JP2613099B2 - Hermetic sealing method for small piezoelectric vibrators - Google Patents
Hermetic sealing method for small piezoelectric vibratorsInfo
- Publication number
- JP2613099B2 JP2613099B2 JP63262534A JP26253488A JP2613099B2 JP 2613099 B2 JP2613099 B2 JP 2613099B2 JP 63262534 A JP63262534 A JP 63262534A JP 26253488 A JP26253488 A JP 26253488A JP 2613099 B2 JP2613099 B2 JP 2613099B2
- Authority
- JP
- Japan
- Prior art keywords
- container
- lid
- sealing
- vacuum
- present
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000007789 sealing Methods 0.000 title claims description 22
- 238000000034 method Methods 0.000 title claims description 11
- 239000003566 sealing material Substances 0.000 claims description 10
- 238000010438 heat treatment Methods 0.000 claims description 5
- 229910000679 solder Inorganic materials 0.000 description 17
- 239000000919 ceramic Substances 0.000 description 12
- 239000011521 glass Substances 0.000 description 10
- 230000000694 effects Effects 0.000 description 8
- 239000010453 quartz Substances 0.000 description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- 239000013078 crystal Substances 0.000 description 7
- 239000007789 gas Substances 0.000 description 4
- 238000002844 melting Methods 0.000 description 4
- 238000007796 conventional method Methods 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000001465 metallisation Methods 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000005764 inhibitory process Effects 0.000 description 1
- 238000012536 packaging technology Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は水晶等の圧電振動子を真空あるいは不活性ガ
スにて封入する面実装用の小型圧電振動子の気密封止方
法に関するものである。Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for hermetically sealing a small surface-mounting piezoelectric vibrator in which a piezoelectric vibrator made of quartz or the like is sealed with a vacuum or an inert gas. .
圧電振動子、特に水晶振動子はその固有振動数が非常
に安定で、その用途は、昨今のエレクトロニクス、メカ
トロニクス分野におけるめざましい技術革新、特に高密
度実装技術の進歩と相まってますます広くなり、中でも
面実装用の水晶振動子の需要が高まっている。例えば水
晶腕時計においてはその薄型化、小型化、低廉化の波は
著しく、水晶振動子も例外ではない。昨今はICカードの
普及によって超薄型の面実装用圧電振動子の需要が伸び
ている。本発明は薄型で振動特性の優れた面実装用の小
型圧電振動子の気密封止の方法に関する。Piezoelectric resonators, especially quartz resonators, have extremely stable natural frequencies, and their applications are becoming more and more widespread, coupled with the remarkable technological innovations in the electronics and mechatronics fields in recent years, especially advances in high-density packaging technology. Demand for crystal oscillators for mounting is increasing. For example, in the case of quartz wristwatches, the waves of thinning, miniaturization and cost reduction are remarkable, and quartz oscillators are no exception. In recent years, demand for ultra-thin surface mount piezoelectric vibrators has been growing due to the spread of IC cards. The present invention relates to a method for hermetically sealing a small-sized piezoelectric vibrator for surface mounting, which is thin and has excellent vibration characteristics.
本発明はセラミック等の容器の基底部に、真空中にて
容器と蓋とを離間した状態に容器を保持することができ
る突起部を設け、前記容器と蓋のシール部に、あらかじ
め半田材を施し、両者の隙間を保ち真空中で加熱、溶融
させ、そこから放出される蒸気あるいはガス等を十分取
り去ってから容器と蓋を重ね合わせて加圧し、その後、
即冷却して気密封止をすることにより、良好な真空度の
面実装用の小型圧電振動子を得るものである。The present invention provides, at the base of a container such as a ceramic, a protrusion capable of holding the container in a state where the container and the lid are separated from each other in a vacuum, and a solder material is previously applied to the seal between the container and the lid. Heating and melting in vacuum while maintaining the gap between the two, and after sufficiently removing the vapor or gas released therefrom, overlapping the container and lid and pressurizing, then
A compact piezoelectric vibrator for surface mounting with a good degree of vacuum is obtained by immediately cooling and hermetically sealing.
従来、小型圧電振動子を収納する気密容器は特公昭57
−18371号公報に開示されているようにセラミック容器
にガラス蓋をハンダ、あるいは低融点ガラスで封止して
用いられるのが普通である。この気密封止方法は、例え
ばICカード用の超薄型面実装用のセラミック容器のシー
ル部をハンダの濡れ性の良いメタライズを設ける。又、
ガラス蓋にも同じようにハンダの濡れ性の良いメタライ
ズを設けて、前記セラミック容器とガラス蓋の間にハン
ダワッシャーを挟み込んで真空中で加熱し溶融しながら
圧着して気密封止していた。Conventionally, an airtight container for storing a small piezoelectric vibrator was
As disclosed in JP-A-18371, a glass container is usually used by sealing a glass lid with solder or low-melting glass. In this hermetic sealing method, for example, a metallization with good solder wettability is provided on a seal portion of an ultra-thin surface mounting ceramic container for an IC card. or,
Similarly, a metallization having good solder wettability was provided on the glass lid, and a solder washer was sandwiched between the ceramic container and the glass lid.
また、前記気密容器は、薄型化、小型化することに重
点がおかれ、真空中で容器と蓋とを離間して保持するこ
とができるような容器の構造には全く配慮がなされてお
らず、薄型の容器を用いる場合でも、容器と蓋とを密着
して真空装置内に保持し、封止するという気密封止方法
を用いていた。Further, the hermetic container is focused on thinning and miniaturization, and no consideration is given to the structure of the container that can hold the container and the lid apart in a vacuum. Even when a thin container is used, an airtight sealing method has been used in which the container and the lid are closely attached to each other, held in a vacuum device, and sealed.
そのため上記の気密封止方法においてはハンダワッシ
ャーの溶融時に放出するガス等が気密容器内に残留し真
空度が悪くなり、特性も安定せず、前記薄型の面実装用
の小型圧電振動子の薄型化の阻害とともに特性にも影響
を及ぼし問題であった。Therefore, in the above-mentioned hermetic sealing method, the gas or the like released when the solder washer is melted remains in the hermetic container, the degree of vacuum deteriorates, the characteristics are not stable, and the thin piezoelectric vibrator for thin surface mounting is thin. In addition to the inhibition of the formation, it also affected the properties and was a problem.
上記課題はセラミック容器あるいはガラス容器の基底
部に、真空中で容器と蓋とを離間して容器を保持するこ
とができる突起部を設け、前記容器のシール部あるいは
ガラス蓋のシール部の一方かあるいは双方にあらかじめ
ハンダ封止材を施しハンダワッシャーを用いず、双方を
真空環境の中で隙間を保って加熱し、溶融したまま数分
間経過した後、前記容器と蓋を重ね合わせて加圧し、そ
の後、即冷却して気密封止することにより解決されるも
のである。The above object is to provide a projection on a base of a ceramic container or a glass container, which can hold the container by separating the container and the lid in a vacuum, and to provide one of a sealing portion of the container and a sealing portion of the glass lid. Or both without applying a solder sealing material in advance and using a solder washer, heating both with a gap in a vacuum environment, and after several minutes while melting, the container and the lid are overlapped and pressurized, Then, it is solved by immediately cooling and hermetically sealing.
本発明に係わる面実装用の小型圧電振動子の収納容器
の容積は必然的に非常に小さく、ハンダ封止材の加熱溶
融の際に放出される蒸気やガス等により真空度が影響さ
れ易いので、本発明では前記容器の基底部に突起部を設
けて容器を蓋から離して保持し、双方の溶融から生じる
ガス等は真空引きされる環境で放出され、その後、封止
されるものである。Since the volume of the storage container for the small-sized piezoelectric vibrator for surface mounting according to the present invention is inevitably very small, the degree of vacuum is easily affected by steam, gas, and the like released when the solder sealing material is heated and melted. According to the present invention, a projection is provided at the base of the container to hold the container away from the lid, and gases and the like generated from the melting of both are released in an environment where vacuum is drawn, and then sealed. .
以下本発明の一実施例を図面に基づいて説明する。第
１図は、本発明の封止方法に適用される面実装用の小型
圧電振動子の一例で、（Ａ）は平面図、（Ｂ）は側面方
向からの断面図である。第２図は本発明に使われる封止
装置の断面図である。図に示すように、真空チャンバー
９内に上・下側ヒータ板７と８とが設けられている。上
側ヒータ板７には凹部が形成されており、セラミック容
器３はその凹部に置かれている。セラミック容器３の基
底部には突起部が設けられており、この突起部は上側ヒ
ータ板７の凹部に形成された支持部に係止してセラミッ
ク容器３を支持している。また、セラミック容器３は、
開口部のある収納部を有しており、その内部に支持台２
に取り付けられた水晶振動子１を収納している。Hereinafter, an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is an example of a small-sized surface-mounting piezoelectric vibrator applied to the sealing method of the present invention. FIG. 1 (A) is a plan view, and FIG. 1 (B) is a cross-sectional view from the side. FIG. 2 is a sectional view of the sealing device used in the present invention. As shown, upper and lower heater plates 7 and 8 are provided in a vacuum chamber 9. A concave portion is formed in the upper heater plate 7, and the ceramic container 3 is placed in the concave portion. A protrusion is provided on the base of the ceramic container 3, and the protrusion is engaged with a support formed in a concave portion of the upper heater plate 7 to support the ceramic container 3. In addition, the ceramic container 3
It has a storage part with an opening, and a support
The crystal unit 1 attached to the housing is housed.
一方、下側ヒータ板８の上には、ガラス製の蓋４が固
定されている。ガラス製の蓋４の封止部５にはハンダ封
止材６が施されている。On the other hand, a lid 4 made of glass is fixed on the lower heater plate 8. The sealing portion 5 of the glass lid 4 is provided with a solder sealing material 6.
このように、セラミック容器３とガラス製の蓋４と
は、それぞれ上側ヒータ板７と下側ヒータ板８とにそれ
ぞれ支持され、セラミック容器３の開口部と蓋４とが封
止部を離間させて対向配置されている。Thus, the ceramic container 3 and the glass lid 4 are supported by the upper heater plate 7 and the lower heater plate 8, respectively, and the opening of the ceramic container 3 and the lid 4 separate the sealing portion. And are arranged facing each other.
この状態でチャンバー内を真空引きしながら、各ヒー
タ板のプレートヒータ（図示せず）に電流を流して加熱
し、ハンダ封止材６を溶融させる。そして２分間経過
後、下側ヒータ板８を矢示ａのように上昇させてセラミ
ック容器３のシール部５に圧着し、ただちにヒータの電
流を切る。これによりハンダ材は固化し、第１図（Ｂ）
に示すように、セラミック容器３内に水晶振動子片が気
密封止された小型圧電振動子が得られる。なお、実施例
はプレートヒータを上・下側ヒータ板７と８の双方に設
けているが、一方のみに設けてもよい。In this state, while the inside of the chamber is evacuated, an electric current is applied to a plate heater (not shown) of each heater plate to heat and heat the solder sealing material 6. After a lapse of 2 minutes, the lower heater plate 8 is raised as shown by the arrow a to be pressed against the seal portion 5 of the ceramic container 3 and immediately cut off the current of the heater. As a result, the solder material solidifies, and FIG. 1 (B)
As shown in (1), a small-sized piezoelectric vibrator in which a quartz-crystal vibrating piece is hermetically sealed in a ceramic container 3 is obtained. In the embodiment, the plate heaters are provided on both the upper and lower heater plates 7 and 8, but may be provided on only one of them.
本実施例の効果をより明確にするため、第３図、第４
図、第５図を用いて説明する。In order to clarify the effect of this embodiment, FIGS.
This will be described with reference to FIGS.
第４図は、本発明の対象となる小型の音叉型水晶振動
子を真空中で励振させた時の真空度と振動子の等価直列
抵抗値の関係で、真空度が低下すると等価直列抵抗値が
増大することがわかる。FIG. 4 shows the relationship between the degree of vacuum and the equivalent series resistance of the vibrator when the small tuning-fork type quartz crystal resonator to which the present invention is applied is excited in a vacuum. It can be seen that increases.
第５図は、第４図と同様の音叉型水晶振動子を従来の
方法、すなわち容器と蓋とを密着させておいて、真空中
で加熱と冷却を行い封止した場合と、本発明の方法、す
なわち容器と蓋とを第２図の如く離間させておいて、真
空中で加熱し、所定時間経過後容器と蓋とを密着させて
冷却して封止した場合との振動子の等価直列抵抗値の比
較をしたものである。FIG. 5 shows a case where the same tuning fork type quartz vibrator as FIG. 4 is sealed by performing heating and cooling in a vacuum with a container and a lid kept in close contact with each other, and the present invention. A method equivalent to a method in which a container and a lid are separated from each other as shown in FIG. 2 and heated in a vacuum, and after a predetermined time has elapsed, the container and the lid are closely contacted and cooled and sealed, is used. This is a comparison of series resistance values.
ここで、T1は第３図に示す振動子の容器の深さに相当
する方法で、T2はハンダ封止材の厚みである。T2/T1が
0.1の時、従来の方法による等価直列抵抗値が本発明に
よる実施例より大きく、T2/T1が大きくなるほど、すな
わち、容器の深さが浅くなるほど両例での等価直列抵抗
値の差は大きくなる。すなわち、本発明による方法で製
造された水晶振動子は容器の深さを浅くしても良好な振
動特性を示すが、従来の方法により製造された水晶振動
子は容器の小型、薄型化に伴って振動特性が悪化し、そ
の傾向は、第４図における真空度の低下による振動特性
の悪化（等価直列抵抗値の上昇）に類似している。Here, T 1 is in a manner corresponding to the depth of the container of the vibrator shown in FIG. 3, T 2 is the thickness of the solder sealing material. T 2 / T 1 is
At 0.1, the equivalent series resistance value according to the conventional method is larger than that of the embodiment according to the present invention, and as T 2 / T 1 increases, that is, as the depth of the container becomes shallower, the difference between the equivalent series resistance values in both examples becomes smaller. growing. In other words, the quartz resonator manufactured by the method according to the present invention shows good vibration characteristics even when the depth of the container is reduced, but the quartz resonator manufactured by the conventional method is accompanied by a reduction in the size and thickness of the container. As a result, the vibration characteristics deteriorate, and the tendency is similar to the deterioration of the vibration characteristics (increase in the equivalent series resistance value) due to the decrease in the degree of vacuum in FIG.
なお、第３図の本発明の実施例は、ハンダ封止材を蓋
４と容器３の各シール部５に設けたことだけが、第２図
とは異なるが、発明の思想と効果は第２図と全く同様で
あることは明らかである。The embodiment of the present invention shown in FIG. 3 is different from FIG. 2 only in that a solder sealing material is provided on the lid 4 and each seal portion 5 of the container 3, but the idea and effect of the present invention are different from those of FIG. It is clear that this is exactly the same as FIG.
さらに、本発明のもう一つの効果を説明すると、第３
図の容器３の基底部3aの突起部3b、3cを設けて真空中で
第２図の如く容器を蓋と離間して保持するのを容易にし
たことにより、真空中で容器の側面に強い圧力をかけて
容器を保持する必要がなく、容器と蓋の封止を安定して
容易に行うことができるという量産上大きな効果を有す
るものである。特に、容器の厚みT3の値が0.7mm以下の
時、蓋の厚みT4の値が0.2mm以下の時に本発明の効果は
著しいものである。Further, another effect of the present invention will be described.
Protrusions 3b and 3c of the base 3a of the container 3 shown in the figure are provided to facilitate holding the container away from the lid as shown in FIG. There is no need to hold the container by applying pressure, and the container and the lid can be stably and easily sealed, which has a great effect on mass production. In particular, when the value of the thickness T 3 of the container is 0.7mm or less, the effect of the present invention the values of the thickness T 4 of the lid when the 0.2mm or less is significant.
以上説明したように、本発明によって、前記容器の基
底部の少なくとも一部に突起部を設けて、真空中で容器
と蓋とを離間して保持するのを容易にしたことにより、
真空中で容器の側面と強い圧力をかけて容器を保持する
必要がなく、容器と蓋の封止を安定して行うことができ
るという量産上大きな効果をもたらし、その結果、面実
装用の小型圧電振動子の内部が高真空に保持され、良好
な特性が得られるものである。As described above, according to the present invention, by providing a projection on at least a part of the base of the container, by facilitating holding the container and the lid apart in a vacuum,
There is no need to hold the container by applying strong pressure to the side of the container in a vacuum, and this has a significant effect on mass production that the container and the lid can be stably sealed, resulting in a small size for surface mounting. The inside of the piezoelectric vibrator is maintained in a high vacuum, and good characteristics are obtained.
第１図は本発明の面実装用の小型圧電振動子の一例で、
（Ａ）は平面図、（Ｂ）は側面方向からの断面図であ
る。 第２図は本発明に適用される封止装置の真空チャンバー
内と被封止部品を示した断面図である。 第３図は本発明の効果を説明するための本発明の振動子
の断面図である。 第４図は本発明の例としての小型の音叉型水晶振動子の
真空度と等価直列抵抗値の関係を示す図である。 第５図は音叉型水晶振動子における本発明の実施例と従
来の方法による例での等価直列抵抗値の比較を示す図で
ある。 １……水晶振動子 ２……支持台 ３……容器 3a……容器の基底部 3b……突起部 3c……突起部 ４……蓋 ５……シール部 ６……ハンダ封止材 6a……ハンダ封止材 ７……上側ヒータ板 ８……下側ヒータ板 ９……真空チャンバー T1……容器の深さ T2……ハンダ封止材の厚み T3……容器の厚み T4……蓋の厚みFIG. 1 shows an example of a small-sized piezoelectric vibrator for surface mounting according to the present invention.
(A) is a plan view, and (B) is a cross-sectional view from the side. FIG. 2 is a cross-sectional view showing the inside of a vacuum chamber and a part to be sealed of the sealing device applied to the present invention. FIG. 3 is a sectional view of the vibrator of the present invention for explaining the effect of the present invention. FIG. 4 is a diagram showing the relationship between the degree of vacuum and the equivalent series resistance of a small tuning-fork type crystal resonator as an example of the present invention. FIG. 5 is a diagram showing a comparison of equivalent series resistance values between the embodiment of the present invention and an example according to a conventional method in a tuning fork type crystal resonator. DESCRIPTION OF SYMBOLS 1 ... Crystal oscillator 2 ... Support base 3 ... Container 3a ... Base part of container 3b ... Projection part 3c ... Projection part 4 ... Cover 5 ... Seal part 6 ... Solder sealing material 6a ... … Solder sealing material 7 …… Upper heater plate 8 …… Lower heater plate 9 …… Vacuum chamber T 1 …… Container depth T 2 …… Solder sealing material thickness T 3 …… Container thickness T 4 ...... Lid thickness
フロントページの続き (72)発明者 松野 亨 宮城県仙台市西多賀５丁目30番１号 セ イコー電子部品株式会社内 (56)参考文献 特開 昭53−93794（ＪＰ，Ａ) 特開 昭55−23607（ＪＰ，Ａ) 特開 昭53−84595（ＪＰ，Ａ) 特開 昭53−87192（ＪＰ，Ａ) 特開 昭54−107695（ＪＰ，Ａ) 特公 昭57−18371（ＪＰ，Ｂ２)Continuation of the front page (72) Inventor Toru Matsuno 5-30-1, Nishitaga, Sendai-shi, Miyagi Seiko Electronic Components Co., Ltd. (56) References JP-A-53-93794 (JP, A) JP-A-55- 23607 (JP, A) JP-A-53-84595 (JP, A) JP-A-53-87192 (JP, A) JP-A-54-107695 (JP, A) JP-B-57-18371 (JP, B2)
Claims (1)
部に圧電振動子を取り付けた容器と、前記容器の開口を
封止する蓋であって、前記開口部または蓋の少なくとも
一方の封止部に封止材が形成された前記容器と前記蓋と
を準備する工程と、 真空チャンバー内に設けられ、前記容器の突起部を支持
する支持部を備えた板と、前記蓋を支持する板とからな
り、少なくとも一方の板がヒータ板である封止装置を準
備する工程と、 前記容器と前記蓋とをそれぞれの板に固定し、双方の封
止部を離間させて対向配置させ、真空下で前記ヒータ板
を加熱する工程と、 所定時間経過後に、前記板同士を接近させて前記容器と
前記蓋とを重ね合わせて加圧し、その後加熱を停止する
ことにより前記容器と前記蓋とを気密封止する工程とか
らなることを特徴とする小型圧電振動子の気密封止方
法。1. A container having a projection formed on an outer side and having an opening and having a piezoelectric vibrator mounted therein, and a lid for sealing an opening of the container, wherein at least one of the opening or the lid is provided. A step of preparing the container having the sealing material formed on the sealing portion and the lid, and a plate provided in a vacuum chamber and provided with a supporting portion that supports a projection of the container; and A step of preparing a sealing device comprising a supporting plate and at least one plate being a heater plate, fixing the container and the lid to the respective plates, and disposing the two sealing portions to face each other and facing each other. And heating the heater plate under vacuum, and after a lapse of a predetermined time, bring the plates closer together, press the container and the lid together, pressurize the container, and then stop heating. And a step of hermetically sealing the lid. Hermetic sealing method of small piezoelectric vibrator to.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63262534A JP2613099B2 (en) | 1988-10-17 | 1988-10-17 | Hermetic sealing method for small piezoelectric vibrators |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63262534A JP2613099B2 (en) | 1988-10-17 | 1988-10-17 | Hermetic sealing method for small piezoelectric vibrators |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02108314A JPH02108314A (en) | 1990-04-20 |
| JP2613099B2 true JP2613099B2 (en) | 1997-05-21 |
Family
ID=17377137
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63262534A Expired - Fee Related JP2613099B2 (en) | 1988-10-17 | 1988-10-17 | Hermetic sealing method for small piezoelectric vibrators |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2613099B2 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007013594A (en) * | 2005-06-30 | 2007-01-18 | Kyocera Kinseki Corp | Method for manufacturing piezoelectric device |
| JP6030436B2 (en) * | 2011-12-27 | 2016-11-24 | 京セラ株式会社 | Electronic device manufacturing method and electronic device manufacturing apparatus |
| WO2013172444A1 (en) * | 2012-05-18 | 2013-11-21 | 株式会社村田製作所 | Method for manufacturing crystal oscillator |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5393794A (en) * | 1977-01-26 | 1978-08-17 | Citizen Watch Co Ltd | Hermetic sealing method of crystal vibrator |
| JPS54107695A (en) * | 1978-02-10 | 1979-08-23 | Seiko Epson Corp | Sealing method for air-tight package for piezoelectric oscillator |
-
1988
- 1988-10-17 JP JP63262534A patent/JP2613099B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02108314A (en) | 1990-04-20 |
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