JP2579045B2 - Punch device - Google Patents

Description

Description: TECHNICAL FIELD The present invention relates to a punching device for performing a boring process, and particularly to a punching device for a ceramic green sheet (hereinafter simply referred to as a green sheet) in a workpiece. The present invention relates to a punching device capable of improving positioning accuracy and moving a punch pin at a high speed with a simple structure, and at the same time, removing drilling debris.

[Related Art] For example, as a substrate of a semiconductor integrated circuit device used in a large-sized computer or the like, a multilayer wiring substrate made of ceramic is generally used. The manufacturing process of this ceramic substrate is as follows. First, a through hole is opened by a punching device on a base substrate called a green sheet made of plate-like alumina, and then molybdenum (Mo) or tungsten (W) is formed on the surface. In general, a conductor paste is printed in a predetermined shape, and the conductor paste is also filled into the inner wall of the opened through-hole, and a predetermined number of these are laminated and simultaneously sintered to manufacture. .

Also, in the manufacturing process of the ceramic substrate, an important work to determine the performance of the multilayer wiring board is to open a through-hole hole for electrically conducting between each layer wiring,
For example, a punch device described in Japanese Patent Application Laid-Open No. 1-171800 or the like is used, and the processed portion has a configuration as shown in FIG.

That is, the green sheet 1 to be punched is placed on the die base 2 corresponding to the lower side of the punch device, and the die 3 is fixed corresponding to the punching position of the die base 2.

The upper die of the punch device includes a base plate 4, a punch pin holder 5 fixed below the base plate 4, and a stripper plate 6 fixed further below the punch pin holder 5.

A sleeve 7 is provided in the through hole of the punch pin holder 5.
The ball guide 8 is inserted into the sleeve 7, and a stripper 9 is inserted below the ball guide 8 so as to contact the stripper plate 6.

A spring receiver 10 is inserted into the through hole of the base plate 4 so as to be in contact with the punch pin holder 5, and a spring 11 is further inserted into contact with the spring receiver 10.

Further, a spring is provided in the through hole of the base plate 4.
A spring holder 12 is inserted so as to be in contact with 11, and a pin holder 14 having a flange 13 formed in contact with the spring receiver 12.
Are movably inserted into the hole guide 8.

Further, a pin sleeve 15 is inserted above the pin holder 14, a cutting edge 16a is formed at one end of the pin sleeve 15, and a punch pin 16 that passes through the base plate 4, the punch pin holder 5 and the stripper plate 6 is inserted. I have. The screw 17 is screwed to one end of the pin sleeve 15 so that one end is in contact with the punch pin 16.

When the green sheet 1 is positioned on the die base 2 in the processing section having such a configuration, the punch pin 16 is moved in the axial direction of the green sheet 1 by the operation of a driving means (not shown). Drill holes.

The diameter of the through-hole formed in this way has been reduced in size with higher density and higher integration, and a hole having a diameter of 0.2 mm or less is required. For this, punch pins 16
The diameter of the cutting edge 16a of the punch pin 16 is becoming thinner, and the clearance between the cutting edge 16a of the punch pin 16 and the die 3 is 0.01
It is formed to about 0.03 mm.

Further, in order to increase the efficiency of the drilling operation, it is required to increase the number of punch pins 16 provided in the punch device. For this purpose, a punch pin incorporated in a punch device
16 is required to be thinner, and the outer diameter of the shaft is 0.3 to 1
mm.

[Problems to be Solved by the Invention] However, in the above-described conventional technology, the sliding portion of the punch pin 16 is eliminated and the punch pin 16 is positioned with high accuracy. The structure is complicated. For this reason, the number of parts increases, and there is a problem that it is difficult to obtain the position accuracy of the punch pin 16 due to the influence of the processing accuracy of each part and the accumulated error when combining them.

In addition, since the cutting edge of the punch pin 16 is not restrained, the pin holder 14, the pin sleeve 15, or the punch pin 16 is thermally deformed by the heat generated by the driving means. There is a problem that it is easy.

Further, in the conventional punching apparatus, there is a problem that the number of punch pins 16 arranged in the punching apparatus cannot be increased because the structure is complicated and the number of parts is large.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a punch device, a punch pin, and a guide member for a punch pin which can be positioned with high accuracy with a simple configuration.

Another object of the present invention is to provide a punch device, a punch pin, and a guide member capable of reducing abrasion of a punch pin and a guide member, preventing deformation due to heat rise, and removing drilling debris. It is in.

Still another object of the present invention is to provide a punch device, a punch pin, and a guide member for the punch pin and the guide member capable of improving the wear resistance of the guide pin and the guide member.

The above and other objects and novel features of the present invention are as follows.
It will be apparent from the description of this specification and the accompanying drawings.

[Means for Solving the Problems] Of the inventions disclosed in the present application, the outline of a representative one will be briefly described as follows.

That is, the punching device of the present invention is a punching device that drives a single or a plurality of punch pins held by a punch pin holder in an axial direction thereof to make a single or a plurality of holes in a workpiece, Above and below the punch pin holder, a base plate and a stripper plate having a through hole for driving the punch pin are integrally fixed, and the shaft of the punch pin slides in the through holes of the base plate and the stripper plate. A guide member having a through hole formed therein is provided therein, and the shaft of the punch pin is slidably fitted in the through hole of the guide member.

Also, a flow path for the compressed gas is formed in the punch pin holder, and the shaft of the punch pin is slidably fitted into the through hole of the guide member through the flow path.

Further, a stripper chamber in which a through-hole through which the blade of a punch pin penetrates is formed in a through-hole of the stripper plate is provided below the guide member, and a shaft of the punch pin is provided with a compressed gas formed in the punch pin holder. The guide member penetrates the flow passage and is slidably fitted in the through hole of the guide member.

In this case, the punch pin and the guide member are made of a sintered body,
It is formed of a sintered body of the same material, a sintered body of a cemented carbide, or a sintered body of fine ceramics.

The punch pin of the present invention is formed of a sintered body, and has at least one spiral groove formed at the end of the shaft portion on the stripper plate side.

Further, the guide member of the punch pin of the present invention is formed of a sintered body, and has at least one spiral groove formed on the inner surface of the through hole.

[Operation] According to the punch device described above, a guide member in which a through-hole through which a shaft portion of a punch pin slides is formed in a through-hole of a base plate and a stripper plate which are integrally fixed above and below a punch pin holder, respectively. Are respectively provided, and the shaft portion of the punch pin is slidably fitted into the through hole of the guide member, whereby the positioning structure of the punch pin can be formed only by the guide member. Thereby, the positioning structure is simplified, and the positioning of the punch pin can be easily performed with the simple structure.

According to the other punching device described above, the compressed gas flow passage is formed in the punch pin holder, and the punch pin shaft is slidably fitted into the through hole of the guide member through the flow passage. This allows the compressed gas to flow between the guide member and the shaft of the punch pin through the flow passage.
Thereby, abrasion between the guide member and the punch pin is reduced, and the movement of the punch pin can be performed smoothly. At the same time, it is possible to prevent drilling debris of the workpiece generated during drilling from entering between the guide member and the punch pin.

Further, according to the other punching apparatus described above, a stripper chamber in which a through-hole through which the cutting edge of a punch pin penetrates is formed in a through-hole of the stripper plate is provided below the guide member, and a shaft of the punch pin is provided with a punch. By passing through the compressed gas flow passage formed in the pin holder and slidably fitted in the through hole of the guide member, the compressed gas can flow toward the workpiece along the cutting edge of the punch pin. it can. As a result, it is possible to remove drilling debris attached to the cutting edge of the punch pin. At the same time, drilling dust adhering to the workpiece can be removed by the compressed gas.

Also, in this case, the guide member and the punch pin,
By being formed of a sintered body, a sintered body of the same material, a sintered body of a cemented carbide, or a sintered body of fine ceramics, the wear resistance between the guide member and the punch pin can be improved. Thereby, the service life of the punch pin and the guide member can be extended.

Further, the punch pin of the present invention is formed of a sintered body, and at least one spiral groove is formed at the end of the shaft portion on the stripper plate side, so that the compressed gas between the guide member and the punch pin is formed. Flow can be improved.
Thereby, the abrasion of the guide member and the punch pin is further reduced, and at the same time, it is possible to remove drilling chips from the workpiece.

Further, the guide member of the punch pin of the present invention is formed of a sintered body and has at least one spiral groove formed on the inner surface of the through-hole, so that the guide member and the punch pin are formed similarly to the punch pin. , The flow of the compressed gas can be improved. Thereby, the abrasion of the guide member and the punch pin is further reduced, and at the same time, it is possible to remove drilling chips from the workpiece.

Embodiment 1 FIG. 1 is a cross-sectional view showing a main part of a punch device according to an embodiment of the present invention, FIG. 2 is a cross-sectional view showing a punch pin and a guide member used in the punch device of the present embodiment, FIG. 3 is a sectional view taken along line III-III in FIG.

First, the configuration of the punch device of the present embodiment will be described with reference to FIG.

The punch device of the present embodiment is, for example, a punch device 22 for punching a green sheet 21 as a workpiece, a die base 23 on which the green sheet 21 is placed, and fixed to the die base 23 at predetermined intervals. A lower mold having a plurality of dies 24, a base plate 25 having a plurality of through holes formed at predetermined intervals, fixed below the base plate 25,
Punch pin holder 26 having a plurality of through holes communicating with through holes of base plate 25 and stripper plate
27, an upper die having a plate 28 fixed above the base plate 25 and similarly formed with a plurality of through holes communicating with the through holes of the base plate 25.

And the upper base plate 25, punch pin holder
A plurality of punch pins 29 for piercing the green sheet 21 are movably inserted into through holes formed in the stripper plate 26, the stripper plate 27, and the plate.

In the die base 23, a plurality of through holes are formed at predetermined intervals, that is, at intervals at which the plurality of punch pins 29 are arranged,
Dies 24 are inserted and fixed in the small diameter portions of these through holes. The die 24 has a through hole having a diameter slightly larger than the cutting edge of the punch pin 29.

A plurality of through holes are formed in the base plate 25 at predetermined intervals in which a plurality of punch pins 29 are arranged similarly to the die base 23, and in these through holes, through holes having substantially the same diameter as the shaft of the punch pin 29 are formed. The inserted guide bush (guide member) 30 is inserted and fixed.

The punch pin holder 26 is fixed below the base plate 25 and has a plurality of through holes communicating with the through holes of the base plate 25, and a source of compressed gas, And a flow passage 26a is formed.

The stripper plate 27 is fixed below the punch pin holder 26, and the base plate 25 and the punch pin holder
A plurality of through holes communicating with the 26 through holes are formed.
A guide bush (guide member) 32 having a through-hole having substantially the same diameter as the shaft of the punch pin 29 is inserted and fixed into these through-holes. To this end, a stripper chamber 33 in which a through hole having a diameter slightly larger than the cutting edge of the punch pin 29 is formed on the die 24 side is fixed.

The plate 28 is fixed above the base plate 25,
A plurality of through holes communicating with the through holes of the base plate 25 are formed. The bush 34 is inserted and fixed in the through hole of the plate 28.

A spring 35 is inserted into the bush 34, and a spring receiver 36 is movably inserted so as to be positioned above the spring 35. The spring receiver 36 is locked by fixing a stripper plate 37 in which a through hole communicating with the through hole of the plate 28 is formed.

The punch pin 29 has a second end at the end of the shaft portion on the side of the cutting edge 29a.
One spiral groove 29b as shown in FIG. 3 and FIG. 3 is formed, and the other end side is screwed by a screw 39 so as to be in contact with the pin sleeve.

Then, the punch pin 29 is moved from the pin sleeve 38 side to the pin sleeve 38, the spring receiver 36, and the guide bushes 32, 30.
And its cutting edge 29a is inserted so as to penetrate the stripper chamber 33.

The punch pins 29 and the guide bushes 30 and 32 in this embodiment are formed of a sintered body of fine ceramics having a high lubricating effect. Also, the edge of the punch pin 29
29a is formed with a diameter of about 0.13 mm, thereby forming a through hole hole of about 0.15 mm diameter with respect to the green sheet 21, for example, when a punch pin 29 of 40 axes is disposed,
It is possible to drill 40 through holes at the same time.

The processing section of the punch device 22 configured as described above is linked to, for example, an electromagnetic coil (not shown) and a drive shaft driven by the electromagnetic coil, and punching is performed by moving the punch pin 29 in the axial direction.

 Next, the operation of the present embodiment will be described.

First, clean compressed air is supplied from a supply source of compressed air to the flow passage 26a, and at the same time, compressed air is sucked from the through-hole of the die base 23. Is formed and the green sheet 21 is perforated.

First, the drive shaft is driven in the axial direction by energizing an electromagnetic coil (not shown), and the punch pin 29 is moved in conjunction with the drive shaft, and the state shown in FIG.
Of the cutting edge 29a is passed through the green sheet 21.

Further, the energization of the electromagnetic coil is cut off, and the punch pin 29 is pulled out from the state of being penetrated by the biasing force of the spring 35 to return to the initial state. By repeating the above operation, a predetermined number of through-hole holes can be formed in the green sheet 21 at a predetermined pitch.

In this case, for example, at the moment when the punch pin 29 is pulled out, the compressed air supplied to the flow passage 26a passes through the groove 29b formed in the punch pin 29, and the gap between the guide bush 32 and the punch pin 29, and enters the stripper chamber 33. Sent in.

Then, the air pressure rises in the stripper chamber 33, and compressed air is released from the stripper chamber 33 and the punch pin 29.
And is sucked toward the die base 23 through a gap between the through hole of the die 24 and the cutting edge 29a of the punch pin 29.

In this case, the flow of the compressed air blows off the perforated chips of the green sheet 21 attached to the cutting edge 29a of the punch pin 29, and can suck the dust toward the die base 23, so that the cutting edge 29a of the punch pin 29 is maintained in a clean state. can do.

At the same time, since the compressed air flows through the green sheet 21, the drilling dust attached to the inner surface of the formed through-hole and the drilling dust dropped on the green sheet 21 are blown off to keep the green sheet 21 in a clean state. Can be maintained.

Further, the green sheet 21 jumps up at the moment when the punch pin 29 is pulled out, that is, the cutting edge of the punch pin 29.
Lifting of the green sheet 21 due to friction with 29a,
It can be suppressed by the pressure of the compressed air around the perforated portion. In this case, it is possible to reliably prevent the green sheet 21 from jumping up by adjusting the pressure of the supplied compressed air.

On the other hand, even in a state where the cutting edge 29a of the punch pin 29 is penetrated through the green sheet 21, a flow path of compressed air is formed in the direction of the cutting edge 29a from the shaft with respect to the punch pin 29, and the stripper chamber 33 passes through a slight gap. It flows out and is sucked into the die pace 23 side.

Therefore, according to the punch device 22 of the present embodiment, the groove 29b is formed at the end of the shaft portion of the punch pin 29 on the cutting edge 29a side, and penetrates the punch pin sleeve 38, the spring receiver 36, and the guide bushes 32, 30. By inserting the cutting edge 29a so as to penetrate the strip chamber 33, the positioning of the punch pin 29 can be performed by the guide bushes 30, 32, which are guide members of the punch pin 29, mainly the guide bush 32. The structure is simplified, and highly accurate positioning of the punch pin 29 can be easily performed.

Further, by supplying compressed air along the punch pins 29, the punch pins 29 and the green sheet 21 can be kept in a clean state, and the cleaning operation of the green sheet 21 can be easily performed.

Furthermore, the compressed air flows between the guide bush 32 and the punch pin 29, thereby reducing the wear of the sliding portion between the guide bush 32 and the punch pin 29, and at the same time, suppressing the frictional heat generated by the sliding. Can be.

Further, by forming the punch pin 29 and the guide bush 32 from a sintered body of fine ceramics, the wear resistance of the punch pin 29 can be improved.

Second Embodiment FIG. 4 is a cross-sectional view showing a punch pin and a guide member used in a punch device according to another embodiment of the present invention, and FIG. 5 is a cross-sectional view taken along line VV in FIG. is there.

The punching device of the present embodiment is, for example, a punching device 22 for punching a green sheet 21 in a configuration similar to that of the first embodiment, and the difference from the first embodiment is shown in FIGS. 4 and 5. In the reverse, the guide bush (guide member) 32
A spiral groove 32 is formed on the inner surface of the punch pin 29.
Is formed in a straight line.

Therefore, also in the processing section of the punch device 22 of the present embodiment, the compressed air (compressed gas) supplied to the flow passage 26a passes through the groove 32a formed in the guide bush 32 and the gap between the guide bush 32 and the punch pin 29. As a result, by flowing along the direction of the cutting edge 29a from the shaft portion of the punch pin 29,
The punch pin 29 and the green sheet 21 can be kept clean, and at the same time, the guide bush 32 and the punch pin 29
Abrasion of the sliding portion can be reduced.

Further, similarly to the first embodiment, since the positioning of the punch pin 29 can be performed by the guide bushes 30, 32, mainly the guide bush 32, the positioning structure is simplified, and the highly accurate positioning of the punch pin 29 is easily performed. It can be carried out.

As described above, the invention made by the inventor has been specifically described based on Embodiments 1 and 2. However, the present invention is not limited to each of the above-described embodiments, and can be variously modified without departing from the gist thereof. Needless to say, there is.

For example, in the punch devices 22 of the first and second embodiments, the case where the punch pins 29 and the guide bushes 30 and 32 are formed of a sintered body of fine ceramics has been described. However, the present invention is limited to each of the above embodiments. However, the present invention can be widely applied to other sintered bodies such as a sintered body of a cemented carbide, and in particular, the punch pin 29 and the guide bushes 30 and 32 are formed of the same material of the sintered material. desirable.

The shapes of the punch pin 29 and the guide bush 32 are not limited to the shapes shown in FIGS. 2 to 5, and for example, two or more spiral grooves may be formed. The shape of the triangular groove,
Various modifications are possible.

Further, the number of axes of the punch pins 29 can also be changed according to the size of the green sheet 21, the pitch of the through holes, and the like.

Further, in the punch device 22 of each of the above embodiments, the case where compressed air as an example of compressed gas is supplied to the flow passage 26a of the punch pin holder 26 has been described. It is also possible to supply the cooling gas, and when the cooling gas is supplied, the cooling effect of the punching device, particularly the sliding portion of the punch pin 29, can be further improved. Further, when hot air is supplied, the clearance of the sliding portion can be appropriately maintained by utilizing the difference in thermal expansion between the components.

In the above description, the case where the invention made mainly by the inventor is applied to the punching device 22 used for the workpiece of the green sheet 21 as the field of use has been described, but the invention is not limited thereto. It is widely applicable to other drilling processes.

[Effects of the Invention] Of the inventions disclosed in the present application, effects obtained by typical ones will be briefly described as follows.

(1). In a single case, a base plate and a stripper plate each having a through hole for driving a punch pin are fixed integrally above and below a punch pin holder holding a plurality of punch pins, respectively, and the through holes of the base plate and the stripper plate are formed. A guide member having a through hole through which the shaft of the punch pin slides is provided therein, and the shaft of the punch pin is slidably fitted into the through hole of the guide member, thereby forming a punch pin positioning structure. Can be formed only by the guide member, the positioning structure can be simplified, and the positioning of the punch pin can be easily performed with the simple structure.

(2). A flow path for compressed gas is formed in the punch pin holder, and a shaft portion of the punch pin penetrates the flow path and is slidably fitted in a through hole of the guide member. Since the compressed gas can flow between the shaft and the shaft, wear between the guide member and the punch pin is reduced, and the punch pin can be moved smoothly.

(3). A stripper chamber in which a through-hole through which the edge of a punch pin penetrates is formed in a through-hole of the stripper plate is provided below the guide member, and a shaft of the punch pin is provided with a compressed gas passage formed in the punch pin holder. The compressed gas can flow toward the workpiece along the cutting edge of the punch pin by being slidably fitted into the through hole of the guide member, so that a hole attached to the cutting edge of the punch pin is formed. Debris can be removed, and at the same time drilling debris that has adhered to the workpiece can be removed by the compressed gas.

(4). The punch pin and guide member are formed of a sintered body, a sintered body of the same material, a sintered body of cemented carbide, or a sintered body of fine ceramics, so that the wear resistance between the guide member and the punch pin is improved. So you can
The service life of the punch pin and the guide member can be extended.

(5). The punch pin is formed of a sintered body, and at least one spiral groove is formed at the end of the shaft portion on the stripper plate side, so that the flow of compressed gas between the guide member and the punch pin is improved. Therefore, the wear between the guide member and the punch pin can be further reduced, and at the same time, it is possible to remove drilling chips from the workpiece.

(6). Since the guide member of the punch pin is formed of a sintered body and at least one spiral groove is formed on the inner surface of the through hole, the compression between the guide member and the punch pin is performed in the same manner as in the above (5). Since the flow of gas can be improved, wear of the guide member and the punch pin is further reduced,
At the same time, it is possible to remove drilling chips from the workpiece.

(7). According to the above (1), the positioning structure is reduced in size by reducing the number of parts, and more punch pins 16 can be arranged within a predetermined range. Improvement can be achieved.

(8). According to the above (2), the compressed gas can flow from the shaft portion of the punch pin along the cutting edge, so that drilling chips of the workpiece generated during the drilling process enter between the guide member and the punch pin. Can be prevented.

(9). According to the above (2), wear of the guide member and the punch pin is reduced, so that deformation of each component due to frictional heat can be prevented.

(Ten). According to the above (2) or (3), the supply of the compressed gas can prevent the workpiece from jumping at the moment when the punch pin is pulled out, that is, lifting around the perforated portion due to friction with the cutting edge of the punch pin.

(11). According to the above (1) to (10), the positioning accuracy can be improved and the sliding resistance of the punch pin can be reduced. Therefore, a punch device, a punch pin, and a guide member for punching with high accuracy and high speed can be formed. Obtainable.

[Brief description of the drawings]

FIG. 1 is a sectional view showing a main part of a punching apparatus according to a first embodiment of the present invention, FIG. 2 is a sectional view showing a punch pin and a guide member used in the punching apparatus according to the first embodiment, and FIG. FIG. 4 is a cross-sectional view taken along line III-III of FIG. 2. FIG. 4 is a cross-sectional view showing a punch pin and a guide member used in a punch device according to a second embodiment of the present invention. FIG. FIG. 6 is a partial sectional view showing a main part of a punching device as an example of a conventional example. 1 ... green sheet, 2 ... die base, 3 ... die, 4 ... base plate, 5 ... punch pin holder,
6 ... stripper plate, 7 ... sleeve, 8 ... hole guide, 9 ... stopper, 10 ... spring receiver,
11 …… spring, 12 …… spring receiver, 13 …… tsuba,
14 Pin holder, 15 Pin sleeve, 16 Punch pin, 16a Blade tip, 17 Screw, 21 Green sheet (workpiece), 22 Punch device, 23 Die base, 24 ... Die, 25 ... Base plate, 26 ... Punch pin holder, 26a ... Flow passage, 27 ... Stripper plate, 28 ... Plate, 29 ... Punch pin, 29a ... Cutting edge, 29b ... Groove, 30 ... Guide bush (guide member), 3
1 ... Joint, 32 ... Guide bush (guide member), 32a ... Groove, 33 ... Strip chamber, 34 ...
Bush, 35 ... spring, 36 ... spring receiver,
37 ... Stripper plate, 38 ... Pin sleeve, 39 ...
…screw.

 ──────────────────────────────────────────────────続 き Continuation of the front page (72) Inventor Seiji Nakajima 2100 Kamiimaizumi, Ebina City, Kanagawa Prefecture Inside Hitachi Seiko Co., Ltd. (56) References JP-A-1-171800 (JP, A) JP-A-62-213998 ( JP, A) JP-A-59-115199 (JP, A) JP-B-47-44109 (JP, B1)

Claims (4)

(57) [Claims] 1. A punch device for driving one or more punch pins held in a punch pin holder in an axial direction thereof to make one or more holes in a workpiece, said punch pin holder comprising: A base plate and a stripper plate integrally fixed above and below the first plate, a first guide member provided in a through hole of the base plate, and a second guide member provided in a through hole of the stripper plate. A shaft portion is slidably fitted in a flow passage formed in the punch pin holder and connected to a through hole of the punch pin holder, and a through hole formed in the first and second guide members. A punch device having the punch pin, wherein at least one spiral groove is formed in a portion of the shaft portion of the punch pin that fits with the second guide member. 2. A punch apparatus for driving one or a plurality of punch pins held by a punch pin holder in an axial direction thereof to make one or a plurality of holes in a workpiece, said punch pin holder comprising: A base plate and a stripper plate integrally fixed above and below the first plate, a first guide member provided in a through hole of the base plate, and a second guide member provided in a through hole of the stripper plate. A shaft portion is slidably fitted in a flow passage formed in the punch pin holder and connected to a through hole of the punch pin holder, and a through hole formed in the first and second guide members. A punching pin, wherein at least one spiral groove is formed on the inner surface of the through hole of the second guide member fitted to the shaft of the punch pin. Ji equipment. 3. A stripper chamber in which a through-hole through which a cutting edge of the punch pin penetrates is formed in a through-hole of the stripper plate is provided below the second guide member.
And a shaft portion of the punch pin is slidably fitted in a through hole of the second guide member through a compressed gas flow passage formed in the punch pin holder. Item 3. The punch device according to item 1 or 2. 4. The punch device according to claim 1, wherein the punch pin and the first and second guide members are formed of a sintered body.