JP2583091B2 - Dielectric ceramic composition - Google Patents
Dielectric ceramic compositionInfo
- Publication number
- JP2583091B2 JP2583091B2 JP63023885A JP2388588A JP2583091B2 JP 2583091 B2 JP2583091 B2 JP 2583091B2 JP 63023885 A JP63023885 A JP 63023885A JP 2388588 A JP2388588 A JP 2388588A JP 2583091 B2 JP2583091 B2 JP 2583091B2
- Authority
- JP
- Japan
- Prior art keywords
- oxide
- mol
- component
- ceramic composition
- dielectric ceramic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000000203 mixture Substances 0.000 title claims description 22
- 239000000919 ceramic Substances 0.000 title claims description 15
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 18
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 claims description 16
- 229910002113 barium titanate Inorganic materials 0.000 claims description 13
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 claims description 13
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 claims description 11
- 239000005751 Copper oxide Substances 0.000 claims description 10
- 229910000431 copper oxide Inorganic materials 0.000 claims description 10
- 229910000428 cobalt oxide Inorganic materials 0.000 claims description 9
- IVMYJDGYRUAWML-UHFFFAOYSA-N cobalt(ii) oxide Chemical compound [Co]=O IVMYJDGYRUAWML-UHFFFAOYSA-N 0.000 claims description 9
- 229910001404 rare earth metal oxide Inorganic materials 0.000 claims description 9
- 239000011787 zinc oxide Substances 0.000 claims description 9
- VQCBHWLJZDBHOS-UHFFFAOYSA-N erbium(iii) oxide Chemical compound O=[Er]O[Er]=O VQCBHWLJZDBHOS-UHFFFAOYSA-N 0.000 claims description 8
- 229910000480 nickel oxide Inorganic materials 0.000 claims description 8
- GNRSAWUEBMWBQH-UHFFFAOYSA-N oxonickel Chemical compound [Ni]=O GNRSAWUEBMWBQH-UHFFFAOYSA-N 0.000 claims description 8
- 229940071182 stannate Drugs 0.000 claims description 7
- 229910052788 barium Inorganic materials 0.000 claims description 4
- HNQGTZYKXIXXST-UHFFFAOYSA-N calcium;dioxido(oxo)tin Chemical compound [Ca+2].[O-][Sn]([O-])=O HNQGTZYKXIXXST-UHFFFAOYSA-N 0.000 claims description 4
- 229910003440 dysprosium oxide Inorganic materials 0.000 claims description 4
- NLQFUUYNQFMIJW-UHFFFAOYSA-N dysprosium(iii) oxide Chemical compound O=[Dy]O[Dy]=O NLQFUUYNQFMIJW-UHFFFAOYSA-N 0.000 claims description 4
- JYTUFVYWTIKZGR-UHFFFAOYSA-N holmium oxide Inorganic materials [O][Ho]O[Ho][O] JYTUFVYWTIKZGR-UHFFFAOYSA-N 0.000 claims description 4
- OWCYYNSBGXMRQN-UHFFFAOYSA-N holmium(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Ho+3].[Ho+3] OWCYYNSBGXMRQN-UHFFFAOYSA-N 0.000 claims description 4
- 229910001954 samarium oxide Inorganic materials 0.000 claims description 4
- 229940075630 samarium oxide Drugs 0.000 claims description 4
- FKTOIHSPIPYAPE-UHFFFAOYSA-N samarium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[Sm+3].[Sm+3] FKTOIHSPIPYAPE-UHFFFAOYSA-N 0.000 claims description 4
- 125000005402 stannate group Chemical group 0.000 claims description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 3
- 238000005245 sintering Methods 0.000 description 19
- 239000003990 capacitor Substances 0.000 description 10
- 238000000034 method Methods 0.000 description 9
- 238000009413 insulation Methods 0.000 description 8
- 230000000694 effects Effects 0.000 description 6
- PLDDOISOJJCEMH-UHFFFAOYSA-N neodymium(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Nd+3].[Nd+3] PLDDOISOJJCEMH-UHFFFAOYSA-N 0.000 description 6
- ZIKATJAYWZUJPY-UHFFFAOYSA-N thulium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[Tm+3].[Tm+3] ZIKATJAYWZUJPY-UHFFFAOYSA-N 0.000 description 6
- 230000032798 delamination Effects 0.000 description 4
- 229910052573 porcelain Inorganic materials 0.000 description 4
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 150000004703 alkoxides Chemical class 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- AMWRITDGCCNYAT-UHFFFAOYSA-L hydroxy(oxo)manganese;manganese Chemical compound [Mn].O[Mn]=O.O[Mn]=O AMWRITDGCCNYAT-UHFFFAOYSA-L 0.000 description 2
- -1 inorganic acid salts Chemical class 0.000 description 2
- MRELNEQAGSRDBK-UHFFFAOYSA-N lanthanum(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[La+3].[La+3] MRELNEQAGSRDBK-UHFFFAOYSA-N 0.000 description 2
- PQXKHYXIUOZZFA-UHFFFAOYSA-M lithium fluoride Chemical compound [Li+].[F-] PQXKHYXIUOZZFA-UHFFFAOYSA-M 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 229910000510 noble metal Inorganic materials 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- UOCLXMDMGBRAIB-UHFFFAOYSA-N 1,1,1-trichloroethane Chemical compound CC(Cl)(Cl)Cl UOCLXMDMGBRAIB-UHFFFAOYSA-N 0.000 description 1
- WZTUZRFSDWXDRM-IAGOJMRCSA-N 1-[(3s,8r,9s,10r,13s,14s,17r)-6-chloro-3,17-dihydroxy-10,13-dimethyl-1,2,3,8,9,11,12,14,15,16-decahydrocyclopenta[a]phenanthren-17-yl]ethanone Chemical compound C1=C(Cl)C2=C[C@@H](O)CC[C@]2(C)[C@@H]2[C@@H]1[C@@H]1CC[C@@](C(=O)C)(O)[C@@]1(C)CC2 WZTUZRFSDWXDRM-IAGOJMRCSA-N 0.000 description 1
- FFQALBCXGPYQGT-UHFFFAOYSA-N 2,4-difluoro-5-(trifluoromethyl)aniline Chemical compound NC1=CC(C(F)(F)F)=C(F)C=C1F FFQALBCXGPYQGT-UHFFFAOYSA-N 0.000 description 1
- DJOYTAUERRJRAT-UHFFFAOYSA-N 2-(n-methyl-4-nitroanilino)acetonitrile Chemical compound N#CCN(C)C1=CC=C([N+]([O-])=O)C=C1 DJOYTAUERRJRAT-UHFFFAOYSA-N 0.000 description 1
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 229910052692 Dysprosium Inorganic materials 0.000 description 1
- 229910052691 Erbium Inorganic materials 0.000 description 1
- 229910052689 Holmium Inorganic materials 0.000 description 1
- 229910052779 Neodymium Inorganic materials 0.000 description 1
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 1
- 229910052772 Samarium Inorganic materials 0.000 description 1
- 229910052775 Thulium Inorganic materials 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 229910021523 barium zirconate Inorganic materials 0.000 description 1
- DQBAOWPVHRWLJC-UHFFFAOYSA-N barium(2+);dioxido(oxo)zirconium Chemical compound [Ba+2].[O-][Zr]([O-])=O DQBAOWPVHRWLJC-UHFFFAOYSA-N 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- CXKCTMHTOKXKQT-UHFFFAOYSA-N cadmium oxide Inorganic materials [Cd]=O CXKCTMHTOKXKQT-UHFFFAOYSA-N 0.000 description 1
- CFEAAQFZALKQPA-UHFFFAOYSA-N cadmium(2+);oxygen(2-) Chemical compound [O-2].[Cd+2] CFEAAQFZALKQPA-UHFFFAOYSA-N 0.000 description 1
- 150000004649 carbonic acid derivatives Chemical class 0.000 description 1
- 239000003985 ceramic capacitor Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 238000007606 doctor blade method Methods 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 229910001938 gadolinium oxide Inorganic materials 0.000 description 1
- 229940075613 gadolinium oxide Drugs 0.000 description 1
- CMIHHWBVHJVIGI-UHFFFAOYSA-N gadolinium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[Gd+3].[Gd+3] CMIHHWBVHJVIGI-UHFFFAOYSA-N 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 150000004679 hydroxides Chemical class 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- MLOKPANHZRKTMG-UHFFFAOYSA-N lead(2+);oxygen(2-);tin(4+) Chemical compound [O-2].[O-2].[O-2].[Sn+4].[Pb+2] MLOKPANHZRKTMG-UHFFFAOYSA-N 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 238000009766 low-temperature sintering Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 150000007524 organic acids Chemical class 0.000 description 1
- 235000005985 organic acids Nutrition 0.000 description 1
- 150000003891 oxalate salts Chemical class 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 238000010532 solid phase synthesis reaction Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- VEALVRVVWBQVSL-UHFFFAOYSA-N strontium titanate Chemical compound [Sr+2].[O-][Ti]([O-])=O VEALVRVVWBQVSL-UHFFFAOYSA-N 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Compositions Of Oxide Ceramics (AREA)
- Inorganic Insulating Materials (AREA)
Description
【発明の詳細な説明】 (産業上の利用分野) 本発明は、チタン酸バリウムを主成分とする誘電性セ
ラミツク組成物に関するものであり、さらに詳しくは、
コンデンサー用途として適した強誘電性組成物に関する
ものである。Description: TECHNICAL FIELD The present invention relates to a dielectric ceramic composition containing barium titanate as a main component.
The present invention relates to a ferroelectric composition suitable for use in a capacitor.
(従来の技術) 従来、チタン酸バリウムを主成分とする強誘電性セラ
ミツク組成物は、焼結温度が、1300℃以上と極めて高い
ため、積層コンデンサー用途として用いる場合、内部電
極材料として高温の焼結温度に耐えうる高融点貴金属、
例えば、白金、パラジウム、金等が用いられてきた。こ
れらの貴金属は高価なものであるため、積層コンデンサ
ーのコストも高いものとなる。また、高温で焼結するた
め、焼結炉の設計、焼結に要するエネルギー等も問題と
なつてくる。すなわち、積層コンデンサーを製造する場
合、コストの面から、内部電極材料として、安価な銀を
主成分とすることが好ましく、また、炉の設計が容易で
あるためにも、低温で焼結可能な強誘電性セラミツク組
成物が強く望まれていた。(Prior art) Conventionally, ferroelectric ceramic compositions containing barium titanate as a main component have a very high sintering temperature of 1300 ° C. or higher. High melting point noble metal that can withstand sintering temperature,
For example, platinum, palladium, gold and the like have been used. Since these noble metals are expensive, the cost of the multilayer capacitor is also high. In addition, since sintering is performed at a high temperature, the design of a sintering furnace, the energy required for sintering, and the like also pose problems. That is, in the case of manufacturing a multilayer capacitor, it is preferable to use inexpensive silver as a main component as an internal electrode material from the viewpoint of cost, and also that sintering can be performed at a low temperature because the furnace design is easy. Ferroelectric ceramic compositions have been strongly desired.
チタン酸バリウムの焼結温度を低下させるための焼結
助剤として、酸化銅〔Trans.Brit.Ceram.Soc.,74,165
(1975)〕、フツ化リチウム〔J.Am.Ceram.Soc.,66,11,
801(1983)、特開昭57−160963〕等が報告されている
が、これらの焼結助剤を用いて誘電体磁器を作成した場
合、グレインサイズが大きく、不均一であり、場合によ
つては数10μmに達する異常粒成長も起こり得る。この
欠点を改善する方法として、特開昭61−251561には、酸
化銅と酸化亜鉛および/または酸化カドミウムを0.2〜
5.5mol%添加することで、1200℃以下の焼結温度で、ほ
ぼ理論密度の焼結体が得られ、なおかつ、その微構造を
制御できる可能性が開示されている。しかし、この方法
で得られる誘電体磁器は、1200℃以下で焼結でき、グレ
インも微小均一で、電気特性(例えば、誘電率、絶縁抵
抗、誘電損失)も比較的良好であるが、信頼性に若干の
問題が残されていた。Copper oxide (Trans.Brit. Ceram. Soc., 74, 165) as a sintering aid for lowering the sintering temperature of barium titanate.
(1975)], lithium fluoride [J. Am. Ceram. Soc., 66, 11,
801 (1983), JP-A-57-160963] and the like. However, when dielectric porcelain is prepared using these sintering aids, the grain size is large and non-uniform. As a result, abnormal grain growth reaching several tens of μm may occur. As a method for remedying this drawback, JP-A-61-251561 discloses that copper oxide, zinc oxide and / or cadmium oxide are used in an amount of 0.2 to 0.2%.
It is disclosed that by adding 5.5 mol%, a sintered body having a substantially theoretical density can be obtained at a sintering temperature of 1200 ° C. or lower, and the microstructure thereof can be controlled. However, the dielectric porcelain obtained by this method can be sintered at 1200 ° C or lower, has a fine and uniform grain, and has relatively good electrical characteristics (for example, permittivity, insulation resistance, and dielectric loss). Had some problems.
この問題に対し、チタン酸バリウムに希土類酸化物を
添加すると、信頼性が向上することが知られている。J.
Am.Ceram.,46,5,197(1963)には、チタン酸バリウムに
0.5mol%の酸化ランタンを添加し、1375〜1500℃で焼結
した積層コンデンサーの信頼性が向上することが報告さ
れている。この方法では、焼結温度が高いため、グレイ
ンサイズが不均一になり易く、実用上電気特性も不安定
である。It is known that the reliability is improved by adding a rare earth oxide to barium titanate. J.
Am. Ceram., 46, 5, 197 (1963) states that barium titanate
It is reported that the reliability of a multilayer capacitor sintered at 1375 to 1500 ° C. by adding 0.5 mol% of lanthanum oxide is improved. In this method, since the sintering temperature is high, the grain size tends to be non-uniform, and the electrical characteristics are unstable in practical use.
(発明が解決しようとする課題) したがつて、従来技術では1200℃以下の温度で焼結で
き、グレインが均一であり、電気特性が良好で同時に信
頼性を満足する誘電体磁器組成物は見い出されていな
い。(Problems to be Solved by the Invention) Therefore, in the prior art, a dielectric ceramic composition which can be sintered at a temperature of 1200 ° C. or less, has a uniform grain, has good electric characteristics and satisfies reliability at the same time has been found. Not.
(課題を解決するための手段) 本発明者らは、鋭意検討を重ねた結果、チタン酸バリ
ウムに酸化銅、酸化亜鉛、希土類酸化物、さらに、酸化
鉄、酸化コバルト、酸化ニツケルの中から選ばれた1種
以上を特定量添加した際に、1200℃以下の焼結温度で、
微構造が均一で、理論密度の95%以上に緻密化した焼結
体が得られ、同時に信頼性が飛躍的に向上することを見
い出し、本発明に到達した。(Means for Solving the Problems) As a result of intensive studies, the present inventors have selected barium titanate from copper oxide, zinc oxide, rare earth oxide, iron oxide, cobalt oxide, and nickel oxide. At a sintering temperature of 1200 ° C or less,
It has been found that a sintered body having a uniform microstructure and densified to 95% or more of the theoretical density can be obtained, and at the same time, reliability has been dramatically improved, and the present invention has been achieved.
すなわち、本発明は、第一成分として85.6〜99.49mol
%のチタン酸バリウム、第二成分として0.2〜5.5mol%
の酸化亜鉛、第三成分として0.01〜0.7mol%の酸化鉄、
酸化コバルト、酸化ニツケルの中から選ばれた1種以
上、第四成分として0.1〜1.2mol%の希土類酸化物、第
五成分として0.2〜7mol%の酸化銅からなる誘電性セラ
ミツク組成物に関するものである。That is, the present invention provides, as the first component, 85.6 to 99.49 mol.
% Barium titanate, 0.2-5.5 mol% as the second component
Zinc oxide, as a third component 0.01-0.7 mol% of iron oxide,
The present invention relates to a dielectric ceramic composition comprising at least one selected from cobalt oxide and nickel oxide, 0.1 to 1.2 mol% of a rare earth oxide as a fourth component, and 0.2 to 7 mol% of copper oxide as a fifth component. is there.
チタン酸バリウムに特定量の酸化亜鉛、希土類酸化
物、酸化銅さらに酸化鉄、酸化コバルト、酸化ニツケル
の中から選ばれた1種以上を添加し焼成した誘電性セラ
ミツク組成物は、希土類酸化物無添加の場合に比べ、誘
電率が高く、グレインサイズが均一であり、極めて信頼
性が高い。A dielectric ceramic composition obtained by adding a specific amount of zinc oxide, rare earth oxide, copper oxide, and at least one selected from iron oxide, cobalt oxide, and nickel oxide to barium titanate, followed by firing, has a rare earth oxide Compared with the case of addition, the dielectric constant is high, the grain size is uniform, and the reliability is extremely high.
さらに、チタン酸塩、ジルコン酸塩、スズ酸塩から選
ばれた1種以上の特定量を第六成分として組み合わせる
ことにより、上記特性を損ねることなく、室温付近の誘
電率を12000以上にまで高めることが可能である。Further, by combining at least one specific amount selected from titanates, zirconates, and stannates as the sixth component, the dielectric constant near room temperature can be increased to 12000 or more without deteriorating the above characteristics. It is possible.
本発明で使用するチタン酸バリウムは、固相法、液相
法(例えば、しゆう酸塩法、アルコキシド法)等いずれ
の方法で製造されたものでもよい。平均粒径が1μm以
下と小さく、粒度分布の均一なものを用いた場合、一層
均一な微構造を持ち、電気特性の良好な信頼性の高い磁
器が得られる。The barium titanate used in the present invention may be produced by any method such as a solid phase method and a liquid phase method (for example, oxalate method, alkoxide method). When an average particle size as small as 1 μm or less and having a uniform particle size distribution is used, a highly reliable porcelain having a more uniform microstructure and good electric characteristics can be obtained.
本発明では、添加物として酸化亜鉛、希土類酸化物、
酸化銅、さらに、酸化鉄、酸化コバルト、酸化ニツケル
をそのまま用いることができるが、水酸化物、炭酸塩な
どの無機酸塩や、しゆう酸塩、アルコキシドなどの有機
酸等、焼結温度以下で分解して酸化物となるものなら
ば、いずれも使用できる。酸化銅としては一価、二価、
および一価、二価の共存しているもの、いずれのものも
使用できる。酸化マンガンとしては、二価、三価、四
価、七価およびそれらが共存しているもの、いずれのも
のも使用できる。希土類酸化物としては、酸化ネオジウ
ム、酸化サマリウム、酸化ガドリニウム、酸化ジスプロ
シウム、酸化ホルミウム、酸化エルビウム、酸化ツリウ
ム等いずれのものも使用できる。In the present invention, as additives zinc oxide, rare earth oxide,
Copper oxide, iron oxide, cobalt oxide and nickel oxide can be used as they are, but inorganic acid salts such as hydroxides and carbonates, organic acids such as oxalates and alkoxides, etc. Any substance can be used as long as it decomposes to form an oxide. Monovalent, divalent, as copper oxide
Any of monovalent and divalent coexisting materials can be used. As manganese oxide, any of divalent, trivalent, tetravalent, and heptavalent and those coexisting therewith can be used. As the rare earth oxide, any of neodymium oxide, samarium oxide, gadolinium oxide, dysprosium oxide, holmium oxide, erbium oxide, thulium oxide and the like can be used.
また、本発明で第六成分として添加する酸化物は、ス
ズ酸塩、チタン酸塩、ジルコン酸塩の通常の複合酸化物
の形のものが好適に用いられる。The oxide added as the sixth component in the present invention is preferably in the form of an ordinary composite oxide of stannate, titanate and zirconate.
本発明の磁器組成物中のチタン酸バリウムの割合は、
85.6〜99.49mol%の範囲である。その割合が99.49mol%
より多いと、1200℃以下の温度で焼結が困難となり、8
5.6mol%より少ないと、焼結時に著しい素地の変形が生
じる。焼結性がよく、かつ、素地の変形がほとんど生じ
ない好ましい範囲は92.8〜98.45mol%である。The proportion of barium titanate in the porcelain composition of the present invention,
It is in the range of 85.6 to 99.49 mol%. The ratio is 99.49mol%
If it is larger, sintering becomes difficult at temperatures below 1200 ° C,
If the amount is less than 5.6 mol%, significant deformation of the substrate occurs during sintering. A preferable range in which sinterability is good and deformation of the substrate hardly occurs is 92.8 to 98.45 mol%.
酸化亜鉛の割合は、ZnOの形として0.2〜5.5mol%の範
囲である。5.5mol%を超えると、1200℃以下での焼結が
困難であり、グレインの不均一性、絶縁抵抗の低下を招
く。0.2mol%未満では、添加効果がほとんど認められ
ず、また、誘電損失も増大する。焼結性が良好で充分高
い絶縁抵抗を与える最も好ましい範囲は、0.6〜3mol%
の範囲である。The proportion of zinc oxide is in the range from 0.2 to 5.5 mol% in the form of ZnO. If it exceeds 5.5 mol%, sintering at 1200 ° C. or less is difficult, resulting in non-uniform grain and lower insulation resistance. If it is less than 0.2 mol%, the effect of addition is hardly recognized, and the dielectric loss increases. The most preferable range which provides good sinterability and sufficiently high insulation resistance is 0.6 to 3 mol%.
Range.
酸化鉄、酸化コバルト、酸化ニツケルの割合は、それ
ぞれFe203、Co304、Ni203の形として0.01〜0.7mol%の
範囲である。0.7mol%より多い場合は、1200℃以下での
焼結が困難であり、積層コンデンサーを製造する場合、
内部電極と誘電体層間でのデラミネーシヨンが著しい。
また、0.01mol%以下の場合では、添加効果がほとんど
認められず、信頼性が低い。デラミネーシヨンが起こら
ず、信頼性も充分良好となる最も好ましい範囲は、0.05
〜0.5mol%の範囲である。The ratio of iron oxide, cobalt oxide, and nickel oxide is in the range of 0.01 to 0.7 mol% as Fe203, Co304, and Ni203, respectively. If it is more than 0.7 mol%, sintering at 1200 ° C or less is difficult.
The delamination between the internal electrode and the dielectric layer is remarkable.
In addition, when the content is 0.01 mol% or less, the effect of addition is hardly recognized, and the reliability is low. The most preferable range in which delamination does not occur and the reliability is sufficiently good is 0.05
0.50.5 mol%.
希土類酸化物の割合は、Me203(Me=La、Nd、Sm、G
d、Dy、Ho、Er、Tm等)の形として0.1〜1.2mol%の範囲
である。添加量の増加にしたがい信頼性は向上するが、
1.2mol%を超えると、微構造が不均一になり易く、異常
粒成長も認められる。さらに増加すると、1200℃以下で
の焼結が困難になる。0.1mol%未満では、添加効果がほ
とんど認められず、信頼性も低い。焼結性も損なわず高
い信頼性が得られる最も好ましい範囲は0.3〜0.7mol%
である。The ratio of the rare earth oxide is Me203 (Me = La, Nd, Sm, G
d, Dy, Ho, Er, Tm, etc.) in the range of 0.1 to 1.2 mol%. The reliability increases as the amount added increases,
If it exceeds 1.2 mol%, the microstructure tends to be non-uniform, and abnormal grain growth is also observed. If it further increases, sintering at 1200 ° C. or lower becomes difficult. If it is less than 0.1 mol%, the effect of addition is hardly recognized and the reliability is low. The most preferable range in which high reliability can be obtained without impairing the sinterability is 0.3 to 0.7 mol%.
It is.
酸化銅の割合は、CuOとして0.2〜7mol%の範囲であ
る。7mol%より多い場合は、デラミネーシヨンが著し
く、誘電損失の値も大きくなる。また、焼結時のグレイ
ンサイズが不均一で大きくなり、信頼性も極めて悪化す
る。0.2mol%より少ない場合は、低温焼結が困難とな
る。デラミネーシヨンが起こらず、充分高い信頼性を与
える最も好ましい範囲は0.6〜3mol%である。The proportion of copper oxide is in the range of 0.2 to 7 mol% as CuO. When it is more than 7 mol%, delamination is remarkable, and the value of dielectric loss becomes large. In addition, the grain size during sintering becomes uneven and large, and the reliability is extremely deteriorated. If it is less than 0.2 mol%, low-temperature sintering becomes difficult. The most preferable range where delamination does not occur and which provides sufficiently high reliability is 0.6 to 3 mol%.
さらに、好適な実施態様において、スズ酸塩、チタン
酸塩、ジルコン酸塩の中から選ばれた1種以上の複合酸
化物を第一成分、第二成分、第三成分、第四成分の和10
0モルに対して2〜20mol添加することにより、室温付近
の誘電率を12000以上に増大することが可能である。そ
の量が2mol未満では、添加効果はあまり顕著ではなく、
室温付近の誘電率も低い。また、20モルを超えると、12
00℃以下での焼結が困難となる。スズ酸バリウムまたは
スズ酸カルシウムまたはこれらの混合物を用いた場合、
誘電率の大きなものが得られ易くなる。Further, in a preferred embodiment, one or more complex oxides selected from stannate, titanate, and zirconate are combined with the first component, the second component, the third component, and the fourth component. Ten
By adding 2 to 20 mol per 0 mol, the dielectric constant near room temperature can be increased to 12000 or more. If the amount is less than 2 mol, the effect of addition is not so remarkable,
The dielectric constant near room temperature is also low. Also, if it exceeds 20 moles, 12
Sintering at or below 00 ° C. becomes difficult. When using barium stannate or calcium stannate or a mixture thereof,
A material having a large dielectric constant is easily obtained.
(実施例) 以下、本発明を実施例により詳細に説明する。(Examples) Hereinafter, the present invention will be described in detail with reference to examples.
実施例1 チタン酸バリウム、酸化亜鉛、酸化銅、および酸化
鉄、酸化コバルト、酸化ニツケルと酸化ネオジウム、酸
化サマリウム、酸化ジスプロシウム、酸化ホロミウム、
酸化エルビウム、酸化ツリウムをそれぞれ表1に示す割
合で秤量し、純水を加え、湿式ボールミルにより混合し
た。混合物を充分乾燥、粗砕した後、アクリル樹脂をバ
インダーにトリクロロエタンを溶媒として、ボールメデ
イアにジルコニアを使用し、ペーストを調製した。得ら
れたペーストから、ドクターブレード法で厚み28μmの
グリーンシートを作成し、スクリーン印刷法により有効
層5層の積層コンデンサーを試作した。内部電極として
Ag/Pd=70/30の材料を使用した。このチツプを脱バイン
ダーした後、1100℃、3時間焼結した。得られた積層コ
ンデンサーは、誘電体層厚みが18μm、有効内部電極面
積が0.009cm2である。次に、外部電極として銀電極を焼
き付け電気特性を測定した。誘電率と誘電損失は、LCR
メーターを用いて、1KHz、1V、20℃の条件下で測定し
た。絶縁抵抗は高絶縁抵抗計を使用し、50V電圧印加1
分間値で示した。また、グレインサイズは積層コンデン
サーの断面を研磨し、1:1塩酸でエツチング処理後、走
査形電子顕微鏡写真を撮影し、ラインインターセプト法
により求めた。信頼性の評価として高温負荷試験を行
い、寿命は125℃、200VDC負荷条件下、故障率63%に到
達する時間で表わした。測定結果を表2に示した。Example 1 Barium titanate, zinc oxide, copper oxide, and iron oxide, cobalt oxide, nickel oxide and neodymium oxide, samarium oxide, dysprosium oxide, holmium oxide,
Erbium oxide and thulium oxide were weighed at the ratios shown in Table 1, pure water was added, and mixed by a wet ball mill. After the mixture was sufficiently dried and crushed, a paste was prepared using zirconia as a ball medium and trichloroethane as a solvent using an acrylic resin as a binder. A green sheet having a thickness of 28 μm was prepared from the obtained paste by a doctor blade method, and a multilayer capacitor having five effective layers was prototyped by a screen printing method. As an internal electrode
Ag / Pd = 70/30 material was used. After debinding the chip, the chip was sintered at 1100 ° C. for 3 hours. The obtained multilayer capacitor has a dielectric layer thickness of 18 μm and an effective internal electrode area of 0.009 cm 2 . Next, a silver electrode was baked as an external electrode, and the electrical characteristics were measured. Dielectric constant and dielectric loss are LCR
The measurement was performed using a meter under the conditions of 1 KHz, 1 V, and 20 ° C. For insulation resistance, use a high insulation resistance meter and apply 50V voltage 1
The value was shown in minutes. The grain size was determined by polishing the cross section of the multilayer capacitor, performing an etching treatment with 1: 1 hydrochloric acid, photographing a scanning electron microscope photograph, and determining the grain size by a line intercept method. A high-temperature load test was performed as an evaluation of reliability, and the life was expressed as the time to reach a failure rate of 63% under the conditions of 125 ° C and 200 VDC load. Table 2 shows the measurement results.
表2において、試料番号9,10,11はそれぞれ第三成
分、第四成分、あるいは両者を添加していない比較例で
ある。この場合、コンデンサーの電気特性の低下は認め
られないものの、高温負荷寿命は106、121、23時間と短
い。In Table 2, sample numbers 9, 10, and 11 are comparative examples in which the third component, the fourth component, or both were not added. In this case, although the electrical characteristics of the capacitor do not deteriorate, the high temperature load life is as short as 106, 121, and 23 hours.
これに対し、第三成分として、酸化鉄、酸化コバル
ト、酸化ニツケルを、第四成分として、酸化ネオジウ
ム、酸化サマリウム、酸化ジスプロシウム、酸化ホロミ
ウム、酸化エルビウム、酸化ツリウムのいずれかを添加
した場合、容量、誘電損失、絶縁抵抗等の電気特性の低
下を招くことなく、高温負荷特性を著しく向上すること
がわかる。On the other hand, when any one of iron oxide, cobalt oxide, and nickel oxide is added as the third component and neodymium oxide, samarium oxide, dysprosium oxide, holmium oxide, erbium oxide, and thulium oxide are added as the fourth component, It can be seen that high-temperature load characteristics are significantly improved without lowering electrical characteristics such as dielectric loss and insulation resistance.
実施例2 キユリー点をシフトさせるための添加物として、スズ
酸バリウム、スズ酸カルシウムを、第一成分、第二成
分、第三成分、第四成分、第五成分の和100molに対して
表3に示す割合になるように秤量し、第六成分として添
加した。実施例1と同様の方法で積層コンデンサーを試
作し、電気物性を測定した。結果を表4に示す。 Example 2 As an additive for shifting the Curie point, barium stannate and calcium stannate were used in Table 3 with respect to 100 mol of the sum of the first, second, third, fourth and fifth components. Was weighed so as to have the ratio shown in Table 2, and added as the sixth component. A multilayer capacitor was prototyped in the same manner as in Example 1, and the electrical properties were measured. Table 4 shows the results.
表3において、試料番号2,6は第三成分添加量が本発
明と異なる比較例であり、表4から分るように、焼結体
密度が低く、電気特性を測定することができない。試料
番号1,3,4,5は本発明のものであり、スズ酸バリウム、
スズ酸カルシウムの添加により、20℃での容量を増大す
ることが可能である。添加するシフターとしては、その
他に、スズ酸ストロンチウム、スズ酸鉛、チタン酸スト
ロンチウム、ジルコン酸バリウム、ジルコン酸カルシウ
ム、ジルコン酸ストロンチウム、ジルコン酸鉛などを使
用しても、同様な効果が得られる。素体のグレインサイ
ズは4μm程度の均一な微構造であり、誘電損失、絶縁
抵抗などの電気特性の悪化も認められない。高温負荷条
件下での寿命も長く、信頼性の高い積層コンデンサーが
得られることがわかる。In Table 3, Sample Nos. 2 and 6 are Comparative Examples in which the amount of the third component added is different from that of the present invention. As can be seen from Table 4, the sintered body density is low and the electrical characteristics cannot be measured. Sample Nos. 1, 3, 4, and 5 are of the present invention and include barium stannate,
It is possible to increase the capacity at 20 ° C. by adding calcium stannate. Similar effects can be obtained by using strontium stannate, lead stannate, strontium titanate, barium zirconate, calcium zirconate, strontium zirconate, lead zirconate, or the like as a shifter to be added. The element body has a uniform microstructure with a grain size of about 4 μm, and no deterioration in electrical characteristics such as dielectric loss and insulation resistance is observed. It can be seen that a long life under a high temperature load condition and a highly reliable multilayer capacitor can be obtained.
以上の実施例において、チタン酸バリウムはBaとTiの
モル比がほぼ1のものを用いたが、0.05mol程度その比
率がずれていても良好な特性を得ることができる。 In the above embodiments, barium titanate having a molar ratio of Ba to Ti of approximately 1 was used, but good characteristics can be obtained even if the ratio is shifted by about 0.05 mol.
(発明の効果) 以上述べたことから、本発明の強誘電性セラミツク組
成物は、1200℃以下の温度で焼結可能であり、グレイン
サイズが均一で、誘電損失、絶縁抵抗などの電気物性も
良好であり、極めて高い信頼性を有するものである。さ
らに、これらの特性を損ねることなく、室温付近での誘
電率を12000以上に高めることができ、積層セラミツク
コンデンサー用誘電性組成物として極めて有用であり、
その産業的価値は大きいものである。(Effects of the Invention) As described above, the ferroelectric ceramic composition of the present invention can be sintered at a temperature of 1200 ° C. or less, has a uniform grain size, and has electrical properties such as dielectric loss and insulation resistance. It is good and has extremely high reliability. Furthermore, without impairing these properties, the dielectric constant near room temperature can be increased to 12000 or more, which is extremely useful as a dielectric composition for a multilayer ceramic capacitor,
Its industrial value is great.
Claims (6)
酸バリウム、第二成分として0.2〜5.5mol%の酸化亜
鉛、第三成分として0.01〜0.7mol%の酸化鉄、酸化コバ
ルト、酸化ニツケルの中から選ばれた1種以上、第四成
分として0.1〜1.2mol%の希土類酸化物、第五成分とし
て0.2〜7mol%の酸化銅からなる誘電性セラミツク組成
物。1. A first component comprising 85.6 to 99.49 mol% of barium titanate, a second component comprising 0.2 to 5.5 mol% of zinc oxide, and a third component comprising 0.01 to 0.7 mol% of iron oxide, cobalt oxide and nickel oxide. A dielectric ceramic composition comprising 0.1 to 1.2 mol% of a rare earth oxide as a fourth component and 0.2 to 7 mol% of a copper oxide as a fifth component.
0.6〜3mol%、第三成分が0.05〜0.5mol%、第四成分が
0.3〜0.7mol%、第五成分が0.6〜3mol%である請求項1
記載の誘電性セラミツク組成物。2. The composition according to claim 1, wherein the first component is 92.8 to 98.45 mol%, and the second component is
0.6-3mol%, the third component is 0.05-0.5mol%, the fourth component is
3. The composition according to claim 1, wherein the third component is 0.3 to 0.7 mol%, and the fifth component is 0.6 to 3 mol%.
The dielectric ceramic composition as described in the above.
たは請求項2記載の誘電性セラミツク組成物。3. The dielectric ceramic composition according to claim 1, wherein the third component is cobalt oxide.
シウム、酸化ホロミウム、酸化エルビウムの中から選ば
れた1種以上である請求項1または請求項2記載の誘電
性セラミツク組成物。4. The dielectric ceramic composition according to claim 1, wherein the fourth component is at least one selected from samarium oxide, dysprosium oxide, holmium oxide, and erbium oxide.
0molに対し、第六成分として、スズ酸塩、チタン酸塩、
ジルコン酸塩の中から選ばれた1種以上を2〜20mol含
有する誘電性セラミツク組成物。5. The dielectric ceramic composition according to claim 1,
For 0 mol, as the sixth component, stannate, titanate,
A dielectric ceramic composition containing 2 to 20 mol of at least one selected from zirconates.
スズ酸カルシウムである請求項5記載の誘電性セラミツ
ク組成物。6. The dielectric ceramic composition according to claim 5, wherein the sixth component is barium stannate and / or calcium stannate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63023885A JP2583091B2 (en) | 1988-02-05 | 1988-02-05 | Dielectric ceramic composition |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63023885A JP2583091B2 (en) | 1988-02-05 | 1988-02-05 | Dielectric ceramic composition |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01201070A JPH01201070A (en) | 1989-08-14 |
| JP2583091B2 true JP2583091B2 (en) | 1997-02-19 |
Family
ID=12122902
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63023885A Expired - Fee Related JP2583091B2 (en) | 1988-02-05 | 1988-02-05 | Dielectric ceramic composition |
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| Country | Link |
|---|---|
| JP (1) | JP2583091B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0512997Y2 (en) * | 1989-12-14 | 1993-04-06 | ||
| WO2014097678A1 (en) * | 2012-12-21 | 2014-06-26 | 株式会社村田製作所 | Laminated ceramic capacitor and method for producing same |
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1988
- 1988-02-05 JP JP63023885A patent/JP2583091B2/en not_active Expired - Fee Related
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| Publication number | Publication date |
|---|---|
| JPH01201070A (en) | 1989-08-14 |
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