JP2641565B2 - Quadrupole particle accelerator and device using the same - Google Patents
Quadrupole particle accelerator and device using the sameInfo
- Publication number
- JP2641565B2 JP2641565B2 JP1128833A JP12883389A JP2641565B2 JP 2641565 B2 JP2641565 B2 JP 2641565B2 JP 1128833 A JP1128833 A JP 1128833A JP 12883389 A JP12883389 A JP 12883389A JP 2641565 B2 JP2641565 B2 JP 2641565B2
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- quadrupole
- electrode
- electrodes
- wavy
- particle accelerator
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Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は四重極粒子〔以下、RFQ(Radio Frequency Q
uadrupole)と記す〕加速器、及びそれを応用した装置
に係り、特に複数のビームを同時に加速し、従来にない
大電流のビーム加速を行い得る四重極粒子加速器に関す
る。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to quadrupole particles [hereinafter referred to as RFQ (Radio Frequency Q).
The present invention relates to an accelerator and a device to which the accelerator is applied, and more particularly to a quadrupole particle accelerator capable of simultaneously accelerating a plurality of beams and performing beam acceleration of a large current which has not been achieved conventionally.
従来のRFQ加速器の構造を第4図に示す。該図に示す
加速器は、四重極電極1,2,3,4の向き合つた面が波打つ
ており、これらの電極1,2,3,4に高周波電圧を印加する
ことにより軸方向に電界が生じ、この電界により入射し
てきた荷電粒子を加速するものである。FIG. 4 shows the structure of a conventional RFQ accelerator. In the accelerator shown in the figure, the facing surfaces of the quadrupole electrodes 1, 2, 3, 4 are wavy, and an electric field is applied in the axial direction by applying a high-frequency voltage to these electrodes 1, 2, 3, 4. Is generated, and the charged particles that are incident are accelerated by the electric field.
ところで、大電流イオンビームを加速しようとした場
合に、ひとつのRFQでは加速し得るビーム電流に限度が
生じる。これは加速する荷電粒子が互いに反発し合うた
め(空間電荷の作用)、ある断面積を通過できる荷電粒
子の量に限りがあるからである。そこで、RFQのビーム
通過断面積を大きくすれば、ひとつのRFQでも大電流イ
オンビームの加速が行えることになるが、この場合、今
度は軸方向の加速効果を保つために、波打ちのピツチを
大きくしなければならず、それに伴つて加速管が長くな
つてしまう。By the way, when trying to accelerate a high-current ion beam, one RFQ limits the beam current that can be accelerated. This is because the amount of charged particles that can pass through a certain cross-sectional area is limited because the accelerated charged particles repel each other (action of space charge). Therefore, if the beam cross-sectional area of the RFQ is increased, it is possible to accelerate a high-current ion beam with a single RFQ.In this case, however, the pitch of the waving should be increased to maintain the axial acceleration effect. Must be done and the accelerating tube will be lengthened accordingly.
このような背景から、大電流ビームの加速を行う場合
の従来のRFQ構造は、アイ・イー・イー・イー トラン
ザクシヨン オン ニユークリア サイエンス,エヌ・
エス−32(1985年)第3347頁から第3349頁[IEEE Tran
s. on Nucl Sci.,NS−32(1985)PP3347−3349]におい
て示されている様に、単に複数個のRFQロツドを並べて
複数のビームを同時に加速することで、合計としてアン
ペア級のビーム電流を得る構造がとられている。Against this background, the conventional RFQ structure for accelerating a large current beam is based on the IEE Transaction on New Clear Science, N.C.
S-32 (1985) pp. 3347-3349 [IEEE Tran
s. on Nucl Sci., NS-32 (1985) PP3347-3349], simply by arranging a plurality of RFQ rods and accelerating a plurality of beams simultaneously, the beam current of the ampere class as a total is obtained. Is obtained.
従来従来技術は、複数のビームを同時に加速してアン
ペア級の大電流ビームを得るという点では優れている
が、装置全体の寸法を小さくおさえるという点について
は配慮がなされていない。The prior art is excellent in that a plurality of beams are simultaneously accelerated to obtain an ampere-class high-current beam, but no consideration is given to reducing the size of the entire apparatus.
本発明の目的は、装置全体の寸法を小さくおさえるこ
とにより、実用的な寸法内で上記従来技術による方式で
得られる以上のビーム電流を得ることのできる四重極粒
子加速器を提供するにある。SUMMARY OF THE INVENTION An object of the present invention is to provide a quadrupole particle accelerator capable of obtaining a beam current larger than that obtainable by the above-described prior art method within a practical size by keeping the size of the entire apparatus small.
上記目的は、RFQの電極に対してある一方向にのみ波
打ち構造を形成するのではなく、様々な方向に波打ち構
造を持つように電極を加工し、一本の電極を共用して幾
つかの四重極電極構造を形成することにより、達成され
る。The above purpose is not to form a wavy structure only in one direction with respect to the RFQ electrode, but to process the electrode so as to have a wavy structure in various directions, and to share one electrode, several This is achieved by forming a quadrupole electrode structure.
又、これを、出射イオンを中性化して中性粒子のビー
ムを得る中性粒子入射装置,異種イオンビームを加速し
た複合イオンビーム装置にも適用したものである。The present invention is also applied to a neutral particle injector for obtaining a neutral particle beam by neutralizing outgoing ions and a composite ion beam apparatus for accelerating a different ion beam.
〔作用〕 RFQの電極に対して、様々な方向に波打ち構造を形成
することにより、一本の電極を、最大で4つの四重極電
極セツトに共用させることができる。これにより、従来
方式のように多くの電極棒を使用する必要がなくなり、
装置をコンパクトにすることが可能となる。[Operation] By forming a wavy structure in various directions with respect to the RFQ electrode, one electrode can be shared by a maximum of four quadrupole electrode sets. This eliminates the need to use many electrode rods as in the conventional method,
The device can be made compact.
以下、図面の実施例に基づいて本発明を説明する。 Hereinafter, the present invention will be described based on embodiments of the drawings.
まず、2つのビームを加速する場合の実施例を第1図
により説明する。該図の如く、下段の四重極電極1,2,3,
4のうち電極1を上段の四重極電極にも共用して、1,
2′,3′,4′でももう1つの四重極電極セツトを形成す
る。電極1の波打ち構造は上面,下面に形成する。これ
により、2つのビームを加速するのに、従来は8本の電
極が必要であつたが、本実施例により7本で行うことが
できる。また、従来必要であつた四重極電極セツト間の
距離も事実上ゼロになるので、上記電極本数の削減とと
もに装置全体の大きさを大幅に小型化することができ
る。First, an embodiment in which two beams are accelerated will be described with reference to FIG. As shown in the figure, the lower quadrupole electrodes 1, 2, 3,
Electrode 1 of 4 is also shared with the upper quadrupole electrode,
2 ', 3', 4 'also form another quadrupole electrode set. The wavy structure of the electrode 1 is formed on the upper surface and the lower surface. Thus, although eight electrodes were conventionally required to accelerate two beams, the present embodiment can perform seven electrodes. Further, since the distance between the quadrupole electrode sets, which is conventionally required, is practically zero, the number of electrodes can be reduced and the size of the entire apparatus can be significantly reduced.
更に4本のビームを加速する場合の実施例を第2図に
示す。この図は電極棒の断面図を示したものであり、図
中の符号は電位の極性を示す。四重極電極には高周波電
圧が印加されるが、ある向き合つた2本の電極がのと
きは、残りの向きあつた2本の電極はになる。なお、
電極5,6を除く残りの7本の電極で2本のビームを加速
する場合が、前記の第1図の実施例に相当する。図から
電極5,6の2本を加えるだけで、ビームの数を2つから
4つに増やすことができることがわかる。この場合、従
来方式では1つのビーム毎に4本の電極が必要なため、
4本のビーム束を加速するには合計16本の電極が必要で
あつた。これに対し、本実施例では9本の電極で同じ性
能が得られることになり、この実施例では前記2つのビ
ーム加速の場合に比べて、より多くの電極を削減でき、
装置寸法を大幅に小さくすることができる。FIG. 2 shows an embodiment in which four beams are further accelerated. This figure shows a cross-sectional view of the electrode rod, and the symbols in the figure show the polarity of the potential. A high-frequency voltage is applied to the quadrupole electrode, but when two electrodes facing one another are located, the remaining two electrodes facing each other become. In addition,
The case where two beams are accelerated by the remaining seven electrodes except for the electrodes 5 and 6 corresponds to the embodiment of FIG. From the figure, it can be seen that the number of beams can be increased from two to four simply by adding two electrodes 5 and 6. In this case, since the conventional method requires four electrodes for each beam,
A total of 16 electrodes were required to accelerate the four beam bundles. On the other hand, in the present embodiment, the same performance can be obtained with nine electrodes, and in this embodiment, more electrodes can be reduced as compared with the case of the two beam accelerations.
The size of the device can be significantly reduced.
電極数の削減効果は、加速ビーム本数を増やすと更に
大きくなる。例えば、アンペア級のビームを得るために
12本のビームを同時に加速する場合には、第2図を延長
して電極を形成していくと21本の電極ですみ、従来方式
に比べて半分以下の電極本数で足りることになる。それ
に伴つて装置の寸法も半分以下にすることができるよう
になる。The effect of reducing the number of electrodes is further increased by increasing the number of acceleration beams. For example, to get an ampere beam
In the case of accelerating 12 beams at the same time, if electrodes are formed by extending FIG. 2, only 21 electrodes are required, and the number of electrodes is less than half that of the conventional method. Accordingly, the size of the device can be reduced to less than half.
また、第2図において、4つのビームに対するそれぞ
れの波打ち形状をそれぞれ任意に選ぶことにより、各四
重極電極セツト毎に異種イオンを同時に加速することが
できる。なお、この時、電極間の発生電圧はどの電極に
ついても等しい値であるので、電極間距離、波打ちピツ
チ等を調整することにより異種イオンの同時加速が実施
可能になることは言うまでもない。Further, in FIG. 2, different ions can be simultaneously accelerated for each quadrupole electrode set by arbitrarily selecting the respective waving shapes for the four beams. At this time, since the voltage generated between the electrodes has the same value for all the electrodes, it goes without saying that simultaneous acceleration of different ions can be performed by adjusting the distance between the electrodes, the waving pitch, and the like.
更に別の実施例を第3図に示す。この図は第2図の9
本の加速電極棒の外側に6本の電圧補正電極11を配置し
たものである。実際上の各電極棒の発生電圧は、高周波
電源12からみた各電極棒のインピーダンスによつて決ま
るため、各電極への配線構造によつては電極間の電圧ば
らつきが生じる。これを補正するために、第3図のよう
に実質的にはビーム加速に寄与しない電圧補正電極11を
配置することで、加速に直接寄与する電極の発生電圧を
均一にすることができる。本実施例によれば、加速ビー
ム本数が多数になればなる程、各電極の発生電圧のばら
つきを抑える効果がある。Another embodiment is shown in FIG. This figure corresponds to 9 in FIG.
In this configuration, six voltage correction electrodes 11 are arranged outside the acceleration electrode rods. Since the actual voltage generated by each electrode rod is determined by the impedance of each electrode rod as viewed from the high-frequency power supply 12, voltage variation between the electrodes occurs depending on the wiring structure to each electrode. In order to correct this, by arranging the voltage correction electrode 11 which does not substantially contribute to the beam acceleration as shown in FIG. 3, the generated voltage of the electrode which directly contributes to the acceleration can be made uniform. According to the present embodiment, as the number of acceleration beams increases, there is an effect of suppressing the variation in the voltage generated between the electrodes.
尚、上記した各実施例における電極材料は、加工のし
易い銅,アルミニウム,高融点金属のモリブデンやタン
グステンが好しい。The electrode material in each of the above-described embodiments is preferably copper, aluminum, and molybdenum and tungsten, which are easily processed, and are high-melting metals.
更に、上記した各実施例で説明した四重極粒子加速器
を、イオンを中性化して中性粒子のビームを得る中性粒
子入射装置、あるいは異種イオンビームを加速した複合
イオンビーム装置に適用することにより、装置全体を小
形化することができる。Further, the quadrupole particle accelerator described in each of the above embodiments is applied to a neutral particle injector for neutralizing ions to obtain a beam of neutral particles, or a composite ion beam device for accelerating heterogeneous ion beams. Thereby, the entire device can be downsized.
以上説明した本発明によれば、RFQ加速器で複数ビー
ムの加速を行うときに電極の数を削減することができる
ため、小型の寸法で効率良く粒子加速ができるようにな
り、特に、アンペア級の軽イオンの加速ビームを得ると
きには効果的である。このようなアンペア級の加速ビー
ムが必要となるのは、プラズマ加熱に用いられる高速中
性粒子入射装置へ応用した場合であり、本発明はこのと
きに最も効果的である。According to the present invention described above, since the number of electrodes can be reduced when accelerating a plurality of beams with the RFQ accelerator, particles can be efficiently accelerated with small dimensions, and in particular, an ampere class It is effective when obtaining an accelerated beam of light ions. Such an ampere-class acceleration beam is required when applied to a high-speed neutral particle injector used for plasma heating, and the present invention is most effective at this time.
第1図は本発明の一実施例の四重極粒子加速器における
電極部分を示す斜視図、第2図,及び第3図はそれぞれ
本発明の別の実施例を示す概略図、第4図は従来のRFQ
加速器の構造を一部破断して示す斜視図である。 1,2,3,4,2′,3′,4′5,6……電極棒,10……加速管。FIG. 1 is a perspective view showing an electrode portion in a quadrupole particle accelerator according to one embodiment of the present invention, FIGS. 2 and 3 are schematic views each showing another embodiment of the present invention, and FIG. Traditional RFQ
It is a perspective view which shows the structure of the accelerator partially broken. 1,2,3,4,2 ', 3', 4'5,6 ... electrode rod, 10 ... acceleration tube.
Claims (6)
置してイオンビームの加速を行う四重極粒子加速器に於
いて、前記電極のうちの少なくとも1本が、前記向き合
つた面以外の面にも波打ち構造をもち、かつ、該波打た
せた面とは別の面が、前記四重極とは別の四重極電極構
造の一部を形成することを特徴とする四重極粒子加速
器。1. A quadrupole particle accelerator for arranging four electrodes whose facing surfaces are waved to accelerate an ion beam, wherein at least one of the electrodes is oriented in the opposite direction. A surface other than the undulating surface also has a wavy structure, and a surface different from the wavy surface forms a part of a quadrupole electrode structure different from the quadrupole. Quadrupole particle accelerator.
の波打ち形状と異なる形状をもつことを特徴とする請求
項1記載の四重極粒子加速器。2. The quadrupole particle accelerator according to claim 1, wherein another wavy shape formed on said electrode has a shape different from the original wavy shape.
なくすために、前記電極の他に、加速に寄与しない電極
を配置したことを特徴とする請求項1記載の四重極粒子
加速器。3. The quadrupole particle accelerator according to claim 1, wherein an electrode that does not contribute to acceleration is arranged in addition to said electrode in order to eliminate a variation in generated voltage at each of said electrodes.
記波打ち形状を決定したことを特徴とする請求項1記載
の四重極粒子加速器。4. The quadrupole particle accelerator according to claim 1, wherein the waving shape is determined so that the generated voltages of the electrodes become equal.
が、向き合つた面以外の面にも波打ち構造をもち、該波
打たせた面とは別の面が、前記四重極とは別の四重極電
極構造の一部を形成して成る四重極粒子加速器からの出
射イオンを中性化して中性粒子のビームを得ることを特
徴とする中性粒子入射装置。5. The quadrupole electrode, wherein at least one electrode has a wavy structure on a surface other than the facing surfaces, and another surface different from the wavy surface is connected to the quadrupole. Is a neutral particle injector characterized in that a beam of neutral particles is obtained by neutralizing ions emitted from a quadrupole particle accelerator which forms a part of another quadrupole electrode structure.
が、向き合つた面以外の面にも波打ち構造をもち、該波
打たせた面とは別の面が、前記四重極とは別の四重極電
極構造の一部を形成すると共に、元の面形状とは異なる
四重極粒子加速器を用いて異種イオンビームを加速する
ことを特徴とする複合イオンビーム装置。6. The quadrupole electrode, wherein at least one electrode has a wavy structure on a surface other than the facing surfaces, and another surface different from the wavy surface is formed with the quadrupole. Is a composite ion beam apparatus that forms a part of another quadrupole electrode structure and accelerates a different ion beam using a quadrupole particle accelerator different from the original surface shape.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1128833A JP2641565B2 (en) | 1989-05-24 | 1989-05-24 | Quadrupole particle accelerator and device using the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1128833A JP2641565B2 (en) | 1989-05-24 | 1989-05-24 | Quadrupole particle accelerator and device using the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02309600A JPH02309600A (en) | 1990-12-25 |
| JP2641565B2 true JP2641565B2 (en) | 1997-08-13 |
Family
ID=14994533
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1128833A Expired - Lifetime JP2641565B2 (en) | 1989-05-24 | 1989-05-24 | Quadrupole particle accelerator and device using the same |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2641565B2 (en) |
-
1989
- 1989-05-24 JP JP1128833A patent/JP2641565B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02309600A (en) | 1990-12-25 |
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