JP2601355B2 - Transfer jig for wafer boat - Google Patents
Transfer jig for wafer boatInfo
- Publication number
- JP2601355B2 JP2601355B2 JP1277314A JP27731489A JP2601355B2 JP 2601355 B2 JP2601355 B2 JP 2601355B2 JP 1277314 A JP1277314 A JP 1277314A JP 27731489 A JP27731489 A JP 27731489A JP 2601355 B2 JP2601355 B2 JP 2601355B2
- Authority
- JP
- Japan
- Prior art keywords
- wafer boat
- notch
- arc
- transfer jig
- holding portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000003014 reinforcing effect Effects 0.000 claims description 24
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 description 52
- 239000012535 impurity Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- 238000005452 bending Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Packaging Frangible Articles (AREA)
Description
【発明の詳細な説明】 産業上の利用分野 この発明は半導体ウェハをのせたウェハボートを保持
して炉芯管に出入れするのに用いる搬送治具に関する。Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a transfer jig used for holding a wafer boat on which semiconductor wafers are placed and moving it into and out of a furnace core tube.
従来の技術 従来の搬送治具、すなわちフォークは、第７図に示す
ようにパイプ部分１に切欠部２を設けてウエハボートの
保持部３を形成したものである。切欠部２は円弧状の部
分と直線状の部分を有する。曲線状の部分は曲げモーメ
ントが最大の部分であるので、部分4,5が他の部分より
肉厚になっている。例えば特開平１−251713号公報に記
載のウェハボート搬送治具を参照。2. Description of the Related Art A conventional transfer jig, that is, a fork has a notch 2 provided in a pipe portion 1 to form a holding portion 3 of a wafer boat as shown in FIG. The notch 2 has an arc-shaped portion and a linear portion. Since the curved portion has the maximum bending moment, the portions 4 and 5 are thicker than the other portions. For example, refer to a wafer boat transfer jig described in JP-A-1-251713.
発明が解決しようとする課題 しかしこのように肉厚にしても十分な強度を有してい
ない。長時間使用しているとウェハボート保持部３が想
像線で示すようにたわむという欠点があった。このとき
の先端たわみ量Ｔを小さくしたい。このたわみ量を小さ
くするにはフォーク全体の肉厚を大きくしなければなら
ず、軽量化が図れない。Problems to be Solved by the Invention However, even with such a thick wall, it does not have sufficient strength. When used for a long time, there is a disadvantage that the wafer boat holding section 3 bends as indicated by imaginary lines. At this time, it is desired to reduce the tip deflection amount T. In order to reduce the amount of deflection, the thickness of the entire fork must be increased, and the weight cannot be reduced.
特開昭56−36129号公報には、中空状の石英ガラス材
料に切欠部を設けてウェハボートを保持するウェハボー
ト保持部を形成したウェハボート用の搬送治具が記載さ
れている。上記切欠部に沿って上記切欠部と上記ウェハ
ボート保持部を両方の実質上遮蔽する板状の補強部材が
設けられている。しかし、この搬送治具においては、ウ
ェハボート保持部が全体的に板状の補強部材によって遮
蔽されて、その中に中空部を形成しているだけでなく、
そのようにして形成されたウェハボート保持部の中空部
が切欠部の中空部を介して外部に通じているため、炉外
の冷気、不純物などがウェハボート保持部の先端まで到
来し得る。JP-A-56-36129 describes a transfer jig for a wafer boat in which a notch is provided in a hollow quartz glass material to form a wafer boat holding portion for holding the wafer boat. A plate-like reinforcing member is provided along the notch to substantially shield both the notch and the wafer boat holding portion. However, in this transfer jig, not only is the wafer boat holding portion entirely shielded by a plate-like reinforcing member, but also a hollow portion is formed therein,
Since the hollow portion of the wafer boat holding portion thus formed communicates with the outside through the hollow portion of the cutout portion, cold air and impurities outside the furnace can reach the tip of the wafer boat holding portion.
この発明は、搬送治具全体の肉厚を増さなくてもたわ
みを小さくでき、切欠部の強度を向上でき、かつ、炉外
の冷気等がウェハボート保持部の先端まで到来できない
ウェハボート用の搬送治具を提供することを目的とす
る。The present invention can reduce the deflection without increasing the thickness of the entire transfer jig, improve the strength of the notch portion, and can prevent cold air outside the furnace from reaching the tip of the wafer boat holding portion. It is an object of the present invention to provide a transfer jig.
課題を解決するための手段 この発明は、中空状の石英ガラス材料に切欠部を設け
てウェハボートを保持するウェハボート保持部を形成し
たウェハボート用の搬送治具において、上記切欠部が円
弧状部分と直線状部分を有し、上記直線状部分を上記ウ
ェハボート保持部とし、さらに、上記円弧状部分に板状
の補強部材を設け、上記補強部材が上記切欠部の上部か
ら上記ウェハボート保持部の内底部に達していて、上記
切欠部の円弧状部分と上記ウェハボート保持部との間を
実質上遮蔽し、かつ上記ウェハボート保持部は全体的に
解放された構成にしたことを特徴とするウェハボート用
の搬送治具を要旨としている。Means for Solving the Problems The present invention provides a wafer boat transfer jig in which a notch is provided in a hollow quartz glass material to form a wafer boat holding portion for holding a wafer boat, wherein the notch has an arc shape. And a linear portion, wherein the linear portion serves as the wafer boat holding portion, and further, a plate-like reinforcing member is provided in the arc-shaped portion, and the reinforcing member holds the wafer boat from above the cutout portion. The inner bottom of the portion, substantially shielding between the arc-shaped portion of the notch and the wafer boat holding portion, and wherein the wafer boat holding portion is entirely open. And a transfer jig for a wafer boat.
作用 切欠部の円弧状部分とウェハボート保持部との間を実
質上遮蔽するように板状の補強部材を切欠部の円弧状部
分に設けるので、切欠部の円弧状部分が補強されるだけ
でなく、板状の補強部材が遮蔽作用を奏して、そこで冷
気や不純物等が切欠部の円弧状部分よりも内側に侵入す
ることを阻止できる。Since a plate-like reinforcing member is provided in the arc-shaped portion of the notch so as to substantially shield between the arc-shaped portion of the notch and the wafer boat holding portion, only the arc-shaped portion of the notch is reinforced. Instead, the plate-like reinforcing member exerts a shielding effect, so that it is possible to prevent cold air, impurities, and the like from entering inside the arc-shaped portion of the cutout portion.
実施例１ 第１図に示すフォークは石英ガラスで作られている。
フォークはパイプ部分11と切欠部12およびウェハボート
保持部13を有している。ウェハボート保持部13にウェハ
ボート（図示せず）を載せるである。ウェハボート保持
部13は切欠部12の直線状部分である。また、板状の補強
部材14が円弧状の切欠部12とウェハボート保持部13との
間を実質上遮蔽するように設けてある。Embodiment 1 The fork shown in FIG. 1 is made of quartz glass.
The fork has a pipe portion 11, a notch portion 12, and a wafer boat holding portion 13. A wafer boat (not shown) is placed on the wafer boat holding unit 13. The wafer boat holding part 13 is a straight part of the notch part 12. Further, a plate-shaped reinforcing member 14 is provided so as to substantially shield between the arc-shaped notch 12 and the wafer boat holding portion 13.
パイプ部分11の肉厚は、切欠部12およびウェハボート
保持部13の肉厚よりも薄くなっている。寸法例を示せ
ば、パイプ部分11の厚みt1は3mmで、切欠部12の厚みt2
は8mmで、補強板14の厚みt3は4.5mmで、ウェハボート保
持部13の厚みt4は4.5mmである。パイプ部分11は、切欠
部12に固定されている。The wall thickness of the pipe portion 11 is smaller than the wall thickness of the notch portion 12 and the wafer boat holding portion 13. If Shimese dimensions example, the thickness t 1 of the pipe section 11 is 3 mm, notch 12 of the thickness t 2
Is 8 mm, the thickness t 3 of the reinforcing plate 14 is 4.5 mm, and the thickness t 4 of the wafer boat holder 13 is 4.5 mm. The pipe portion 11 is fixed to the notch 12.
切欠部12は横断面形状がほぼ円弧状の部分と上記直線
状の部分を有する。円弧状の部分には上述の補強板14が
固定されている。この補強板14は切欠部12の上部からウ
ェハボート保持部13の内底部に達している。The notch 12 has a substantially arc-shaped cross-sectional shape and the above-described linear portion. The above-described reinforcing plate 14 is fixed to the arc-shaped portion. The reinforcing plate 14 extends from the upper part of the notch 12 to the inner bottom of the wafer boat holding part 13.
このようにすることにより、切欠部12の円弧状部分の
強度を上げて最大応力が発生しても対応できる。By doing so, the strength of the arcuate portion of the notch 12 can be increased to cope with the maximum stress.
実施例２ 第２図に示すフォークは、石英ガラスで作られてい
る。フォークはパイプ部分21と切欠部22およびウェハボ
ート保持部23を有している。ウェハボート保持部23にウ
ェハボート（図示せず）を載せるものである。また、板
状の補強部材24が円弧状の切欠部22とウェハボート保持
部23との間を実質上遮蔽するように設けてある。Embodiment 2 The fork shown in FIG. 2 is made of quartz glass. The fork has a pipe portion 21, a cutout portion 22, and a wafer boat holding portion 23. The wafer boat (not shown) is placed on the wafer boat holding unit 23. Further, a plate-shaped reinforcing member 24 is provided so as to substantially shield the space between the arc-shaped notch portion 22 and the wafer boat holding portion 23.
パイプ部分21の肉厚は、切欠部22およびウェハボート
保持部23の肉厚よりもうすくなっている。寸法例を示せ
ば、パイプ部分21の厚みt6は、3mmで、切欠部22の厚みt
7は4mmで、補強板24の厚みt8は4.5mmで、ウェハボート
保持部23の厚みt9は4.0mmである。さらにリブ30の厚みt
10は12mmで幅t11（第３図参照）は10mmである。t10はあ
まり大きくするとウェハボートを保持しずらい。パイプ
部分21は、切欠部22に固定されている。The wall thickness of the pipe portion 21 is thinner than the wall thickness of the notch portion 22 and the wafer boat holding portion 23. As an example of the dimensions, the thickness t 6 of the pipe portion 21 is 3 mm, and the thickness t of the notch 22 is
7 is 4 mm, the thickness t 8 of the reinforcing plate 24 is 4.5 mm, and the thickness t 9 of the wafer boat holder 23 is 4.0 mm. Furthermore, the thickness t of the rib 30
10 is 12 mm and width t 11 (see FIG. 3) is 10 mm. hesitation to hold the wafer boat and t 10 is too large. The pipe portion 21 is fixed to the notch 22.
切欠部22のほぼ円弧状部分には補強板24が設けられて
いる。この補強板24は切欠部22の上部からウェハボート
保持部23の内底部に達している。A reinforcing plate 24 is provided in a substantially arc-shaped portion of the notch 22. The reinforcing plate 24 extends from the upper part of the notch 22 to the inner bottom of the wafer boat holding part 23.
上記リブ30は補強板24の下部から出てウェハボート保
持部23の先端近くまで達している。このように実施例２
ではリブ30とさらに補強板24の両方により補強してあ
る。The rib 30 extends from the lower part of the reinforcing plate 24 and reaches near the tip of the wafer boat holding part 23. Thus, Embodiment 2
In FIG. 7, the reinforcement is provided by both the ribs 30 and the reinforcing plate 24.
実施例３と実施例４ 第４図の実施例３は第１図の実施例１の補強板14の中
央に穴40が設けたものを示している。これは、フォーク
を移載装置（図示せず）に取付ける際に、この穴40レー
ザー光を通して炉芯管の炉芯に対してフォークの芯を出
すのである。Embodiment 3 and Embodiment 4 Embodiment 3 shown in FIG. 4 shows an embodiment in which a hole 40 is provided at the center of the reinforcing plate 14 of Embodiment 1 shown in FIG. This is because when the fork is mounted on a transfer device (not shown), the core of the fork is put out of the furnace core of the furnace core tube through the hole 40 laser light.
第５図の実施例４は第２図の実施例２の補強板24の中
央に穴50が設けたものを示している。Embodiment 4 of FIG. 5 shows the reinforcing plate 24 of Embodiment 2 of FIG. 2 in which a hole 50 is provided at the center.
表−１を参照する。 Refer to Table 1.
表−１には、第６図のようにして、従来例のフォーク
とこの発明の実施例１と２のフォークの各ウェハボート
保持部に荷重Ｗをかけたときの先端たわみＴと最大発生
応力を示している。Table 1 shows, as shown in FIG. 6, the tip deflection T and the maximum generated stress when a load W is applied to each wafer boat holding portion of the conventional fork and the forks of the first and second embodiments of the present invention. Is shown.
従来のフォークに比べて、実施例１と２のフォークは
肉薄にすることにより重量が軽くなっているにもかかわ
らず先端のたわみＴは小さく最大発生応力も小さくでき
る。As compared with the conventional fork, the forks of Examples 1 and 2 are thinner and thinner in weight, but the deflection T at the tip is smaller and the maximum generated stress can be reduced.
ところでこの発明は上述の実施例に限定されない。 Incidentally, the present invention is not limited to the above embodiment.
発明の効果 この発明によれば、搬送治具全体の肉厚をさらに大き
くしなくても、最大応力発生部である切欠部の円弧状部
分の強度を向上できる。そしてウェハボートの保持部の
たわみを減少でき、ウェハをのせたウェハボートを安定
して、保持して搬送することができる。According to the present invention, it is possible to improve the strength of the arc-shaped portion of the notch, which is the maximum stress generating portion, without increasing the thickness of the entire transport jig. The deflection of the holding portion of the wafer boat can be reduced, and the wafer boat on which wafers are placed can be stably held and transported.
さらに、本発明の搬送治具を使用してウェハボートを
炉内に入れると、板状の補強部材が切欠部の円弧状部分
とウェハボート保持部との間で遮蔽作用を奏する。その
ため、炉外の空気（冷気）や不純物等が搬送治具の内部
空間を通ってウェハボート保持部の先端や炉内に流入す
ることを防止できる。とくに炉の内外の温度差が大きい
ときは、炉外の冷気がウェハボート保持部の中空部や炉
内の暖気に急激に流入する傾向が強いが、本発明によれ
ば、そのような冷気のウェハボート保持部の中空部や炉
内への急激な流入を実質的に遮断できる。Further, when the wafer boat is put into the furnace using the transfer jig of the present invention, the plate-like reinforcing member exerts a shielding effect between the arc-shaped portion of the cutout portion and the wafer boat holding portion. Therefore, it is possible to prevent air (cool air), impurities, and the like outside the furnace from flowing into the front end of the wafer boat holding portion and the furnace through the internal space of the transfer jig. In particular, when the temperature difference between the inside and outside of the furnace is large, there is a strong tendency that the cool air outside the furnace rapidly flows into the hollow portion of the wafer boat holding portion and the warm air inside the furnace. The rapid inflow into the hollow part of the wafer boat holding part and the furnace can be substantially blocked.
なお、本発明の第４〜５図の実施例のように板状の補
強部材14、24に小さな穴40、50が形成されていても、レ
ーザー光を通す程度のものであれば、そこを通って冷気
が急激に流入することは無視し得る。Even if the small holes 40 and 50 are formed in the plate-like reinforcing members 14 and 24 as in the embodiment of FIGS. The rapid flow of cool air through it can be neglected.
また、板状の補強部材によって切欠部の円弧状部分と
ウェハボート保持部との間を実質的に遮断する構成にす
ると、搬送治具の内部空間の内壁を清掃しなくても、そ
の内壁に積った不純物等がウェハボート保持部を介して
炉内に侵入することを確実に防止できる。Further, when the plate-shaped reinforcing member is configured to substantially block the arc-shaped portion of the cutout portion and the wafer boat holding portion, the inner wall of the inner space of the transfer jig can be cleaned without cleaning the inner wall of the inner space. It is possible to reliably prevent the accumulated impurities and the like from entering the furnace through the wafer boat holding unit.
第１図は、本発明の実施例１を示す断面図、第２図は、
本発明の実施例２の断面図、第３図は実施例２の正面
図、第４図と第５図は実施例３と４を示す断面図、第６
図は荷重をウェハボート保持部にかけた状態を説明する
図、第７図は従来のフォークを示す断面図である。 11,21……パイプ部分 12,22……切欠部 13,23……ウェハボート保持部 14,24……補強板FIG. 1 is a sectional view showing a first embodiment of the present invention, and FIG.
FIG. 3 is a cross-sectional view of a second embodiment of the present invention, FIG. 3 is a front view of the second embodiment, FIG. 4 and FIG.
FIG. 7 is a view for explaining a state in which a load is applied to a wafer boat holding unit, and FIG. 7 is a sectional view showing a conventional fork. 11,21 pipe part 12,22 notch 13,23 wafer boat holder 14,24 reinforcing plate
Claims (1)
ウェハボートを保持するウェハボート保持部を形成した
ウェハボート用の搬送治具において、上記切欠部が円弧
状部分と直線状部分を有し、上記直線状部分を上記ウェ
ハボート保持部とし、さらに、上記円弧状部分に板状の
補強部材を設け、上記補強部材が上記切欠部の上部から
上記ウェハボート保持部の内底部に達していて、上記切
欠部の円弧状部分と上記ウェハボート保持部との間を実
質上遮蔽し、かつ上記ウェハボート保持部は全体的に解
放された構成にしたことを特徴とするウェハボート用の
搬送治具。1. A wafer boat transfer jig in which a notch is provided in a hollow quartz glass material to form a wafer boat holding portion for holding a wafer boat, wherein the notch has an arc-shaped portion and a linear portion. Having the linear portion as the wafer boat holding portion, and further providing a plate-like reinforcing member in the arc portion, wherein the reinforcing member reaches the inner bottom portion of the wafer boat holding portion from the upper portion of the notch. Wherein the arc-shaped portion of the notch portion and the wafer boat holding portion are substantially shielded, and the wafer boat holding portion is entirely opened. Transfer jig.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1277314A JP2601355B2 (en) | 1989-10-26 | 1989-10-26 | Transfer jig for wafer boat |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1277314A JP2601355B2 (en) | 1989-10-26 | 1989-10-26 | Transfer jig for wafer boat |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03141637A JPH03141637A (en) | 1991-06-17 |
| JP2601355B2 true JP2601355B2 (en) | 1997-04-16 |
Family
ID=17581814
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1277314A Expired - Fee Related JP2601355B2 (en) | 1989-10-26 | 1989-10-26 | Transfer jig for wafer boat |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2601355B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6631934B1 (en) | 2000-06-02 | 2003-10-14 | Saint-Gobain Ceramics & Plastics, Inc. | Silicon carbide cantilever paddle |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2908288B1 (en) * | 1979-03-03 | 1980-01-17 | Heraeus Schott Quarzschmelze | Quartz glass bell for semiconductor technology purposes |
| JPS5636129A (en) * | 1979-08-31 | 1981-04-09 | Hitachi Ltd | Method and device for heat treatment of semiconductor thin plate |
| JPS634343A (en) * | 1986-06-24 | 1988-01-09 | Nec Corp | Microcomputer for evaluation |
| JPH01187811A (en) * | 1988-01-22 | 1989-07-27 | Tel Sagami Ltd | Conveying jig for soft landing device |
| JPH01251713A (en) * | 1988-03-31 | 1989-10-06 | Toshiba Ceramics Co Ltd | Quarts glass wafer boat transfer jig |
-
1989
- 1989-10-26 JP JP1277314A patent/JP2601355B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH03141637A (en) | 1991-06-17 |
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