16 on the substrate 10 with high accuracy.

発明の効果 以上説明した如く、本発明に係る光集積回路の基板と
光ファイバとの結合方法は、光ファイバを光集積回路の
基板に加工したV字溝に位置させて、その円錐状または
半球状に加工したコア先端をV字溝の傾斜端部に指向さ
せて固定することを内容とし、従って光ファイバと光導
波路との間で光が分散する損失を有効に抑制して、高い
光伝送効率を得ることができる。また基板表面に形成し
たV字溝に光ファイバを臨ませるだけで、基板上の光導
波路に当該光ファイバき中心軸線を高精度で位置決めさ
せることができる。
As described above, in the method for coupling the substrate of the optical integrated circuit and the optical fiber according to the present invention, the optical fiber is positioned in the V-shaped groove formed in the substrate of the optical integrated circuit, and the conical or hemispherical shape is formed. The purpose is to fix the tip of the core processed into a V-shaped groove by directing it toward the slanted end portion of the V-shaped groove, and thus effectively suppressing the loss of light dispersion between the optical fiber and the optical waveguide to achieve high optical transmission. You can get efficiency. Further, only by exposing the optical fiber to the V-shaped groove formed on the surface of the substrate, the central axis line of the optical fiber can be positioned with high accuracy in the optical waveguide on the substrate.

【図面の簡単な説明】[Brief description of drawings]

第1図は本発明に係る方法により結合された光集積回路
の基板と光ファイバとの結合状態の実施例を示す縦断面
図、第2図は第1図に示す方法に使用される光ファイバ
の先端を円錐形状に加工する手段の1例を示す説明図、
第3図は第2図に示す手段により加工された光ファイバ
の先端形状を示す説明図、第4図は第1図に示す方法に
使用される光ファイバの先端を半球状に加工する手段の
1例を示す説明図、第5図は従来技術に係る光集積回路
基板の溝部と光ファイバとの結合状態を示す縦断面図で
ある。 10……基板、12……V字溝 12a……最奥部、14……光ファイバ 14a……先端、16……光導波路 16a……開放端、18……保持体 20……回転軸、22……研削砥石 22a……研削面、24,26……放電電極
FIG. 1 is a vertical cross-sectional view showing an embodiment of a state in which a substrate of an optical integrated circuit and an optical fiber are coupled by the method according to the present invention, and FIG. 2 is an optical fiber used in the method shown in FIG. Explanatory diagram showing an example of means for processing the tip of the cone into a conical shape,
FIG. 3 is an explanatory view showing the tip shape of the optical fiber processed by the means shown in FIG. 2, and FIG. 4 shows a means for processing the tip of the optical fiber used in the method shown in FIG. FIG. 5 is an explanatory view showing an example, and FIG. 5 is a vertical cross-sectional view showing a coupling state between a groove portion and an optical fiber of an optical integrated circuit substrate according to a conventional technique. 10 …… Substrate, 12 …… V-shaped groove 12a …… Deepest part, 14 …… Optical fiber 14a …… Tip, 16 …… Optical waveguide 16a …… Open end, 18 …… Holder 20 …… Rotation axis, 22 …… Grinding wheel 22a …… Grinding surface, 24,26 …… Discharge electrode

Claims (3)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】光ファイバの先端を円錐状または半球状に
加工し、この光ファイバを光集積回路の基板に加工した
断面V字状で最奥に傾斜端部を有する溝部に位置させ、
前記加工後の光ファイバの先端を前記傾斜端部に指向さ
せて固定することを特徴とする光集積回路の基板と光フ
ァイバとの結合方法。
1. A tip of an optical fiber is processed into a conical shape or a hemispherical shape, and the optical fiber is positioned in a groove portion having a V-shaped cross section formed on a substrate of an optical integrated circuit and having an inclined end portion at the innermost side,
A method for coupling a substrate of an optical integrated circuit and an optical fiber, characterized in that the tip of the processed optical fiber is directed and fixed to the inclined end portion.
【請求項2】前記光ファイバの先端を回転中の研削砥石
に所要角度で接触させ、これにより当該先端を円錐状に
加工することを特徴とする特許請求の範囲第1項記載の
光集積回路の基板と光ファイバとの結合方法。
2. The optical integrated circuit according to claim 1, wherein the tip of the optical fiber is brought into contact with a rotating grinding wheel at a required angle to thereby process the tip into a conical shape. Method of connecting the substrate to the optical fiber.
【請求項3】前記光ファイバの先端を、アーク放電によ
り溶融させて半球状に加工することを特徴とする特許請
求の範囲第1項記載の光集積回路の基板と光ファイバと
の結合方法。
3. The method for coupling a substrate of an optical integrated circuit and an optical fiber according to claim 1, wherein the tip of the optical fiber is melted by arc discharge and processed into a hemispherical shape.
JP62186040A 1987-07-24 1987-07-24 Method of coupling substrate of optical integrated circuit and optical fiber Expired - Fee Related JP2564836B2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP62186040A JP2564836B2 (en) 1987-07-24 1987-07-24 Method of coupling substrate of optical integrated circuit and optical fiber
US07/447,421 US5018817A (en) 1987-07-24 1989-12-07 Method of optically coupling optical fiber to waveguide on substrate, and optical device produced by the method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62186040A JP2564836B2 (en) 1987-07-24 1987-07-24 Method of coupling substrate of optical integrated circuit and optical fiber

Publications (2)

Publication Number Publication Date
JPS6429809A JPS6429809A (en) 1989-01-31
JP2564836B2 true JP2564836B2 (en) 1996-12-18

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP62186040A Expired - Fee Related JP2564836B2 (en) 1987-07-24 1987-07-24 Method of coupling substrate of optical integrated circuit and optical fiber

Country Status (1)

Country Link
JP (1) JP2564836B2 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2672307B2 (en) * 1987-11-17 1997-11-05 富士通株式会社 Optical fiber connection structure for waveguide
US4916497A (en) * 1988-05-18 1990-04-10 Harris Corporation Integrated circuits including photo-optical devices and pressure transducers and method of fabrication
US5037765A (en) * 1988-05-18 1991-08-06 Harris Corporation Method of fabricating integrated circuits including photo optical devices and pressure transducers
US5070596A (en) * 1988-05-18 1991-12-10 Harris Corporation Integrated circuits including photo-optical devices and pressure transducers and method of fabrication
DE4344179C1 (en) * 1993-12-23 1994-10-27 Krone Ag Coupling device between a glass fibre (optical fibre) and a dielectric waveguide integrated on a substrate
JP4528970B2 (en) * 2005-03-28 2010-08-25 国立大学法人東京農工大学 Waveguide connection structure and optical branching coupling element
JP4823278B2 (en) * 2008-08-04 2011-11-24 パナソニック株式会社 Coil manufacturing method

Also Published As

Publication number Publication date
JPS6429809A (en) 1989-01-31

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