JP2600055B2 - Cryopump - Google Patents
CryopumpInfo
- Publication number
- JP2600055B2 JP2600055B2 JP5228333A JP22833393A JP2600055B2 JP 2600055 B2 JP2600055 B2 JP 2600055B2 JP 5228333 A JP5228333 A JP 5228333A JP 22833393 A JP22833393 A JP 22833393A JP 2600055 B2 JP2600055 B2 JP 2600055B2
- Authority
- JP
- Japan
- Prior art keywords
- low
- temperature
- section
- cryopump
- drive unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000005057 refrigeration Methods 0.000 claims description 38
- 238000001816 cooling Methods 0.000 claims description 9
- 230000005494 condensation Effects 0.000 claims description 3
- 238000009833 condensation Methods 0.000 claims description 3
- 238000007599 discharging Methods 0.000 claims description 3
- 239000012530 fluid Substances 0.000 claims description 3
- 238000000926 separation method Methods 0.000 claims description 2
- 238000001179 sorption measurement Methods 0.000 claims description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 24
- 239000007789 gas Substances 0.000 description 23
- 239000007788 liquid Substances 0.000 description 12
- 229910052757 nitrogen Inorganic materials 0.000 description 12
- 239000003463 adsorbent Substances 0.000 description 10
- 230000005855 radiation Effects 0.000 description 10
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
- 238000005339 levitation Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000007710 freezing Methods 0.000 description 2
- 230000008014 freezing Effects 0.000 description 2
- 230000003993 interaction Effects 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 229910052691 Erbium Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- UYAHIZSMUZPPFV-UHFFFAOYSA-N erbium Chemical compound [Er] UYAHIZSMUZPPFV-UHFFFAOYSA-N 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005459 micromachining Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Compressor (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明はクライオポンプに関し、
特に、局所分析機能や微細加工機能のような振動を極度
に嫌う機能を有する真空装置において主排気用真空ポン
プとして利用されるクライオポンプに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cryopump,
In particular, the present invention relates to a cryopump used as a main exhaust vacuum pump in a vacuum apparatus having a function of extremely dislike vibration such as a local analysis function and a fine processing function.
【０００２】[0002]
【従来の技術】図２を参照して従来の産業用クライオポ
ンプの構造を説明する。2. Description of the Related Art The structure of a conventional industrial cryopump will be described with reference to FIG.
【０００３】冷凍駆動部２１は、約１０Ｋの熱負荷フラ
ンジ部２２と約８０Ｋの熱負荷フランジ部２３を有す
る。冷凍駆動部２１の冷凍駆動原理には、Ｇ−Ｍサイク
ル、ソルベイサイクル、またはスターリングサイクルが
使用され、そのためにクライオポンプはその内部に機械
的駆動部すなわち振動発生源を有している。The refrigeration drive 21 has a heat load flange 22 of about 10K and a heat load flange 23 of about 80K. A GM cycle, a Solvay cycle, or a Stirling cycle is used for the refrigerating drive principle of the refrigerating drive unit 21. For this purpose, the cryopump has a mechanical drive unit, that is, a vibration source therein.
【０００４】低温部２４は熱負荷フランジ部２３と熱接
触しており、その外面部は、ポンプ容器２５の内面から
の熱輻射を受けにくいようにＮｉ光沢メッキ等の低輻射
率処理が施され、その内面部は、ポンプ容器吸入口フラ
ンジ２６の側から内方に入射した熱輻射を反射し、さら
に内側の低温部に入射しないように、黒体化処理されて
いる。The low temperature section 24 is in thermal contact with the heat load flange section 23, and the outer surface thereof is subjected to a low emissivity treatment such as Ni gloss plating so as not to receive heat radiation from the inner surface of the pump container 25. The inner surface is blackened so as to reflect the heat radiation that has entered inward from the side of the pump container inlet flange 26 and not to enter the inner low-temperature portion.
【０００５】低温部２７は低温部２４と熱接触してお
り、この低温部２７は、ポンプ容器吸入フランジ２６側
からの熱輻射が、低温部２７および低温部２４で囲まれ
た内側の低温部を直射しないようにする構造、および気
体分子が通り抜けられる構造を有している。The low-temperature section 27 is in thermal contact with the low-temperature section 24, and the low-temperature section 27 transmits heat radiation from the pump container suction flange 26 side to the inner low-temperature section surrounded by the low-temperature section 27 and the low-temperature section 24. Has a structure that prevents direct exposure to light, and a structure that allows gas molecules to pass through.
【０００６】低温部２８において、低温部２４と低温部
２７からの熱輻射の直射を受ける部分には熱輻射を受け
にくいようにＮｉ光沢メッキ等の低輻射率処理が施され
る。また低温部２８において、低温部２４と低温部２７
からの熱輻射の直射を受けない部分は、活性炭等の比表
面積の大きい吸着材２９が接着され、約１０Ｋの熱負荷
フランジ部２２と熱接触している。[0006] In the low temperature section 28, a portion which receives direct heat radiation from the low temperature section 24 and the low temperature section 27 is subjected to a low emissivity treatment such as Ni gloss plating so as not to receive heat radiation. In the low-temperature section 28, the low-temperature section 24 and the low-temperature section 27
Adsorbent 29 having a large specific surface area, such as activated carbon, is adhered to a portion that is not directly exposed to heat radiation from the heat radiation, and is in thermal contact with the heat load flange portion 22 of about 10K.
【０００７】上記のクライオポンプに対し、気体分子
は、ポンプ容器吸入口フランジ２６の外側方向から進入
し、８０Ｋ程度の温度で凝縮するＨ2 Ｏ、ＣＯ2 等の気
体分子は低温部２７と低温部２４にて凝縮排気され、８
０Ｋ程度の温度では凝縮しないが１０Ｋ程度の温度では
凝縮するＮ2 ，Ｏ2 ，Ａｒ，ＣＯ等の他の気体分子は低
温部２８の外面部にて凝縮排気され、１０Ｋ程度の温度
でも凝縮しないまたは非凝縮性のＨ2 、Ｈｅ等の気体分
子は、さらに内側の吸着材２９によって物理吸着され
る。[0007] For the above cryopump, gas molecules, enters from the outside direction of the pump chamber inlet flange 26, H 2 O to condense at a temperature of about 80K, gas molecules such as CO 2 is the low temperature section 27 and the low-temperature Condensed and evacuated in the section 24;
Other gas molecules such as N 2 , O 2 , Ar, and CO which do not condense at a temperature of about 0K but condense at a temperature of about 10K are condensed and evacuated at the outer surface of the low-temperature section 28 and do not condense at a temperature of about 10K. Alternatively, gas molecules such as non-condensable H 2 and He are physically adsorbed by the adsorbent 29 further inside.
【０００８】[0008]
【発明が解決しようとする課題】従来のクライオポンプ
では、その排気動作時に、音として充分に人間に聞こえ
る程の大きな振動が存在した。この振動を生じる原因
は、前述の通り、冷凍駆動部の内部に、振動発生源とな
る機械的駆動部を有するからである。この機械的駆動部
による機械的な動作は、低温部が冷凍駆動部を介して常
温部と熱接触しており、この熱接触による熱伝達の効果
が非常に大きいので、気体の排気に使用している各低温
部を特定の温度を維持するために必然的な要素である。
機械的駆動部から発生する振動は真空装置に伝わる。従
って、この真空装置が、振動を極度に嫌う局所分析機能
または微細加工機能を有する装置である場合には、これ
らの機能を大きく阻害するという欠点を有していた。In the conventional cryopump, during the evacuation operation, there is a large vibration that can be sufficiently heard by humans as sound. As described above, the cause of the vibration is that the mechanical drive unit serving as the vibration source is provided inside the refrigerating drive unit. The mechanical operation by the mechanical drive unit is used for gas exhaust because the low-temperature part is in thermal contact with the room-temperature part via the refrigerating drive unit, and the heat transfer effect by this thermal contact is very large. Each low temperature part is a necessary element to maintain a specific temperature.
The vibration generated from the mechanical drive is transmitted to the vacuum device. Therefore, when this vacuum apparatus is an apparatus having a local analysis function or a fine processing function that extremely dislikes vibration, there is a disadvantage that these functions are greatly impaired.
【０００９】本発明の目的は、局所分析機能や微細加工
機能を有する真空装置に振動を伝えず、これにより真空
装置の機能を阻害しないようにしたクライオポンプを提
供することにある。An object of the present invention is to provide a cryopump in which vibration is not transmitted to a vacuum device having a local analysis function and a fine processing function so as not to hinder the function of the vacuum device.
【００１０】[0010]
【課題を解決するための手段】本発明に係るクライオポ
ンプは、上記の目的を達成するため、次のように構成さ
れる。The cryopump according to the present invention is configured as follows to achieve the above object.
【００１１】本発明に係るクライオポンプは、気体の凝
縮または低温物理吸着により排気を行うための温度の異
なる複数の排気用低温部を有し、これらの低温部のうち
少なくとも１つの低温部を、他の部分（他の低温部およ
び常温部）に対し、磁気発生手段を用いて空間的に分離
して孤立状態で配置し、この低温部と他の部分との間で
の接触による熱伝導をなくすように構成した。[0011] The cryopump according to the present invention has a plurality of exhaust low-temperature sections having different temperatures for exhausting by gas condensation or low-temperature physical adsorption. The other parts (other low-temperature parts and normal-temperature parts) are separated spatially using magnetic generating means and placed in an isolated state, and the heat conduction due to contact between this low-temperature part and other parts is It was configured to eliminate it.
【００１２】前記の構成において、好ましくは、空間的
に分離して配置された低温部を冷却するための冷凍駆動
部と、低温部を冷却するとき冷凍駆動部を接触させ冷却
終了後に冷凍駆動部を低温部から分離する機構とを設
け、分離時に冷凍駆動部に設けられた振動発生源の動作
を停止させるようにしている。In the above configuration, preferably, the refrigeration drive unit for cooling the low-temperature portion, which is spatially separated, is brought into contact with the refrigeration drive portion when cooling the low-temperature portion, and after the cooling is completed, the refrigeration drive portion is provided. And a mechanism that separates the vibration source from the low-temperature section, and stops the operation of the vibration source provided in the refrigerating drive section at the time of separation.
【００１３】前記の構成において、好ましくは、空間的
に分離して配置された低温部は、その熱容量を大きくす
る高比熱高密度部材を有する。この高比熱高密度部材に
よれば、その熱容量に基づき、上記低温部を冷凍駆動部
の接触により特定温度以下まで冷却しその後に冷凍駆動
部を離して冷凍駆動部の運転を停止した場合、孤立した
低温部にて他の部分からの熱輻射により上昇する温度
が、真空装置側で一連の局所分析および微細加工等を行
うために必要な時間の経過後に、低温部の排気機能を維
持するために必要とされる最大温度以下となる。In the above structure, preferably, the low-temperature portion spatially separated has a high-specific-heat, high-density member for increasing its heat capacity. According to the high specific heat and high density member, if the low temperature section is cooled to a specific temperature or less by contact of the refrigeration drive section based on its heat capacity, and then the refrigeration drive section is separated to stop the operation of the refrigeration drive section, In order to maintain the evacuation function of the low-temperature part after the elapse of the time required for performing a series of local analysis and fine processing on the vacuum device side, the temperature that rises due to heat radiation from other parts in the low-temperature part Below the maximum temperature required.
【００１４】前記の構成において、好ましくは、空間的
に分離されない他の低温部は冷凍駆動部を備え、この冷
凍駆動部では液体窒素等の低温流体の導入および排出で
低温状態を発生する。In the above configuration, preferably, the other low-temperature portion that is not spatially separated is provided with a refrigeration drive unit, and the refrigeration drive unit generates a low-temperature state by introducing and discharging a low-temperature fluid such as liquid nitrogen.
【００１５】[0015]
【作用】本発明では、クライオポンプに含まれる低温部
を磁気浮上の構造としかつその熱容量を高めるように
し、低温部を所定の温度に冷却するときには、対応する
冷凍駆動部を動作状態に保持して当該低温部に接触さ
せ、冷却を行う。低温部が所定温度に冷却された後に
は、冷凍駆動部を低温部から離して低温部を空間的に孤
立した状態にて浮かせてその熱伝導を遮断すると共に、
冷凍駆動部内の振動発生源の動作を停止する。これによ
り、真空排気時においては、振動を嫌う機能を有した真
空装置に対し振動が与えられない。振動を生じない他の
低温部の構造としては、冷凍駆動部に液体窒素等の導入
および排出の構成を利用することも可能である。According to the present invention, the low-temperature portion included in the cryopump has a magnetic levitation structure and its heat capacity is increased, and when the low-temperature portion is cooled to a predetermined temperature, the corresponding refrigeration drive is held in an operating state. To contact with the low-temperature part to cool. After the low-temperature part is cooled to a predetermined temperature, the refrigeration drive unit is separated from the low-temperature part and the low-temperature part is floated in a spatially isolated state to cut off its heat conduction,
The operation of the vibration source in the refrigerating drive unit is stopped. As a result, during vacuum evacuation, no vibration is given to the vacuum device having a function that dislikes vibration. As another structure of the low-temperature section that does not generate vibration, it is also possible to use a configuration for introducing and discharging liquid nitrogen or the like to the refrigeration drive section.
【００１６】[0016]
【実施例】以下に、本発明の実施例を添付図面に基づい
て説明する。Embodiments of the present invention will be described below with reference to the accompanying drawings.
【００１７】図１は本発明に係るクライオポンプの要部
の内部構造を示す。図１において、１は第１の冷凍駆動
部であり、その先端部１ａは約１０Ｋまで冷却される。
２は冷凍駆動部１の先端部１ａと熱接触することが可能
な第１の排気用低温部である。この低温部２は、冷凍駆
動部１の先端部１ａと熱接触状態にあるとき、かかる熱
接触により約１０Ｋまで冷却される。３は低温部２の一
部であって、Ｐｂ（鉛），またはＥｒ（エルビュウム）
とＮｉの合金等の高比熱高密度材料で形成された部材で
ある。冷凍駆動部１を囲む高比熱高密度部材３は例えば
筒体形状を有する。これらの高比熱高密度部材３は、低
温部２の低温での熱容量を大きくするためのものであ
る。さらに４は低温部２の一部であってＨ2 ，Ｈｅ等の
気体分子を物理吸着し排気するための活性炭等による筒
体状の吸着材であり、５は低温部２の筒体状の気体凝縮
パネル部である。吸着材４および気体凝縮パネル部５
は、１０Ｋ程度の温度で凝縮される気体分子を排気する
と共に、１０Ｋ程度の温度では凝縮しない気体分子を通
過させる。また気体凝縮パネル部５は、外から入射して
くる熱輻射が低温部２の一部の吸着材４を直射しない構
造を有する。６は低温部２の一部をなすリング形状の磁
石部であり、磁石部６は、その外側の対向する位置に配
置された磁石部７との磁場相互作用（反発作用等）に基
づき低温部２全体を空間的に浮かせる機能を有してい
る。すなわち、高比熱高密度部材３、吸着材４、気体凝
縮パネル部５、磁石部６を含むほぼ筒体状（図中右端部
は閉じている）の低温部２は、磁気浮上の状態にて、空
間的に分離され孤立状態に配置される。なお、低温部２
の軸方向の動きについては構造的に規制が施されてい
る。FIG. 1 shows an internal structure of a main part of a cryopump according to the present invention. In FIG. 1, reference numeral 1 denotes a first refrigeration drive unit, and its tip 1a is cooled to about 10K.
Reference numeral 2 denotes a first exhaust low-temperature portion that can be in thermal contact with the tip portion 1a of the refrigeration drive 1. When the low-temperature section 2 is in thermal contact with the tip 1a of the freezing drive section 1, the low-temperature section 2 is cooled down to about 10K by such thermal contact. Numeral 3 is a part of the low temperature part 2, and is Pb (lead) or Er (erbium).
And a member formed of a high specific heat and high density material such as an alloy of Ni and Ni. The high specific heat high density member 3 surrounding the refrigeration drive unit 1 has, for example, a cylindrical shape. These high specific heat and high density members 3 are for increasing the heat capacity of the low temperature section 2 at low temperature. Further, reference numeral 4 denotes a part of the low-temperature part 2 which is a cylindrical adsorbent made of activated carbon or the like for physically adsorbing and exhausting gas molecules such as H 2 and He, and 5 denotes a cylindrical adsorbent of the low-temperature part 2. This is the gas condensing panel section. Adsorbent 4 and gas condensing panel 5
Exhausts gas molecules that are condensed at a temperature of about 10K and passes gas molecules that are not condensed at a temperature of about 10K. Further, the gas condensing panel section 5 has a structure in which heat radiation entering from the outside does not directly irradiate a part of the adsorbent 4 of the low temperature section 2. Reference numeral 6 denotes a ring-shaped magnet part which forms a part of the low-temperature part 2. The magnet part 6 is based on a magnetic field interaction (such as a repulsion action) with a magnet part 7 disposed at a position outside and facing the low-temperature part. 2 has a function of spatially floating the whole. That is, the low-temperature portion 2 having a substantially cylindrical shape (the right end in the figure is closed) including the high-specific-heat, high-density member 3, the adsorbent 4, the gas condensing panel portion 5, and the magnet portion 6 is in a magnetically levitated state. , Are spatially separated and arranged in an isolated state. In addition, low temperature part 2
The movement in the axial direction is structurally regulated.
【００１８】８は第２の冷凍駆動部であり、この冷凍駆
動部８では液体窒素などの低温流体（液体または気体）
を利用して冷却作用を生じる。すなわち、液体窒素導入
排出口９から導入された液体窒素を冷凍駆動部８の部分
に溜め込むことにより、約７７Ｋの低温を発生させる。
冷凍駆動部８では、液体窒素自体の重量を利用して液体
窒素を導入し、かつ液体窒素の蒸発作用を利用して蒸発
した窒素を排出しているだけであるので、振動の発生は
ほとんどない。１０は、冷凍駆動部８と一体化されて熱
接触し、これにより約７７Ｋまで冷却される第２の低温
部であり、排気作用を有する。冷凍駆動部８および低温
部１０はポンプケーシングを形成する。この低温部１０
では、約７７Ｋ以上の温度で凝縮される気体分子が排気
され、さらに、この程度の温度では凝縮されない気体分
子を通過させ、内側の上記低温部２へ向かわせる構造を
有している。また低温部１０は、外部からの熱輻射が低
温部２を直射しない構造を有する。７は、低温部１０の
一部をなすリング形状の磁石部であり、対向する磁石部
６（低温部２の一部である）との磁場相互作用に基づ
き、前述の通り、低温部２全体を空間的に浮かせる機能
を有している。Reference numeral 8 denotes a second refrigeration drive unit, which is a low-temperature fluid (liquid or gas) such as liquid nitrogen.
Utilizes a cooling effect. That is, the liquid nitrogen introduced from the liquid nitrogen introduction / exhaust port 9 is stored in the refrigeration drive section 8 to generate a low temperature of about 77K.
The refrigeration drive unit 8 only introduces liquid nitrogen using the weight of the liquid nitrogen itself and discharges the evaporated nitrogen using the evaporating action of the liquid nitrogen, so that there is almost no vibration. . Reference numeral 10 denotes a second low-temperature section which is integrated with the refrigeration drive section 8 and is in thermal contact with the refrigeration drive section 8 to be cooled down to about 77K. The refrigeration drive section 8 and the low-temperature section 10 form a pump casing. This low temperature part 10
Has a structure in which gas molecules condensed at a temperature of about 77 K or more are exhausted, and gas molecules that are not condensed at such a temperature are allowed to pass therethrough and directed to the inside low-temperature section 2. The low-temperature section 10 has a structure in which heat radiation from the outside does not directly hit the low-temperature section 2. Reference numeral 7 denotes a ring-shaped magnet part forming a part of the low-temperature part 10, based on a magnetic field interaction with the facing magnet part 6 (which is a part of the low-temperature part 2), as described above. Has the function of spatially floating.
【００１９】図１に示されたその他の構造に関し、１１
はベローズ部、１２はネジ部、１３はポンプ取付けフラ
ンジ部である。ネジ部１２を調整することによって、冷
凍駆動部１をポンプ取付けフランジ部１３に対し左右に
移動させ、冷凍駆動部１を低温部２に熱接触させたり、
低温部２から離したりすることができる。なお、冷凍駆
動部１を低温部２に熱接触させたり低温部２から離した
りするための機構は、ネジ機構に限定されない。前述の
通り、低温部２の全体は、磁石部６，７の作用に基づき
磁気浮上の状態にあり、従って、冷凍駆動部１と熱接触
状態にない低温部２は、他の部分（他の低温部および常
温部）に対して空間的に分離されて孤立状態にあり、他
の部分との間で熱伝導が生じない。With respect to the other structure shown in FIG.
Is a bellows portion, 12 is a screw portion, and 13 is a pump mounting flange portion. By adjusting the screw portion 12, the refrigerating drive unit 1 is moved left and right with respect to the pump mounting flange portion 13 so that the refrigerating drive unit 1 is brought into thermal contact with the low-temperature unit 2,
It can be separated from the low temperature section 2. The mechanism for bringing the refrigeration drive unit 1 into thermal contact with the low-temperature unit 2 or separating it from the low-temperature unit 2 is not limited to the screw mechanism. As described above, the entire low-temperature section 2 is in a magnetic levitation state due to the action of the magnet sections 6 and 7, and therefore, the low-temperature section 2 that is not in thermal contact with the refrigeration drive section 1 is in other parts (other parts). (Low-temperature section and normal-temperature section) and are spatially separated and in an isolated state, and heat conduction does not occur with other sections.
【００２０】冷凍駆動部１は、熱接触状態にて低温部２
を所定温度になるまで冷却した後、ネジ部１２の調整で
低温部２から切り離され、さらに冷凍駆動を行う機械的
駆動部（振動発生源）の動作が停止される。これにより
ポンプ部を完全に無振動にすることができる。The refrigerating drive unit 1 has a low temperature unit 2 in a thermal contact state.
After cooling to a predetermined temperature, the screw portion 12 is adjusted to separate the low temperature portion 2 from the low temperature portion 2, and further, the operation of the mechanical drive portion (vibration source) for performing the freezing drive is stopped. This makes it possible to completely eliminate vibration of the pump section.
【００２１】低温部２が単位時間当りに受けとる熱量
は、低温部２から見たときの低温部１０および冷凍駆動
部８の表面積および輻射率と、低温部１０および冷凍駆
動部８から見たときの低温部２の表面積および輻射率
と、各々の温度とによって、計算することが可能であ
る。また上記の高比熱高密度部材３の量は、単位時間当
りに受けとる熱量によって低温部２が所定の排気機能を
果たせる最高温度に至るまでの時間が、装置側での作業
時間よりも短くなる量として設定されている。The amount of heat received by the low-temperature section 2 per unit time includes the surface area and emissivity of the low-temperature section 10 and the refrigeration drive section 8 as viewed from the low-temperature section 2, and the heat amount as viewed from the low-temperature section 10 and the refrigeration drive section 8. Can be calculated based on the surface area and emissivity of the low-temperature portion 2 and the respective temperatures. The amount of the high-specific-heat, high-density member 3 is such that the time required for the low-temperature portion 2 to reach the maximum temperature at which the predetermined low-pressure part can be achieved by the amount of heat received per unit time is shorter than the working time on the device side. Is set as
【００２２】上記構造を有するクライオポンプにおい
て、気体分子は、外部より低温部１０に飛来する。飛来
する気体分子について、７７Ｋ程度の温度で凝縮するＨ
2 Ｏ，ＣＯ2 等の気体分子は、低温部１０で凝縮排気さ
れ、７７Ｋ程度の温度では凝縮しないが１０Ｋ程度の温
度で凝縮するＮ2 ，Ｏ2 ，Ａｒ，ＣＯ等の他の気体分子
は、低温部２における吸着材４を除く部分で凝縮排気さ
れる。さらに、１０Ｋ程度の温度でも凝縮しない、また
は非凝縮性のＨ2 ，Ｈｅ等の気体分子は、内側の吸着材
４で物理吸着される。In the cryopump having the above structure, gas molecules fly to the low temperature section 10 from the outside. About the gas molecules that fly, H condenses at a temperature of about 77K.
Gas molecules such as 2 O and CO 2 are condensed and exhausted in the low temperature section 10, and do not condense at a temperature of about 77 K, but other gas molecules such as N 2 , O 2 , Ar and CO condensed at a temperature of about 10 K Then, the air is condensed and exhausted at a portion other than the adsorbent 4 in the low temperature section 2. Further, gas molecules such as H 2 and He which do not condense or are non-condensable even at a temperature of about 10 K are physically adsorbed by the inner adsorbent 4.
【００２３】本実施例によるクライオポンプは、上記の
ような構造および機能を有しているため、所定の排気機
能を有し真空装置（図示せず）の内部を真空排気すると
共に、真空装置の側が局所分析や微細加工等の動作を行
うときに完全無振動化を実現でき、振動を著しく嫌う真
空装置用の排気ポンプとして使用できる。Since the cryopump according to the present embodiment has the above-described structure and function, it has a predetermined evacuation function and evacuates the inside of a vacuum device (not shown). When the side performs an operation such as local analysis or micromachining, it can be completely vibration-free, and can be used as an exhaust pump for a vacuum apparatus that remarkably rejects vibration.
【００２４】なお、本実施例では低温部１０を冷却する
ために液体窒素を使用した冷凍駆動部８を用いたが、低
温部２と同様の磁気浮上構造を用いて、低温部１０を、
常温部および低温部２から浮かし、冷凍駆動部１に類似
した冷凍駆動部を設けて、低温部１０に熱接触させた
り、させなかったりする構造を設ければ、振動のない液
体窒素冷凍駆動部８の代わりに、他の冷凍駆動部の構造
を用いることもできる。この場合にも、当該冷凍駆動部
を低温部１０から切り離したとき、内部の振動発生源の
動作は停止される。また、低温部２で高比熱高密度部材
を用いたのと同様に、低温部１０に対して高比熱高密度
部材を用いることが必要である。In the present embodiment, the refrigeration drive unit 8 using liquid nitrogen for cooling the low-temperature section 10 is used. However, by using the same magnetic levitation structure as the low-temperature section 2, the low-temperature section 10 is cooled.
A liquid nitrogen refrigeration drive unit having no vibration can be provided by providing a refrigeration drive unit that floats from the normal temperature unit and the low temperature unit 2 and is similar to the refrigeration drive unit 1 so as to make thermal contact with the low temperature unit 10 or not. Instead of 8, another refrigeration drive structure may be used. Also in this case, when the refrigeration drive unit is separated from the low-temperature unit 10, the operation of the internal vibration source is stopped. Also, it is necessary to use a high specific heat and high density member for the low temperature section 10 in the same manner as using a high specific heat and high density member for the low temperature section 2.
【００２５】前記実施例のクライオポンプの構成では、
温度の異なる２つの排気用低温部を備えていたが、２つ
以上の排気用低温部を備えるクライオポンプに対し本発
明の構成を適用することもできる。In the configuration of the cryopump of the embodiment,
Although two exhaust low-temperature sections having different temperatures are provided, the configuration of the present invention can also be applied to a cryopump including two or more exhaust low-temperature sections.
【００２６】[0026]
【発明の効果】以上の説明で明らかなように本発明によ
れば、クライオポンプの冷凍駆動部において無振動化を
可能にしたため、当該クライオポンプを、振動を極端に
嫌う局所分析機能や微細加工機能を有する真空装置の主
排気ポンプとして使用することができる。As is apparent from the above description, according to the present invention, the cryopump can be made free of vibrations in the refrigerating drive section. It can be used as a main exhaust pump of a vacuum device having a function.
【図１】本発明に係るクライオポンプの内部構造を示す
断面図である。FIG. 1 is a sectional view showing an internal structure of a cryopump according to the present invention.
【図２】従来のクライオポンプの内部構造を示す断面図
である。FIG. 2 is a sectional view showing an internal structure of a conventional cryopump.
１ 冷凍駆動部 ２ 低温部 ３ 高比熱高密度部材 ４ 吸着材 ５ 気体凝縮パネル部 ６ 磁石部 ７ 磁石部 ８ 冷凍駆動部 ９ 液体窒素導入排出口 １０ 低温部 １１ ベローズ部 １２ ネジ部 DESCRIPTION OF SYMBOLS 1 Refrigeration drive part 2 Low temperature part 3 High specific heat high-density member 4 Adsorbent 5 Gas condensation panel part 6 Magnet part 7 Magnet part 8 Refrigeration drive part 9 Liquid nitrogen introduction and discharge port 10 Low temperature part 11 Bellows part 12 Screw part
Claims (4)
て、気体の凝縮または低温物理吸着により排気を行うた
めの温度の異なる複数の排気用低温部を有し、少なくと
も１つの前記低温部を、他の部分に対し、磁気発生手段
を用いて空間的に分離して配置し、この低温部と前記他
の部分との間での接触による熱伝導をなくすようにした
ことを特徴とするクライオポンプ。1. A cryopump for performing vacuum evacuation, comprising a plurality of low-temperature evacuation sections having different temperatures for performing evacuation by gas condensation or low-temperature physical adsorption, wherein at least one low-temperature section is connected to another section. In contrast, a cryopump characterized by spatially separating using a magnetic generating means so as to eliminate heat conduction due to contact between the low-temperature portion and the other portion.
て、空間的に分離して配置された前記低温部を冷却する
ための冷凍駆動部と、前記低温部を冷却するとき前記冷
凍駆動部を接触させ冷却終了後に前記冷凍駆動部を前記
低温部から分離する機構とを設け、分離時に前記冷凍駆
動部に設けられた振動発生源の動作を停止させることを
特徴とするクライオポンプ。2. The cryopump according to claim 1, wherein the refrigeration drive unit for cooling the low-temperature unit, which is spatially separated, is brought into contact with the refrigeration drive unit when cooling the low-temperature unit. A cryopump comprising: a mechanism for separating the refrigeration drive unit from the low-temperature portion after cooling is completed; and stopping the operation of a vibration source provided in the refrigeration drive unit at the time of separation.
て、前記空間的に分離して配置された前記低温部は、そ
の熱容量を大きくする高比熱高密度部材を有することを
特徴とするクライオポンプ。3. The cryopump according to claim 1, wherein the low-temperature portion, which is spatially separated, has a high-specific-heat, high-density member that increases its heat capacity.
て、空間的に分離されない他の前記低温部は、低温流体
の導入および排出で低温状態を発生する冷凍駆動部を備
えることを特徴とするクライオポンプ。4. The cryopump according to claim 1, wherein the other low-temperature section that is not spatially separated includes a refrigeration drive section that generates a low-temperature state by introducing and discharging a low-temperature fluid. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5228333A JP2600055B2 (en) | 1993-08-20 | 1993-08-20 | Cryopump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5228333A JP2600055B2 (en) | 1993-08-20 | 1993-08-20 | Cryopump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0763166A JPH0763166A (en) | 1995-03-07 |
| JP2600055B2 true JP2600055B2 (en) | 1997-04-16 |
Family
ID=16874819
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5228333A Expired - Fee Related JP2600055B2 (en) | 1993-08-20 | 1993-08-20 | Cryopump |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2600055B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6672054B2 (en) * | 2016-04-19 | 2020-03-25 | アルバック・クライオ株式会社 | Cryopump, vacuum processing equipment |
-
1993
- 1993-08-20 JP JP5228333A patent/JP2600055B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0763166A (en) | 1995-03-07 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4926648A (en) | Turbomolecular pump and method of operating the same | |
| KR101047398B1 (en) | Cryopump and vacuum exhaust method | |
| US4546613A (en) | Cryopump with rapid cooldown and increased pressure | |
| EP0079960B1 (en) | Improved cryopump | |
| US5156007A (en) | Cryopump with improved second stage passageway | |
| EP3710699B1 (en) | Cryopump with enhanced frontal array | |
| JPH04219478A (en) | Two stage type cryopump | |
| JP2000512703A (en) | Regeneration method by purging and lowering vacuum of cryopump, cryopump and control device | |
| US4966016A (en) | Cryopump with multiple refrigerators | |
| US5345787A (en) | Miniature cryosorption vacuum pump | |
| EP0610666B1 (en) | Turbomolecular pump | |
| JP2600055B2 (en) | Cryopump | |
| WO2022190760A1 (en) | Cryopump | |
| US5211022A (en) | Cryopump with differential pumping capability | |
| US5001903A (en) | Optimally staged cryopump | |
| CN1252844A (en) | In situ getter pump system and method | |
| EP0506133B1 (en) | A cryopump | |
| EP0126909A2 (en) | Cryopump with rapid cooldown and increased pressure stability | |
| JPH0544642A (en) | Cryopump equipped with low temperature trap | |
| US4896511A (en) | Optimally staged cryopump | |
| TW201725321A (en) | Cryopump | |
| US20240369052A1 (en) | Cryopump | |
| JP2587522B2 (en) | Generation method of extremely high vacuum environment | |
| EP0349577B1 (en) | An optimally staged cryopump | |
| JP2656199B2 (en) | Opening method of vacuum chamber and PVD apparatus |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20080129 Year of fee payment: 11 |
|
| S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313111 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20080129 Year of fee payment: 11 |
|
| R360 | Written notification for declining of transfer of rights |
Free format text: JAPANESE INTERMEDIATE CODE: R360 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20080129 Year of fee payment: 11 |
|
| R371 | Transfer withdrawn |
Free format text: JAPANESE INTERMEDIATE CODE: R371 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20080129 Year of fee payment: 11 |
|
| S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313111 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20080129 Year of fee payment: 11 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090129 Year of fee payment: 12 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090129 Year of fee payment: 12 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20100129 Year of fee payment: 13 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20100129 Year of fee payment: 13 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110129 Year of fee payment: 14 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110129 Year of fee payment: 14 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110129 Year of fee payment: 14 |
|
| S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313111 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110129 Year of fee payment: 14 |
|
| R360 | Written notification for declining of transfer of rights |
Free format text: JAPANESE INTERMEDIATE CODE: R360 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110129 Year of fee payment: 14 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110129 Year of fee payment: 14 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110129 Year of fee payment: 14 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120129 Year of fee payment: 15 |
|
| LAPS | Cancellation because of no payment of annual fees |